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CN105702412A - A kind of β-FeSi2 nano-hexahedral particles with light-controlled strong room temperature ferromagnetism and preparation method thereof - Google Patents

A kind of β-FeSi2 nano-hexahedral particles with light-controlled strong room temperature ferromagnetism and preparation method thereof Download PDF

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CN105702412A
CN105702412A CN201610241250.3A CN201610241250A CN105702412A CN 105702412 A CN105702412 A CN 105702412A CN 201610241250 A CN201610241250 A CN 201610241250A CN 105702412 A CN105702412 A CN 105702412A
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ferromagnetism
hexahedral
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何志强
吴淑毅
吴兴龙
沈剑沧
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Nanjing University
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/40Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4
    • H01F1/401Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials of magnetic semiconductor materials, e.g. CdCr2S4 diluted
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B22CASTING; POWDER METALLURGY
    • B22FWORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00Making metallic powder or suspensions thereof
    • B22F9/16Making metallic powder or suspensions thereof using chemical processes
    • B22F9/18Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds
    • B22F9/24Making metallic powder or suspensions thereof using chemical processes with reduction of metal compounds starting from liquid metal compounds, e.g. solutions
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01FMAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F1/00Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties
    • H01F1/01Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials
    • H01F1/03Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity
    • H01F1/12Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials
    • H01F1/14Magnets or magnetic bodies characterised by the magnetic materials therefor; Selection of materials for their magnetic properties of inorganic materials characterised by their coercivity of soft-magnetic materials metals or alloys
    • H01F1/147Alloys characterised by their composition
    • H01F1/14766Fe-Si based alloys

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Abstract

The invention relates to a beta-FeSi2 nanometre hexahedral particle having strong optical control room-temperature ferromagnetism and a preparation method thereof. A nanometre material has strong room-temperature ferromagnetism (15emu/g); furthermore, the strong room-temperature ferromagnetism can be converted into the paramagnetism in a laser irradiation condition; and thus, adjustment and control of light to the magnetism are realized. The preparation method of the nanometre particle comprises the following steps of: reacting ferrous chloride anhydrous and a silicon wafer by adopting a chemical vapour deposition method at 800 DEG C for 2 h, and naturally cooling. The beta-FeSi2 nanometre hexahedral particle disclosed by the invention has the crystal face-dependent ferromagnetism; the beta-FeSi2 nanometre cubic particle integrates the room-temperature ferromagnetism and the semiconductor properties into a whole; therefore, the beta-FeSi2 nanometre cubic particle is a first-choice material for developing a spin electronic device of a semiconductor; and the beta-FeSi2 nanometre hexahedral particle has the good promotion effect for application and development of spintronics of semiconductors.

Description

一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒及其制备方法A kind of β-FeSi2 nano-hexahedral particles with light-controlled strong room temperature ferromagnetism and preparation method thereof

技术领域technical field

本发明涉及一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒及其制备方法,属于磁性半导体领域。The invention relates to a β - FeSi2 nanometer hexahedral particle with light-controlled strong room-temperature ferromagnetism and a preparation method thereof, belonging to the field of magnetic semiconductors.

背景技术Background technique

随着晶体管的不断微型化和电子元器件的小型化,半导体器件尺寸正在量子相干效应设定的极限附近,为此需要开创新的信息处理机制。传统的电子学主要依赖于电子的电荷属性,而自旋是电子的另一个内禀属性,通过电子自旋的控制可以增加信息处理的自由度。自旋电子学同时调控电子的电荷和自旋两种属性,进行信息读取、传输和处理,可以提高数据处理速度,降低耗电量,增加集成度并且解决当下信息存储的“易失性”问题。With the continuous miniaturization of transistors and the miniaturization of electronic components, the size of semiconductor devices is approaching the limit set by quantum coherence effects, which requires the development of new information processing mechanisms. Traditional electronics mainly relies on the charge property of electrons, while spin is another intrinsic property of electrons. The degree of freedom in information processing can be increased through the control of electron spin. Spintronics simultaneously regulates the two properties of charge and spin of electrons for information reading, transmission and processing, which can improve data processing speed, reduce power consumption, increase integration and solve the "volatile" of current information storage. question.

实现半导体自旋器件的首要条件是注入自旋极化电流,因此,制备自旋极化材料是自旋电子学的重中之重。半金属铁磁体由于块体、表面以及界面的电子结构并不相同,异质结界面处实验表明自旋极化率远低于理论值。铁磁金属具有较高的自旋极化率,但由于与半导体电导的失配导致自旋在界面处发生严重散射。磁性半导体由于具有半导体导电性和铁磁材料的自旋极化,是自旋极化电流注入的理想材料。The first condition for realizing semiconductor spin devices is to inject spin-polarized current. Therefore, the preparation of spin-polarized materials is the top priority of spintronics. Due to the different electronic structures of the bulk, surface, and interface of semi-metallic ferromagnets, experiments at the heterojunction interface show that the spin polarizability is much lower than the theoretical value. Ferromagnetic metals have high spin polarizability, but the spins are severely scattered at the interface due to the conductance mismatch with the semiconductor. Magnetic semiconductors are ideal materials for spin-polarized current injection due to their semiconducting conductivity and spin polarization of ferromagnetic materials.

在磁性半导体的研究中,掺杂的Ⅲ-Ⅴ族稀磁半导体,其居里温度低于室温,而对于宽禁带磁性半导体,一些报道表明其居里温度可高于室温,然而,不同的实验报道结果千差万别,对于磁性的起源也是众说纷纭,同时由于磁性杂质的溶解度低,仅能获得较弱的磁性。此外,硅是目前半导体领域的支柱材料,它同时也具有低的自旋-轨道散射和倒格子对称性,从而拥有了较大的自旋寿命和扩散长度,有望在自旋电子学中大展宏图,然而由于硅基磁性材料的缺乏,硅基自旋电子学的发展相对落后。In the study of magnetic semiconductors, the Curie temperature of doped III-V dilute magnetic semiconductors is lower than room temperature, and for wide bandgap magnetic semiconductors, some reports indicate that the Curie temperature can be higher than room temperature, however, different Experimental results vary widely, and there are different opinions on the origin of magnetism. At the same time, due to the low solubility of magnetic impurities, only weaker magnetism can be obtained. In addition, silicon is the current pillar material in the field of semiconductors. It also has low spin-orbit scattering and inverse lattice symmetry, so it has a large spin lifetime and diffusion length, and is expected to develop in spintronics. However, due to the lack of silicon-based magnetic materials, the development of silicon-based spintronics is relatively backward.

因此,寻找室温铁磁性的硅基半导体材料具有重大意义。Therefore, it is of great significance to search for room-temperature ferromagnetic silicon-based semiconductor materials.

在当今的CMOS微电子器件中,金属硅化物作为硅和金属界面处的连接而无处不在,很有希望成为构建硅基自旋电子学基础的材料。其中,硅化铁材料有很高的生态学价值,它的组成元素的无毒性以及现阶段地球上储备的充足性使得它有望成为重要的环境友好型材料。在铁硅化合物中,半导体相β-FeSi2由于在光电子和光伏器件方面的广泛应用而格外引人注目。对于半导体多面体纳米颗粒,由于晶体的各向异性,不同的晶面具有不同的表面原子排布和电子能带结构,特定的晶面不成对的自旋电子和自然存在的悬挂键相互作用可以引起磁性。因此,通过暴露纳米颗粒的特定晶面是引入磁性的一种方法。此外,近年来随着信息存储密度不断提高,磁场驱动的写入不仅变得越来越困难,而且存在速度慢、噪声大、能耗高等诸多问题。大多数情况下,铁磁半导体的磁学性质和载流子有关,在光照条件下,纳米颗粒表面载流子浓度的改变将对磁性起到调节作用,这将为磁信息的光写入提供可能。如果能够通过β-FeSi2纳米颗粒的晶面诱导引入室温铁磁性,不仅能够得到室温磁性半导体,而且其集优异的光电性能与磁性于一身,将进一步拓展材料用途,存在巨大的应用前景。Metal silicides are ubiquitous in today's CMOS microelectronic devices as connections at the silicon-metal interface and are promising materials for building the basis of silicon-based spintronics. Among them, the iron silicide material has high ecological value, the non-toxicity of its constituent elements and the adequacy of reserves on the earth at this stage make it expected to become an important environmentally friendly material. Among iron silicon compounds, the semiconducting phase β - FeSi2 is particularly attractive due to its wide application in optoelectronic and photovoltaic devices. For semiconductor polyhedral nanoparticles, due to the anisotropy of the crystal, different crystal planes have different surface atomic arrangements and electronic band structures, and the unpaired spin electrons and naturally occurring dangling bond interactions of specific crystal planes can cause magnetic. Therefore, exposing specific crystal faces of nanoparticles is one way to introduce magnetism. In addition, with the continuous improvement of information storage density in recent years, magnetic field-driven writing has not only become more and more difficult, but also has many problems such as slow speed, high noise, and high energy consumption. In most cases, the magnetic properties of ferromagnetic semiconductors are related to carriers. Under light conditions, the change of the carrier concentration on the surface of nanoparticles will regulate the magnetism, which will provide the optical writing of magnetic information. possible. If room-temperature ferromagnetism can be induced through the crystal facet of β - FeSi2 nanoparticles, not only can a room-temperature magnetic semiconductor be obtained, but also it combines excellent optoelectronic properties and magnetism, which will further expand the use of materials and have great application prospects.

发明内容Contents of the invention

针对现有磁性半导体的不足,本发明目的旨在于,提供一种β-FeSi2纳米六面体颗粒及简单、有效的方法制备出强的室温硅基磁性半导体,该半导体磁性对光的响应灵敏。Aiming at the shortcomings of existing magnetic semiconductors, the purpose of the present invention is to provide a β - FeSi2 nano-hexahedral particle and a simple and effective method to prepare a strong room-temperature silicon-based magnetic semiconductor, which is sensitive to light.

本发明的技术方案:一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒,所述纳米六面体颗粒是具有两个{100}面和四个{011}侧面的β-FeSi2纳米立方体颗粒;该纳米六面体颗粒在室温下显示出高达15emu/g的铁磁性,在激光辐照条件下,铁磁性会变成顺磁性,撤去光照后,铁磁性重新恢复,实现了光对磁性的调控。纳米颗粒强室温磁性起源于表面铁原子层附近的局域磁矩与表面态巡游电子的相互作用,其磁性具有形貌和尺寸依赖性,不规则形貌和小于150nm的颗粒不具有磁畴结构。The technical scheme of the present invention: a β-FeSi 2 nanohexahedral particle with light-controlled strong room temperature ferromagnetism, the nanohexahedral particle is a β-FeSi 2 nanometer particle with two {100} faces and four {011} sides Cubic particles; the nano-hexahedral particles show ferromagnetism up to 15emu/g at room temperature. Under the condition of laser irradiation, the ferromagnetism will become paramagnetic. regulation. The strong room-temperature magnetism of nanoparticles originates from the interaction between the local magnetic moment near the surface iron atomic layer and the surface state itinerant electrons. Its magnetism is shape- and size-dependent, and particles with irregular shapes and smaller than 150nm do not have a magnetic domain structure. .

所述的具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒的制备方法,其特征在于:制备The preparation method of the β - FeSi2 nano-hexahedral particles with light-controlled strong room temperature ferromagnetism is characterized in that:

按如下步骤进行:Proceed as follows:

步骤1:将清洗干净的直径为4-10cm的石英管水平放置在具有两个中心相距31.5±10cm温区的管式炉中;Step 1: Place the cleaned quartz tube with a diameter of 4-10cm horizontally in a tube furnace with two temperature zones with a center distance of 31.5±10cm;

步骤2:将盛有0.056g纯度99.5%以上的无水氯化亚铁粉末的石英舟和洁净的电阻率为25-100Ω·cmP型硅片,分别放入两个温区中;Step 2: Put the quartz boat containing 0.056g of anhydrous ferrous chloride powder with a purity of more than 99.5% and a clean silicon wafer with a resistivity of 25-100Ω·cmP into two temperature zones respectively;

步骤3:石英管整体放入管式炉中,使石英舟和硅片分别对应上下游温区的中心;Step 3: The quartz tube is put into the tube furnace as a whole, so that the quartz boat and the silicon wafer correspond to the centers of the upstream and downstream temperature zones;

步骤4:将上下游温区在20min内同时加热到600±20℃和800±20℃;Step 4: Heat the upstream and downstream temperature zones to 600±20°C and 800±20°C simultaneously within 20 minutes;

步骤5:在100±20sccm流量的氩气载气的吹拂下,反应2h;Step 5: Under the blowing of argon carrier gas with a flow rate of 100±20 sccm, react for 2 hours;

步骤6:反应结束后自然降至室温,取出硅片,则硅片表面生成β-FeSi2纳米六面体颗粒组成的薄膜。Step 6: After the reaction is finished, cool down to room temperature naturally, take out the silicon chip, and then generate a film of β - FeSi2 nanometer hexahedral particles on the surface of the silicon chip.

尤其是反应温度800℃和反应流量100sccm,得到大密度纯的β-FeSi2相。In particular, the reaction temperature is 800°C and the reaction flow rate is 100 sccm, and a large-density pure β-FeSi 2 phase is obtained.

β-FeSi2纳米六面体颗粒具有强的光控室温铁磁性的机理分析如下:在纳米尺度下,纳米材料的比表面积大大增加,键态严重失配,无序度增加。多面体纳米颗粒特定晶面不成对的自旋电子和自然存在的悬挂键相互作用可以引起磁性。第一性原理计算表明,β-FeSi2的{100}和{011}两种晶面表面的铁原子均具有较大磁矩并呈现出铁磁序,而内部的铁原子自旋具有无规取向。{100}晶面方向的自旋态密度表明在费米能级附近存在自旋向下的部分占据带以及自旋向上的空带,表面铁原子层附近的局域磁矩与表面态巡游电子的相互作用可以引起强的室温铁磁性。铁磁半导体的磁学性质往往和载流子有关,在光照条件下,纳米颗粒表面载流子浓度的改变将对磁性起到调节作用。The mechanism analysis of the strong light-controlled room temperature ferromagnetism of β-FeSi 2 nanohexahedral particles is as follows: at the nanoscale, the specific surface area of nanomaterials is greatly increased, the bond state is seriously mismatched, and the degree of disorder increases. Magnetism can be induced by unpaired spin electrons and naturally occurring dangling bond interactions on specific facets of polyhedral nanoparticles. First-principles calculations show that the iron atoms on the {100} and {011} crystal planes of β-FeSi 2 have large magnetic moments and exhibit ferromagnetic order, while the internal iron atoms have random spins. orientation. The spin density of states in the {100} crystal plane direction shows that there are spin-down partially occupied bands and spin-up empty bands near the Fermi level, the local magnetic moment near the surface iron atomic layer and the surface state itinerant electrons The interaction can induce strong room temperature ferromagnetism. The magnetic properties of ferromagnetic semiconductors are often related to carriers. Under light conditions, the change of carrier concentration on the surface of nanoparticles will play a role in regulating the magnetism.

β-FeSi2纳米颗粒在尺寸大于150nm和具有六面体规则形貌时才具有磁畴结构。立方体颗粒在空气中氧化一段时间后磁性消失,说明磁性起源于颗粒表面,同时也排除了磁性掺杂和晶体铁和铁的氧化物存在的可能性。此外,相关的光谱表征也说明该材料不含有杂质相。为防止颗粒表面氧化,在反应2h结束后,关闭出气阀,避免冷却过程中压强降低空气混入。β-FeSi 2 nanoparticles have a magnetic domain structure when the size is larger than 150nm and has a hexahedral regular shape. The magnetism of the cubic particles disappears after being oxidized in air for a period of time, indicating that the magnetism originates from the surface of the particles, and also excludes the possibility of magnetic doping and the existence of crystalline iron and iron oxides. In addition, the relevant spectral characterization also shows that the material does not contain impurity phases. In order to prevent oxidation of the surface of the particles, after the reaction for 2 hours, the outlet valve was closed to avoid the pressure drop and air mixing during the cooling process.

本发明有益效果:本发明涉及一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒及其制备方法,磁性测量表明该纳米材料具有高达15emu/g的饱和磁化强度,在光照条件下,材料从铁磁性变为顺磁性。该材料集表面铁磁性、半导体性以及自旋极化特性于一身,是开发半导体自旋电子器件的上选材料,对半导体自旋电子学的应用发展具有很好的促进作用。本发明提供了一种简单、快捷、廉价的合成方法,合成材料的磁性来源于特定晶面,为其它非磁半导体材料通过暴露特定晶面从而引入磁性提供了有益启示。β-FeSi2是一种性能优良的环境半导体材料,它0.81-0.87eV的能带宽度适合于光纤通信用光源。Beneficial effects of the present invention: the present invention relates to a β - FeSi2 nano-hexahedral particle with light-controlled strong room-temperature ferromagnetism and a preparation method thereof. Magnetic measurements show that the nanomaterial has a saturation magnetization as high as 15emu/g. , the material changes from ferromagnetic to paramagnetic. The material combines surface ferromagnetism, semiconductivity and spin polarization properties, and is the best choice for the development of semiconductor spintronics devices, which has a good role in promoting the application and development of semiconductor spintronics. The invention provides a simple, fast and cheap synthesis method, and the magnetism of the synthesized material comes from a specific crystal plane, which provides beneficial enlightenment for other non-magnetic semiconductor materials to introduce magnetism by exposing the specific crystal plane. β-FeSi 2 is an environmental semiconductor material with excellent performance, and its energy band width of 0.81-0.87eV is suitable for optical fiber communication light source.

附图说明Description of drawings

图1(a)、(b)和(c)分别为六面体β-FeSi2纳米颗粒不同放大倍数的扫描电镜图。(d)样品的XRD图谱。Figure 1(a), (b) and (c) are the SEM images of the hexahedral β-FeSi 2 nanoparticles at different magnifications, respectively. (d) XRD pattern of the sample.

图2(a)和(b)分别是所制备的六面体β-FeSi2颗粒沿[0-11]方向的低放大倍数的透射电子显微图和选区衍射光斑。(c)和(d)是沿[0-11]方向的低放大倍数的透射电子显微镜和选区衍射光斑。Figure 2(a) and (b) are the low-magnification transmission electron micrographs and selected area diffraction spots of the as-prepared hexahedral β - FeSi2 particles along the [0-11] direction, respectively. (c) and (d) are low magnification TEM and selected area diffraction spots along the [0-11] direction.

图3(a)六面体β-FeSi2纳米颗粒的室温M-H曲线,方形曲线为不加光情形,三角形曲线为加光情形,圆形曲线为光撤去后情形。(b)β-FeSi2纳米颗粒在300K-750K范围内的M-T曲线,使用平均场外延近似得到居里温度约为800K。Figure 3(a) Room temperature MH curves of hexahedral β - FeSi2 nanoparticles, the square curve is the situation without light, the triangle curve is the situation with light, and the circular curve is the situation after the light is removed. (b) MT curves of β - FeSi2 nanoparticles in the range of 300K–750K, using mean-field epitaxy to approximate the Curie temperature to be about 800K.

图4(a)和(b)分别是大小约为200nm的β-FeSi2颗粒的原子力和磁力显微图。(c)和(d)分别是150nm颗粒的原子力和磁力显微图。(e)和(f)分别是不规则形状颗粒的原子力和磁力显微图。(g)(h)和(i)(j)分别是未处理和喷金处理的β-FeSi2颗粒放置干燥空气三周后的原子力和磁力显微图。Figure 4(a) and (b) are atomic force and magnetic force micrographs, respectively, of β-FeSi2 particles with a size of about 200 nm. (c) and (d) are atomic force and magnetic force micrographs of 150 nm particles, respectively. (e) and (f) are atomic force and magnetic force micrographs of irregularly shaped particles, respectively. (g)(h) and (i)(j) are the atomic force and magnetic force micrographs of untreated and gold-sprayed β - FeSi2 particles placed in dry air for three weeks, respectively.

图5初始和氧化的样品的XPS谱(a)Fe2p,(b)Si2p,(c)O1s。Figure 5 XPS spectra of pristine and oxidized samples (a) Fe2p, (b) Si2p, (c) O1s.

图6(a)和(b)分别是纳米六面体颗粒上下表面为{011}和{100}晶面的薄片的电子结构,铁原子上标注的为非零的Mulliken自旋,单位是μB。深色和浅色的球分别代表铁原子和硅原子。可以看到两种晶面表面的铁原子均具有铁磁序,内部自旋具有无规取向,表明磁性来源于特定晶面。Figure 6(a) and (b) are the electronic structures of the flakes with {011} and {100} crystal planes on the upper and lower surfaces of nano-hexahedral particles, respectively. The non-zero Mulliken spin is marked on the iron atom, and the unit is μ B . Dark and light colored spheres represent iron and silicon atoms, respectively. It can be seen that the iron atoms on the surface of the two crystal planes have ferromagnetic order, and the internal spins have random orientations, indicating that the magnetism originates from a specific crystal plane.

具体实施方式detailed description

一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒及其制备方法,将清洗干净的直径为6cm的石英管水平放置在具有两个中心相距31.5cm温区的管式炉中;将P型硅片(1cm*1cm,电阻率25-100Ω·cm)清洗干净;将盛有0.056g无水氯化亚铁粉末的石英舟和清洗过的硅片分别放入直径为2cm的石英管中,相距31.5cm;将2cm的石英管放入管式炉直径为6cm的石英管中,使石英舟和硅片分别对应上下游温区的中心;排出装置内氧气;将上下游温区在20min内同时加热到600℃和800℃;在100sccm流量的载气氩气的吹拂下,反应2h;反应结束后自然降至室温,取出硅片,则表面生成β-FeSi2纳米六面体颗粒组成的薄膜。A kind of β - FeSi2 nano-hexahedral particles with light-controlled strong room temperature ferromagnetism and its preparation method, the cleaned quartz tube with a diameter of 6 cm is horizontally placed in a tube furnace with two temperature zones with a distance of 31.5 cm between centers; Clean the P-type silicon wafer (1cm*1cm, resistivity 25-100Ω·cm); put the quartz boat containing 0.056g of anhydrous ferrous chloride powder and the cleaned silicon wafer into a quartz boat with a diameter of 2cm In the tube, the distance is 31.5cm; put the 2cm quartz tube into the quartz tube with a diameter of 6cm in the tube furnace, so that the quartz boat and the silicon wafer correspond to the center of the upstream and downstream temperature zones respectively; exhaust the oxygen in the device; put the upstream and downstream temperature zone Heating to 600°C and 800°C within 20min at the same time; under the blowing of 100sccm carrier gas argon, react for 2h; after the reaction, naturally cool down to room temperature, take out the silicon wafer, and the surface will form β-FeSi 2 Nano-hexahedral particles film.

硅片的清洗流程如下:将硅片用丙酮和乙醇分别进行超声波清洗10min,超声波的频率和功率设置为40kHz和150W;将超声后的硅片用去离子水冲洗干净;将冲洗后的硅片放入体积比为1:2:5的盐酸、双氧水和去离子水的混合溶液中,油浴煮沸3mim;降至室温后,将硅片用去离子水冲洗干净;将冲洗后的硅片放入体积比为1:2:6的氨水、双氧水和去离子水的混合溶液中,油浴煮沸3mim;降至室温后,将硅片用去离子水冲洗干净;将硅片用1wt%的HF酸清洗,去除表面的氧化层;将硅片用去离子水冲洗干净后,放入干燥箱内烘干。本发明所用的硅片作为反应物,这样清洗后,可以暴露出硅表面的活性位点,也可以排除杂质对表征的影响。The cleaning process of the silicon wafer is as follows: the silicon wafer is ultrasonically cleaned with acetone and ethanol for 10 minutes respectively, and the frequency and power of the ultrasonic waves are set to 40kHz and 150W; the silicon wafer after ultrasonic is rinsed with deionized water; the rinsed silicon wafer is Put it into a mixed solution of hydrochloric acid, hydrogen peroxide and deionized water with a volume ratio of 1:2:5, boil in an oil bath for 3mim; after cooling down to room temperature, rinse the silicon wafer with deionized water; put the rinsed silicon wafer into a mixed solution of ammonia, hydrogen peroxide and deionized water with a volume ratio of 1:2:6, and boiled in an oil bath for 3mim; after cooling down to room temperature, the silicon wafers were rinsed with deionized water; Acid cleaning to remove the oxide layer on the surface; rinse the silicon wafer with deionized water and put it in a drying oven for drying. The silicon wafer used in the present invention is used as a reactant, so that after cleaning, the active sites on the silicon surface can be exposed, and the influence of impurities on the characterization can also be eliminated.

排出装置内氧气的方法如下:使用机械泵加分子泵将石英管内气压抽至1*10-3Pa,去除空气;通入200sccm流量的氩气恢复常压;打开出气阀,在通入氩气的同时,将上下游温区在10min内加热到100℃;在100℃下,持续通入200sccm流量的氩气30min。这样可以降低氧气的干扰,避免杂质相的产生。The method of exhausting the oxygen in the device is as follows: Use a mechanical pump plus a molecular pump to pump the air pressure in the quartz tube to 1*10 -3 Pa to remove the air; inject 200 sccm of argon to restore normal pressure; open the outlet valve, and then inject argon At the same time, the upstream and downstream temperature zones are heated to 100°C within 10 minutes; at 100°C, argon gas with a flow rate of 200 sccm is continuously introduced for 30 minutes. This reduces the interference of oxygen and avoids the generation of impurity phases.

本发明在偏离800℃时会有ε-FeSi等杂质相生成,为得到纯的β-FeSi2相,本发明采用的做法是反应温度在20min内升至800℃以前以及反应2h结束后,均关闭进气阀,避免无水氯化亚铁在氩气吹拂下到达下游温区同硅片反应。When the present invention deviates from 800 DEG C, impurity phases such as ε-FeSi will be generated. In order to obtain pure β-FeSi 2 phases, the method adopted in the present invention is that before the reaction temperature rises to 800 DEG C within 20 min and after the reaction 2 h finishes, all Close the inlet valve to prevent the anhydrous ferrous chloride from reaching the downstream temperature zone to react with the silicon wafer under argon blowing.

对实施例1所得产物进行其它表征:Carry out other characterizations to embodiment 1 gained product:

1)X-射线衍射分析:1) X-ray diffraction analysis:

对所得样品进行XRD分析,所得谱图如图2(d)所示,所有的衍射峰(220)、(313)、(331)、(004)、(040)和(442)对应正交晶系的β-FeSi2,没有晶体铁和氧化铁的峰出现,说明制备的颗粒不含有晶体铁和氧化铁。The resulting sample was analyzed by XRD, and the resulting spectrum is shown in Figure 2(d), all diffraction peaks (220), (313), (331), (004), (040) and (442) correspond to orthorhombic For β-FeSi 2 , there are no peaks of crystalline iron and iron oxide, indicating that the prepared particles do not contain crystalline iron and iron oxide.

2)扫描电子显微镜表征:2) Scanning electron microscope characterization:

图1(a)、(b)和(c)为本发明所制备β-FeSi2纳米六面体颗粒的扫描电镜图,可看出颗粒有明确的棱和光滑的表面。Fig. 1 (a), (b) and (c) are scanning electron micrographs of β-FeSi 2 nano-hexahedral particles prepared by the present invention, it can be seen that the particles have clear edges and smooth surfaces.

3)透射电子显微镜表征:3) Transmission electron microscope characterization:

图2为本发明所制备β-FeSi2纳米六面体颗粒透射电镜图,(a)和(c)是沿[0-11]和[100]方向的低放大倍数图像,(b)和(d)分别是(a)和(c)对应的选区电子衍射图。图中未出现非晶衍射光斑,表明该颗粒为单晶。图(b)明锐的衍射光斑对应于(022)和(400)晶面,图(d)对应于(040)、(004)和(022)晶面。由于晶格参数b和c很接近,看到的基本是一个正方对称的衍射光斑。因此,六面体的六个面中,两个晶面为(100)和(-100),其余四个面为(011)、(0-11)、(01-1)和(0-1-1)。Fig. 2 is β-FeSi prepared by the present invention 2 Nano-hexahedral particles transmission electron microscope, (a) and (c) are low magnification images along [0-11] and [100] directions, (b) and (d) The selected area electron diffraction patterns corresponding to (a) and (c), respectively. There is no amorphous diffraction spot in the figure, indicating that the particle is a single crystal. The sharp diffraction spots in picture (b) correspond to (022) and (400) crystal planes, and picture (d) corresponds to (040), (004) and (022) crystal planes. Since the lattice parameters b and c are very close, what we see is basically a square symmetrical diffraction spot. Therefore, among the six faces of the hexahedron, two crystal faces are (100) and (-100), and the remaining four faces are (011), (0-11), (01-1) and (0-1-1 ).

4)磁学性质测定:4) Determination of magnetic properties:

将本发明所制备β-FeSi2纳米六面体颗粒在超导量子干涉仪(SQUID)测量磁性,所加磁场平行于硅衬底,最后的磁滞回线扣除了硅衬底的抗磁信号。如图3(a)所示,可以看出室温下样品的磁化强度高达15emu/g,矫顽力约为123Oe,具有明显的铁磁性。当将功率100mW、波长425nm的激光通过光纤导入SQUID照射在样品上时,样品由铁磁转化为顺磁,将光撤去后,样品重新恢复铁磁性,表明样品具有光调控的铁磁性。为确定居里温度,由于仪器限制,测试了300K-750K范围内的磁化强度,可以看到,在750K时磁化强度并不为零,使用平均场近似外延得到居里温度约为800K。The magnetism of the β-FeSi2 nanohexahedral particles prepared in the present invention is measured in a superconducting quantum interference instrument (SQUID), the applied magnetic field is parallel to the silicon substrate, and the final hysteresis loop deducts the diamagnetic signal of the silicon substrate. As shown in Figure 3(a), it can be seen that the magnetization of the sample at room temperature is as high as 15emu/g, and the coercive force is about 123Oe, showing obvious ferromagnetism. When a laser with a power of 100mW and a wavelength of 425nm is introduced into the SQUID through an optical fiber to irradiate the sample, the sample changes from ferromagnetism to paramagnetism, and after the light is removed, the sample returns to ferromagnetism, indicating that the sample has light-regulated ferromagnetism. In order to determine the Curie temperature, due to the limitation of the instrument, the magnetization in the range of 300K-750K was tested. It can be seen that the magnetization is not zero at 750K, and the Curie temperature is about 800K by using mean field approximate epitaxy.

为确定磁性起源,对样品进行磁力显微实验,图4中(a)和(b)分别是大小约为200nm的β-FeSi2颗粒的原子力和磁力显微图,这些颗粒具有明显的磁畴结构。(c)和(d)分别是约150nm颗粒的原子力和磁力显微图,该颗粒没有磁畴结构。(e)和(f)分别是不规则形状颗粒的原子力和磁力显微图,这些颗粒也未显示出磁畴结构。这表明β-FeSi2颗粒的磁性是尺寸和形貌依赖的,小于150nm和无规则形貌的颗粒均没有铁磁性。(g)(h)和(i)(j)分别是未处理和喷金处理的β-FeSi2颗粒放置干燥空气三周后的原子力和磁力显微图。前者没有室温铁磁性,后者铁磁性保持。由于氧化过程缓慢,只发生在表面,所以β-FeSi2颗粒的磁性来源于颗粒的表面。同时排除了磁性掺杂、晶体铁和铁的氧化物存在的可能性,因为如若存在,颗粒内部会继续保持铁磁性。In order to determine the origin of magnetism, magnetic force microscopy experiments were carried out on the samples. Figure 4 (a) and (b) are the atomic force and magnetic force micrographs of β-FeSi2 particles with a size of about 200 nm, respectively. These particles have obvious magnetic domains structure. (c) and (d) are atomic force and magnetic force micrographs, respectively, of a particle of about 150 nm, which has no magnetic domain structure. (e) and (f) are atomic force and magnetic force micrographs, respectively, of irregularly shaped particles that also do not show magnetic domain structures. This indicates that the magnetism of β-FeSi 2 particles is size- and shape-dependent, and the particles smaller than 150nm and with irregular shapes are not ferromagnetic. (g)(h) and (i)(j) are the atomic force and magnetic force micrographs of untreated and gold-sprayed β - FeSi2 particles placed in dry air for three weeks, respectively. The former has no room temperature ferromagnetism, while the latter retains ferromagnetism. Since the oxidation process is slow and only occurs on the surface, the magnetic properties of β - FeSi2 particles originate from the surface of the particles. At the same time, the possibility of magnetic doping, crystalline iron and iron oxides is excluded, because if present, the interior of the particle will continue to maintain ferromagnetism.

5)X射线光电子能谱测量5) X-ray photoelectron spectroscopy measurement

对本发明所制备的样品进行XPS测试,一种为合成的初始样品,一种为在空气中氧化数周后的样品。如图5所示,初始样品中没有FeOx的信号,氧化后样品的XPS谱显示其表面有非晶氧化铁形成。合成的初始样品中的氧来自于硅片的氧化,而不是铁的氧化物。进一步说明了初始样品不含有铁的氧化物这些杂质相。The XPS test is carried out on the samples prepared by the present invention, one is the initial synthetic sample, and the other is the sample after being oxidized in air for several weeks. As shown in Figure 5, there is no signal of FeOx in the initial sample, and the XPS spectrum of the oxidized sample shows the formation of amorphous iron oxide on the surface. The oxygen in the as-synthesized initial sample came from the oxidation of the silicon wafer, not the iron oxide. It is further illustrated that the initial sample does not contain these impurity phases of iron oxides.

6)晶面引入磁性的第一性原理计算6) First-principle calculations of magnetism introduced by crystal planes

为了研究六面体β-FeSi2颗粒的室温铁磁性与晶面的依赖关系,使用第一性原理研究颗粒的{011}和{100}晶面,使用广义梯度近似,在平面波规范-守恒赝势下使用CASTEP包。图6显示的是两个具有{011}和{100}晶面的薄片表面的电子状态,可以看到,两种晶面表面的铁原子都显示了铁磁有序,然而内部的铁原子上,自旋排布无规,这和体材料的顺磁性相吻合,说明磁性来源于纳米颗粒特定的晶面。To study the crystal plane dependence of the room temperature ferromagnetism of hexahedral β - FeSi2 particles, the {011} and {100} crystal planes of the particles were investigated using first-principles, using the generalized gradient approximation, under the plane-wave gauge-conservation pseudopotential Use the CASTEP package. Figure 6 shows the electronic states on the surface of two flakes with {011} and {100} crystal planes. It can be seen that the iron atoms on the surface of the two crystal planes all show ferromagnetic order, while the internal iron atoms on the , the spin arrangement is random, which is consistent with the paramagnetism of the bulk material, indicating that the magnetism comes from the specific crystal plane of the nanoparticle.

Claims (4)

1.一种具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒,其特征在于,所述纳米六面体颗粒是具有两个{100}面和四个{011}侧面的β-FeSi2纳米立方体颗粒;该纳米六面体颗粒在室温下显示出达15emu/g的铁磁性,在激光辐照条件下,铁磁性会变成顺磁性,撤去光照后,铁磁性重新恢复,实现了光对磁性的调控。1. a kind of β-FeSi nano-hexahedral particle with light control strong room temperature ferromagnetism, it is characterized in that, described nano-hexahedral particle is β-FeSi with two {100} faces and four {011} side faces 2 nanometers Cubic particles; the nano-hexahedral particles show ferromagnetism up to 15emu/g at room temperature. Under the condition of laser irradiation, the ferromagnetism will become paramagnetism. regulation. 2.根据权利要求1所述的具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒,其特征在于,纳米颗粒强室温磁性起源于表面铁原子层附近的局域磁矩与表面态巡游电子的相互作用,其磁性具有形貌和尺寸依赖性,不规则形貌和小于150nm的颗粒不具有磁畴结构。 2. the β-FeSi nano-hexahedral particles with light-controlled strong room-temperature ferromagnetism according to claim 1, characterized in that, the strong room-temperature magnetism of nanoparticles originates from the local magnetic moment and surface state parade near the surface iron atomic layer The interaction of electrons has a shape and size dependence on its magnetic properties, and particles with irregular shapes and smaller than 150nm do not have a magnetic domain structure. 3.根据权利要求1或2所述的具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒的制备方法,其特征在于:制备按如下步骤进行:3. according to claim 1 and 2 , there is the preparation method of the β-FeSi2nano-hexahedral particle of light-controlled strong room temperature ferromagnetism, it is characterized in that: preparation is carried out as follows: 步骤1:将清洗干净的直径为4-10cm的石英管水平放置在具有两个中心相距31.5±10cm温区的管式炉中;Step 1: Place the cleaned quartz tube with a diameter of 4-10cm horizontally in a tube furnace with two temperature zones with a center distance of 31.5±10cm; 步骤2:将盛有0.056g纯度99.5%以上的无水氯化亚铁粉末的石英舟和洁净的电阻率为25-100Ω·cmP型硅片,分别放入两个温区中;Step 2: Put the quartz boat containing 0.056g of anhydrous ferrous chloride powder with a purity of more than 99.5% and a clean silicon wafer with a resistivity of 25-100Ω·cmP into two temperature zones respectively; 步骤3:石英管整体放入管式炉中,使石英舟和硅片分别对应上下游温区的中心;Step 3: The quartz tube is put into the tube furnace as a whole, so that the quartz boat and the silicon wafer correspond to the centers of the upstream and downstream temperature zones; 步骤4:将上下游温区在20min内同时加热到600±20℃和800±20℃;Step 4: Heat the upstream and downstream temperature zones to 600±20°C and 800±20°C simultaneously within 20 minutes; 步骤5:在100±20sccm流量的氩气载气的吹拂下,反应2h;Step 5: Under the blowing of argon carrier gas with a flow rate of 100±20 sccm, react for 2 hours; 步骤6:反应结束后自然降至室温,取出硅片,则硅片表面生成β-FeSi2纳米六面体颗粒组成的薄膜。Step 6: After the reaction is finished, cool down to room temperature naturally, take out the silicon chip, and then generate a film of β - FeSi2 nanometer hexahedral particles on the surface of the silicon chip. 4.根据权利要求3所述的具有光控强室温铁磁性的β-FeSi2纳米六面体颗粒的制备方法,其特征在于,反应温度800℃和反应流量100sccm氩气,得到大密度纯的β-FeSi2相。4. the preparation method of the β - FeSi2nano-hexahedral particle with light-controlled strong room temperature ferromagnetism according to claim 3 is characterized in that, 800 ℃ of reaction temperature and reaction flow 100sccm argon gas, obtain the pure β- FeSi 2 phase.
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Application publication date: 20160622