CN105170406A - Slit coating unit, coating head and coating equipment - Google Patents
Slit coating unit, coating head and coating equipment Download PDFInfo
- Publication number
- CN105170406A CN105170406A CN201510594454.0A CN201510594454A CN105170406A CN 105170406 A CN105170406 A CN 105170406A CN 201510594454 A CN201510594454 A CN 201510594454A CN 105170406 A CN105170406 A CN 105170406A
- Authority
- CN
- China
- Prior art keywords
- coating
- slit
- width
- passage
- channel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 73
- 239000011248 coating agent Substances 0.000 title claims abstract description 72
- 239000012530 fluid Substances 0.000 claims abstract description 22
- 230000007423 decrease Effects 0.000 claims description 5
- 238000007670 refining Methods 0.000 claims 2
- 238000010079 rubber tapping Methods 0.000 claims 2
- 239000000463 material Substances 0.000 abstract description 9
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 238000001125 extrusion Methods 0.000 abstract description 3
- 239000007788 liquid Substances 0.000 abstract description 3
- 238000007599 discharging Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 8
- 238000009501 film coating Methods 0.000 description 6
- 238000009826 distribution Methods 0.000 description 5
- 239000007888 film coating Substances 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000003044 adaptive effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Abstract
Description
技术领域 technical field
本发明涉及液体涂覆技术领域,尤其涉及狭缝涂布单元、涂布头以及涂布设备。 The invention relates to the technical field of liquid coating, in particular to a slit coating unit, a coating head and coating equipment.
背景技术 Background technique
狭缝涂布已经成为现有薄膜涂覆领域最具有代表性的薄膜涂覆方法之一,主要体现在液晶显示领域的像素制备工艺过程中的光敏胶涂覆。当前关于狭缝涂布的薄膜厚度与均匀性的控制主要有两种方法:第一种是通过在狭缝中添加夹片的方式控制挤出量的多少,以此来进一步调控涂覆薄膜的厚度,同时保证厚度的均匀性;第二种是通过供料系统的设计,尽量保证涂布头的进料流速的平稳性,以帮助更好的完成挤出料的可控性。这两种方法,都需要供料系统的流速保持非常稳定的状态才能达到均匀涂覆的要求。 Slit coating has become one of the most representative thin film coating methods in the existing thin film coating field, mainly reflected in the photosensitive adhesive coating in the pixel preparation process in the liquid crystal display field. At present, there are two main methods for controlling the film thickness and uniformity of slit coating: the first is to control the amount of extrusion by adding clips in the slit, so as to further control the thickness of the coated film. Thickness, while ensuring the uniformity of the thickness; the second is through the design of the feeding system, try to ensure the stability of the feeding flow rate of the coating head, so as to help better controllability of the extruded material. Both of these methods require the flow rate of the feeding system to be kept very stable in order to achieve the requirements of uniform coating.
发明内容 Contents of the invention
本发明所要解决的技术问题,在于提供一种狭缝涂布单元、涂布头以及涂布设备,能够解决因进料流速不稳定导致薄膜涂覆不均匀的问题。 The technical problem to be solved by the present invention is to provide a slit coating unit, coating head and coating equipment, which can solve the problem of uneven film coating caused by unstable feed flow rate.
本发明解决上述技术问题所采用的技术方案是: The technical solution adopted by the present invention to solve the problems of the technologies described above is:
本发明提供了一种狭缝涂布单元,其包括外壳,所述外壳内设有用于流体流入的进料通道、用于流体流出的出料通道、连通所述进料通道与出料通道的分压通道以及设于所述进料通道末端的狭缝喷嘴,所述进料通道的宽度沿着朝向狭缝喷嘴的方向逐级递减。 The invention provides a slit coating unit, which includes a housing, and the housing is provided with a feed channel for fluid inflow, a discharge channel for fluid outflow, and a connection between the feed channel and the discharge channel. The pressure dividing channel and the slit nozzle arranged at the end of the feed channel, the width of the feed channel gradually decreases along the direction toward the slit nozzle.
作为上述技术方案的进一步改进,所述分压通道的宽度与其对应的每一级进料通道的宽度相同。 As a further improvement of the above technical solution, the width of the pressure-dividing channel is the same as the width of each corresponding feed channel.
作为上述技术方案的进一步改进,所述进料通道的下一级宽度为上一级宽度的80%。 As a further improvement of the above technical solution, the width of the next stage of the feed channel is 80% of the width of the previous stage.
作为上述技术方案的进一步改进,所述进料通道的深度与宽度的比例范围为1:100至1:1。 As a further improvement of the above technical solution, the ratio of the depth to the width of the feed channel ranges from 1:100 to 1:1.
作为上述技术方案的进一步改进,所述进料通道的宽度从3cm递减至50μm。 As a further improvement of the above technical solution, the width of the feed channel is gradually reduced from 3 cm to 50 μm.
作为上述技术方案的进一步改进,所述流体的速度范围为0.001ml/min至10ml/min。 As a further improvement of the above technical solution, the speed of the fluid ranges from 0.001ml/min to 10ml/min.
本发明提供了一种涂布头,其包括并排设置的多个如上所述的狭缝涂布单元。 The present invention provides a coating head, which includes a plurality of the above-mentioned slit coating units arranged side by side.
作为上述技术方案的进一步改进,所述涂布头的还包括一分配单元,所述分配单元设有与所述狭缝喷嘴相通的匀料槽以及至少一条与所述匀料槽相通狭缝流道,所述狭缝流道的末端为涂布口。 As a further improvement of the above technical solution, the coating head also includes a distribution unit, the distribution unit is provided with a leveling groove communicated with the slit nozzle and at least one slit flow communicated with the leveling groove channel, and the end of the slit flow channel is the coating port.
本发明提供了一种涂布设备,其包括如上所述狭缝涂布单元。 The present invention provides a coating device comprising the slit coating unit as described above.
本发明还提供了一种涂布设备,其包括如上所述的涂布头。 The present invention also provides a coating device, which includes the above-mentioned coating head.
本发明的有益效果是: The beneficial effects of the present invention are:
本发明狭缝涂布单元通过对在进料通道与狭缝喷嘴之间采用增加分压通道方式进行流体分流,通过出料通道进行回流,同时进料通道逐级变窄,将进料通道内流体的压力递减从而使流速逐级递减,如此一来,即便入口处进料流体因机械泵的压力变化引起流速变化,在狭缝喷嘴处的液体挤出速度基本不受影响,进而能够解决因进料流速不稳定导致薄膜涂覆不均匀的问题。 The slit coating unit of the present invention divides the fluid by adopting the method of increasing the partial pressure channel between the feed channel and the slit nozzle, and carries out backflow through the discharge channel, and at the same time, the feed channel is gradually narrowed, and the inside of the feed channel The pressure of the fluid decreases gradually so that the flow rate decreases step by step. In this way, even if the flow rate of the feed fluid at the inlet changes due to the pressure change of the mechanical pump, the liquid extrusion speed at the slit nozzle is basically not affected, which can solve the problem. Unstable feed flow rates lead to problems with uneven film coating.
本发明涂布头采用了上述狭缝涂布单元,也就能够解决因进料流速不稳定导致薄膜涂覆不均匀的问题。 The coating head of the present invention adopts the above-mentioned slit coating unit, which can solve the problem of uneven film coating caused by unstable feed flow rate.
本发明涂布设备采用了上述狭缝涂布单元或涂布头,也能够解决因进料流速不稳定导致薄膜涂覆不均匀的问题。 The coating equipment of the present invention adopts the above-mentioned slit coating unit or coating head, which can also solve the problem of uneven film coating caused by unstable feed flow rate.
附图说明 Description of drawings
图1是本发明狭缝涂布单元的立体结构示意图; Fig. 1 is the schematic diagram of the three-dimensional structure of the slit coating unit of the present invention;
图2是本发明狭缝涂布单元的全剖示意图; Fig. 2 is the full sectional view of slit coating unit of the present invention;
图3是本发明狭缝涂布单元内的流体流动方向示意图; Fig. 3 is a schematic diagram of the fluid flow direction in the slit coating unit of the present invention;
图4是本发明涂布头第一种实施方式的正视角度的全剖视图; Figure 4 is a full sectional view of the front view angle of the first embodiment of the coating head of the present invention;
图5是本发明涂布头第一种实施方式的左视角度的全剖视图; Fig. 5 is a full sectional view of the left viewing angle of the first embodiment of the coating head of the present invention;
图6是本发明涂布头第二种实施方式的正视角度的全剖视图。 Fig. 6 is a full cross-sectional view of the second embodiment of the coating head according to the present invention.
具体实施方式 Detailed ways
以下将结合实施例和附图对本发明的构思、具体结构及产生的技术效果进行清楚、完整地描述,以充分地理解本发明的目的、特征和效果。显然,所描述的实施例只是本发明的一部分实施例,而不是全部实施例,基于本发明的实施例,本领域的技术人员在不付出创造性劳动的前提下所获得的其他实施例,均属于本发明保护的范围。另外,专利中涉及到的所有联接/连接关系,并非单指构件直接相接,而是指可根据具体实施情况,通过添加或减少联接辅件,来组成更优的联接结构。本发明中的各个技术特征,在不互相矛盾冲突的前提下可以交互组合。 The idea, specific structure and technical effects of the present invention will be clearly and completely described below in conjunction with the embodiments and accompanying drawings, so as to fully understand the purpose, features and effects of the present invention. Apparently, the described embodiments are only some of the embodiments of the present invention, rather than all of them. Based on the embodiments of the present invention, other embodiments obtained by those skilled in the art without creative efforts belong to The protection scope of the present invention. In addition, all the connection/connection relationships involved in the patent do not simply refer to the direct connection of components, but mean that a better connection structure can be formed by adding or reducing connection accessories according to specific implementation conditions. The various technical features in the present invention can be combined interactively on the premise of not conflicting with each other.
请一并参照图1、图2和图3,本发明狭缝涂布单元1包括外壳10,所述外壳10内设有用于流体流入的进料通道20、用于流体流出的出料通道30、连通所述进料通道20与出料通道30的分压通道40以及设于所述进料通道20末端的狭缝喷嘴50,所述进料通道20的宽度沿着朝向狭缝喷嘴50的方向逐级递减。本发明狭缝涂布单元1的进料通道20、出料通道30以及分压通道40的横截面的形状可以灵活选取,例如但不限于矩形、圆形、多边形等,因此当进料通道20的横截面为矩形时,所述进料通道20的宽度即为其两平行面的距离,当进料通道20的横截面为圆形时,所述进料通道20的宽度即为直径。 Please refer to Fig. 1, Fig. 2 and Fig. 3 together, the slit coating unit 1 of the present invention includes a housing 10, and the housing 10 is provided with a feed channel 20 for fluid inflow and a discharge channel 30 for fluid outflow , the partial pressure channel 40 communicating with the feed channel 20 and the discharge channel 30 and the slit nozzle 50 located at the end of the feed channel 20 , the width of the feed channel 20 is along the direction toward the slit nozzle 50 The direction decreases step by step. The shapes of the feed channel 20, the discharge channel 30 and the cross-section of the partial pressure channel 40 of the slit coating unit 1 of the present invention can be flexibly selected, such as but not limited to rectangle, circle, polygon, etc., so when the feed channel 20 When the cross section of the feed channel 20 is rectangular, the width of the feed channel 20 is the distance between two parallel planes; when the cross section of the feed channel 20 is circular, the width of the feed channel 20 is the diameter.
本实施例中,进料通道20为多级结构,而且是宽度层层递减,优选地,下一级宽度为上一级宽度的80%,如图2所示,第二级进料通道22的宽度为第一级进料通道21宽度的80%,第三级进料通道23的宽度为第二级进料通道22宽度的80%,以此类推,逐渐递减至合适的宽度,本实施例中进料通道20的宽度优选为从3cm递减至50μm。 In this embodiment, the feed channel 20 is a multi-stage structure, and the width is gradually reduced layer by layer. Preferably, the width of the next stage is 80% of the width of the previous stage. As shown in Figure 2, the second stage feed channel 22 The width is 80% of the width of the first-stage feed channel 21, the width of the third-stage feed channel 23 is 80% of the width of the second-stage feed channel 22, and so on, gradually decreasing to a suitable width, this implementation In the example, the width of the feed channel 20 is preferably decreased from 3 cm to 50 μm.
进料通道20的深度20b与宽度20a的比例范围为1:100至1:1,该比值根据流体物料的具体粘度进行调整,以达到最优涂覆效果。进料通道20外接进料系统,所述进料系统包括进料管路以及流体泵等,该进料系统将流体物料从储料罐里泵出,经过狭缝涂布单元1之后,部分流体物料再通过出料通道30回流至储料罐里。所述流体的速度范围为0.001ml/min至10ml/min,根据涂覆薄膜厚度的需求进行调整。 The ratio of the depth 20b to the width 20a of the feeding channel 20 ranges from 1:100 to 1:1, and the ratio is adjusted according to the specific viscosity of the fluid material to achieve an optimal coating effect. The feeding channel 20 is externally connected to a feeding system, which includes a feeding pipeline and a fluid pump, etc., the feeding system pumps the fluid material from the storage tank, and after passing through the slit coating unit 1, part of the fluid The material flows back into the storage tank through the discharge channel 30 again. The speed of the fluid ranges from 0.001ml/min to 10ml/min, and is adjusted according to the thickness of the coating film.
分压通道40主要用于对进料通道20内的流体进行分流、降压、减速,其宽度与其对应的每一级进料通道20的宽度相同,具体而言,如图2所示,第一级分压通道41的宽度与第一级进料通道21的宽度相同,第二级分压通道42的宽度与第二级进料通道22的宽度相同,第三级分压通道43的宽度与第三级进料通道23的宽度相同,以此类推。 The pressure dividing channel 40 is mainly used to divide, decompress, and decelerate the fluid in the feed channel 20, and its width is the same as the width of each stage of the feed channel 20 corresponding to it. Specifically, as shown in Figure 2, the first The width of the first-stage pressure-dividing channel 41 is the same as the width of the first-stage feed channel 21, the width of the second-stage pressure-dividing channel 42 is the same as the width of the second-stage feed channel 22, and the width of the third-stage pressure-dividing channel 43 is the same. It is the same as the width of the third stage feeding channel 23, and so on.
图4和图5示出了本发明涂布头的第一种实施方式的具体结构。请一并参照图4和图5,本发明涂布头包括并排设置的多个如上所述的狭缝涂布单元1,还包括一分配单元2,所述分配单元2设有与所述狭缝喷嘴50相通的匀料槽60以及一条与所述匀料槽60相通狭缝流道70,所述狭缝流道70的末端为涂布口80。这里所述的“并排设置”并不局限于多个狭缝涂布单元1通过多种固接方式(如粘接、焊接、螺栓连接等)进行并排的设置,也包括涂布头的一体成型方式,也就是说,一体的涂布头具有多个狭缝涂布单元1。分配单元2的主要作用就是将狭缝喷嘴50的流体物料进行再次分配,以涂布光敏胶为例,在不同的液晶显示器的像素制备过程中,其尺寸大小各有差异,在这种情况下,通过分配单元2的流体物料再分配过程就能够进行多种不同尺寸规格的涂布,适应性强。 Fig. 4 and Fig. 5 show the specific structure of the first embodiment of the coating head of the present invention. Please refer to Fig. 4 and Fig. 5 together, the coating head of the present invention comprises a plurality of above-mentioned slit coating units 1 arranged side by side, also comprises a distribution unit 2, and described distribution unit 2 is provided with described slit The leveling groove 60 communicated with the slit nozzle 50 and a slit flow channel 70 communicated with the leveling groove 60 , the end of the slit flow channel 70 is a coating port 80 . The "side-by-side arrangement" mentioned here is not limited to the side-by-side arrangement of multiple slit coating units 1 through various fixing methods (such as bonding, welding, bolting, etc.), but also includes the integral molding of the coating head In other words, an integrated coating head has a plurality of slit coating units 1 . The main function of the distributing unit 2 is to redistribute the fluid material of the slit nozzle 50. Taking the coating of photosensitive adhesive as an example, in the process of preparing pixels of different liquid crystal displays, their sizes are different. In this case , through the fluid material redistribution process of the distribution unit 2, it is possible to carry out the coating of various sizes and specifications, and has strong adaptability.
图6示出了本发明涂布头的第二种实施方式的具体结构。如图6所示,该实施方式与第一种实施方式的不同就在于其狭缝流道70为多条,其他结构都与第一种实施方式相同,在此不再赘述。因为在光敏胶的涂布过程中,有时不需要对整面进行涂布,仅需要在特定位置进行涂布,这样就可以采用多条适应性的狭缝流道70进行针对性的涂布,减少了物料的使用量,降低了成本。 Fig. 6 shows the specific structure of the second embodiment of the coating head of the present invention. As shown in FIG. 6 , the difference between this embodiment and the first embodiment is that there are multiple slit channels 70 , and other structures are the same as those of the first embodiment, which will not be repeated here. Because in the coating process of the photosensitive adhesive, sometimes it is not necessary to coat the entire surface, but only at a specific position, so that multiple adaptive slit flow channels 70 can be used for targeted coating, The usage of materials is reduced and the cost is reduced.
本发明还提供了一种涂布装置,其采用了上述狭缝涂布单元或涂布头。 The present invention also provides a coating device, which adopts the above-mentioned slit coating unit or coating head.
以上是对本发明的较佳实施进行了具体说明,但本发明并不限于所述实施例,熟悉本领域的技术人员在不违背本发明精神的前提下还可做出种种的等同变形或替换,这些等同的变形或替换均包含在本申请权利要求所限定的范围内。 The above is a specific description of the preferred implementation of the present invention, but the present invention is not limited to the described embodiments, and those skilled in the art can also make various equivalent deformations or replacements without violating the spirit of the present invention. These equivalent modifications or replacements are all within the scope defined by the claims of the present application.
Claims (10)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510594454.0A CN105170406B (en) | 2015-09-16 | 2015-09-16 | Slot coating unit, coating head, and coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510594454.0A CN105170406B (en) | 2015-09-16 | 2015-09-16 | Slot coating unit, coating head, and coating equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105170406A true CN105170406A (en) | 2015-12-23 |
| CN105170406B CN105170406B (en) | 2018-04-24 |
Family
ID=54893102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510594454.0A Active CN105170406B (en) | 2015-09-16 | 2015-09-16 | Slot coating unit, coating head, and coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105170406B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108636917A (en) * | 2018-04-13 | 2018-10-12 | 北京无线电测量研究所 | A kind of Anti-solidification liquid bath, Anti-solidification wet bath system and anti-condensation solid method |
| CN108882891A (en) * | 2016-04-05 | 2018-11-23 | 日本精密测器株式会社 | Expiration check device |
| TWI732549B (en) * | 2016-07-29 | 2021-07-01 | 南韓商三星顯示器有限公司 | Display device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001062368A (en) * | 1999-08-27 | 2001-03-13 | Dainippon Printing Co Ltd | Coating device and coating method |
| CN101199961A (en) * | 2006-12-12 | 2008-06-18 | 东京应化工业株式会社 | Slit nozzle |
| US20100075073A1 (en) * | 2008-09-24 | 2010-03-25 | O'byrne Christopher | Article with interchangeable decorative ornaments |
| CN201552108U (en) * | 2010-01-23 | 2010-08-18 | 深圳市浩能科技有限公司 | Porous feeding type extrusion head |
| CN103331232A (en) * | 2013-05-30 | 2013-10-02 | 深圳市华星光电技术有限公司 | Coating nozzle, coating apparatus with coating nozzle, and coating method thereof |
| CN205008186U (en) * | 2015-09-16 | 2016-02-03 | 华南师范大学 | Slit coating unit, scribble leftover of bolt of cloth and coating equipment |
-
2015
- 2015-09-16 CN CN201510594454.0A patent/CN105170406B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001062368A (en) * | 1999-08-27 | 2001-03-13 | Dainippon Printing Co Ltd | Coating device and coating method |
| CN101199961A (en) * | 2006-12-12 | 2008-06-18 | 东京应化工业株式会社 | Slit nozzle |
| US20100075073A1 (en) * | 2008-09-24 | 2010-03-25 | O'byrne Christopher | Article with interchangeable decorative ornaments |
| CN201552108U (en) * | 2010-01-23 | 2010-08-18 | 深圳市浩能科技有限公司 | Porous feeding type extrusion head |
| CN103331232A (en) * | 2013-05-30 | 2013-10-02 | 深圳市华星光电技术有限公司 | Coating nozzle, coating apparatus with coating nozzle, and coating method thereof |
| CN205008186U (en) * | 2015-09-16 | 2016-02-03 | 华南师范大学 | Slit coating unit, scribble leftover of bolt of cloth and coating equipment |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108882891A (en) * | 2016-04-05 | 2018-11-23 | 日本精密测器株式会社 | Expiration check device |
| TWI732549B (en) * | 2016-07-29 | 2021-07-01 | 南韓商三星顯示器有限公司 | Display device |
| US11112896B2 (en) | 2016-07-29 | 2021-09-07 | Samsung Display Co., Ltd. | Display device having fracture resistance |
| US11914806B2 (en) | 2016-07-29 | 2024-02-27 | Samsung Display Co., Ltd. | Display device having fracture resistance |
| US12271545B2 (en) | 2016-07-29 | 2025-04-08 | Samsung Display Co., Ltd. | Display device having fracture resistance |
| CN108636917A (en) * | 2018-04-13 | 2018-10-12 | 北京无线电测量研究所 | A kind of Anti-solidification liquid bath, Anti-solidification wet bath system and anti-condensation solid method |
| CN108636917B (en) * | 2018-04-13 | 2020-04-03 | 北京无线电测量研究所 | Anti-coagulation liquid tank, anti-coagulation liquid tank system and anti-coagulation method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105170406B (en) | 2018-04-24 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102176978B (en) | For applying the coated tool of fluid film on matrix | |
| CN105170406B (en) | Slot coating unit, coating head, and coating equipment | |
| CN103246165B (en) | Photoresist coating device and coating method thereof | |
| CN204234279U (en) | Applying device | |
| JP2011078961A (en) | Curtain-type coater | |
| US20120204789A1 (en) | Method for coating with coating liquid, coating apparatuses for use therein, and method for designing the same | |
| RU2008112566A (en) | METHOD FOR SUBMITTING THE PROPPANT TO A WELL | |
| CN104808446B (en) | Coating machine | |
| CN205008186U (en) | Slit coating unit, scribble leftover of bolt of cloth and coating equipment | |
| US3893410A (en) | Cascade coater | |
| CN110981167B (en) | Two platinum passageway glass liquid of inclination type are handled conveying system | |
| CN212702776U (en) | Liquid supply device for intermittent coating | |
| CN119427740A (en) | 3D printing equipment | |
| US10619240B2 (en) | Gas diffusion device and film-forming apparatus | |
| CN110394278A (en) | The manufacturing method of apparatus for coating and film | |
| CN220611068U (en) | Coating equipment and battery production system | |
| CN109127261B (en) | Coating device and coating method for silver nanowires | |
| US20240173739A1 (en) | Coating apparatus | |
| CN109518166B (en) | Gas uniform flow system suitable for ultra-large scale atomic layer deposition | |
| CN209158740U (en) | Flow distribution nozzle for foaming material | |
| CN110639724A (en) | Coating system and coating method | |
| KR101043294B1 (en) | Two-component metering discharge pump | |
| US20140083665A1 (en) | Heat exchanger | |
| CN217069432U (en) | Slit coating die head for low-viscosity slurry | |
| JP2016038936A (en) | Apparatus for manufacturing battery polar plate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |