CN105458810B - The drive system and rotating table device of a kind of rotary table - Google Patents

Abstract

The present invention provides the drive systems and rotating table device of a kind of rotary table, are related to technical field of transmission machinery, and wherein drive system includes：Axis system, rotary table, synchronization belt transmission system, pedestal and motor assembly；The axis system is mounted on the pedestal, and the rotary table is mounted on the axis system；The motor assembly includes：Bottom plate, motor cabinet, motor, adjustment head and adjustment frame, the synchronization belt transmission system include：Transmission synchronous belt, synchronous pulley, meshing part, the synchronous pulley are mounted on the output shaft of the motor, and the transmission is sleeved on synchronous belt one end on the rotary table circumference, and the other end of transmission synchronous belt is sleeved on the synchronous pulley.The program can improve the degree of operating steadily and positioning accuracy of rotary table, improve equipment dependability.

Description

A drive system of a rotary table and a rotary table device

technical field

The invention relates to the technical field of transmission machinery, in particular to a drive system of a rotary table and a rotary table device.

Background technique

In the manufacturing process of semiconductor special equipment, the workbench often needs to achieve rotation and positioning within a certain degree range to meet the requirements of the processing technology. Therefore, it is a key technology for the manufacture of semiconductor special equipment to realize reliable and stable rotation of the workbench and precise positioning. In modern production equipment, the traditional way of driving the table is to directly act on the shaft system through the motor reducer to drive the table to rotate. This device has certain deficiencies in practical applications, such as unstable operation, large vibration, and loud noise. , Due to the mismatch of the moment of inertia, it is difficult to stop the workbench when it is in place, and the positioning accuracy cannot meet the process requirements, thus greatly reducing the reliability of the equipment.

Contents of the invention

In order to overcome the above problems, the present invention provides a drive system and a rotary table device for a rotary table, which solve the problems in the prior art that the table is difficult to stop when it is in place, the positioning accuracy cannot meet the process requirements, and the equipment reliability is insufficient.

In order to solve the above technical problems, the present invention adopts the following technical solutions:

A drive system for a rotary table, comprising: a spindle system, a rotary table, a synchronous belt drive system, a base, and a motor assembly;

Wherein, the main shaft system is installed on the base, and the rotary table is installed on the main shaft system;

The motor assembly includes: a base plate, a motor base, a motor, an adjustment head and an adjustment frame, wherein the base plate is installed on the base, the motor is installed on the motor base, and the motor base is connected to the The bottom plate is connected, the motor is installed and fixed on the base, the adjustment head is connected to one end of the motor base, the adjustment frame is fixed on the bottom plate, and an adjustment screw is installed on the adjustment frame. The adjusting screw passes through the adjusting frame and is threadedly connected with the adjusting head;

The synchronous belt transmission system includes: a synchronous belt for transmission, a synchronous pulley, and an engaging part, wherein the synchronous pulley is installed on the output shaft of the motor, and the engaging part is fixed on the On the circumference of the rotary table, the synchronous belt for transmission is sleeved on the circumference of the rotary table with one end of the tooth inward, and meshes with the teeth of the meshing part, and is buckled on the meshing part by the pressing plate. and the meshing part of the synchronous belt for transmission, press and fix the meshing part of the meshing part and the synchronous belt for transmission on the rotary table, and the other end of the synchronous belt for transmission is sleeved on the on the timing pulley.

Optionally, opposite guide wheels are fixed on the base, and the opposite guide wheels are respectively located on both sides of the transmission synchronous belt, so as to compress the transmission synchronous belt.

Optionally, the distance between the oppositely arranged guide wheels is smaller than the diameter of the rotary table and greater than or equal to the diameter of the synchronous pulley.

Optionally, oppositely disposed limit sensors for sensing the rotational position of the rotary table are fixed on the base.

Optionally, the main shaft system is an air bearing main shaft system.

Optionally, the synchronous belt for transmission is a polyurethane steel wire belt.

A rotary table device, comprising the above-mentioned driving system of the rotary table.

The beneficial effects of the present invention are:

In the above solution, the drive system of the rotary table is specifically combined with the synchronous belt transmission system, so that the drive system has a large moment of inertia and a large torque, and thus solves the problem of the traditional motor-driven spindle being unable to stop due to inertia mismatch. To solve the problem of accuracy, realize the precise positioning and stable positioning of the rotary table, improve the running stability and positioning accuracy of the rotary table, and improve the reliability of the equipment.

Description of drawings

Fig. 1 is the overall structure schematic diagram of the drive system of rotary table in the present invention;

Fig. 2 is the top view of the drive system of the rotary table in Fig. 1;

Fig. 3 is a schematic sectional view along line A-A in Fig. 1;

Fig. 4 is a schematic cross-sectional view along line B-B in Fig. 1 .

Reference signs:

1 main shaft system, 2 rotary table, 3 base, 41 bottom plate, 42 motor seat, 43 motor, 44 adjustment head, 45 adjustment frame, 46 adjustment screw, 51 synchronous belt for transmission, 52 synchronous pulley, 53 meshing parts, 54 Press plate, 55 guide wheels, 31 limit sensors.

Detailed ways

Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided for more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

As shown in Fig. 1, Fig. 2, Fig. 3 and Fig. 4, the present invention discloses a drive system of a rotary table, which is characterized in that it includes: a spindle system 1, a rotary table 2, a synchronous belt transmission system, and a base 3 And the motor assembly; wherein, the spindle system 1 is installed on the base 3, and the rotary table 2 is installed on the spindle system 1.

Wherein, the motor assembly includes: base plate 41, motor base 42, motor 43, adjustment head 44 and adjustment frame 45, wherein, base plate 41 is installed on the base 3, motor 43 is installed on the motor base 42, motor base 42 and base plate 41 connection, the motor 43 is installed and fixed on the base 3, the adjustment head 44 is connected to one end of the motor base 42, the adjustment frame 45 is fixed on the bottom plate 41, an adjustment screw 46 is installed on the adjustment frame 45, and the adjustment screw 46 passes through the adjustment frame 45 It is threadedly connected with the adjustment head 44.

Wherein, the synchronous belt transmission system includes: a synchronous belt 51 for transmission, a synchronous pulley 52, and an engaging part 53, wherein the synchronous pulley 52 is installed on the output shaft of the motor 43, and the engaging part 53 is fixed on the On the circumference of the rotary table 2, one end of the synchronous belt 51 for transmission is set on the circumference of the rotary table 2 through the way that the teeth face inward, and meshes with the teeth of the engaging part 53, and is buckled on the engaging part 53 and the transmission by the pressing plate 54. The meshing portion of the synchronous belt 51 is pressed and fixed on the rotary table 2 between the meshing part 53 and the synchronous belt 51 for transmission, and the other end of the synchronous belt 51 for transmission is sleeved on the synchronous pulley 52 .

Specifically, the motor 43 is installed on the motor base 42, the motor base 42 is connected with the base plate 41, the motor 43 is installed and fixed on the base 3, the connection between the motor base 42 and the base plate 41 is a position adjustable connection, and the base plate 41 or The motor base 42 can be provided with a bar-shaped hole that is conducive to realizing position adjustment. Specifically, the position of the motor base 42 is realized by an adjustment head 44 connected to one end of the motor base 42 and an adjustment frame 45 connected with it by an adjustment screw 46. adjustment, the adjustment head 44 is fixedly connected to the end of the motor base 42 away from the rotary table 2, and the adjustment frame 45 is fixedly installed on the bottom plate 41. When the adjustment screw 46 is rotated, the adjustment head 44 drives the motor base 42 to move relative to the bottom plate 41. Modulation can be used to adjust the distance between the motor 43 and the rotary table 2 to become farther or closer, and then the motor 43 drives the synchronous belt 51 for transmission to adjust the tension, so as to better realize the transmission effect.

Further, the synchronous belt 51 for transmission is used to drive the rotary table 2 to rotate, and the synchronous pulley 52 provided on the output shaft of the motor 43 is specifically used to drive the synchronous belt 51 for transmission to rotate, and the synchronous belt 51 for transmission is sleeved on the synchronous belt On the wheel 52, specifically, it is sleeved on its circumferential surface; while the transmission synchronous belt 51 is sleeved on the synchronous pulley 52, it is also sleeved and partially fixed on the circumferential surface of the rotary table 2, and the engaging part 53 Through its teeth facing outwards meshing with the teeth facing inwards on the synchronous belt 51 for transmission, the synchronous belt 51 for transmission can be fixed at the mesh; Snap-in transmission, when the motor 43 drives the synchronous belt 51 for transmission to rotate through the synchronous pulley 52, the synchronous belt 51 for transmission drives the rotary table 2 to rotate through the engaging part 53 and the pressing plate 54. timing belt.

Wherein, the synchronous belt 51 for transmission can be an endless belt. When installing, turn the adjusting screw 46 to make the distance between the motor 43 and the rotary table 2 close, and the endless belt is sleeved on the rotary table 2 and the rotating table 2. On the synchronous pulley 52; the synchronous belt 51 for transmission can also be a strip belt, and when installing, the joint of the strip belt is engaged with the engaging part 53, and it is fixed and pressed to death by the pressing plate 54, which is convenient for disassembly. It is more conducive to the installation, combination and maintenance of the overall structure.

In the specific use process, the motor 43 is started to drive the synchronous belt 51 for transmission to move. Since the synchronous belt 51 for transmission is sleeved on the rotary table 2, it is engaged with the engaging part 53, and is pressed to death by the pressure plate 54 and fixed on it. The meshing part on the circumferential surface of the rotary table 2, the synchronous belt 51 for transmission drives the rotary table 2 to rotate within a certain angle range through the meshing part at this time, and then rotates when reaching the rotatable limit position. In the drive system of the rotary table in the present invention, the above-mentioned synchronous belt transmission system is specifically combined, and the synchronous belt 51 for transmission is fixedly connected with the part of the rotary table 2, and the rotation and stop of the rotary table 2 are realized. The real-time control makes the drive system have a large moment of inertia and a large torque, which solves the problems of the traditional motor-driven spindle being unable to stop and inaccurate positioning due to inertia mismatch, and realizes precise positioning of the rotary table and stable landing. position, improve the running stability and positioning accuracy of the rotary table, and improve the reliability of the equipment.

Wherein, the base 3 is fixed with oppositely arranged guide wheels 55, and the oppositely arranged guide wheels 55 are respectively located on both sides of the transmission synchronous belt 51 to compress the transmission synchronous belt 51. The relative arrangement of the guide wheels 55 It means that the guide wheels 55 on the base 3 are specifically two, and the positions of the two guide wheels 55 are arranged symmetrically with respect to the synchronous belt 51 for transmission. The transmission of belt 51 is stable. Specifically, in combination with actual installation needs, the distance between the oppositely arranged guide wheels 55 is smaller than the diameter of the rotary table 2 and greater than or equal to the diameter of the synchronous pulley 52, and its position is adjustable, so as to dynamically adjust the transmission. The tension of synchronous belt 51, and carry out transmission guide better.

Further, the base 3 is fixed with a limit sensor 31 oppositely arranged for sensing the rotational position of the rotary table 2. The limit sensor 31 is also specifically two, and the positions of the two limit sensors 31 are used for relative transmission. The synchronous belt 51 is arranged symmetrically, and is specifically arranged at the extreme position of the rotatable angle when the rotary table 2 is driven by the synchronous belt 51 for transmission in the forward rotation and rotation, so as to monitor the safe and reliable operation of the rotary table 2.

Furthermore, the spindle system 1 is an air-floating spindle system, and the synchronous belt 51 for transmission drives the rotary table 2 and the air-floating spindle system to run. The air-floating spindle system uses the mature rotary air-floating technology to make the rotation The workbench 2 floats to realize the smooth rotation of the rotary workbench 2 approximately without friction, so as to reduce loss and noise; wherein, the synchronous belt 51 for transmission is preferably a polyurethane steel wire belt.

The invention also discloses a rotary table device, which is semiconductor special equipment for processing wafers, and the rotary table device includes the above-mentioned drive system of the rotary table.

The invention provides a new, simple and practical, easy to use, reliable structure and stable operation rotary table drive system and rotary table device. Due to the use of synchronous belt transmission, the overall structure of the device is compact, the installation is simple, and the structure Reliable, stable operation, precise positioning, and can also reduce the vibration noise of the traditional drive structure, which can perfectly meet the requirements of wafer processing technology.

Having described preferred embodiments of embodiments of the present invention, additional changes and modifications to these embodiments can be made by those skilled in the art once the basic inventive concept is appreciated. Therefore, the appended claims are intended to be construed to cover the preferred embodiment and all changes and modifications which fall within the scope of the embodiments of the present invention.

Furthermore, the term "comprises", "comprises" or any other variation thereof is intended to cover a non-exclusive inclusion such that a process, method, article, or terminal equipment comprising a set of elements includes not only those elements, but also includes elements not expressly listed. other elements identified, or also include elements inherent in such a process, method, article, or end-equipment. Without further limitations, an element defined by the phrase "comprising a ..." does not exclude the presence of additional identical elements in the process, method, article or terminal device comprising said element.

What has been described above is a preferred embodiment of the present invention. It should be pointed out that for those skilled in the art, some improvements and modifications can also be made without departing from the principles described in the present invention. within the scope of protection of the invention.

Claims (7)

1. A drive system for a rotary table, characterized in that it comprises: a spindle system (1), a rotary table (2), a synchronous belt drive system, a base (3) and a motor assembly; Wherein, the spindle system (1) is installed on the base (3), and the rotary table (2) is installed on the spindle system (1); The motor assembly includes: a base plate (41), a motor base (42), a motor (43), an adjustment head (44) and an adjustment frame (45), wherein the base plate (41) is installed on the base (3 ), the motor (43) is mounted on the motor base (42), the motor base (42) is connected to the base plate (41), and the adjustment head (44) is connected to the motor base ( 42) One end, the adjustment frame (45) is fixed on the base plate (41), an adjustment screw (46) is installed on the adjustment frame (45), and the adjustment screw (46) passes through the adjustment frame (45) is threadedly connected with the adjustment head (44); The synchronous belt transmission system includes: a synchronous belt (51) for transmission, a synchronous pulley (52), and an engaging part (53), wherein the synchronous pulley (52) is installed on the output shaft of the motor (43) Above, the meshing part (53) is fixed on the circumference of the rotary table (2) through the teeth outward, and one end of the transmission synchronous belt (51) is sleeved on the rotary table (2) through the teeth inward. on the circumference of the platform (2), and mesh with the teeth of the engaging part (53), and buckle and press the engaging part (53) and the synchronous belt (51) for transmission through the pressing plate (54), Press and fix the engaging part (53) and the synchronous belt (51) for transmission on the rotary table (2), and the other end of the synchronous belt (51) for transmission is sleeved on the on the synchronous pulley (52); Wherein, the synchronous belt (51) for transmission drives the rotary table (2) to rotate within a certain angle range through the meshing part, and then rotates when reaching a rotatable limit position. 2. The drive system of the rotary table according to claim 1, characterized in that, The base (3) is fixed with opposite guide wheels (55), and the opposite guide wheels (55) are respectively located on both sides of the transmission synchronous belt (51) to synchronize the transmission Belt (51) compresses. 3. The drive system of the rotary table according to claim 2, characterized in that the distance between the oppositely arranged guide wheels (55) is smaller than the diameter of the rotary table (2) and greater than or equal to the diameter of the rotary table (2). The diameter of the timing pulley (52). 4. The drive system of the rotary table according to claim 1, characterized in that, A relative limit sensor (31) for sensing the rotational position of the rotary table (2) is fixed on the base (3). 5. The drive system of the rotary table according to claim 1, characterized in that the spindle system (1) is an air bearing spindle system. 6. The drive system of the rotary table according to any one of claims 1-5, characterized in that, the synchronous belt (51) for transmission is a polyurethane steel wire belt. 7. A rotary table device, characterized in that it comprises the drive system of the rotary table according to any one of claims 1-5.