CN105032181B - A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device and reaction system - Google Patents
A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device and reaction system Download PDFInfo
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Abstract
The present invention relates to a kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device and reaction system, including water conservancy diversion module, core electrode, electrode case, dielectric and driving power supply, wherein, the core electrode is coaxially disposed with electrode case, dielectric is arranged between core electrode and electrode case, driving power supply is connected with the core electrode and electrode case respectively, be provided with the electrode case two along electrode hood columella to gas passage, the two gas passages are symmetrical arranged relative to the center line of core electrode rod.Multiple reaction units can constitute sytem matrix by way of series connection and parallel connection.The reaction unit and reaction system can improve the plasma catalytic efficiency and catalytic effect of gas.
Description
Technical field
The invention belongs to industrial waste gas low-temperature plasma catalytic treatment field, and in particular to a kind of cartridge type dielectric barrier discharge
Low-temperature plasma reaction unit and reaction system.
Background technology
Plasma technique is one of forward position of research in new high-tech, and plasma is by the close positive grain of electric charge number
The aggregate of son, negative particle (including cation, anion, electronics, free radical and various active groups etc.) composition, and table
Reveal a kind of non-condensed system of quasi-neutrality of collective behavior, be the new state of aggregation beyond solid, liquids and gases tri-state, also known as
4th state of material.Gas is the insulator of electricity in itself, and when applied voltage reaches the firing voltage of gas, gas molecule is hit
Wear, produce the mixture low temperature plasma including electronics, various ions, atom and free radical.Although in discharge process
Electron temperature is very high, but heavy particle temperature is very low, and whole system is in low-temperature condition, so referred to as low temperature plasma.They
It is being in macroscopically electroneutral, the average energy of its particle is：l<W<2x1069V.Can be with now with the high-energy of plasma
Carry out being difficult to processing preparation of the chemical reaction or material carried out etc. under normal condition.
Plasma technology has been widely used in chemical synthesis, environmental science, material science, Surface Science, biology and life
The fields such as life science.It is the electronics containing various excitation state, atom, free radical applied to the plasma on environment protection chemical chemical industry
With the ionized gas of ion isoreactivity group.This low temperature plasma is used for degradation of contaminant, and what it was utilized is that these are high
Pollutant effect in energy electronics, free radical isoreactivity particle and waste gas, makes contaminant molecule occur to divide within the extremely short time
Solution, and occur follow-up various reactions, to reach the purpose of degradation of contaminant.
Being used to produce the method for low temperature plasma under typical normal temperature and pressure conditionses mainly has corona discharge (corona
Discharge), glow discharge (glow discharge) and dielectric barrier discharge (Dielectric Barrier
Discharge, DBD) etc..
Glow discharge generally by being filled with low-pressure gas in the glass tube for placing plate electrode, and two interpolars apply compared with
High voltage is obtained, and its power density is moderate and electric discharge is uniform, can be non-equilibrium with higher electron energy for producing
State low temperature plasma.Glow discharge is highly suitable to be applied for the fields such as material surface modifying and thin film deposition, but its generation is needed
Expensive vacuum equipment is wanted, can not continuously be run in application, need to be by the way of batch processing, therefore be difficult to meet extensive work
The requirement of industry application.
Corona discharge is typically obtained by asymmetry electrode, can produce stable nonequilibrium state low temperature plasma.
At present, the electric discharge of this form has been widely used in industrial pollution improvement.But corona generally occurs in severe non-uniform electric field
Stroke field intensity area domain small range space in, be unsuitable for industrial large-scale surface processing.And this weaker, generation etc. of discharging
Gas ions and the efficiency of active particle are too low, greatly limit its application prospect.
The mechanism and process of dielectric barrier discharge are the alternating currents for applying certain frequency and voltage to electrode, and between electric discharge
Gap inserts block media, and when reaching the disruptive field intensity of gas, working gas can discharge.Electric current by discharging gap is by big
Amount is called the nanosecond fast pulse current filament composition of micro discharge, and these micro discharges are irregularly distributed in over time and space
Whole discharge space, mean electron energy is higher (1-10eV) in micro discharge, and ion energy is not high, i.e. nonequilibrium state
Low temperature plasma.Medium can be covered on electrode and can also be suspended in discharge space.Its operation air pressure range is wider, energy
It is enough produced close under normal temperature and atmospheric pressure large area, high-energy-density low temperature nonequilibrium plasma, and its generation need not
Vacuum equipment.Under such plasma atmosphere, then with addition of some other process conditions, such as select suitable working gas,
Air pressure and electric parameter etc., you can reach the different work purpose such as chemical synthesis, decomposition.Reaction unit discharge power it is big
It is small, for working condition, operational effect important.Dielectric barrier discharge is to be more suitable for large-scale continuous commercial Application
A kind of gas discharge form, be widely used in many productions and research field.Low temperature produced using gas discharge etc.
The gas ions processing pollutant such as industrial waste gas, with handling process simplicity, purification efficiency height, low energy consumption, non-secondary pollution and
The advantages of particulate being handled simultaneously, has a extensive future.
Current dielectric barrier discharge reaction unit mainly has plate electrode structures and concentric cylinder structure (axial admission) two
Kind, the problem of there is the gas through-flow sectional area increase difficulty of reaction unit cellular construction.
Plate electrode structures region of discharge gas through-flow sectional area is the discharge air-gap height perpendicular to air-flow approach axis
With the product of slab length.Increase gas through-flow sectional area can increase discharge air-gap height or increase slab length.Flat board reacts
The disruptive discharge voltage of device is highly directly proportional to discharge air-gap, and increase air gap height will cause the linear increasing of device operating voltage
Plus, Power Management Design is manufactured and system insulation difficulty.It is limited to production technology, plane block media (ceramics, the stone of longer area
English etc.) it is processing and manufacturing difficulty, cost height, low intensity, fragile.
The concentric cylinder structure region of discharge gas through-flow sectional area of axial admission is only dependent upon between core electrode and pipe electrode
Annulus area, it is unrelated with electrode axial length.Increasing gas through-flow sectional area can only be by increasing between core electrode and pipe electrode
Air-gap separation, increase air gap height will cause the increase of device operating voltage, make that Power Management Design is manufactured and system insulation is difficult,
It is difficult to use in processing big flow gas.The coaxial column casing formula reaction unit of traditional sucrose barrier discharge, such as patent
(2013100935014) cellular construction shown in, does not use water conservancy diversion module, gas by column casing axially into reaction unit,
Think that gas is uniformly distributed in the annular region formed between core electrode and electrode shell, and annular region space is limited, water conservancy diversion
Module is difficult to design and arranged, therefore water conservancy diversion module is not provided with this kind of reaction unit.Said structure shortcoming is：Above-mentioned anti-
Answer in device, gas axially flows along column casing, is mainly flowed in annular region with layer flow mode, disturbs very faint.Edge
Column casing radial line direction, near core electrode, electric-field intensity is high, and the high energy particle for being activated into plasma state is more, and in electrode
Near shell, electric-field intensity is weaker, and the high energy particle being excited is less, and lower state particle is more.Laminar Flow is unfavorable for strong, weak electricity
Upper state particle and the interparticle energy exchange of lower state (mainly being carried out in particle encounter mode), therefore, are not provided with leading between
This kind of reaction unit of flow module does not have effect to reinforcing DBD.
The content of the invention
The invention aims to solve above technical problem, there is provided a kind of cartridge type dielectric barrier discharge low-temperature plasma
Reaction unit and reaction system, the present apparatus being capable of various dimensions regulation DBD region of discharge cross-sectional flow areas；Big flow gas can be handled
Body；Gas disturbance can be strengthened, strengthen plasma-catalytic；And multiple gases mixing uniformity can be improved；DBD punctures
Voltage and discharge power are relatively low, it is possible to decrease processing waste gas cost；Can be worked independently the dielectric impedance that also matrix arrangements work
Discharge low-temperature plasma catalytic device.
In order to solve the above technical problems, the technical scheme is that：
A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device, including core electrode, electrode case, dielectric with
And driving power supply, wherein, the core electrode is coaxially disposed with electrode case, dielectric be arranged on core electrode and electrode case it
Between, driving power supply is connected with the core electrode and electrode case respectively, and two are provided with the electrode case along electrode case
The gas passage of axial direction, the two gas passages are symmetrical arranged relative to the center line of core electrode rod.Due to core electrode, electrode hood
Shell and dielectric can set different length, it is possible to achieve being adjusted axially for the gas flow area of reaction unit, change
Become the size of gas through-flow sectional area, and then adjust the flow of gas.
It is preferred that, the reaction unit also includes water conservancy diversion module, and the water conservancy diversion module is along the outer of gas passage
Side is set.
It is preferred that, the core electrode is core electrode rod.Reaction unit internal electric intensity is uneven, when using small curvature half
During the interior electrode in footpath, relatively low input voltage can obtain larger electric-field intensity at interior electrode surface, so that favorably
In the generation punctured with low temperature plasma of gas.
It is preferred that, the electrode case is an entirety.
It is preferred that, the electrode case includes symmetrically arranged two parts, and this two parts coordinates, and constitutes gas passage；Electricity
The distance between pole case and described core electrode rod can be adjusted.By adjusting the distance between electrode case and core electrode rod,
The radiai adjustment of gas flow area is realized, changes the size of gas through-flow sectional area, and then adjust the flow of gas.
It is preferred that, the dielectric is shaped as hollow circular cylinder.Dielectric uses tubular structure (quartz ampoule, pottery
Porcelain tube), compared with planar structure, the block media of the structure, with manufacturing processing technic is easy, cost is low, intensity relatively
High advantage, and can axially and radially size obtains larger DBD volumes by increasing medium tube.
It is further preferred that the dielectric is closely linked on core electrode rod.
It is further preferred that the dielectric is linked on core electrode rod, and gap is left between core electrode rod.
A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction system, the reaction system is as the reaction described in several
Device is in parallel and/or is in series, and the gas access end of the reaction system sets guiding device.Reaction unit in parallel can be with
Substantial amounts of gas is handled simultaneously, the purification efficiency of gas is improved, and the reaction unit of series connection is entered by extending the catalysis time of gas
And the catalyticing purifying effect of gas can be improved, the reaction system of series connection adduction connection can not only improve the catalytic efficiency of gas,
The catalyticing purifying effect of gas, adaptability of the intensified response device to gas flow and flow velocity can also be improved.
A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction system, the reaction system is as the reaction described in several
Device is axially formed by stacking, and the gas access end of the reaction system sets guiding device.Axially stacking can be by changing
Reaction unit axial length, you can to increase the length of gas passage.In the case where block media is constant, reaction unit DBD
Voltage depends primarily on the distance of discharging gap between two electrodes.Therefore, increase air cleft length (L) is adjusted axially, only increase gas
Cross-sectional flow area S, the increase without causing DBD voltages.
Beneficial effects of the present invention are：
1st, reaction unit construction unit of the present invention can change gas using radiai adjustment and by the way of being adjusted axially simultaneously
Cross-sectional flow area size, and then increase the flow of processing gas.Radiai adjustment is by changing solid dielectric insulation sleeve and gold
Belong to the radial difference realization of electrode case per unit axial length, that is, adjust air cleft height.Be adjusted axially is by changing reaction
What device axial length was realized, i.e. air cleft length.The reaction unit structure of the present invention, which can be, realizes DBD regions radial direction and axial direction
Double dimension variations, can increase gas through-flow sectional area (being adjusted axially) in the case where not increasing driving power supply operating voltage,
Gas through-flow sectional area (radiai adjustment) can be increased in the case where driving power supply operating voltage is increased slightly.Therefore, it is of the invention
The gas through-flow sectional area for efficiently solving flat reaction unit and axial admission spool formula reaction unit cellular construction is difficult to
The defect of increase.
2nd, reaction unit of the present invention carries preposition water conservancy diversion module, and water conservancy diversion module has advantages below：
A, the sufficient multiple gases of mixing enter in reaction unit through module necking, and air scour water conservancy diversion module necking is just right
Reaction unit core electrode, gas will concentrate enter core electrode near electric-field intensity upper zone, it is easier to be provoked into as height
Can plasmoid；
B, the effect just to the core electrode that the necking of water conservancy diversion module is arranged simultaneously with circular turbulence columns, due to circular turbulence columns
With maximum lateral dimension and minimum flow direction dimension, cause the velocity gradient on its surface normal direction maximum, inverse pressure
Gradient is also maximum, and the trailing vortex structure in cylindrical turbulence columns tail clearly, forms that 2 yardsticks are larger and base after turbulence columns
This symmetrical vortex, this will greatly facilitate the energy exchange of upper state particle and lower state particle in catalyzed gas；Gas exists
Cylindrical core surrounding them forms strong turbulent flow, improves multiple gases mixing uniformity, at the same promote high field with
The mixing of gas particle in low strengh electric field, improves the collision probability between high energy particle and low energy particle, so as to reduce this hair
Bright reaction unit DBD breakdown voltage and discharge power, so as to reduce processing waste gas cost.
3rd, the coaxial column casing structural response device that the present invention is used, reaction unit internal electric intensity is uneven, works as use
During the interior electrode of small radius of curvature, relatively low input voltage can obtain larger electric-field intensity at interior electrode surface,
So as to be conducive to the generation punctured with low temperature plasma of gas.By power drives, stop through solid dielectric insulation, can be
Stable DBD regions are produced between core electrode rod (line) and metal electrode case.
4th, there is two kinds of different discharge types, dielectric impedance corona discharge and dielectric impedance silk in reaction unit of the present invention
Shape discharges, and its discharge image is dramatically different, can by the adjustment to parameters such as reaction unit operating voltage, medium equivalent capacitys
To change electric-field intensity and discharge type, so as to according to the difference of processing gas flow effectively regulation discharge power, reduction
Handle the cost of waste gas.
5th, solid dielectric insulation uses tubular structure (quartz ampoule, earthenware), compared with planar structure, the knot in the present invention
The block media of structure, has the advantages that manufacturing processing technic is easy, cost is low, intensity is of a relatively high, and can pass through increase
Axially and radially size obtains larger DBD volumes to medium tube.
6th, the present invention is suitable to chemical reaction.Obtain energy from local high-strength electric field and accelerated electronics have it is higher
Energy, is the basic and key reacted later, and its energy range is just suitable to open chemical bond, ground-state species is excited or is made point
Son turns into atom, ion, so as to trigger various plasma chemical reactions.
7th, discharge process of the present invention is easily controllable.From microcosmic, DBD regions are made up of many electric discharge filaments, but it
It can be adjusted by changing the easily controllable parameter of the macroscopic view such as air pressure, discharge voltage, electrode shape, temperature and discharge frequency
Section, is allowed to as Engineering Service.
8th, capacity usage ratio of the present invention is high.Many micro discharges are had when electrode two ends apply voltage, in ion plasma to lead to
Road r radiuses are about 100I_tm), because the density of passage is big, the Energy distribution of input is non-pooled in many bar microchannels
In certain, capacity usage ratio is then improved.
9th, filamentous trickle Fast pulsed discharge is largely presented in whole discharge space in reaction unit, and current filament is random
It is distributed in region of discharge.Now the discharge type in reaction unit is dielectric impedance filament-like discharges, between interior electrode and medium
Gas is all punctured, and due to the presence of electric contrasted between solid dielectric, is limited freely increasing for discharge current, is also prevented interpolar spark
With the formation of arc light, gas discharge stable under usual atmospheric pressure can be formed.
10th, use condition of the present invention is not harsh.DBD can be used in very wide air pressure, voltage and frequency range, in addition
Because it can form ion plasma in larger region, it is possible to allow have larger gas flow.
11st, good operating stability of the invention, discharge power are big, and reaction unit is simple in construction, and cost is low, and its gap
It is larger, it can reduce the circulating resistance to gas during processing industrial waste gas.
Brief description of the drawings
Fig. 1 is the structural representation of the reaction unit of the present invention；
Fig. 2 is the mounting structure schematic diagram of the reaction unit of the present invention；
Fig. 3 is the reaction unit of present invention structural representation in parallel；
Mounting structure schematic diagram when Fig. 4 is in parallel for the reaction unit of the present invention；
The structural representation that Fig. 5 connects for the reaction unit of the present invention；
Mounting structure schematic diagram when Fig. 6 connects for the reaction unit of the present invention；
Wherein, 1, core electrode rod, 2, dielectric, 3, electrode case, 4, water conservancy diversion module, 5, treat catalyzed gas, 6, insulation
Medium end cap a, 7, dielectric end cap b, 8, driving power supply.
Embodiment
The invention will be further described with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As depicted in figs. 1 and 2, core electrode rod 1, dielectric 2 (can be quartz ampoule or earthenware) and electrode case 3
(including symmetrically arranged two parts) are coaxially arranged, and core electrode rod 1 is located at the center of reaction unit, and dielectric 2 is wrapped up
On the outside of core electrode rod 1 (diameter of core electrode rod 1 can tune up adjustable small), the both sides of dielectric 2 are provided with dielectric end
A6 and dielectric end cap b7 is covered, gap is left between electrode case 3 and core electrode rod 1；The two-stage of reaction unit driving power supply 8
Core electrode rod 1 and electrode case 3 are connected respectively；Water conservancy diversion module 4 is arranged in reaction unit and meets stream direction front end along by catalyzed gas,
The necking center line of water conservancy diversion module 4 in the same plane, is arranged with reaction unit axis parallel to reaction unit axis；Gas to be catalyzed
Body 5 enters in reaction unit perpendicular to the necking center line of water conservancy diversion module 4, stops through core electrode rod 1, and it is two to be waited flow shunt
Road, respectively enters the gap of core electrode rod 1 and electrode case 3, and this gap is reaction unit DBD regions；Complete catalytic reaction
Gas escaped by reaction unit rear aperture.
The gas through-flow sectional area S=2*L* (R-r) of reaction unit construction unit, L are the length of reaction unit, and R is electricity
The radius of pole case 3, r is the radius of core electrode rod 1.Radiai adjustment is by changing core electrode rod 1 and the unit axle of electrode case 3
Realized to the radial difference of length, that is, adjust air cleft height (R-r).Be adjusted axially is by changing reaction unit axial length
Realize, i.e. air cleft length L.
The thickness d of dielectric 2 (quartz ampoule) can be with auxiliary adjustment DBD breakdown voltages and discharge power.
Embodiment 2
Electrode case 3 can also be an entirety, and this is provided with two gas passages on the whole, the two gas passage phases
For the Central Symmetry of core electrode rod 1.
Embodiment 3
As shown in Figure 3 and Figure 4,3 reaction units are arranged in parallel, and the center line of the core electrode rod 1 of each reaction unit is same
In one plane.All reaction unit units of access in parallel of driving power supply 8, the wiring of electrode case 3 and power supply can be by a bus
Pick out, also can side by side be picked out by many power lines.The reaction unit being arranged in parallel can also be to be multiple, such as 3,4,5 with
And it is more.
Embodiment 4
As shown in Figure 5 and Figure 6,2 reaction unit units are arranged in series.It is anti-that the arrangement can be extended to N number of identical
Device is answered to connect, such as 3,4,5 and multiple, only first reaction unit unit setting water conservancy diversion module 4, each reaction unit core
The center line of electrode bar 1 is in the same plane.The N number of reaction unit unit of access in parallel of driving power supply 8, electrode case 3 and power supply
Wiring can be picked out by a bus, also can side by side be picked out by many power lines.
Embodiment 5
Multiple reaction units can also be that the mode of series connection adduction connection constitutes systems array.
Embodiment 6
Multiple reaction units are axially superimposed setting, can be the axially stacking settings of two 2 reactors, or many
It is individual, it is such as 3,4,5 or more.
Although above-mentioned the embodiment of the present invention is described with reference to accompanying drawing, not to invention protection domain
Limitation, one of ordinary skill in the art should be understood that on the basis of technical scheme those skilled in the art are not required to
Pay various modifications or deform still within the scope of the present invention that creative work can make.
Claims (6)
1. a kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device, it is characterised in that：Including core electrode, electrode case,
Dielectric and driving power supply, wherein, the core electrode is coaxially disposed with electrode case, dielectric be arranged on core electrode with
Between electrode case, driving power supply is connected with the core electrode and electrode case respectively, and two are provided with the electrode case
Along electrode hood columella to gas passage, the two gas passages are symmetrical arranged relative to the center line of core electrode；
The electrode case includes symmetrically arranged two parts, and this two parts coordinates, and constitutes gas passage；Electrode case with it is described
The distance between core electrode can be adjusted；
The reaction unit also includes water conservancy diversion module, and the outside of gas passage of the water conservancy diversion module described in one is set；
The electrode case is an entirety.
2. reaction unit according to claim 1, it is characterised in that：The dielectric is shaped as hollow circular cylinder.
3. reaction unit according to claim 2, it is characterised in that：The dielectric is closely linked on core electrode.
4. reaction unit according to claim 3, it is characterised in that：The dielectric is linked on core electrode, and with
Gap is left between core electrode.
5. a kind of cartridge type dielectric barrier discharge low-temperature plasma reaction system, the reaction system is by several claims 1-4
Any described reaction unit is in parallel and/or is in series.
6. a kind of cartridge type dielectric barrier discharge low-temperature plasma reaction system, the reaction system is by several claims 1-4
Any described reaction unit is axially stacking to be formed.
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| CN201510501725.3A CN105032181B (en) | 2015-08-14 | 2015-08-14 | A kind of cartridge type dielectric barrier discharge low-temperature plasma reaction device and reaction system |
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| CN108322985B (en) * | 2018-02-02 | 2023-09-19 | 深圳市诚峰智造有限公司 | Plasma generator |
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| FR2692730B1 (en) * | 1992-06-19 | 1994-08-19 | Air Liquide | Device for forming excited or unstable gas molecules and uses of such a device. |
| CN201997241U (en) * | 2011-04-01 | 2011-10-05 | 浙江工商大学 | Reactor for treating VOCs with plasma cooperating with chemical catalysis |
| KR102124042B1 (en) * | 2013-02-18 | 2020-06-18 | 삼성디스플레이 주식회사 | Vapor deposition apparatus and method for manufacturing organic light emitting display apparatus |
| CN104548925A (en) * | 2015-01-12 | 2015-04-29 | 北京科技大学 | Matrix type dielectric barrier plasma synergistic adsorption/catalytic decomposition denitration device |
| CN205007851U (en) * | 2015-08-14 | 2016-02-03 | 山东电力工程咨询院有限公司 | Cartridge ionic reaction device and reaction systems such as dielectric barrier discharge low temperature |
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