CN105411625B - Diagnosis and treatment integrative ultrasonic system based on capacitance type micromachined ultrasonic energy converter planar battle array - Google Patents
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Abstract
本发明公开了一种基于电容式微加工超声换能器面阵的诊疗一体化超声系统,包括超声成像诊断装置、超声聚焦治疗装置和探头;所述探头包括由电容式微加工超声换能器作为阵元组成的面阵,每个所述阵元均分别与所述超声成像诊断装置和超声聚焦治疗装置连接,所述探头用于工作在成像诊断模式和/或聚焦治疗模式下。本发明的诊疗一体化超声系统集超声成像诊断和超声聚焦治疗于一体,宽带宽、高灵敏度、小体积、低噪声、易声阻抗匹配和工作温度范围大等诸多优点。
The invention discloses a diagnosis and treatment integrated ultrasonic system based on a capacitive micro-machined ultrasonic transducer area array, comprising an ultrasonic imaging diagnostic device, an ultrasonic focusing treatment device and a probe; the probe includes a capacitive micro-machined ultrasonic transducer as an array Each of the array elements is connected to the ultrasonic imaging diagnosis device and the ultrasonic focusing treatment device, respectively, and the probe is used to work in the imaging diagnosis mode and/or the focused treatment mode. The integrated ultrasonic system for diagnosis and treatment of the invention integrates ultrasonic imaging diagnosis and ultrasonic focusing treatment, and has many advantages, such as wide bandwidth, high sensitivity, small volume, low noise, easy acoustic impedance matching and large working temperature range.
Description
技术领域technical field
本发明涉及超声诊疗器械领域,具体涉及一种基于电容式微加工超声换能器面阵的诊疗一体化超声系统。The invention relates to the field of ultrasonic diagnosis and treatment instruments, in particular to a diagnosis and treatment integrated ultrasonic system based on a capacitive micro-machined ultrasonic transducer area array.
背景技术Background technique
超声以其无损无辐射、实时性好、操作便捷、价格便宜等优点,被广泛应用于临床诊断治疗、工业无损探测、厚度流速流量监测等各个领域。目前在临床诊断方面使用的超声探头,多是基于压电陶瓷(PZT)、压电单晶(如PMN-PT,PINMT等)或压电复合材料(包括1-3,2-2压电复合等)等具有压电效应的材料。这是因为这些材料具有比其它材料高得多的压电常数和机电耦合系数,能产生很强的超声信号并进行高灵敏的探测。Ultrasound is widely used in various fields such as clinical diagnosis and treatment, industrial non-destructive detection, thickness flow rate flow monitoring, etc. The ultrasonic probes currently used in clinical diagnosis are mostly based on piezoelectric ceramics (PZT), piezoelectric single crystals (such as PMN-PT, PINMT, etc.) or piezoelectric composite materials (including 1-3, 2-2 piezoelectric composites) etc.) and other materials with piezoelectric effect. This is because these materials have much higher piezoelectric constants and electromechanical coupling coefficients than other materials, and can generate strong ultrasonic signals and perform highly sensitive detection.
而近年来随着微机电系统MEMS工艺和大规模集成电路IC技术的发展,一种新型的超声换能器——微加工超声换能器(MUT)得到了愈来愈多地研究和发展。MUT以其不同的驱动原理主要可以分为:压电式微加工超声换能器(pMUT)和电容式微加工超声换能器(cMUT)。其中pMUT是采用MEMS工艺溅射很薄的压电薄膜(如sol-gel PZT)或通过光刻、刻蚀等MEMS方法制作压电复合材料来制作高性能超声换能器,尤其是高频超声换能器。因此其本质上还是基于压电材料的超声换能器。而cMUT则完全不同,其实质是一种微型化的平板电容,其工作原理是基于静电力作用。cMUT制作方法主要包括Bulk Micromaching和Surface Micromaching两种,其基本思路都是首先通过在硅基或玻璃基上通过光刻、RIE等MEMS工艺形成一个个设计好的孔隙,然后通过化学气相沉积(LPVCD)或覆置薄块等方式在孔隙上表面形成一层很薄的膜,加上设计好的连接电极及引线等完成制作。cMUT工作过程可分为发射和接收两部分:发射时,在上下两表面施加与其机械共振频率相同的交流电压,上表面的薄膜就会发生位移进而产生超声波;接收时,在上下表面施加适当的直流偏置电压后,由于薄膜受回波超声的作用产生变形,就会产生可测的电流/电压,实现对回波超声波强度的探测。可见,由于cMUT的制作工艺与CMOS等IC制作工艺兼容,因此可以将后续的驱动电路、前级放大电路及信号处理电路等整合到一起,从而有效降低电路间寄生电容影响和干扰信号的引入可能,十分有利于制作高集成度的高性能阵列换能器和探头。其次,因为cMUT探头尺寸小、材料便宜、加工精度高、十分利于规模化生产和IC集成等优点,可大大降低超声探头的生产成本。此外,cMUT探头还有宽带宽、高灵敏度、小体积、低噪声、易声阻抗匹配和工作温度范围大等诸多优点。因此,从1996年,美国斯坦福大学B.T Khuri-Yakub教授及其团队提出以薄膜沉积、牺牲层的制作方式大大改进了cMUT性能及成品率以来,近年来cMUT工艺和换能器的研制得到了迅猛的发展。cMUT的优点使得将一个换能器探头既用作成像诊断有用作聚焦治疗成为可能,但是,目前还没有一种这样的超声系统。In recent years, with the development of MEMS technology of micro-electromechanical system and large-scale integrated circuit IC technology, a new type of ultrasonic transducer, micro-machined ultrasonic transducer (MUT), has been more and more researched and developed. MUTs can be mainly divided into piezoelectric micro-machined ultrasonic transducers (pMUT) and capacitive micro-machined ultrasonic transducers (cMUT) by their different driving principles. Among them, pMUT is to use MEMS technology to sputter very thin piezoelectric films (such as sol-gel PZT) or to make piezoelectric composite materials by MEMS methods such as photolithography and etching to make high-performance ultrasonic transducers, especially high-frequency ultrasonic transducers. transducer. Therefore, it is essentially an ultrasonic transducer based on piezoelectric materials. The cMUT is completely different, its essence is a miniaturized plate capacitor, its working principle is based on electrostatic force. The cMUT fabrication methods mainly include Bulk Micromaching and Surface Micromaching. The basic idea is to form designed pores one by one through MEMS processes such as photolithography and RIE on silicon or glass substrates, and then pass chemical vapor deposition (LPCVD). ) or covering a thin block to form a very thin film on the upper surface of the pore, and add the designed connecting electrodes and leads to complete the production. The working process of cMUT can be divided into two parts: transmitting and receiving: when transmitting, an AC voltage with the same mechanical resonance frequency is applied to the upper and lower surfaces, and the film on the upper surface will be displaced to generate ultrasonic waves; After the DC bias voltage is applied, since the film is deformed by the echo ultrasonic wave, a measurable current/voltage will be generated to realize the detection of the echo ultrasonic wave intensity. It can be seen that since the manufacturing process of cMUT is compatible with IC manufacturing processes such as CMOS, the subsequent drive circuit, pre-amplifier circuit and signal processing circuit can be integrated together, thereby effectively reducing the influence of parasitic capacitance between circuits and the introduction of interference signals. , which is very beneficial to the production of highly integrated high-performance array transducers and probes. Secondly, because the cMUT probe has the advantages of small size, cheap materials, high processing accuracy, and it is very beneficial to large-scale production and IC integration, it can greatly reduce the production cost of ultrasonic probes. In addition, the cMUT probe has many advantages, such as wide bandwidth, high sensitivity, small size, low noise, easy acoustic impedance matching and large operating temperature range. Therefore, since 1996, Professor B.T Khuri-Yakub of Stanford University and his team proposed that the performance and yield of cMUT have been greatly improved by thin film deposition and sacrificial layer fabrication. development of. The advantages of cMUT make it possible to use a transducer probe for both imaging diagnostics and focused therapy, however, there is currently no such ultrasound system.
发明内容SUMMARY OF THE INVENTION
因此,本发明要解决的技术问题在于克服现有技术中的没有集超声成像诊断和超声聚焦治疗于一体的超声系统的缺陷。Therefore, the technical problem to be solved by the present invention is to overcome the defect in the prior art that there is no ultrasonic system integrating ultrasonic imaging diagnosis and ultrasonic focusing treatment.
为此,本发明的一种基于电容式微加工超声换能器面阵的诊疗一体化超声系统,包括超声成像诊断装置、超声聚焦治疗装置和探头;To this end, an integrated ultrasonic system for diagnosis and treatment based on a capacitive micro-machined ultrasonic transducer area array of the present invention includes an ultrasonic imaging diagnostic device, an ultrasonic focusing treatment device and a probe;
所述探头包括由电容式微加工超声换能器作为阵元组成的面阵,每个所述阵元均分别与所述超声成像诊断装置和超声聚焦治疗装置连接,所述探头用于工作在成像诊断模式和/或聚焦治疗模式下。The probe includes an area array composed of capacitive micro-machined ultrasonic transducers as array elements, and each of the array elements is respectively connected with the ultrasonic imaging diagnostic device and the ultrasonic focusing treatment device, and the probe is used for working in imaging. in diagnostic mode and/or in focused therapy mode.
优选地,各个所述阵元具有相同或不同的中心频率、带宽和形状结构。Preferably, each of the array elements has the same or different center frequency, bandwidth and shape structure.
优选地,所述面阵包括至少一个区域,属于一个区域的阵元具有相同的中心频率和带宽,属于不同区域的阵元具有不同的中心频率、带宽和形状结构。Preferably, the area array includes at least one area, the array elements belonging to one area have the same center frequency and bandwidth, and the array elements belonging to different areas have different center frequencies, bandwidths and shape structures.
优选地,一部分所述区域的阵元受所述超声聚焦治疗装置的控制工作在聚焦治疗模式下,一部分所述区域的阵元受所述超声成像诊断装置的控制工作在成像诊断模式下。Preferably, a part of the array elements in the area are controlled by the ultrasonic focused therapy device to work in a focused therapy mode, and a part of the array elements in the area are controlled by the ultrasonic imaging diagnostic device to work in an imaging diagnosis mode.
优选地,所述成像诊断模式包括A模式、M模式、B模式、3D模式、多普勒模式和弹性模式。Preferably, the imaging diagnostic modes include A mode, M mode, B mode, 3D mode, Doppler mode and elasticity mode.
优选地,所述成像诊断模式为弹性模式时,探头的阵元中的一部分用于发射声辐射,另一部分用于接收横向传播的弹性波。Preferably, when the imaging diagnosis mode is the elastic mode, a part of the array elements of the probe is used for emitting acoustic radiation, and the other part is used for receiving elastic waves propagating laterally.
优选地,所述聚焦治疗模式包括单点聚焦治疗模式和多点聚焦治疗模式。Preferably, the focus therapy mode includes a single-point focus therapy mode and a multi-point focus therapy mode.
优选地,所述多点聚焦治疗模式中的各个焦点包含相同或不同的焦距、能量强度和聚焦区域形状。Preferably, each focal point in the multi-focus treatment mode contains the same or different focal lengths, energy intensities and focal area shapes.
优选地,所述超声成像诊断装置包括发射控制模块、脉冲发射模块、信号接收模块和显示模块;Preferably, the ultrasonic imaging diagnostic device includes a transmission control module, a pulse transmission module, a signal reception module and a display module;
所述发射控制模块与脉冲发射模块连接,用于生成包含波束形成特点的第一信号并将其传输给所述脉冲发射模块;The transmission control module is connected to the pulse transmission module for generating and transmitting a first signal including beamforming characteristics to the pulse transmission module;
所述脉冲发射模块与所述探头连接,用于根据所述第一信号控制所述探头的各个阵元的激励顺序和时间延迟;The pulse transmitting module is connected to the probe, and is used for controlling the excitation sequence and time delay of each array element of the probe according to the first signal;
所述信号接收模块与所述探头连接,用于接收所述探头的各个阵元根据按序接收到的反射回波超声信号所生成的电信号,并将所述电信号进行放大和滤波处理后输出给所述显示模块;The signal receiving module is connected to the probe, and is used to receive the electrical signals generated by each array element of the probe according to the sequentially received reflected echo ultrasonic signals, and amplify and filter the electrical signals after processing. output to the display module;
所述显示模块用于将所述电信号转换成图像进行显示。The display module is used for converting the electrical signal into an image for display.
优选地,所述超声聚焦治疗装置包括治疗控制模块和聚焦发射模块;Preferably, the ultrasonic focused treatment device includes a treatment control module and a focused emission module;
所述治疗控制模块与所述聚焦发射模块连接,用于生成包含菲涅尔环分布特点的第二信号并将其传输给所述聚焦发射模块;The treatment control module is connected to the focus emission module, and is used for generating a second signal containing the distribution characteristics of the Fresnel ring and transmitting it to the focus emission module;
所述聚焦发射模块与所述探头连接,用于根据所述第二信号控制所述探头的各个所述阵元的工作状态以获得聚焦的焦距和强度。The focusing emission module is connected to the probe, and is used for controlling the working state of each of the array elements of the probe according to the second signal to obtain the focused focal length and intensity.
本发明技术方案,具有如下优点:The technical scheme of the present invention has the following advantages:
1.本发明实施例提供的基于电容式微加工超声换能器面阵的诊疗一体化超声系统,通过设置由电容式微加工超声换能器作为阵元组成的面阵形成探头,利用cMUT工艺微加工、高集成的特点,能实现对大面阵探头的各个阵元独立精确控制,进而可实现超声成像诊断和超声聚焦治疗的功能,集超声成像诊断和超声聚焦治疗于一体,具有宽带宽、高灵敏度、小体积、低噪声、易声阻抗匹配和工作温度范围大等诸多优点。1. The integrated ultrasonic system for diagnosis and treatment based on the area array of capacitive micro-machined ultrasonic transducers provided by the embodiment of the present invention forms a probe by setting the area array composed of capacitive micro-machined ultrasonic transducers as array elements, and uses the cMUT process for micro-machining. , High integration features, can achieve independent and precise control of each array element of the large area array probe, and then realize the functions of ultrasonic imaging diagnosis and ultrasonic focusing treatment, integrating ultrasonic imaging diagnosis and ultrasonic focusing treatment, with wide bandwidth, high It has many advantages such as sensitivity, small size, low noise, easy acoustic impedance matching and large operating temperature range.
2.本发明实施例提供的基于电容式微加工超声换能器面阵的诊疗一体化超声系统,区别于传统的线阵、凸阵压电陶瓷/单晶超声成像系统,通过设置超声成像诊断装置可以使cMUT面阵工作于成像诊断模式,并且能够实现样式灵活多样的多模式超声成像,如A模式、M模式、B模式、3D模式、多普勒模式、弹性模式等。甚至可以在不移动探头的情况下实现对探测区域而非单一切面的实时3D成像和多普勒成像,从而可以适应多种应用环境。2. The integrated ultrasonic system for diagnosis and treatment based on the capacitive micro-machined ultrasonic transducer area array provided by the embodiment of the present invention is different from the traditional linear array and convex array piezoelectric ceramic/single crystal ultrasonic imaging system. By setting an ultrasonic imaging diagnostic device The cMUT area array can work in the imaging diagnosis mode, and can realize flexible and diverse multi-mode ultrasound imaging, such as A mode, M mode, B mode, 3D mode, Doppler mode, elasticity mode, etc. Even real-time 3D imaging and Doppler imaging of the detection area rather than a single slice can be achieved without moving the probe, which can adapt to a variety of application environments.
3.本发明实施例提供的基于电容式微加工超声换能器面阵的诊疗一体化超声系统,通过设置超声聚焦治疗装置可以使cMUT面阵探头工作于聚焦治疗模式,从而可以在使用同一探头的情况下,进行高强度的超声聚焦用于治疗。且不同于以往球面或凹面聚焦的超声HIFU探头,该探头的聚焦方式和焦距是通过菲涅尔相位调制实现的,因而可以通过需要灵活设定调节,而且焦点也可以根据需要灵活设定调节,不再是唯一的,可以同时在各个区域有多个焦点,甚至各焦点的聚焦、强度也可以是不同的,从而提高了聚焦精度,也可以适应多种应用环境。3. The integrated ultrasonic system for diagnosis and treatment based on the capacitive micro-machined ultrasonic transducer area array provided by the embodiment of the present invention can make the cMUT area array probe work in the focused treatment mode by setting the ultrasonic focusing treatment device, so that the same probe can be used. In some cases, high-intensity focused ultrasound is used for treatment. And different from the previous spherical or concave focusing ultrasonic HIFU probe, the focusing method and focal length of the probe are realized by Fresnel phase modulation, so it can be flexibly set and adjusted according to needs, and the focus can also be flexibly set and adjusted according to needs. It is no longer unique, there can be multiple focal points in each area at the same time, and even the focus and intensity of each focal point can be different, thereby improving the focusing accuracy and adapting to various application environments.
4.本发明实施例提供的基于电容式微加工超声换能器面阵的诊疗一体化超声系统,通过将探头的cMUT面阵中的不同部分区域的阵元设置成工作在聚焦治疗模式或超声成像模式的不同的工作模式下,从而能实现在聚焦治疗时实时成像治疗区域,观测治疗效果,实现术中调整治疗区域和超声强度,从而可以改进治疗效果。4. The integrated ultrasound system for diagnosis and treatment based on the capacitive micro-machined ultrasonic transducer area array provided by the embodiment of the present invention, by setting the array elements in different parts of the cMUT area array of the probe to work in a focused therapy mode or ultrasonic imaging In different working modes, the treatment area can be imaged in real time during focused treatment, the treatment effect can be observed, and the treatment area and ultrasonic intensity can be adjusted during the operation, so that the treatment effect can be improved.
附图说明Description of drawings
为了更清楚地说明本发明具体实施方式中的技术方案,下面将对具体实施方式描述中所需要使用的附图作简单地介绍,显而易见地,下面描述中的附图是本发明的一些实施方式,对于本领域普通技术人员来讲,在不付出创造性劳动的前提下,还可以根据这些附图获得其他的附图。In order to illustrate the technical solutions in the specific embodiments of the present invention more clearly, the following briefly introduces the accompanying drawings used in the description of the specific embodiments. Obviously, the accompanying drawings in the following description are some embodiments of the present invention. , for those of ordinary skill in the art, other drawings can also be obtained based on these drawings without any creative effort.
图1为本发明一种实施例的诊疗一体化超声系统的原理框图;FIG. 1 is a schematic block diagram of an integrated ultrasound system for diagnosis and treatment according to an embodiment of the present invention;
图2为本发明一种实施例的cMUT面阵单点聚焦治疗工作模式示意图;2 is a schematic diagram of a working mode of cMUT area array single-point focusing therapy according to an embodiment of the present invention;
图3为本发明一种实施例的cMUT面阵多点聚焦治疗工作模式示意图;3 is a schematic diagram of a working mode of cMUT area array multi-point focusing therapy according to an embodiment of the present invention;
图4为本发明一种实施例的cMUT面阵治疗/成像工作模式示意图。FIG. 4 is a schematic diagram of a working mode of cMUT area array therapy/imaging according to an embodiment of the present invention.
附图标记:1-超声成像诊断装置,2-超声聚焦治疗装置,3-探头,11-发射控制模块,12-脉冲发射模块,13-信号接收模块,14-显示模块,21-治疗控制模块,22-聚焦发射模块,31-面阵,311-cMUT阵元。Reference numerals: 1- ultrasonic imaging diagnosis device, 2- ultrasonic focusing treatment device, 3- probe, 11- transmission control module, 12- pulse transmission module, 13- signal receiving module, 14- display module, 21- treatment control module , 22-focusing transmitter module, 31-area array, 311-cMUT array element.
具体实施方式Detailed ways
下面将结合附图对本发明的技术方案进行清楚、完整地描述,显然,所描述的实施例是本发明一部分实施例,而不是全部的实施例。基于本发明中的实施例,本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例,都属于本发明保护的范围。The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are a part of the embodiments of the present invention, but not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.
在本发明的描述中,需要说明的是,术语“第一”、“第二”等仅用于描述目的,而不能理解为指示或暗示相对重要性。In the description of the present invention, it should be noted that the terms "first", "second" and the like are only used for the purpose of description, and should not be construed as indicating or implying relative importance.
除非另有明确的规定和限定,术语“安装”、“相连”、“连接”应做广义理解,例如,可以是直接相连,也可以通过中间媒介间接相连,还可以是两个元件内部的连通,可以是无线连接,也可以是有线连接。对于本领域的普通技术人员而言,可以具体情况理解上述术语在本发明中的具体含义。Unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be directly connected, or indirectly connected through an intermediate medium, or it may be the internal communication between two elements , either a wireless connection or a wired connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.
此外,下面所描述的本发明不同实施方式中所涉及的技术特征只要彼此之间未构成冲突就可以相互结合。In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
图1示出了一种基于电容式微加工超声换能器(cMUT)面阵的诊疗一体化超声系统,如图1所示,包括超声成像诊断装置1、超声聚焦治疗装置2和探头3。FIG. 1 shows an integrated ultrasound system for diagnosis and treatment based on a capacitive micro-machined ultrasound transducer (cMUT) area array, as shown in FIG.
探头3包括由cMUT作为阵元组成的面阵31,每个阵元311均分别与超声成像诊断装置1和超声聚焦治疗装置2连接,探头3用于工作在成像诊断模式和/或聚焦治疗模式下。优选地,cMUT面阵31上的每一个cMUT阵元都通过微加工有专门的连线与超声成像诊断装置1和超声聚焦治疗装置2相连,超声成像诊断装置1和超声聚焦治疗装置2间通过T/R开关实现线路间的变换,进而实现系统对每个cMUT阵元的通断及工作状态的控制。优选地,探头3可集成驱动电路、前级放大电路及信号处理电路等。The probe 3 includes an area array 31 composed of cMUT as an array element, and each array element 311 is respectively connected to the ultrasonic imaging diagnosis device 1 and the ultrasonic focusing treatment device 2, and the probe 3 is used to work in the imaging diagnosis mode and/or the focused treatment mode. Down. Preferably, each cMUT array element on the cMUT area array 31 is connected to the ultrasonic imaging diagnosis device 1 and the ultrasonic focusing treatment device 2 through microfabrication with a special connection line, and the ultrasonic imaging diagnosis device 1 and the ultrasonic focusing treatment device 2 pass through The T/R switch realizes the conversion between lines, and then realizes the control of the on-off and working state of each cMUT array element by the system. Preferably, the probe 3 can integrate a drive circuit, a pre-amplifier circuit, a signal processing circuit, and the like.
上述诊疗一体化超声系统有三种工作模式:成像诊断模式、聚焦治疗模式、综合模式,成像诊断模式可用于临床的超声成像诊断,聚焦治疗模式可用于超声HIFU治疗/超声刺激等,综合模式为同时进行成像诊断和聚焦治疗的模式。The above-mentioned integrated ultrasound system for diagnosis and treatment has three working modes: imaging diagnosis mode, focused therapy mode, and comprehensive mode. A modality for performing imaging diagnostics and focused therapy.
上述基于电容式微加工超声换能器面阵的诊疗一体化超声系统,通过设置由电容式微加工超声换能器作为阵元组成的面阵形成探头,利用cMUT工艺微加工、高集成的特点,能实现对大面阵探头的各个阵元独立精确控制,进而可实现超声成像诊断和超声聚焦治疗的功能,集超声成像诊断和超声聚焦治疗于一体。The above-mentioned integrated ultrasound system for diagnosis and treatment based on the capacitive micro-machined ultrasonic transducer area array forms a probe by setting the area array composed of the capacitive micro-machined ultrasonic transducer as an array element. It realizes the independent and precise control of each array element of the large area array probe, and then realizes the functions of ultrasonic imaging diagnosis and ultrasonic focusing treatment, integrating ultrasonic imaging diagnosis and ultrasonic focusing treatment.
优选地,如图1所示,上述超声成像诊断装置1包括发射控制模块11、脉冲发射模块12、信号接收模块13和显示模块14。Preferably, as shown in FIG. 1 , the above-mentioned ultrasonic imaging diagnostic apparatus 1 includes a transmission control module 11 , a pulse transmission module 12 , a signal reception module 13 and a display module 14 .
发射控制模块11与脉冲发射模块12连接,用于生成包含波束形成特点的第一信号并将其传输给脉冲发射模块12。优选地,发射控制模块11包括波束形成器、时间/相位延迟器等。The transmission control module 11 is connected to the pulse transmission module 12 for generating and transmitting the first signal containing the beamforming characteristics to the pulse transmission module 12 . Preferably, the transmit control module 11 includes a beamformer, a time/phase retarder, and the like.
脉冲发射模块12与探头3连接,用于根据第一信号控制探头3的各个阵元的激励顺序和时间延迟。优选地,脉冲发射模块12包括脉冲发生器等。The pulse transmitting module 12 is connected to the probe 3, and is used for controlling the excitation sequence and time delay of each array element of the probe 3 according to the first signal. Preferably, the pulse transmitting module 12 includes a pulse generator or the like.
信号接收模块13与探头3连接,用于接收探头3的各个阵元根据按序接收到的反射回波超声信号所生成的电信号,并将电信号进行放大、滤波、A/D转换、调制解调等处理后输出给显示模块14。优选地,信号接收模块13包括T/R开关、低噪声放大器、时间增益控制器TGC、抗混叠滤波器AAD、A/D转换器、调制解调器等。The signal receiving module 13 is connected to the probe 3, and is used to receive the electrical signals generated by the various array elements of the probe 3 according to the sequentially received reflected echo ultrasonic signals, and to amplify, filter, A/D convert the electrical signals, and modulate the electrical signals. After processing such as demodulation, it is output to the display module 14 . Preferably, the signal receiving module 13 includes a T/R switch, a low noise amplifier, a time gain controller TGC, an anti-aliasing filter AAD, an A/D converter, a modem, and the like.
显示模块14用于将电信号转换成图像进行显示。The display module 14 is used for converting electrical signals into images for display.
上述超声成像诊断装置1主要是在系统工作在成像诊断模式下时工作,其工作原理为:首先由发射控制模块11,根据探测目标的深度和位置,确定cMUT阵元的波束形成方案,生成包含波束形成特点的第一信号并将其传输给脉冲发射模块12,控制脉冲发射模块12各个cMUT阵元的激励顺序和时间延迟,从而控制cMUT阵元发射的超声波在探测目标中在各点形成最佳的聚集超声波束,提高反射回波的强度与横向分辨率。在接收回波成像时,信号接收模块13根据波束形成的特点,控制T/R开关激活对应cMUT阵元,实现对反射回波超声信号按序被相应的cMUT阵元接收并生产相应的电信号,并通过后续的调制解调、TGC、滤波等信号处理最终通过显示模块14转换成图像进行显示。The above-mentioned ultrasonic imaging diagnosis device 1 mainly works when the system works in the imaging diagnosis mode. The first signal of the beamforming characteristic is transmitted to the pulse transmitter module 12, and the excitation sequence and time delay of each cMUT array element of the pulse transmitter module 12 are controlled, so as to control the ultrasonic wave emitted by the cMUT array element to form the most ultrasonic wave at each point in the detection target. It can focus the ultrasonic beam optimally, and improve the intensity and lateral resolution of the reflected echo. When receiving echo imaging, the signal receiving module 13 controls the T/R switch to activate the corresponding cMUT array element according to the characteristics of the beam forming, so that the reflected echo ultrasonic signal is sequentially received by the corresponding cMUT array element and produces the corresponding electrical signal , and is finally converted into an image by the display module 14 for display through subsequent signal processing such as modulation and demodulation, TGC, and filtering.
该系统具体的扫描成像方式可以是:逐点式,即先水平方向各扫描成像,然后再轴向扫描各点成像,反之亦可。或者,区域式,由于系统可以灵活控制cMUT各个阵元的工作状态,因此可以同时多行/列进行扫描和接收,也可以多个区域(一定面积的阵元,如矩形、正方形)同时进行扫描成像。或者,在完成某一水平面/横切面之后,也可以控制探头对深度/轴向方向进行扫描,从而实现对目标的3D成像。移动探头位置就可以实现对不同位置的3D成像,进而实现对目标大范围的3D成像。The specific scanning imaging method of the system can be: point-by-point type, that is, each scanning imaging in the horizontal direction, and then scanning each point imaging in the axial direction, and vice versa. Alternatively, regional type, since the system can flexibly control the working state of each array element of the cMUT, it can scan and receive multiple rows/columns at the same time, or scan multiple areas (array elements of a certain area, such as rectangles and squares) at the same time. imaging. Alternatively, after completing a certain horizontal plane/transverse plane, the probe can also be controlled to scan in the depth/axial direction, thereby realizing 3D imaging of the target. By moving the probe position, 3D imaging of different positions can be achieved, and then a large range of 3D imaging of the target can be achieved.
系统还可以用于实时多普勒成像。在多普勒成像时,可以控制探头一侧的cMUT阵元波束成形到探测目标位置(如血管内血流),而反射波则由探头另一侧的cMUT阵元接收,根据多普勒效应,即反射频率与发射频率f0之间产生的偏移即多普勒频移fd:fd=2vf0cosθ/C,其中,v为血流的运动速度,C为超声波的速度。由此可以看出,fd与血流的运动速度成正比,若检出fd就可求得血流的运动速度v。cMUT面阵探头的优势是可以根据血管的走向,动态调整波束形成的方位,以确保反射波能被另一侧的阵元探测到,而不用移动探头去适应血管位置。The system can also be used for real-time Doppler imaging. During Doppler imaging, the cMUT array element on one side of the probe can be controlled to be beamformed to the detection target position (such as intravascular blood flow), while the reflected wave is received by the cMUT array element on the other side of the probe. According to the Doppler effect , that is, the offset between the reflection frequency and the emission frequency f 0 is the Doppler frequency shift f d : f d =2vf 0 cosθ/C, where v is the velocity of blood flow, and C is the velocity of ultrasonic waves. It can be seen from this that f d is proportional to the velocity of blood flow. If f d is detected, the velocity v of blood flow can be obtained. The advantage of the cMUT area array probe is that the orientation of the beamforming can be dynamically adjusted according to the direction of the blood vessel to ensure that the reflected wave can be detected by the array element on the other side without moving the probe to adapt to the position of the blood vessel.
此外该系统还可以应用于弹性成像。在弹性成像时,可以控制探头一定区域的cMUT阵元作为向探测目标/组织施加声辐射力的阵元,而其旁边的阵元探测接收其横向传播的弹性波/剪切波,进而计算其传播速度,确定其弹性参数,进而弹性成像。In addition, the system can also be applied to elastography. During elastography, the cMUT array element in a certain area of the probe can be controlled as an array element that applies acoustic radiation force to the detection target/tissue, and the array element next to it detects and receives the elastic wave/shear wave propagating laterally, and then calculates its Propagation speed, determine its elastic parameters, and then elastography.
从而,优选地,上述诊疗一体化超声系统的成像诊断模式可以为A模式(Amplitudmode)、M模式(Motion mode)、B模式(Brightness mode)、3D模式、多普勒模式或弹性模式等。Therefore, preferably, the imaging diagnosis mode of the above-mentioned integrated diagnosis and treatment ultrasound system may be A mode (Amplitud mode), M mode (Motion mode), B mode (Brightness mode), 3D mode, Doppler mode or elasticity mode.
上述诊疗一体化超声系统,区别于传统的线阵、凸阵压电陶瓷/单晶超声成像系统,通过设置超声成像诊断装置可以使cMUT面阵探头工作于成像诊断模式,并且能够实现样式灵活多样的多模式超声成像,如A模式、M模式、B模式、3D模式、多普勒模式、弹性模式等。甚至可以在不移动探头的情况下实现对探测区域而非单一切面的实时3D成像和多普勒成像,从而可以适应多种应用环境。The above-mentioned integrated ultrasound system for diagnosis and treatment is different from the traditional linear array and convex array piezoelectric ceramic/single crystal ultrasound imaging system. By setting the ultrasound imaging diagnostic device, the cMUT area array probe can work in the imaging diagnostic mode, and can realize flexible and diverse styles. Multi-mode ultrasound imaging, such as A mode, M mode, B mode, 3D mode, Doppler mode, elasticity mode, etc. Even real-time 3D imaging and Doppler imaging of the detection area rather than a single slice can be achieved without moving the probe, which can adapt to a variety of application environments.
优选地,如图1所示,上述超声聚焦治疗装置2包括治疗控制模块21和聚焦发射模块22。Preferably, as shown in FIG. 1 , the above-mentioned ultrasonic focused treatment device 2 includes a treatment control module 21 and a focused emission module 22 .
治疗控制模块21与聚焦发射模块22连接,用于生成包含菲涅尔环分布特点的第二信号并将其传输给聚焦发射模块22。The treatment control module 21 is connected to the focus transmission module 22 for generating a second signal containing the distribution characteristics of the Fresnel ring and transmitting the second signal to the focus transmission module 22 .
聚焦发射模块22与探头3连接,用于根据第二信号控制探头3的各个阵元的工作状态以获得聚焦的焦距和强度。The focusing emission module 22 is connected to the probe 3, and is used for controlling the working state of each array element of the probe 3 according to the second signal to obtain the focused focal length and intensity.
上述超声聚焦治疗装置2主要是在系统工作在聚焦治疗模式下时工作,其工作原理为:根据病患需治疗的部位,首先治疗控制模块21确定系统需要聚焦超声的深度(焦距),根据菲涅尔环超声聚焦的原理,控制cMUT面阵探头上特定区域工作与非工作状态的阵元呈菲涅尔环分布设定,生成包含菲涅尔环分布特点的第二信号并将其传输给聚焦发射模块22。优选地,各个菲涅尔波带环的尺寸和位置关系,可由下面公式决定:The above-mentioned ultrasonic focusing treatment device 2 mainly works when the system works in the focusing treatment mode. The principle of ultrasonic focusing of the snel ring is to control the working and non-working state of the array elements on the cMUT area array probe to form a Fresnel ring distribution setting, generate a second signal containing the distribution characteristics of the Fresnel ring and transmit it to the Focus on the launch module 22 . Preferably, the size and positional relationship of each Fresnel zone ring can be determined by the following formula:
当为负式菲涅尔波带(中央区域的cMUT阵元工作)时:When the negative Fresnel band (cMUT element in the central area works):
其中,n为环带的名称,n=1,2,3,……,F为焦距,λ为超声波在传播介质中的波长。 Among them, n is the name of the annular zone, n=1, 2, 3, ..., F is the focal length, and λ is the wavelength of the ultrasonic wave in the propagation medium.
当为正式菲涅尔波带(中央区域的cMUT阵元不工作)时:When it is a formal Fresnel zone (cMUT elements in the central area do not work):
其中,n=0,1,2,3,……,修正因子-1≤δ ≤1。 Wherein, n=0, 1, 2, 3, ..., the correction factor -1≤δ≤1.
优选地,探头3的各个cMUT阵元可以设置成具有相同或不同的中心频率、带宽和形状结构(尺寸大小),所以相较于传统的菲涅尔环阵式聚焦换能器,面阵探头可以精确控制每个阵元的激励与工作状态,因此对同一环内的阵元其也可以根据其与探测目标的各自具体距离,进行精确地相位调制或激励延时,从而获得更佳的聚焦效果。Preferably, each cMUT array element of the probe 3 can be set to have the same or different center frequency, bandwidth and shape structure (size), so compared with the traditional Fresnel ring array focusing transducer, the area array probe The excitation and working state of each array element can be precisely controlled, so the array elements in the same ring can also be precisely phase modulated or delayed excitation according to their specific distances from the detection target, so as to obtain better focusing Effect.
优选地,聚焦治疗模式包括单点聚焦治疗模式和多点聚焦治疗模式。例如,如图2所示,为cMUT面阵单点聚焦治疗工作模式示意图,图中被圆环圈中的cMUT阵元(阴影部分)为在聚焦治疗模式下接通激励电压工作的阵元,而其它非圆环内的cMUT阵元(无阴影部分)为在聚焦治疗模式下不施加激励电压即不工作的阵元。所述多点聚焦治疗模式中的各个焦点包含相同或不同的焦距、能量强度和聚焦区域大小/形状,其可以因需要而进行调节。Preferably, the focus therapy mode includes a single-point focus therapy mode and a multi-point focus therapy mode. For example, as shown in Figure 2, it is a schematic diagram of the single-point focusing treatment working mode of the cMUT area array. The cMUT array element (shaded part) in the circle in the figure is the array element that turns on the excitation voltage in the focusing treatment mode. The other non-circular cMUT array elements (no shade) are array elements that do not work without applying excitation voltage in the focus therapy mode. Each focal point in the multi-focus therapy mode contains the same or different focal length, energy intensity and focus area size/shape, which can be adjusted as needed.
优选地,面阵31包括至少一个区域,属于一个区域的阵元具有相同的中心频率和带宽,属于不同区域的阵元具有不同的中心频率、带宽和形状结构(尺寸大小),从而实现多点聚焦治疗工作模式。例如,如图3所示,为cMUT面阵多点聚焦治疗工作模式示意图,图中被圆环圈中的cMUT阵元(阴影部分)为在聚焦治疗模式下接通激励电压工作的阵元,而其它非圆环内的cMUT阵元(无阴影部分)为在聚焦治疗模式下不施加激励电压即不工作的阵元。Preferably, the area array 31 includes at least one area, the array elements belonging to one area have the same center frequency and bandwidth, and the array elements belonging to different areas have different center frequencies, bandwidths and shape structures (sizes), so as to realize multi-point Focused therapy work mode. For example, as shown in Figure 3, it is a schematic diagram of the working mode of the cMUT area array multi-point focusing treatment. The cMUT array element (shaded part) in the circle in the figure is the array element that turns on the excitation voltage in the focusing treatment mode. The other non-circular cMUT array elements (no shade) are array elements that do not work without applying excitation voltage in the focus therapy mode.
由此可见,在聚焦治疗时,cMUT面阵探头的聚焦方式并非只能单点聚焦,也可以是多点聚焦。只要控制相应区域阵元呈菲涅尔环分布工作即可,而且通过控制cMUT阵元各自菲涅尔环的直径和波束形成,各个区域的焦距和强度也可以是不同的。It can be seen that, during focused therapy, the focusing method of the cMUT area array probe is not only single-point focusing, but also multi-point focusing. As long as the array elements in the corresponding area are controlled to work in a Fresnel ring distribution, and by controlling the diameter and beamforming of the respective Fresnel rings of the cMUT array elements, the focal length and intensity of each area can also be different.
上述诊疗一体化超声系统,通过设置超声聚焦治疗装置可以使cMUT面阵探头工作于聚焦治疗模式,从而可以在使用同一探头的情况下,进行高强度的超声聚焦用于治疗。且不同于以往球面或凹面聚焦的超声HIFU探头,该探头的聚焦方式和焦距是通过菲涅尔相位调制实现的,因而可以通过需要灵活设定调节,而且焦点也可以根据需要灵活设定调节,不再是唯一的,可以同时在各个区域有多个焦点,甚至各焦点的聚焦、强度也可以是不同的,从而提高了聚焦精度,也可以适应多种应用环境。In the above-mentioned integrated ultrasound system for diagnosis and treatment, by setting an ultrasound focusing treatment device, the cMUT area array probe can work in a focusing treatment mode, so that high-intensity ultrasound focusing can be performed for treatment under the condition of using the same probe. And different from the previous spherical or concave focusing ultrasonic HIFU probe, the focusing method and focal length of the probe are realized by Fresnel phase modulation, so it can be flexibly set and adjusted according to needs, and the focus can also be flexibly set and adjusted according to needs. It is no longer unique, there can be multiple focal points in each area at the same time, and even the focus and intensity of each focal point can be different, thereby improving the focusing accuracy and adapting to various application environments.
优选地,探头的cMUT面阵中的一部分区域的阵元受超声聚焦治疗装置2的控制工作在聚焦治疗模式下,一部分区域的阵元受超声成像诊断装置1的控制工作在成像诊断模式下。例如,如图4所示,图中面阵中心被圆环圈中的cMUT阵元(阴影部分)为在聚焦治疗模式下接通激励电压工作的阵元,而其它非圆环内的cMUT阵元(非阴影部分)为在聚焦治疗模式下不施加激励电压即不工作的阵元,而在面阵上下两端的黑色cMUT阵元为与中间cMUT阵元不同中心频率的cMUT,可用于对治疗目标区域进行超声成像。Preferably, the array elements in a part of the cMUT area array of the probe are controlled by the ultrasonic focusing treatment device 2 to work in the focused treatment mode, and the array elements in a part of the area are controlled by the ultrasonic imaging diagnosis device 1 to work in the imaging diagnosis mode. For example, as shown in Fig. 4, the cMUT array element (shaded part) in the circle in the center of the area array in the figure is the array element that turns on the excitation voltage in the focused therapy mode, while the cMUT array elements in other non-circular circles The elements (non-shaded parts) are the array elements that do not work without applying excitation voltage in the focus therapy mode, and the black cMUT elements at the upper and lower ends of the area array are cMUTs with different center frequencies from the middle cMUT elements, which can be used for treatment. Ultrasound imaging of the target area.
因此,在聚焦治疗模式的同时,可以根据需要,切换系统的工作模式,通过成像模式下得到的超声图像,决定后续聚焦治疗模式的探头声强和焦点等。例如,只要切换cMUT面阵探头部分区域阵元的工作模式就可实现。如图4所示,根据波束成形控制两侧探头对治疗区域的切面或区域实时成像,进而实现同一探头边成像边治疗的功能。优选地,为了克服聚焦治疗超声波对成像声波的影响,可以在设计制作cMUT面阵探头时,使其周边(如图4)或特定区域的阵元与用于聚焦治疗的阵元的超声中心频率不同,进而在后期通过频谱滤波等方法,可以降低治疗超声阵元对成像的影响。Therefore, while in the focused therapy mode, the working mode of the system can be switched as required, and the sound intensity and focus of the probe in the subsequent focused therapy mode can be determined through the ultrasound images obtained in the imaging mode. For example, it can be realized by simply switching the working mode of the array elements in some areas of the cMUT area array probe. As shown in Figure 4, according to beamforming, the probes on both sides are controlled to image the section or area of the treatment area in real time, so as to realize the function of treating while imaging with the same probe. Preferably, in order to overcome the influence of focused therapy ultrasound on imaging sound waves, when designing and manufacturing the cMUT area array probe, the array elements in the periphery (as shown in Figure 4) or in a specific area and the ultrasound center frequency of the array elements used for focused therapy Different methods, such as spectral filtering in the later stage, can reduce the influence of the therapeutic ultrasound array elements on the imaging.
上述诊疗一体化超声系统,通过将探头的cMUT面阵中的不同部分区域的阵元设置成工作在聚焦治疗模式或超声成像模式的不同的工作模式下,从而能实现在聚焦治疗时实时成像治疗区域,观测治疗效果,实现术中调整治疗区域和超声强度,从而可以改进治疗效果。这些特点使得该系统在超声成像、聚焦治疗等方面具有很大的优越性,具有广阔的科学研究和实际应用前景。The above-mentioned integrated ultrasound system for diagnosis and treatment can realize real-time imaging therapy during focused therapy by setting the array elements in different parts of the cMUT area array of the probe to work in different working modes of the focused therapy mode or the ultrasound imaging mode. area, observe the treatment effect, and adjust the treatment area and ultrasound intensity during the operation, so that the treatment effect can be improved. These characteristics make the system have great advantages in ultrasonic imaging, focused therapy, etc., and have broad scientific research and practical application prospects.
显然,上述实施例仅仅是为清楚地说明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。Obviously, the above-mentioned embodiments are only examples for clear description, and are not intended to limit the implementation manner. For those of ordinary skill in the art, changes or modifications in other different forms can also be made on the basis of the above description. There is no need and cannot be exhaustive of all implementations here. And the obvious changes or changes derived from this are still within the protection scope of the present invention.
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