CN105355714A - Double-layer perovskite film with ferroelectric and semiconductor photovoltaic effects - Google Patents
Double-layer perovskite film with ferroelectric and semiconductor photovoltaic effects Download PDFInfo
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- 239000013078 crystal Substances 0.000 description 18
- 239000000463 material Substances 0.000 description 14
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical group O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 12
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- 229910004121 SrRuO Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
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- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
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Abstract
本发明公开了一种具有铁电和半导体光伏效应的双层钙钛矿薄膜,所述薄膜成分以通式Bi2(1-x)A2x(FeCr)1-yB2yO6(1-δ)来表示,其中A为Gd元素,B为Ni元素,且x=0.04~0.075,y=0.06~0.1,δ=0.05~0.3。所述的双层钙钛矿薄膜的制备方法为先采用固相烧结法制备靶材,再利用脉冲激光沉积法生长出均匀致密的薄膜。本发明所述的经掺杂后的双层钙钛矿薄膜具有铁电和N型半导体特征,相对其他铁电薄膜,具有更大的光伏效应开路电压(1.0~1.2V),更大的光伏效应短路电流密度(13~40mA/cm2)。
The invention discloses a double - layer perovskite film with ferroelectricity and semiconductor photovoltaic effect. δ) , wherein A is Gd element, B is Ni element, and x=0.04~0.075, y=0.06~0.1, δ=0.05~0.3. The preparation method of the double-layer perovskite thin film is to first prepare a target material by a solid-phase sintering method, and then grow a uniform and dense thin film by a pulsed laser deposition method. The doped double-layer perovskite film of the present invention has the characteristics of ferroelectricity and N-type semiconductor. Compared with other ferroelectric films, it has a larger photovoltaic effect open circuit voltage (1.0-1.2V), and a larger photovoltaic effect. Effect short-circuit current density (13-40mA/cm 2 ).
Description
技术领域technical field
本发明属于半导体材料领域,具体涉及一种基于Bi2FeCrO6材料掺杂的铁电半导体薄膜。The invention belongs to the field of semiconductor materials, and in particular relates to a ferroelectric semiconductor thin film based on Bi 2 FeCrO 6 material doping.
背景技术Background technique
光伏材料是能将太阳能直接转换成电能的半导体材料,例如单晶硅、多晶硅、非晶硅、GaAs、GaAlAs、InP、CdS、CdTe等,其中已批量生产的主要有单晶硅、多晶硅、非晶硅、GaAs。目前半导体光伏材料大多是利用PN结界面处的内建电场将光生载流子空间分离从而产生光电流,光伏电压一般不超过半导体的禁带宽度。而铁电材料具有反常光伏效应,其光伏电压不受晶体禁带宽度(Eg)的限制,可比Eg高2~4个数量级,达103~105V/cm。铁电材料所具有的高的输出光生电压、电场调控光伏的特性,使其在铁电光伏电池、光驱动器、光传感器等方面具有广阔的应用前景。Photovoltaic materials are semiconductor materials that can directly convert solar energy into electrical energy, such as monocrystalline silicon, polycrystalline silicon, amorphous silicon, GaAs, GaAlAs, InP, CdS, CdTe, etc. Among them, monocrystalline silicon, polycrystalline silicon, and amorphous silicon have been mass-produced. Crystalline silicon, GaAs. At present, most semiconductor photovoltaic materials use the built-in electric field at the interface of the PN junction to spatially separate the photogenerated carriers to generate photocurrent, and the photovoltaic voltage generally does not exceed the bandgap width of the semiconductor. The ferroelectric material has anomalous photovoltaic effect, and its photovoltaic voltage is not limited by the crystal band gap (Eg), which can be 2 to 4 orders of magnitude higher than Eg, reaching 10 3 to 10 5 V/cm. Ferroelectric materials have the characteristics of high output photogenerated voltage and electric field regulation of photovoltaics, so they have broad application prospects in ferroelectric photovoltaic cells, optical drivers, and optical sensors.
Bi2FeCrO6是一种多铁材料,即既具有铁电性又具有铁磁性。铁电性是指材料具有自发极化,且在一定温度范围内,自发极化偶极矩的方向能随外加电场的改变而改变。铁磁性是指材料具有自发磁矩,且自发磁矩可以随外加磁场变化而翻转。研究表明,Bi2FeCrO6还具备半导体性质,采用第一性原理方法计算得出Bi2FeCrO6是间接带隙材料,它的带隙Eg=1.7eV,能吸收大部分可见光,从而为成为一种高光电转换效率的光伏材料打下理论基础。Bi 2 FeCrO 6 is a multiferroic material, that is, it has both ferroelectricity and ferromagnetism. Ferroelectricity means that the material has spontaneous polarization, and within a certain temperature range, the direction of the spontaneous polarization dipole moment can change with the change of the applied electric field. Ferromagnetism means that the material has a spontaneous magnetic moment, and the spontaneous magnetic moment can be reversed with the change of the applied magnetic field. Studies have shown that Bi 2 FeCrO 6 also has semiconductor properties. Using first-principle calculations, Bi 2 FeCrO 6 is an indirect band gap material with a band gap of Eg=1.7eV, which can absorb most of the visible light. Lay a theoretical foundation for a photovoltaic material with high photoelectric conversion efficiency.
中国专利CN101255053利用基于化学压原理的固溶体技术,实现Bi2FeCrO6的单相合成;中国专利CN101840993发明了一种具有交换偏置效应的半金属/多铁材料多层膜结构,利用Bi2FeCrO6等多铁材料的磁电耦合效应来编码存储信息。文章Bandgaptuningofmultiferroicoxidesolarcells(NechacheR,etal,NaturePhotonics,9,61-67,2015)讲述的Bi2FeCrO6光伏效应开路电压为0.56~0.84eV,单层薄膜的光伏效应短路电流密度最大为11.2mA/cm2,为了提高Bi2FeCrO6在实际应用中的光电转化效率,光伏性能还需要进一步提高。EnhancedElectricalPropertiesofBi0.9Gd0.1Fe0.975B0.025O3±δ(B=Ni,Mn,Cu,TiandV)ThinFilms(KimJW,etal,Ferroelectrics,473,129-136,2014)报道了在BiFeO3普通钙钛矿结构中共掺Gd、Ni元素,制备了生长在衬底Pt(111)/Ti/SiO2/Si(100)上的Bi0.9Gd0.1Fe0.975Ni0.025O3±δ薄膜,相比于纯BiFeO3薄膜,其铁电性能和漏电流都有一定程度的改善。目前还未见在Bi2FeCrO6双层钙钛矿结构基础上共掺Gd、Ni元素制备出具有N型半导体特征的双层钙钛矿铁电薄膜的报道。Chinese patent CN101255053 utilizes the solid solution technology based on the chemical pressure principle to realize the single-phase synthesis of Bi 2 FeCrO 6 ; 6 and other multiferroic materials to encode and store information. According to the article Bandgaptuning of multiferroic oxide solar cells (NechacheR, et al, Nature Photonics, 9, 61-67, 2015), the open-circuit voltage of the photovoltaic effect of Bi 2 FeCrO 6 is 0.56-0.84eV, and the maximum short-circuit current density of the photovoltaic effect of the single-layer film is 11.2mA/cm 2 , In order to improve the photoelectric conversion efficiency of Bi 2 FeCrO 6 in practical applications, the photovoltaic performance needs to be further improved. Enhanced Electrical Properties of Bi 0.9 Gd 0.1 Fe 0.975 B 0.025 O 3±δ (B=Ni, Mn, Cu, Tian and V) ThinFilms (KimJW, et al, Ferroelectrics, 473, 129-136, 2014) reported that the common perovskite structure in BiFeO 3 Doped with Gd and Ni elements, the Bi 0.9 Gd 0.1 Fe 0.975 Ni 0.025 O 3±δ film grown on the substrate Pt(111)/Ti/SiO2/Si(100) was prepared. Compared with the pure BiFeO 3 film, its Both ferroelectric properties and leakage current are improved to some extent. So far, there has been no report on the preparation of bilayer perovskite ferroelectric thin films with N-type semiconductor characteristics by co-doping Gd and Ni elements on the basis of Bi 2 FeCrO 6 bilayer perovskite structure.
发明内容Contents of the invention
本发明的目的是制备一种掺杂的光伏性能良好的双层钙钛矿铁电薄膜。The purpose of the invention is to prepare a doped double-layer perovskite ferroelectric thin film with good photovoltaic performance.
实现本发明的技术方案是:Realize the technical scheme of the present invention is:
一种双层钙钛矿光伏薄膜,所述薄膜组成成分的分子式为Bi2(1-x)A2x(FeCr)1-yB2yO6(1-δ),其中A为Gd元素,B为Ni元素,且x=0.04~0.075,y=0.06~0.1,δ=0.05~0.3。A double-layer perovskite photovoltaic thin film, the molecular formula of the composition of the thin film is Bi 2(1-x) A 2x (FeCr) 1-y B 2y O 6(1-δ) , wherein A is Gd element, B It is a Ni element, and x=0.04-0.075, y=0.06-0.1, and δ=0.05-0.3.
所述的光伏薄膜具有N型半导体特征,300K时载流子浓度为1018cm-3至1020cm-3,300K时载流子迁移率为2.2cm2·V-1·s-1至25.6cm2·V-1·s-1。The photovoltaic thin film has N-type semiconductor characteristics, the carrier concentration is 10 18 cm -3 to 10 20 cm -3 at 300K, and the carrier mobility is 2.2 cm 2 ·V -1 ·s -1 to 300K. 25.6 cm 2 ·V -1 ·s -1 .
上述双层钙钛矿光伏薄膜在制备PN结中的应用。Application of the above double-layer perovskite photovoltaic thin film in the preparation of PN junctions.
所述的PN结的光伏电流和薄膜的铁电极化方向相反;PN结的最大光伏电流密度为-36.2mA/cm2或17.5mA/cm2。The direction of the photovoltaic current of the PN junction is opposite to that of the ferroelectric polarization of the film; the maximum photovoltaic current density of the PN junction is -36.2mA/cm 2 or 17.5mA/cm 2 .
与现有技术相比,本发明的有益效果是:Compared with prior art, the beneficial effect of the present invention is:
(1)本发明通过引入Gd、Ni元素及氧空位,双层钙钛矿薄膜具备N型半导体性质,300K时载流子浓度为1018cm-3至1020cm-3,300K时载流子迁移率为2.2cm2·V-1·s-1至25.6cm2·V-1·s-1。(1) In the present invention, by introducing Gd, Ni elements and oxygen vacancies, the double-layer perovskite film has N-type semiconductor properties, and the carrier concentration is 10 18 cm -3 to 10 20 cm -3 at 300K, and the current is carried at 300K The submobilities range from 2.2 cm 2 ·V -1 ·s -1 to 25.6 cm 2 ·V -1 ·s -1 .
(2)相对于目前的铁电材料,本发明所述薄膜具有较高的光伏效应短路电流密度和光伏效应开路电压。(2) Compared with the current ferroelectric materials, the thin film of the present invention has higher photovoltaic effect short-circuit current density and photovoltaic effect open circuit voltage.
(3)以本发明的N型双层钙钛矿薄膜与P型GaAs(或P型GaN)构成的PN结,该PN结的光伏特性可由外电场来调控,通过外电场翻转铁电极化从而改变光伏电流的方向和大小。(3) A PN junction composed of the N-type double-layer perovskite film of the present invention and P-type GaAs (or P-type GaN), the photovoltaic characteristics of the PN junction can be regulated by an external electric field, and the ferroelectric polarization can be reversed by an external electric field to thereby Change the direction and magnitude of the photovoltaic current.
附图说明Description of drawings
图1为双层钙钛矿薄膜器件结构示意图。Figure 1 is a schematic diagram of the structure of a double-layer perovskite thin film device.
图2为实施例1Bi1.9Gd0.1(FeCr)0.95Ni0.1O5.7薄膜的X射线衍射谱。Fig. 2 is the X-ray diffraction spectrum of the Bi 1.9 Gd 0.1 (FeCr) 0.95 Ni 0.1 O 5.7 film of Example 1.
图3为实施例2Bi1.85Gd0.15(FeCr)0.97Ni0.06O4.2薄膜的X射线衍射谱。Fig. 3 is the X-ray diffraction spectrum of the Bi 1.85 Gd 0.15 (FeCr) 0.97 Ni 0.06 O 4.2 thin film of Example 2.
图4为实施例3Bi1.92Gd0.08(FeCr)0.96Ni0.08O5.1薄膜的X射线衍射谱。Fig. 4 is the X-ray diffraction spectrum of the Bi 1.92 Gd 0.08 (FeCr) 0.96 Ni 0.08 O 5.1 thin film of Example 3.
图5为实施例1-3三种薄膜的电滞回线。Fig. 5 is the hysteresis loop of three kinds of thin films of embodiment 1-3.
图6为实施例1-3三种薄膜的透射谱。Fig. 6 is the transmission spectrum of three kinds of thin films of Examples 1-3.
图7为实施例1-3三种薄膜经过+10V电压极化后的电流-电压特性。Fig. 7 shows the current-voltage characteristics of the three kinds of films in Examples 1-3 after being polarized by +10V voltage.
图8为在外电场作用下GaAs-实施例3薄膜异质PN结的电流-时间曲线。Fig. 8 is the current-time curve of GaAs-Example 3 film heterogeneous PN junction under the action of an external electric field.
具体实施方式detailed description
下面的实施例是对本发明的进一步说明,而不是限制本发明的范围。The following examples are to further illustrate the present invention, but not to limit the scope of the present invention.
下述实施例中涉及的电场方向、电流方向、铁电极化方向皆规定由薄膜指向衬底为正,由衬底指向薄膜为负。The direction of the electric field, the direction of the current, and the direction of ferroelectric polarization involved in the following embodiments all stipulate that the direction from the thin film to the substrate is positive, and the direction from the substrate to the thin film is negative.
如图1,本发明所述的双层钙钛矿光伏薄膜的制备过程如下:As shown in Figure 1, the preparation process of the double-layer perovskite photovoltaic thin film of the present invention is as follows:
1.靶材制备:将Bi2O3、Fe2O3、Cr2O3以及所选择的掺杂元素氧化物按照一定比例称量,混合均匀后,放入球磨罐中球磨;将混合均匀的粉末压制成圆柱体,放入高温炉800~880摄氏度烧结1~3小时;1. Target material preparation: Weigh Bi 2 O 3 , Fe 2 O 3 , Cr 2 O 3 and the selected doping element oxides according to a certain ratio, mix them evenly, put them into a ball mill jar for ball milling; mix evenly Press the powder into a cylinder, put it into a high-temperature furnace at 800-880 degrees Celsius and sinter for 1-3 hours;
2.薄膜制备:采用脉冲激光沉积法生长出均匀致密的薄膜。将步骤1中制得的靶材放入生长腔,将衬底放入生长腔,先在基片上生长一层导电缓冲层,导电缓冲层可为La0.66Sr0.33MnO3或SrRuO3;再生长双层钙钛矿光伏薄膜层,控制腔内气氛为纯氧,且气压在0.1Pa~10Pa,腔内温度为670~690℃,单次激光脉冲能量为60~100mJ,生长频率为1~10Hz,脉冲次数为5000~20000。2. Film preparation: a uniform and dense film is grown by pulsed laser deposition. Put the target material prepared in step 1 into the growth chamber, put the substrate into the growth chamber, first grow a conductive buffer layer on the substrate, the conductive buffer layer can be La 0.66 Sr 0.33 MnO 3 or SrRuO 3 ; and then grow Double-layer perovskite photovoltaic film layer, the atmosphere in the control chamber is pure oxygen, and the air pressure is 0.1Pa~10Pa, the temperature in the chamber is 670~690℃, the energy of a single laser pulse is 60~100mJ, and the growth frequency is 1~10Hz , The number of pulses is 5000~20000.
实施例1:在La0.66Sr0.33MnO3缓冲层上生长Bi1.9Gd0.1(FeCr)0.95Ni0.1O5.7(简称F1)薄膜。Example 1: growing a Bi 1.9 Gd 0.1 (FeCr) 0.95 Ni 0.1 O 5.7 (abbreviated as F1) film on a La 0.66 Sr 0.33 MnO 3 buffer layer.
1.靶材制备:将Bi2O3、Gd2O3、Fe2O3、Cr2O3、Ni2O3粉末按照摩尔比190:10:95:95:10混合均匀,放入球磨罐,以300r/min的转速球磨12小时,将混合均匀的粉料压制成陶瓷片,在850摄氏度下烧结2h,将多余的粉料堆积在陶瓷片四周以避免Bi元素的挥发。1. Target material preparation: mix Bi 2 O 3 , Gd 2 O 3 , Fe 2 O 3 , Cr 2 O 3 , and Ni 2 O 3 powders evenly according to the molar ratio of 190:10:95:95:10, and put them into a ball mill The tank was ball milled at a speed of 300r/min for 12 hours, and the evenly mixed powder was pressed into a ceramic sheet, which was sintered at 850 degrees Celsius for 2 hours, and the excess powder was deposited around the ceramic sheet to avoid the volatilization of the Bi element.
2.薄膜制备:将步骤1中制得的靶材放入生长腔,将衬底放入生长腔,选用(001)晶面的SrTiO3(STO)单晶衬底;先在基片上生长一层导电缓冲层La0.66Sr0.33MnO3,升高基片温度至650摄氏度,控制腔内气氛为纯氧,且气压在10Pa,单次激光脉冲能量为80mJ,生长频率为2Hz,脉冲次数为5000。2. Thin film preparation: put the target prepared in step 1 into the growth chamber, put the substrate into the growth chamber, and select a SrTiO 3 (STO) single crystal substrate with (001) crystal plane; first grow a Layer conductive buffer layer La 0.66 Sr 0.33 MnO 3 , increase the substrate temperature to 650 degrees Celsius, control the atmosphere in the cavity to be pure oxygen, and the pressure is 10Pa, the single laser pulse energy is 80mJ, the growth frequency is 2Hz, and the pulse number is 5000 .
然后生长双层结构钙钛矿薄膜,改变基片温度为680摄氏度,控制腔内气氛为纯氧,且气压在1Pa,单次激光脉冲能量为60mJ,生长频率为5Hz,脉冲次数为20000。Then grow a double-layer perovskite film, change the substrate temperature to 680 degrees Celsius, control the atmosphere in the cavity to pure oxygen, and the pressure is at 1Pa, the energy of a single laser pulse is 60mJ, the growth frequency is 5Hz, and the number of pulses is 20000.
3.电极制备:将具有100μm直径圆孔的掩膜版贴在步骤2中制得的薄膜上,采用脉冲激光沉积法制备电极。选用电极材料为ITO,控制腔内气氛为纯氧,且气压在3Pa,单次激光脉冲能量为120mJ,室温下生长,生长频率为5Hz,脉冲次数为6000。3. Electrode preparation: A mask plate with a 100 μm diameter circular hole was pasted on the film prepared in step 2, and an electrode was prepared by a pulsed laser deposition method. The electrode material is ITO, the atmosphere in the control chamber is pure oxygen, and the pressure is 3Pa, the single laser pulse energy is 120mJ, grown at room temperature, the growth frequency is 5Hz, and the number of pulses is 6000.
4.性能测试:对所制备的F1薄膜样品作X射线衍射测试。X射线图谱如图2,在SrTiO3单晶衬底上生长的F1单晶薄膜晶格匹配好,无杂相。4. Performance test: perform X-ray diffraction test on the prepared F1 thin film sample. The X-ray spectrum is shown in Figure 2. The F1 single crystal thin film grown on the SrTiO 3 single crystal substrate has good lattice matching and no impurity phase.
采用铁电测试仪测试所制备的F1薄膜的铁电性能。电滞回线如图5,F1薄膜的剩余极化强度为19.3μC/cm2,矫顽电场为63.2kV/cm。The ferroelectric properties of the prepared F1 films were tested by a ferroelectric tester. The hysteresis loop is shown in Figure 5. The remanent polarization of the F1 film is 19.3 μC/cm 2 , and the coercive electric field is 63.2 kV/cm.
对所制备的F1薄膜样品作透射率测试。透射谱如图6,经计算可知F1薄膜的禁带宽度为1.53eV。The transmittance test was carried out on the prepared F1 film samples. The transmission spectrum is shown in Figure 6. It can be known from calculation that the forbidden band width of the F1 film is 1.53eV.
对所制备的F1薄膜样品作光伏性能测试。先采用Keithley2635A数字源表对步骤3中制得的薄膜进行极化。采用+10V电压极化1秒,撤去极化电压,然后采用100mW/cm2的光照垂直照射在极化后的样品上表面测试其光伏性能,光伏特性曲线如图7,可知F1薄膜开路电压为1.02V,短路电流密度为13.1mA/cm2。Photovoltaic performance tests were performed on the prepared F1 film samples. The thin film prepared in step 3 was first polarized by Keithley2635A digital source meter. Use +10V voltage to polarize for 1 second, remove the polarization voltage, and then use 100mW/ cm2 of light to vertically irradiate the upper surface of the polarized sample to test its photovoltaic performance. The photovoltaic characteristic curve is shown in Figure 7. It can be seen that the open circuit voltage of the F1 film is 1.02V, the short-circuit current density is 13.1mA/cm 2 .
采用综合物性测量系统(PPMS)测试所制备的F1薄膜的电学性能。F1单晶薄膜具有N型半导体特征,300K时载流子浓度为4.5×1018cm-3,300K时载流子迁移率为2.4cm2·V-1·s-1。The electrical properties of the as-prepared F1 films were tested by a comprehensive physical property measurement system (PPMS). The F1 single crystal thin film has the characteristics of N-type semiconductor, the carrier concentration is 4.5×10 18 cm -3 at 300K, and the carrier mobility is 2.4cm 2 ·V -1 ·s -1 at 300K.
实施例2:在SrRuO3缓冲层上生长Bi1.85Gd0.15(FeCr)0.97Ni0.06O4.2(简称F2)薄膜。Example 2: growing a Bi 1.85 Gd 0.15 (FeCr) 0.97 Ni 0.06 O 4.2 (F2 for short) film on a SrRuO 3 buffer layer.
1.靶材制备:将Bi2O3、Gd2O3、Fe2O3、Cr2O3、Ni2O3粉末按照摩尔比185:15:97:97:6混合均匀,放入球磨罐,以300r/min的转速球磨12小时,将混合均匀的粉料压制成陶瓷片,在835摄氏度下烧结2h,将多余的粉料堆积在陶瓷片四周以避免Bi元素的挥发。1. Target material preparation: Mix Bi 2 O 3 , Gd 2 O 3 , Fe 2 O 3 , Cr 2 O 3 , and Ni 2 O 3 powders evenly according to the molar ratio of 185:15:97:97:6, and put them into a ball mill The tank was ball milled at a speed of 300r/min for 12 hours, and the evenly mixed powder was pressed into a ceramic sheet, which was sintered at 835 degrees Celsius for 2 hours, and the excess powder was piled up around the ceramic sheet to avoid the volatilization of the Bi element.
2.薄膜制备:将步骤1中制得的靶材放入生长腔,将衬底放入生长腔,选用(001)晶面的SrTiO3单晶衬底;先在基片上生长一层导电缓冲层La0.66Sr0.33MnO3,升高基片温度至685摄氏度,控制腔内气氛为纯氧,且气压在10Pa,单次激光脉冲能量为80mJ,生长频率为2Hz,脉冲次数为5000。2. Thin film preparation: put the target prepared in step 1 into the growth chamber, put the substrate into the growth chamber, and select the SrTiO 3 single crystal substrate with (001) crystal plane; first grow a layer of conductive buffer on the substrate Layer La 0.66 Sr 0.33 MnO 3 , increase the substrate temperature to 685 degrees Celsius, control the atmosphere in the cavity to be pure oxygen, and the pressure is at 10Pa, the single laser pulse energy is 80mJ, the growth frequency is 2Hz, and the number of pulses is 5000.
然后生长双层结构钙钛矿薄膜,改变基片温度为670摄氏度,控制腔内气氛为纯氧,且气压在0.1Pa,单次激光脉冲能量为100mJ,生长频率为1Hz,脉冲次数为20000。Then grow a double-layer perovskite film, change the substrate temperature to 670 degrees Celsius, control the atmosphere in the cavity to pure oxygen, and the pressure is 0.1Pa, the single laser pulse energy is 100mJ, the growth frequency is 1Hz, and the number of pulses is 20000.
3.电极制备:将具有100μm直径圆孔的掩膜版贴在步骤2中制得的薄膜上,采用脉冲激光沉积法制备电极。选用电极材料为ITO,控制腔内气氛为纯氧,且气压在3Pa,单次激光脉冲能量为120mJ,室温下生长,生长频率为5Hz,脉冲次数为6000。3. Electrode preparation: A mask plate with a 100 μm-diameter hole was pasted on the film prepared in step 2, and an electrode was prepared by pulsed laser deposition. The electrode material is ITO, the atmosphere in the control chamber is pure oxygen, and the pressure is 3Pa, the single laser pulse energy is 120mJ, grown at room temperature, the growth frequency is 5Hz, and the number of pulses is 6000.
4.性能测试:对所制备的F2薄膜样品作X射线衍射测试。X射线图谱如图3,在SrTiO3单晶衬底上生长的F2单晶薄膜晶格匹配好,无杂相。4. Performance test: perform X-ray diffraction test on the prepared F2 thin film sample. The X-ray spectrum is shown in Figure 3. The F2 single crystal thin film grown on the SrTiO 3 single crystal substrate has good lattice matching and no impurity phase.
采用铁电测试仪测试所制备的F2薄膜的铁电性能。电滞回线如图5,F2薄膜的剩余极化强度为24.5μC/cm2,矫顽电场为65.5kV/cm。The ferroelectric properties of the prepared F2 films were tested by a ferroelectric tester. The hysteresis loop is shown in Figure 5, the remanent polarization of the F2 film is 24.5μC/cm 2 , and the coercive electric field is 65.5kV/cm.
对所制备的F2薄膜样品作透射率测试。透射谱如图6,经计算可知F2薄膜的禁带宽度为1.59eV。The prepared F2 film samples were tested for transmittance. The transmission spectrum is shown in Figure 6, and it can be known that the forbidden band width of the F2 thin film is 1.59eV through calculation.
对所制备的F2薄膜样品作光伏性能测试。先采用Keithley2635A数字源表对步骤3中制得的薄膜进行极化。采用+10V电压极化1秒,撤去极化电压,然后采用100mW/cm2的光照垂直照射在极化后的样品上表面测试其光伏性能,光伏特性曲线如图7,可知F2薄膜开路电压为1.06V,短路电流密度为20.3mA/cm2。Photovoltaic performance tests were performed on the prepared F2 film samples. The thin film prepared in step 3 was first polarized by Keithley2635A digital source meter. Use +10V voltage to polarize for 1 second, remove the polarization voltage, and then use 100mW/ cm2 of light to vertically irradiate the top surface of the polarized sample to test its photovoltaic performance. The photovoltaic characteristic curve is shown in Figure 7. It can be seen that the open circuit voltage of the F2 film is 1.06V, the short-circuit current density is 20.3mA/cm 2 .
采用综合物性测量系统(PPMS)测试所制备的F2薄膜的电学性能。F2单晶薄膜具有N型半导体特征,300K时载流子浓度为3.2×1019cm-3,300K时载流子迁移率为6.5cm2·V-1·s-1。The electrical properties of the as-prepared F2 films were tested by a comprehensive physical property measurement system (PPMS). The F2 single crystal thin film has the characteristics of N-type semiconductor, the carrier concentration is 3.2×10 19 cm -3 at 300K, and the carrier mobility is 6.5cm 2 ·V -1 ·s -1 at 300K.
实施例3:在La0.66Sr0.33MnO3缓冲层上生长Bi1.92Gd0.08(FeCr)0.96Ni0.08O5.1(简称F3)薄膜。Example 3: growing a Bi 1.92 Gd 0.08 (FeCr) 0.96 Ni 0.08 O 5.1 (abbreviated as F3) film on a La 0.66 Sr 0.33 MnO 3 buffer layer.
1.靶材制备:将Bi2O3、Gd2O3、Fe2O3、Cr2O3、Ni2O3粉末按照摩尔比192:8:96:96:8混合均匀,放入球磨罐,以300r/min的转速球磨12小时,将混合均匀的粉料压制成陶瓷片,在865摄氏度下烧结2h,将多余的粉料堆积在陶瓷片四周以避免Bi元素的挥发。1. Target material preparation: mix Bi 2 O 3 , Gd 2 O 3 , Fe 2 O 3 , Cr 2 O 3 , and Ni 2 O 3 powders evenly according to the molar ratio of 192:8:96:96:8, and put them into a ball mill The tank was ball milled at a speed of 300r/min for 12 hours, and the evenly mixed powder was pressed into a ceramic sheet, which was sintered at 865 degrees Celsius for 2 hours, and the excess powder was deposited around the ceramic sheet to avoid volatilization of the Bi element.
2.薄膜制备:将步骤1中制得的靶材放入生长腔,将衬底放入生长腔,选用(001)晶面的SrTiO3单晶衬底;先在基片上生长一层导电缓冲层La0.66Sr0.33MnO3,升高基片温度至650摄氏度,控制腔内气氛为纯氧,且气压在10Pa,单次激光脉冲能量为80mJ,生长频率为2Hz,脉冲次数为5000。2. Thin film preparation: put the target prepared in step 1 into the growth chamber, put the substrate into the growth chamber, and select the SrTiO 3 single crystal substrate with (001) crystal plane; first grow a layer of conductive buffer on the substrate Layer La 0.66 Sr 0.33 MnO 3 , increase the substrate temperature to 650 degrees Celsius, control the atmosphere in the cavity to be pure oxygen, and the pressure is 10Pa, the single laser pulse energy is 80mJ, the growth frequency is 2Hz, and the number of pulses is 5000.
然后生长双层结构钙钛矿薄膜,改变基片温度为670摄氏度,控制腔内气氛为纯氧,且气压在1Pa,单次激光脉冲能量为85mJ,生长频率为1Hz,脉冲次数为20000。Then grow a double-layer perovskite film, change the substrate temperature to 670 degrees Celsius, control the atmosphere in the cavity to pure oxygen, and the pressure is 1Pa, the energy of a single laser pulse is 85mJ, the growth frequency is 1Hz, and the number of pulses is 20000.
3.电极制备:将具有100μm直径圆孔的掩膜版贴在步骤2中制得的薄膜上,采用脉冲激光沉积法制备电极。选用电极材料为ITO,控制腔内气氛为纯氧,且气压在3Pa,单次激光脉冲能量为120mJ,室温下生长,生长频率为5Hz,脉冲次数为6000。3. Electrode preparation: A mask plate with a 100 μm diameter circular hole was pasted on the film prepared in step 2, and an electrode was prepared by a pulsed laser deposition method. The electrode material is ITO, the atmosphere in the control chamber is pure oxygen, and the pressure is 3Pa, the single laser pulse energy is 120mJ, grown at room temperature, the growth frequency is 5Hz, and the number of pulses is 6000.
4.性能测试:对所制备的F3薄膜样品作X射线衍射测试。X射线图谱如图4,在SrTiO3单晶衬底上生长的F3单晶薄膜晶格匹配好,无杂相。4. Performance test: perform X-ray diffraction test on the prepared F3 thin film sample. The X-ray spectrum is shown in Figure 4, the F3 single crystal thin film grown on the SrTiO 3 single crystal substrate has good lattice matching and no impurity phase.
采用铁电测试仪测试所制备的F3薄膜的铁电性能。电滞回线如图5,F3薄膜的剩余极化强度为32.2μC/cm2,矫顽电场为69.1kV/cm。The ferroelectric properties of the prepared F3 films were tested by a ferroelectric tester. The hysteresis loop is shown in Figure 5, the remanent polarization of the F3 film is 32.2μC/cm 2 , and the coercive electric field is 69.1kV/cm.
对所制备的F3薄膜样品作透射率测试。透射谱如图6,经计算可知F3薄膜的禁带宽度为1.45eV。The transmittance test was carried out on the prepared F3 film samples. The transmission spectrum is shown in Figure 6. It can be known that the forbidden band width of the F3 thin film is 1.45eV through calculation.
对所制备的F3薄膜样品作光伏性能测试。先采用Keithley2635A数字源表对步骤3中制得的薄膜进行极化。采用+10V电压极化1秒,撤去极化电压,然后采用100mW/cm2的光照垂直照射在极化后的样品上表面测试其光伏性能,光伏特性曲线如图7,可知F3薄膜开路电压为1.18V,短路电流密度为36.4mA/cm2。Photovoltaic performance tests were performed on the prepared F3 film samples. The thin film prepared in step 3 was first polarized by Keithley2635A digital source meter. Use +10V voltage to polarize for 1 second, remove the polarization voltage, and then use 100mW/ cm2 of light to vertically irradiate the upper surface of the polarized sample to test its photovoltaic performance. The photovoltaic characteristic curve is shown in Figure 7. It can be seen that the open circuit voltage of the F3 film is 1.18V, the short-circuit current density is 36.4mA/cm 2 .
采用综合物性测量系统(PPMS)测试所制备的F3薄膜的电学性能。F3单晶薄膜具有N型半导体特征,300K时载流子浓度为8.1×1019cm-3,300K时迁移率为22.3cm2·V-1·s-1。The electrical properties of the as-prepared F3 films were tested by a comprehensive physical property measurement system (PPMS). The F3 single crystal thin film has the characteristics of N-type semiconductor, the carrier concentration is 8.1×10 19 cm -3 at 300K, and the mobility is 22.3cm 2 ·V -1 ·s -1 at 300K.
实施例4:在p型的GaAs衬底上生长F3薄膜,制备GaAs-F3异质PN结。Embodiment 4: F3 film is grown on p-type GaAs substrate, and GaAs-F3 heterogeneous PN junction is prepared.
1.靶材制备:选用实施例3中的F3靶材。1. Target material preparation: the F3 target material in Example 3 was selected.
2.薄膜制备:将F3靶材放入生长腔,将衬底放入生长腔,选用(001)晶面的p型GaAs单晶衬底,载流子浓度为2.6×1018cm-3;在基片上生长双层结构钙钛矿薄膜,改变基片温度为670摄氏度,控制腔内气氛为纯氧,且气压在1Pa;单次激光脉冲能量为85mJ,生长频率为1Hz,脉冲次数为20000。2. Thin film preparation: put the F3 target into the growth chamber, put the substrate into the growth chamber, select the p-type GaAs single crystal substrate with (001) crystal plane, and the carrier concentration is 2.6×10 18 cm -3 ; Grow a double-layer perovskite film on the substrate, change the temperature of the substrate to 670 degrees Celsius, control the atmosphere in the cavity to be pure oxygen, and the pressure is 1Pa; the energy of a single laser pulse is 85mJ, the growth frequency is 1Hz, and the number of pulses is 20000 .
3.电极制备:将具有100μm直径圆孔的掩膜版贴在步骤2中制得的薄膜上,采用脉冲激光沉积法制备顶电极。选用顶电极材料为ITO,控制腔内气氛为纯氧,且气压在3Pa,单次激光脉冲能量为120mJ,室温下生长,生长频率为5Hz,脉冲次数为6000。3. Electrode preparation: A mask plate with a 100 μm diameter circular hole was pasted on the film prepared in step 2, and the top electrode was prepared by pulsed laser deposition. The top electrode material is ITO, the atmosphere in the control chamber is pure oxygen, and the pressure is 3Pa, the single laser pulse energy is 120mJ, grown at room temperature, the growth frequency is 5Hz, and the number of pulses is 6000.
将具有100μm直径圆孔的掩膜版贴在该样品的GaAs一面制备采用脉冲激光沉积法制备底电极。选用底电极材料为Pt,单次激光脉冲能量为200mJ,室温下生长,生长频率为5Hz,脉冲次数为20000。A mask plate with a 100 μm diameter circular hole was pasted on the GaAs side of the sample to prepare the bottom electrode by pulsed laser deposition. The bottom electrode material is Pt, the single laser pulse energy is 200mJ, grown at room temperature, the growth frequency is 5Hz, and the number of pulses is 20000.
4.光伏性能测试:先采用Keithley2635A数字源表对步骤3中制得的薄膜进行极化。采用不同电压极化1秒,撤去极化电压,对极化后的薄膜,采用2秒黑暗2秒光照(垂直照射样品顶电极,光照强度为100mW/cm2)的交替条件测试PN结的电流,结果如图8所示:黑暗条件下没有电流,光照条件下产生电流;外加电压极化后会影响该PN结的电流特性,光照电流的方向与极化电压的方向相反,铁电极化正、反方向的时候,该PN结的最大光伏电流分别为-36.2mA/cm2、17.5mA/cm2。4. Photovoltaic performance test: first use Keithley2635A digital source meter to polarize the thin film prepared in step 3. Use different voltages to polarize for 1 second, remove the polarization voltage, and test the current of the PN junction under the alternating conditions of 2 seconds of darkness and 2 seconds of light (vertically illuminate the top electrode of the sample, and the light intensity is 100mW/cm 2 ) for the polarized film. , the results are shown in Figure 8: there is no current under dark conditions, and current is generated under light conditions; the current characteristics of the PN junction will be affected after the polarization of the applied voltage, the direction of the light current is opposite to the direction of the polarization voltage, and the ferroelectric polarization is positive In the opposite direction, the maximum photovoltaic current of the PN junction is -36.2mA/cm 2 , 17.5mA/cm 2 .
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