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CN105808005B - Flexible display screen and manufacturing method thereof - Google Patents

Flexible display screen and manufacturing method thereof Download PDF

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Publication number
CN105808005B
CN105808005B CN201610169779.9A CN201610169779A CN105808005B CN 105808005 B CN105808005 B CN 105808005B CN 201610169779 A CN201610169779 A CN 201610169779A CN 105808005 B CN105808005 B CN 105808005B
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China
Prior art keywords
layer
base board
touch control
flexible base
control electrode
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CN201610169779.9A
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CN105808005A (en
Inventor
蔡晓波
翟应腾
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Tianma Microelectronics Co Ltd
Shanghai Tianma Microelectronics Co Ltd
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Priority to CN201610169779.9A priority Critical patent/CN105808005B/en
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    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0412Digitisers structurally integrated in a display
    • GPHYSICS
    • G09EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
    • G09FDISPLAYING; ADVERTISING; SIGNS; LABELS OR NAME-PLATES; SEALS
    • G09F9/00Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements
    • G09F9/30Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements
    • G09F9/33Indicating arrangements for variable information in which the information is built-up on a support by selection or combination of individual elements in which the desired character or characters are formed by combining individual elements being semiconductor devices, e.g. diodes
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04102Flexible digitiser, i.e. constructional details for allowing the whole digitising part of a device to be flexed or rolled like a sheet of paper
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F2203/00Indexing scheme relating to G06F3/00 - G06F3/048
    • G06F2203/041Indexing scheme relating to G06F3/041 - G06F3/045
    • G06F2203/04103Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Human Computer Interaction (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

The application discloses a flexible display screen and a manufacturing method thereof. One specific embodiment of the flexible display screen comprises: a flexible substrate; the touch electrode layer, the control circuit layer, the anode layer, the organic light emitting layer and the cathode layer are formed on the flexible substrate; the touch electrode layer is located on one side of the flexible substrate far away from the organic light emitting layer or located between the flexible substrate and the organic light emitting layer. According to the embodiment, the touch electrode layer is arranged between the organic light emitting layer and the flexible substrate or arranged on one side of the flexible substrate far away from the organic light emitting layer, the manufacture of the touch electrode can be integrated in the manufacture process of the display unit of the flexible display screen, the process is simple, the thickness increased by using an adhesive can be effectively reduced, and the touch detection precision is ensured.

Description

Flexible display screen and its manufacturing method
Technical field
This application involves field of display technology, and in particular to flexible display technologies field more particularly to flexible display screen and Its manufacturing method.
Background technique
With the development of display technology, flexible display technologies using more and more extensive.In existing flexible display screen In structure, generally includes flexible base board and be formed in each display device layer structure of flexible base board side.Such as a kind of flexibility The structure of OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) display screen may include: flexible base Plate, the multiple conductive layers sequentially formed on flexible substrates, including thin film transistor array layer, anode layer, organic luminous layer, yin Pole layer and encapsulated layer.Insulating layer can also be set between each conductive layer, so as to insulate between adjacent conductive layer.
Usually touch control electrode is placed in except the encapsulated layer of flexible display panels in the design of existing OLED display screen, Or through adhesive bonding in the structures such as protective film, the polarizer of display screen.It is as shown in Figure 1 existing OLED flexibility touch-control One schematic diagram of display screen.OLED flexible touching display screen may include flexible display panels 1 and touch screen 2.Its Middle flexible display panels 1 may include flexible base board 11, tft layer 12, anode layer 13, oled layer 14, cathode layer 15 with And the structures such as encapsulated layer 16.Touch screen 2 can be bonded with flexible display panels 1, and wherein polarizer 21 can be bonded or be bonded in On encapsulated layer 16, touch control electrode 23 is bonded in the surface of polarizer 21 by adhesive 22, and touch screen 2 further includes being covered on touch-control Protection glass 24 on electrode 23.The manufacturing process of this flexible display screen includes the adhesion technique of touch control electrode, and technique is multiple Miscellaneous degree is high, and integrated level is low, and due to using adhesive bonding touch control electrode, increases the integral thickness of display screen.
Summary of the invention
In view of this, it is desired to be able to provide a kind of flexible display screen that can reduce technology difficulty, promote integrated level, together When, also it is desirable to the touch detection precision of provided flexible display screen is not influenced by each conductive layer.In order to solve above-mentioned one A or multiple problems, this application provides flexible display screen and its manufacturing methods.
In a first aspect, this application provides a kind of flexible display screens, comprising: flexible base board;It is formed in the flexible base board On touch control electrode layer, control line layer, anode layer, organic luminous layer, cathode layer;Wherein, the touch control electrode layer is located at institute State side of the flexible base board far from the organic luminous layer;The touch control electrode layer includes multiple touch control electrodes;The control line Road floor includes that multiple control organic luminous layers carry out luminous circuit;The anode layer, the cathode layer and described organic Luminescent layer is used to form organic light emitting diode device.
Second aspect, this application provides a kind of flexible display screens, comprising: flexible base board;It is formed in the flexible base board On touch control electrode layer control line layer, anode layer, organic luminous layer, cathode layer;Wherein, the touch control electrode layer is located at described Between flexible base board and the organic luminous layer;The touch control electrode layer includes multiple touch control electrodes;The control line layer packet It includes multiple control organic luminous layers and carries out luminous circuit;The anode layer, the cathode layer and the organic luminous layer It is used to form organic light emitting diode device.
The third aspect, this application provides a kind of manufacturing methods of flexible display screen, comprising: provides rigid substrates;Institute It states and forms release layer, touch control electrode layer, flexible base board, control line layer, anode layer, organic luminous layer and cathode on rigid substrates Layer, wherein the organic luminous layer is formed after the touch control electrode layer;Using release layer described in laser irradiation, with separation The rigid substrates and the flexible base board.
Flexible display screen provided by the present application and its manufacturing method, for bottom emitting flexible OLED display, by touch-control electricity Pole layer is set between organic luminous layer and flexible base board or is set to side of the flexible base board far from organic luminous layer, can incite somebody to action In the manufacturing process for the display unit that the production of touch control electrode is integrated in flexible display screen, simple process, can effectively reduce makes With the increased thickness of adhesive, while the signal that senses of touch control electrode not will receive the cathode layer of organic light emitting diode device Or the influence of anode layer, it ensure that the precision of touch detection.
Detailed description of the invention
Non-limiting embodiment is described in detail referring to made by the following drawings by reading, other features, Objects and advantages will become more apparent upon:
Fig. 1 is a schematic diagram of existing OLED flexible touching display screen;
Fig. 2 is the structural schematic diagram according to the flexible display screen of the application one embodiment;
Fig. 3 is the structural schematic diagram according to the flexible display screen of the application another embodiment;
Fig. 4 a to Fig. 4 h is illustrated according to the process flow of the manufacturing method of the flexible display screen of the application one embodiment Figure;
Fig. 5 a to Fig. 5 h is shown according to the process flow of the manufacturing method of the flexible display screen of the application another embodiment It is intended to.
Wherein, 100- rigid substrates, 110- release layer, the first barrier layer 121-, the second barrier layer 122-, the resistance of 123- third Barrier, 130- touch control electrode layer, 131- touch control electrode, 140- flexible base board, 150- control line layer, 161- anode layer, 162- Cathode layer, 170- organic luminous layer, 180- encapsulated layer, 190- laser.
Specific embodiment
The application is described in further detail with reference to the accompanying drawings and examples.It is understood that this place is retouched The specific embodiment stated is used only for explaining related invention, rather than the restriction to the invention.It also should be noted that in order to Convenient for description, part relevant to related invention is illustrated only in attached drawing.
It should be noted that in the absence of conflict, the features in the embodiments and the embodiments of the present application can phase Mutually combination.The application is described in detail below with reference to the accompanying drawings and in conjunction with the embodiments.
Referring to FIG. 2, it illustrates the structural schematic diagrams according to the flexible display screen of the application one embodiment.Such as Fig. 2 Shown, flexible display screen 200 includes flexible base board 140 and the touch control electrode layer 130 being formed on flexible base board, control route Layer 150, anode layer 161, organic luminous layer 170 and cathode layer 162.Wherein, touch control electrode layer 130 includes multiple touch control electrodes 131, control line layer 150 includes that multiple control organic luminous layers 170 carry out luminous circuit, anode layer 161, organic luminous layer 170 and cathode layer 162 be used to form organic light emitting diode device.Touch control electrode layer 130 is located at flexible base board 140 far from organic The side of luminescent layer 170.In the present embodiment, flexible base board 140 has pliability, can be by the macromolecule with high transmittance Polymer material is made, such as can be made of PI (Polyimide, polyimides).Touch control electrode layer 130 can be single layer knot Structure, or double-layer structure.When touch control electrode layer 130 is single layer structure, touch control electrode layer 130 includes multiple touch control electrodes 131, flexible display screen 200 is the flexible touching display screen of self-tolerant;When touch control electrode layer 130 is double-layer structure, touch-control electricity Touch control electrode 131 on pole layer 130 may include touch-control emission electrode and touch-control receiving electrode, form the flexible touch-control of mutual capacitance type Display screen.In some embodiments, touch-control emission electrode can be strip shaped electric poles arranged in parallel, and touch-control receiving electrode can be With the strip shaped electric poles of touch-control emission electrode spatially square crossing arrangement.In further embodiments, touch-control emission electrode and Touch-control receiving electrode all can be block type electrode.The material of touch control electrode 131 can be metal material Cu (copper) or Ag (silver), It can be transparent conductive material ITO (Indium tin oxide, tin indium oxide).
Controlling line layer 150 includes carrying out luminous circuit for controlling organic light emitting diode device, such as can be TFT (thin film transistor (TFT)) array.Anode layer 161, organic luminous layer 170 and cathode layer 162 can form having of being arranged in array Machine light emitting diode.Thin film transistor (TFT) array and organic LED array correspond, each thin film transistor (TFT) difference It is connect with an Organic Light Emitting Diode, for controlling the luminance of Organic Light Emitting Diode.Control line layer can also wrap It includes luminous signal transmission line and other is used to control Organic Light Emitting Diode and carries out luminous circuit structure, such as can wrap Include emission control circuit.
In some embodiments, organic light emitting diode device can also include: positioned at organic luminous layer and cathode layer it Between electron transfer layer and the hole transmission layer between organic luminous layer and anode layer.When the circuit of control line layer is logical Cross thin film transistor (TFT) to Organic Light Emitting Diode apply voltage when, cathode layer generate electronics and anode layer generate hole difference It shines after colliding via electron transfer layer and hole transport layer transports to organic luminous layer.
In the embodiment shown in Figure 2, line layer 150, anode layer 161, organic luminous layer 170 and cathode layer 162 are controlled It is sequentially formed on flexible base board 140.Control line layer 150, anode layer 161, organic luminous layer 170 and cathode layer 162 according to The secondary side for being formed in flexible base board 140, touch control electrode layer 130 are formed in the other side of flexible base board 140.Flexible display screen 200 can also include the first barrier layer 121, the second barrier layer 122, third barrier layer 123 and encapsulated layer 180.Wherein first Barrier layer 121 is formed in side of the touch control electrode layer 130 far from flexible base board 140, aobvious for touch control electrode 131 and flexibility to be isolated The other structures unit of side of the touch control electrode layer 130 far from flexible base board 140 in display screen, such as protection glass, are used for simultaneously Touch control electrode is protected when separating rigid substrates and flexible base board 140 using laser irradiation release layer 110 in making flexible base board 130 is injury-free.Second barrier layer 122 is formed between touch control electrode layer 130 and flexible base board 140, for touch-control electricity to be isolated Pole 131 and flexible base board 140.Third barrier layer 123 be formed in control side of the line layer 150 towards flexible base board, for every From control line layer 150 and flexible base board 140.Since touch control electrode layer 130 and control line layer 150 are needed in processing procedure using erosion The techniques such as quarter, if touch control electrode layer 130 or control line layer 150 are directly bonded with flexible base board 140, flexible base board 140 can It can be damaged.Second barrier layer 122 and third barrier layer 123 can be damaged in processing procedure to avoid flexible base board.Simultaneously Second barrier layer 122 and third barrier layer 123 are also possible to prevent touch control electrode layer 130 and the signal of control line layer 150 is mutual Crosstalk and be affected.First barrier layer 121, the second barrier layer 122 and third barrier layer 123 can use silicon nitride material The composition of material, silica material or silicon nitride material, silica material.Encapsulated layer 180 is formed in cathode layer far from flexible base The side of plate 140, for the encapsulating organic light emitting diode component by the way of thin-film package.
Flexible display screen 200 can be bottom emitting OLED flexible display screen, light direction can for from cathode layer 162 to The direction of anode layer 161.Further, anode layer 161 can be transparent electrode, such as ITO can be selected as anode layer 161 Material, cathode layer 162 can be for reflexive electrode, such as can select material of the Ag (silver) as cathode layer 162.
The flexible display screen that the above embodiments of the present application provide, is set to flexible base board far from organic hair for touch control electrode layer The side of photosphere, on the one hand, the production of touch control electrode is integrated in the manufacturing process of flexible base board, bottom emitting may be implemented The touch function of OLED display screen designs.It is aobvious compared to touch control electrode is adhered in the design of the touch-control of top emitting OLED display screen Show on unit or be placed in the scheme in the structures such as polarizer, protective film, can effectively reduce due to using adhesive and increase Thickness.On the other hand, in detected touch point, touching signals will not be by cathode layer or anode before being transferred to touch control electrode Layer shielding, has been effectively ensured the accuracy of touch detection.
Referring to FIG. 3, it illustrates be structural schematic diagram according to the flexible display screen of the application another embodiment.Such as Shown in Fig. 3, flexible display screen 300 includes flexible base board 140 and the touch control electrode layer 130 being formed on flexible base board 140, control Line layer 150 processed, anode layer 161, organic luminous layer 170, cathode layer 162.Wherein, touch control electrode layer 130 includes multiple touch-controls Electrode 131, control line layer 150 include that multiple control organic luminous layers 170 carry out luminous circuit, anode layer 161, You Jifa Photosphere 170 and cathode layer 162 are used to form organic light emitting diode device.Touch control electrode layer 130 is located at flexible base board 140 and has Between machine luminescent layer 170.
Similar with embodiment illustrated in fig. 2, the flexible base board in flexible display screen 300 has pliability, can be by having height The macromolecule polymer material of transmitance is made, and touch control electrode layer 130 can be single layer structure, or double-layer structure.When When touch control electrode layer 130 is single layer structure, touch control electrode layer 130 includes multiple touch control electrodes 131, and flexible display screen 200 is certainly The flexible touching display screen of appearance formula;Touch control electrode 131 when touch control electrode layer 130 is double-layer structure, on touch control electrode layer 130 It may include touch-control emission electrode and touch-control receiving electrode, form the flexible touching display screen of mutual capacitance type.The material of touch control electrode 131 Material can be metal material Cu (copper) or Ag (silver), be also possible to transparent conductive material ITO (Indium tin oxide, oxygen Change indium tin).Controlling line layer 150 includes carrying out luminous circuit for controlling organic light emitting diode device, such as can be TFT (thin film transistor (TFT)) array.Anode layer 161, organic luminous layer 170 and cathode layer 162 can form having of being arranged in array Machine light emitting diode.
In the embodiment shown in fig. 3, touch control electrode layer 130, control line layer 150, anode layer 161, organic luminous layer 170 It is sequentially formed on flexible base board 140 with cathode layer 162.
Further, flexible display screen 300 can also include the first barrier layer 121, the second barrier layer 122, third blocking Layer 123 and encapsulated layer 180.Wherein the first barrier layer 121 is formed in side of the flexible base board 140 far from organic luminous layer 170, For isolated flexible substrate 140 and other structures unit, such as protection glass.Second barrier layer 122 is formed in touch control electrode layer Between 130 and flexible base board 140, for touch control electrode 131 and flexible base board 140 to be isolated.Third barrier layer 123 is formed in control Line layer is used for control-line isolation road floor 150 and touch control electrode layer 130 towards the side of flexible base board 140.180 shape of encapsulated layer At in side of the cathode layer 162 far from flexible base board 140, it to be used for encapsulating organic light emitting diode component.
It, can be to avoid on two conductive layers by the way that barrier layer is arranged between touch control electrode layer 130 and control line layer 150 Signal interfere with each other, flexible base board 140 two sides be arranged barrier layer, can to avoid in processing procedure formed conductive layer when quarter Etching technique causes to damage to flexible base board.
In a further embodiment, flexible display screen 300 can be bottom emitting formula display screen, and light direction can be From cathode layer 162 to the direction of anode layer 161.Specifically, anode layer 161 can be transparent electrode, such as ITO can be selected to make For the material of anode layer 161, cathode layer 162 can be the electrode with reflectivity, such as Ag (silver) can be selected as cathode The material of layer 162.
It should be noted that flexible base board, touch control electrode layer in embodiment illustrated in fig. 3, control line layer respectively with Fig. 2 The material of flexible base board, touch control electrode layer, the structure or use that control line layer in illustrated embodiment can be consistent, herein not It repeats again.
Similar with embodiment illustrated in fig. 2, bottom emitting OLED display screen also may be implemented in flexible base board 300 provided by the embodiment Touch function design, effectively reduce top emitting OLED display screen design in due to use adhesive adherency touch control electrode work Skill and increased thickness.The accuracy of touch detection can be effectively ensured simultaneously, avoid cathode layer or anode layer to touching signals Shielding.
In addition, from figure 3, it can be seen that unlike embodiment illustrated in fig. 2, flexible display screen 300 provided by the embodiment Touch control electrode layer 130 between flexible base board 140 and organic luminous layer 170.Compared with embodiment illustrated in fig. 2, flexibility is aobvious The flexible base board 140 of display screen 300 far from the not formed conductive circuit layer in the side of organic luminous layer 170 (such as touch control electrode layer or Control circuitry layer), it can be further reduced and manufacture conductive circuit layer far from the side of organic luminous layer 170 in flexible base board 140 When damage to flexible base board.
The application implementation additionally provides the manufacturing method of flexible display screen, comprising:
S1: rigid substrates are provided;
S2: release layer, touch control electrode layer, flexible base board, control line layer, anode layer, organic is formed on the rigid substrate Luminescent layer and cathode layer, wherein organic luminous layer is formed after touch control electrode layer;
S3: using release layer described in laser irradiation, to separate rigid substrates and flexible base board.
In some embodiments, it can sequentially form on the rigid substrate: release layer, touch control electrode layer, flexible base board, control Line layer, anode layer, organic luminous layer and cathode layer processed.
It in other implementations, can sequentially form on the rigid substrate: release layer, flexible base board, touch control electrode layer, control Line layer, anode layer, organic luminous layer and cathode layer processed.
Further, first can also be formed between release layer and touch control electrode layer or between release layer and flexible base board Barrier layer forms the second barrier layer between touch control electrode layer and flexible base board, in control line layer one towards rigid substrates Third barrier layer is formed on side, forms encapsulated layer on side of the cathode layer far from rigid substrates.
Explain the manufacture of flexible display screen provided by the present application in detail below in conjunction with Fig. 4 a to Fig. 4 h and Fig. 5 a to Fig. 5 h Method.
Fig. 4 a to Fig. 4 h is please referred to, it illustrates the manufacturers according to the flexible display screen 200 of the application one embodiment The process flow diagram of method.
In the manufacturing method, firstly, as shown in fig. 4 a, forming release layer 110 on rigid substrates 100, later The first barrier layer 121 is formed on release layer 110.Specifically, it can be sequentially depositing release layer 110 and first on the rigid substrate Barrier layer 121.Substrate of the rigid substrates 100 as processing procedure, plays a supportive role, surfacing, has fixed knot convenient for production The conductive layer of structure.Release layer 110, can be by amorphous silicon or transparent oxidation for connecting rigid substrates 100 and flexible base board 140 Object is made.Release layer 110 can be removed under the laser irradiation of specific wavelength.
Later, as shown in Figure 4 b, touch control electrode layer 130 is formed on the first barrier layer 121.Forming touch control electrode layer When 130, the conductive material of touch control electrode can be deposited first, the conductive material of deposition is patterned later, passes through photoetching Etc. techniques formed touch control electrode.The pattern of touch control electrode can be single layer, or double-deck.
Then, as illustrated in fig. 4 c, the second barrier layer 122 is deposited on touch control electrode layer 130 and forms flexible base board 140. It, can be polymer-coated on the second barrier layer 122 by the liquid macroimolecule with high transmittance when making flexible base board 140 On, the high molecular polymer of coating is solidified later, forms flexible base board 140.
Then, as shown in figure 4d, third barrier layer 123 is deposited on flexible base board 140 and forms control line layer 150. The production method similar with touch control electrode layer 130, the first conduction material of depositional control route can be used by controlling line layer 150 Material carries out patterning again later and forms control circuit.Optionally, control circuitry layer can have simple structure, aobvious to guarantee Display screen aperture opening ratio with higher.
As shown in fig 4e, after forming control line layer 150, organic light emitting diode device can be made.Specifically, Anode layer 161, organic luminous layer 170 and cathode layer 162 can be sequentially formed.Anode layer 161 can be by being deposited and patterned Technique production, organic luminous layer and cathode layer can be made by evaporation process.
It should be noted that the schematic structure of organic light emitting diode device is illustrated only in Fig. 4 e, in actual system Cheng Zhong can also make hole transmission layer, in cathode layer 162 and organic light emission between anode layer 161 and organic luminous layer 170 Electrode transport layer is made between layer 170.
Later, as shown in fig. 4f, can on cathode layer 162 depositing encapsulation layer 180.
Finally, as shown in figure 4g, irradiating release layer from the side of rigid substrates 100 using the laser 190 of specific wavelength 110, rigid substrates 100 and the first barrier layer 121 are separated, to separate flexible display screen and rigid substrates, release layer is complete After full removal, flexible display screen as shown in figure 4h is formed.In the process, the first barrier layer 121 can protect touch control electrode 131 is injury-free when laser irradiation release layer separates rigid substrates and flexible base board.
With continued reference to Fig. 5 a to Fig. 5 h, it illustrates the systems according to the flexible display screen 300 of the application another embodiment Make the process flow diagram of method.
In the manufacturing method, firstly, as shown in Figure 5 a, forming release layer 110 on rigid substrates 500, later The first barrier layer 121 is formed on release layer 110.Specifically, it can be sequentially depositing release layer 110 and first on the rigid substrate Barrier layer 121.Substrate of the rigid substrates 100 as processing procedure, plays a supportive role, surfacing, has fixed knot convenient for production The conductive layer of structure.Release layer 110, can be by amorphous silicon or transparent oxidation for connecting rigid substrates 100 and flexible base board 140 Object is made, and can be removed under the laser irradiation of specific wavelength.
Later, as shown in Figure 5 b, flexible base board 140 is formed on the first barrier layer 121.When making flexible base board 140, Can be polymer-coated on the second barrier layer 122 by the liquid macroimolecule with high transmittance, later by the macromolecule of coating Polymer solidification, forms flexible base board 140.
Then, as shown in Figure 5 c, the second barrier layer 122 is deposited on touch control electrode layer 130 and forms touch control electrode layer 130.When forming touch control electrode layer 130, the conductive material of touch control electrode can be deposited first, later by the conductive material of deposition It is patterned, forms touch control electrode by techniques such as photoetching.The pattern of touch control electrode can be single layer, or double-deck. If the flexible display screen of production is self-tolerant touching display screen, the touch control electrode of single layer is made in step corresponding to Fig. 5 c; If the flexible display screen of production is mutual capacitance type touching display screen, double-deck touch control electrode is made in step corresponding to Fig. 5 c.
Then, as fig 5d, third barrier layer 123 is deposited on flexible base board 140 and forms control line layer 150. The production method similar with touch control electrode layer 130, the first conduction material of depositional control route can be used by controlling line layer 150 Material carries out patterning again later and forms control circuit.Optionally, control circuitry layer can have simple structure, aobvious to guarantee Display screen aperture opening ratio with higher.
As depicted in fig. 5e, after forming control line layer 150, organic light emitting diode device can be made.Specifically, Anode layer 161, organic luminous layer 170 and cathode layer 162 can be sequentially formed.Anode layer 161 can be by being deposited and patterned Technique production, organic luminous layer and cathode layer can be made by evaporation process.
It should be noted that the schematic structure of organic light emitting diode device is illustrated only in Fig. 5 e, in actual system Cheng Zhong, it is also necessary to hole transmission layer is made between anode layer 161 and organic luminous layer 170, in cathode layer 162 and organic light emission Electrode transport layer is made between layer 170.
Later, as shown in figure 5f, can on cathode layer 162 depositing encapsulation layer 180.
Finally, as shown in fig. 5g, irradiating release layer from the side of rigid substrates 100 using the laser 190 of specific wavelength 110, rigid substrates 100 and the first barrier layer 121 are separated, to separate flexible display screen and rigid substrates, release layer is complete After full removal, flexible display screen as shown in figure 5h is formed.
In above-described embodiment, rigid substrates are removed by the method for laser irradiation release layer, it is viscous compared to using jelly The technique closed flexible base board and rigid substrates, remove at the end of processing procedure jelly, flexible base board obtained has preferably flat Whole property.
Using the manufacturing method of flexible display screen provided by the embodiments of the present application, the production of touch control electrode can be integrated in In the manufacturing process of flexible base board, integrated level is improved, simplifies manufacturing process, meanwhile, reduce the production work of touch control electrode The increased integral thickness of skill institute.
Above description is only the preferred embodiment of the application and the explanation to institute's application technology principle.Those skilled in the art Member is it should be appreciated that invention scope involved in the application, however it is not limited to technology made of the specific combination of above-mentioned technical characteristic Scheme, while should also cover in the case where not departing from the inventive concept, it is carried out by above-mentioned technical characteristic or its equivalent feature Any combination and the other technical solutions formed.Such as features described above has similar function with (but being not limited to) disclosed herein Can technical characteristic replaced mutually and the technical solution that is formed.

Claims (14)

1. a kind of flexible display screen characterized by comprising
Flexible base board;
Touch control electrode layer, the control line layer, anode layer, organic luminous layer, cathode layer being formed on the flexible base board;
Wherein, the touch control electrode layer is located at side of the flexible base board far from the organic luminous layer;
The touch control electrode layer includes multiple touch control electrodes;
The control line layer includes that multiple control organic luminous layers carry out luminous circuit;
The anode layer, the cathode layer and the organic luminous layer are used to form organic light emitting diode device;
The touch control electrode layer, the anode layer, the organic luminous layer and the cathode layer are arranged at same described soft On property substrate.
2. flexible display screen according to claim 1, which is characterized in that the control line layer, the anode layer, described Organic luminous layer and the cathode layer are sequentially formed on the flexible base board.
3. flexible display screen according to claim 2, which is characterized in that further include:
First barrier layer is formed in side of the touch control electrode layer far from the flexible base board;
Second barrier layer is formed between the touch control electrode layer and the flexible base board;
Third barrier layer is formed in the control line layer towards the side of the flexible base board;And
Encapsulated layer is formed in side of the cathode layer far from the flexible base board.
4. flexible display screen according to claim 3, which is characterized in that the light direction of the flexible display screen is from institute Cathode layer is stated to the direction of the anode layer.
5. flexible display screen according to claim 4, which is characterized in that the anode layer is transparent electrode layer, the yin Pole layer is with reflexive electrode layer.
6. a kind of flexible display screen characterized by comprising
Flexible base board;
Touch control electrode layer, the control line layer, anode layer, organic luminous layer, cathode layer being formed on the flexible base board;
Wherein, the touch control electrode layer is between the flexible base board and the organic luminous layer;
The touch control electrode layer includes multiple touch control electrodes;
The control line layer includes that multiple control organic luminous layers carry out luminous circuit;
The anode layer, the cathode layer and the organic luminous layer are used to form organic light emitting diode device;
The touch control electrode layer, the anode layer, the organic luminous layer and the cathode layer are arranged at same described soft On property substrate.
7. flexible display screen according to claim 6, which is characterized in that the touch control electrode layer, the control line layer, The anode layer, the organic luminous layer and the cathode layer are sequentially formed on the flexible base board.
8. flexible display screen according to claim 7, which is characterized in that further include:
First barrier layer is formed in side of the flexible base board far from the organic luminous layer;
Second barrier layer is formed between the touch control electrode layer and the flexible base board;
Third barrier layer is formed in the control line layer towards the side of the flexible base board;And
Encapsulated layer is formed in side of the cathode layer far from the flexible base board.
9. flexible display screen according to claim 8, which is characterized in that the light direction of the flexible display screen is from institute Cathode layer is stated to the direction of the anode layer.
10. flexible display screen according to claim 9, which is characterized in that the anode layer is transparent electrode layer, the yin Pole layer is with reflexive electrode layer.
11. a kind of manufacturing method of flexible display screen, which is characterized in that flexible display screen includes:
Flexible base board;
Touch control electrode layer, the control line layer, anode layer, organic luminous layer, cathode layer being formed on the flexible base board;
Wherein, the touch control electrode layer is located at side of the flexible base board far from the organic luminous layer, or, the touch-control is electric Pole layer is between the flexible base board and the organic luminous layer;
The touch control electrode layer includes multiple touch control electrodes;
The control line layer includes that multiple control organic luminous layers carry out luminous circuit;
The anode layer, the cathode layer and the organic luminous layer are used to form organic light emitting diode device;
The touch control electrode layer, the anode layer, the organic luminous layer and the cathode layer are arranged at same described soft On property substrate;
The manufacturing method of the flexible display screen includes:
Rigid substrates are provided;
Release layer, touch control electrode layer, flexible base board, control line layer, anode layer, organic light emission are formed on the rigid substrates Layer and cathode layer, wherein the organic luminous layer is formed after the touch control electrode layer;
Using release layer described in laser irradiation, to separate the rigid substrates and the flexible base board;
The touch control electrode layer, the anode layer, the organic luminous layer and the cathode layer are arranged at same described soft On property substrate.
12. according to the method for claim 11, which is characterized in that sequentially formed on the rigid substrates: described release Layer, the touch control electrode layer, the flexible base board, the control line layer, the anode layer, the organic luminous layer and institute State cathode layer.
13. according to the method for claim 11, which is characterized in that sequentially formed on the rigid substrates: described release Layer, the flexible base board, the touch control electrode layer, the control line layer, the anode layer, the organic luminous layer and institute State cathode layer.
14. the described in any item methods of 1-13 according to claim 1, which is characterized in that further include:
The first resistance is formed between the release layer and the touch control electrode layer or between the release layer and the flexible base board Barrier;
The second barrier layer is formed between the touch control electrode layer and the flexible base board;
In the control line layer towards forming third barrier layer on the side of the rigid substrates;And
Encapsulated layer is formed on side of the cathode layer far from the rigid substrates.
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