CN105004476B - A kind of pressure sensor systems - Google Patents
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- CN105004476B CN105004476B CN201510444782.2A CN201510444782A CN105004476B CN 105004476 B CN105004476 B CN 105004476B CN 201510444782 A CN201510444782 A CN 201510444782A CN 105004476 B CN105004476 B CN 105004476B
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Abstract
本发明提供了一种压力传感器系统。该压力传感器系统包括:第一支撑板;压力传感器模块,固定于所述第一支撑板上;以及控温加热模块,固定于第一支撑板上,用于检测压力传感模块的工作温度并对其加热,使其维持在一个恒定的工作温度。本发明通过增加硬件成本的方法,使压力传感模块维持在一个恒定的工作温度,从而可以大大简化压力传感器的标定和温度补偿方法。
The invention provides a pressure sensor system. The pressure sensor system includes: a first support plate; a pressure sensor module fixed on the first support plate; and a temperature control heating module fixed on the first support plate for detecting the working temperature of the pressure sensing module and It is heated to maintain a constant working temperature. The invention maintains the pressure sensing module at a constant working temperature by increasing the hardware cost, thereby greatly simplifying the calibration and temperature compensation methods of the pressure sensor.
Description
技术领域technical field
本发明涉及传感器技术领域,尤其涉及一种压力传感器系统。The invention relates to the technical field of sensors, in particular to a pressure sensor system.
背景技术Background technique
压力传感器已经广泛应用于消费电子、工业控制、气象监测等领域,其制备技术已经十分成熟。然而目前的压力传感器在标定与温度方面都存在算法复杂,费时费力的问题。Pressure sensors have been widely used in consumer electronics, industrial control, weather monitoring and other fields, and their preparation technology is very mature. However, the current pressure sensors have complex algorithms, time-consuming and labor-intensive problems in terms of calibration and temperature.
以消费电子领域常用的ST压阻式压力传感器LPS25HB为例,其标定与温度补偿过程,需要在三个温度点和两个压强点下标定完成,已经相当简化,但仍然比较复杂。工业控制和气象领域压力传感器的标定与温度补偿就更复杂了。为了在一个较宽温度范围内获得较好的气压测量精度,压阻式气压传感器需要在每个10度或者更小的温度间隔下,测试1100hPa、1013hPa、950hPa、900hPa、850hPa等压强点,以期获得一个很好的二维拟合曲线。Taking the commonly used ST piezoresistive pressure sensor LPS25HB in the field of consumer electronics as an example, its calibration and temperature compensation process needs to be calibrated at three temperature points and two pressure points, which is quite simplified, but still relatively complicated. The calibration and temperature compensation of pressure sensors in industrial control and meteorological fields are more complicated. In order to obtain better air pressure measurement accuracy in a wide temperature range, the piezoresistive air pressure sensor needs to test pressure points such as 1100hPa, 1013hPa, 950hPa, 900hPa, 850hPa at each temperature interval of 10 degrees or less, in order to Obtain a nice 2D fit curve.
发明内容Contents of the invention
(一)要解决的技术问题(1) Technical problems to be solved
鉴于上述技术问题,本发明提供了一种压力传感器系统,以通过硬件方式简化压力传感器的标定和温度补偿方法。In view of the above technical problems, the present invention provides a pressure sensor system to simplify the calibration and temperature compensation methods of the pressure sensor through hardware.
(二)技术方案(2) Technical solution
本发明压力传感器系统包括:第一支撑板7;压力传感器模块2,固定于所述第一支撑板7上;以及控温加热模块3,固定于第一支撑板7上,用于检测压力传感模块2的工作温度并对其加热,使其维持在一个恒定的工作温度。The pressure sensor system of the present invention includes: a first support plate 7; a pressure sensor module 2 fixed on the first support plate 7; and a temperature control heating module 3 fixed on the first support plate 7 for detecting pressure transmission. Sensing the operating temperature of the module 2 and heating it to maintain a constant operating temperature.
(三)有益效果(3) Beneficial effects
从上述技术方案可以看出,本发明压力传感器系统通过增加硬件成本的方法,使压力传感模块维持在一个恒定的工作温度,从而可以大大简化压力传感器的标定和温度补偿方法。It can be seen from the above technical solutions that the pressure sensor system of the present invention maintains the pressure sensing module at a constant working temperature by increasing the hardware cost, thereby greatly simplifying the calibration and temperature compensation methods of the pressure sensor.
附图说明Description of drawings
图1为根据本发明实施例压阻式压力传感器系统的结构示意图。FIG. 1 is a schematic structural diagram of a piezoresistive pressure sensor system according to an embodiment of the present invention.
【主要元件】【Main components】
1-隔热外壳;1- Insulation shell;
101-阻热材料;101 - heat-resistant material;
2-压力传感器模块;2- Pressure sensor module;
201-压力外封装壳体; 202-压力敏感元件;201-pressure outer packaging shell; 202-pressure sensitive element;
3-控温加热模块;3-Temperature control heating module;
301-加热电阻; 302-控温电路; 303-有机胶;301-heating resistance; 302-temperature control circuit; 303-organic glue;
4-微控制检测模块; 5-电源模块;4-micro-control detection module; 5-power supply module;
6-电路连接柱; 7-第一印刷电路板;6-circuit connection column; 7-first printed circuit board;
8-第二印刷电路板。8 - Second printed circuit board.
具体实施方式Detailed ways
本发明压力传感器系统通过增加系统的复杂度,也就是在压力传感器系统中适当的位置增加加热模块,并使压力传感器核心元件压力敏感部分至于隔热箱中,来使压力传感器工作于一个恒定的温度下,最终实现只标定两个压强点就可完成压力传感器标定过程的目标。The pressure sensor system of the present invention makes the pressure sensor work at a constant temperature by increasing the complexity of the system, that is, adding a heating module at an appropriate position in the pressure sensor system, and placing the pressure sensitive part of the core component of the pressure sensor in the heat shield box. temperature, the goal of completing the calibration process of the pressure sensor can be achieved by only calibrating two pressure points.
为使本发明的目的、技术方案和优点更加清楚明白,以下结合具体实施例,并参照附图,对本发明进一步详细说明。In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
在本发明的一个示例性实施例中,提供了一种压阻式压力传感器系统。图1为根据本发明实施例压阻式压力传感器系统的结构示意图。如图1所示,本实施例压阻式压力传感器系统包括:隔热外壳1,其形成一隔热腔体;印刷电路板组,包括第一印刷电路板7和第二印刷电路板8,两者通过电路连接柱6相连,其中,第二印刷电路板8固定于隔热腔体的下表面;压力传感器模块2,固定于第一印刷电路板7的上表面;控温加热模块3,固定于第一印刷电路板7的下表面;微控制检测模块4,固定于第二印刷电路板8上;电源模块5,固定于第二印刷电路板8上。In one exemplary embodiment of the invention, a piezoresistive pressure sensor system is provided. FIG. 1 is a schematic structural diagram of a piezoresistive pressure sensor system according to an embodiment of the present invention. As shown in Figure 1, the piezoresistive pressure sensor system of this embodiment includes: a heat-insulating housing 1, which forms a heat-insulating cavity; a printed circuit board group, including a first printed circuit board 7 and a second printed circuit board 8, The two are connected through the circuit connection column 6, wherein the second printed circuit board 8 is fixed on the lower surface of the heat insulation cavity; the pressure sensor module 2 is fixed on the upper surface of the first printed circuit board 7; the temperature control heating module 3, It is fixed on the lower surface of the first printed circuit board 7 ; the micro-control detection module 4 is fixed on the second printed circuit board 8 ; the power supply module 5 is fixed on the second printed circuit board 8 .
以下对本实施例压阻式压力传感器系统的各个组成部分进行详细说明。Each component of the piezoresistive pressure sensor system of this embodiment will be described in detail below.
其中隔热外壳1中填充有阻热材料101,例如是泡沫材料,从而为其他元件提供一稳定的隔热环境,从而使压力传感器核心元件压力敏感部分置于该隔热环境中。The heat-insulating shell 1 is filled with a heat-resistant material 101 , such as a foam material, so as to provide a stable heat-insulating environment for other components, so that the pressure-sensitive part of the core component of the pressure sensor is placed in the heat-insulating environment.
该压力传感器模块2包括:压力外封装壳体201和压力敏感元件202。其中,压力敏感元件202位于压力外封装壳体201所限定的空间内。本实施例中,压力敏感元件202为压阻式压力传感器,但本发明并不以此为限,该压力敏感元件也可为电容式压力传感器或其他压力传感器。The pressure sensor module 2 includes: a pressure outer package casing 201 and a pressure sensitive element 202 . Wherein, the pressure sensitive element 202 is located in the space defined by the pressure outer packaging casing 201 . In this embodiment, the pressure sensitive element 202 is a piezoresistive pressure sensor, but the present invention is not limited thereto, and the pressure sensitive element can also be a capacitive pressure sensor or other pressure sensors.
第一印制电路板7和第二印制电路板8为通用印制电路板,两者通过电路连接柱6连接。印刷电路板和电路连接柱均为本领域内的通用部件,此处不再详细说明。The first printed circuit board 7 and the second printed circuit board 8 are common printed circuit boards, and the two are connected through the circuit connection post 6 . Both the printed circuit board and the circuit connection post are common components in the field, and will not be described in detail here.
控温加热模块3包括:加热电阻301、控温电路302和有机胶303。加热电阻301为通用大功率低阻值电阻,其贴合于第一印刷电路板7的下表面。控温电路302为通用可测温并输出控制信号的电路或专用集成电路芯片,有机胶303可为硅橡胶等中等硬度胶。控温电路中,芯片和电路元器件固定在第一印刷电路板7上,电路连接部分在第二印刷电路板上形成。同样,加热电阻301也固定在第一印刷电路板7上。有机胶303将加热电阻301和控温电路302封装起来,与其他部件隔离。The temperature control heating module 3 includes: a heating resistor 301 , a temperature control circuit 302 and an organic glue 303 . The heating resistor 301 is a general-purpose high-power low-resistance resistor, which is attached to the lower surface of the first printed circuit board 7 . The temperature control circuit 302 is a general-purpose circuit or an application-specific integrated circuit chip capable of measuring temperature and outputting a control signal, and the organic glue 303 can be medium-hard glue such as silicone rubber. In the temperature control circuit, chips and circuit components are fixed on the first printed circuit board 7, and the circuit connection part is formed on the second printed circuit board. Likewise, the heating resistor 301 is also fixed on the first printed circuit board 7 . The organic glue 303 encapsulates the heating resistor 301 and the temperature control circuit 302 to isolate them from other components.
本实施例中,压力传感器模块2、控温加热模块3以及第一印制电路板层7采用层叠方式放置。然而需要说明的是,除了本实施例的层叠顺序之外,三者的层叠顺序还可以压力传感器模块2-控温加热模块3-第一印制电路板层7。In this embodiment, the pressure sensor module 2 , the temperature control heating module 3 and the first printed circuit board layer 7 are placed in a stacked manner. However, it should be noted that, in addition to the stacking sequence of this embodiment, the stacking sequence of the three can also be pressure sensor module 2 - temperature control heating module 3 - first printed circuit board layer 7 .
微控制检测模块4和电源模块5焊接在第二印制电路板8上。微控制检测模块4为通用微运算单元。电源模块5为通用电源产生电路或专用芯片。该电源模块5给微控制检测模块4与控温加热模块3供电。The micro-control detection module 4 and the power supply module 5 are welded on the second printed circuit board 8 . The micro-control detection module 4 is a general-purpose micro-operation unit. The power module 5 is a general power generation circuit or a dedicated chip. The power supply module 5 supplies power to the micro-control detection module 4 and the temperature control heating module 3 .
本实施例压阻式压力传感器系统在实际应用时,电源模块同时给微控制检测模块与控温加热模块供电,控温加热模块一边检测压力传感器工作实际温度一边控制加热模块的加热量,使压力传感器维持在一个恒定的工作温度,微控制检测模块实现压力传感器信号检测并解调以及通过PID算法给控温加热模块提供控温参数,实现简化压力传感器标定补偿过程的简化,最终实现只标定两个压强点就可完成压力传感器标定过程的目标。In the actual application of the piezoresistive pressure sensor system of this embodiment, the power supply module supplies power to the micro-control detection module and the temperature control heating module at the same time. The temperature control heating module controls the heating amount of the heating module while detecting the actual working temperature of the pressure sensor, so that the pressure The sensor is maintained at a constant working temperature. The micro-control detection module realizes the signal detection and demodulation of the pressure sensor and provides temperature control parameters to the temperature control heating module through the PID algorithm, which simplifies the process of calibration and compensation of the pressure sensor, and finally realizes only two calibrations. The goal of the pressure sensor calibration process can be completed by only one pressure point.
至此,已经结合附图对本发明实施例进行了详细描述。依据以上描述,本领域技术人员应当对本发明压阻式压力传感器系统有了清楚的认识。So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings. Based on the above description, those skilled in the art should have a clear understanding of the piezoresistive pressure sensor system of the present invention.
需要说明的是,在附图或说明书正文中,未绘示或描述的实现方式,均为所属技术领域中普通技术人员所知的形式,并未进行详细说明。此外,上述对各元件和方法的定义并不仅限于实施例中提到的各种具体结构、形状或方式,本领域普通技术人员可对其进行简单地更改或替换。It should be noted that, in the accompanying drawings or in the text of the specification, implementations that are not shown or described are forms known to those of ordinary skill in the art, and are not described in detail. In addition, the above definitions of each element and method are not limited to the various specific structures, shapes or methods mentioned in the embodiments, and those skilled in the art can easily modify or replace them.
综上所述,本发明通过增加一些硬件成本的方法,可以大大简化压力传感器的标定和温度补偿方法,适用于需求在一个较宽温度范围内有较好测量精度的气压传感器的领域,如工业控制、气象监测等领域,具有较好的推广应用前景。To sum up, the present invention can greatly simplify the calibration and temperature compensation methods of the pressure sensor by increasing some hardware costs, and is applicable to the fields requiring a barometric pressure sensor with better measurement accuracy in a wider temperature range, such as industrial Control, meteorological monitoring and other fields, has a good prospect of popularization and application.
以上所述的具体实施例,对本发明的目的、技术方案和有益效果进行了进一步详细说明,所应理解的是,以上所述仅为本发明的具体实施例而已,并不用于限制本发明,凡在本发明的精神和原则之内,所做的任何修改、等同替换、改进等,均应包含在本发明的保护范围之内。The specific embodiments described above have further described the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above descriptions are only specific embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the protection scope of the present invention.
Claims (9)
- A kind of 1. pressure sensor systems, it is characterised in that including:First supporting plate (7);Pressure sensor module (2), it is fixed on first supporting plate (7);AndTemperature control heating module (3), it is fixed in the first supporting plate (7), for detecting the operating temperature of pressure sensor module (2) And it is heated, it is maintained a constant operating temperature;Thermally insulating housing (1), form a heat-insulated cavity;First supporting plate (7), pressure sensor module (2) and temperature control heating module (3) are both secured in the heat-insulation chamber body.
- 2. pressure sensor systems according to claim 1, it is characterised in that:The pressure sensor module (2) and temperature control heating module (3) are both secured to the upper surface of the first supporting plate (7);OrThe pressure sensor module (2) and temperature control heating module (3) are individually fixed in the upper surface of first supporting plate (7) And lower surface.
- 3. pressure sensor systems according to claim 1, it is characterised in that the temperature control heating module (3) includes:Add Thermal resistance (301), temperature-adjusting circuit (302) and organic gel (303);Wherein, the adding thermal resistance (301) fits in the lower surface of the first supporting plate (7);The temperature-adjusting circuit (302) is to survey The circuit or dedicated IC chip of temperature and output control signal;The organic gel (303) by the adding thermal resistance (301) and Temperature-adjusting circuit (302) is encapsulated in the lower surface of first supporting plate (7).
- 4. pressure sensor systems according to claim 1, it is characterised in that filled with resistance in the thermally insulating housing (1) Hot material (101).
- 5. pressure sensor systems according to claim 1, it is characterised in that also include:Second supporting plate (8), the lower section of the first supporting plate (7) is fixed on by circuit connecting pole (6);Micro-control module (4), it is fixed on second supporting plate (8), it gives the temperature control heating module by pid algorithm (3) temperature control parameter is provided.
- 6. pressure sensor systems according to claim 5, it is characterised in that:First supporting plate (7) and second supporting plate (8) are printed circuit board (PCB);The micro-control module (4), it is additionally operable to realize detection and the solution of the pressure sensor signal of pressure sensor module (2) output Adjust.
- 7. pressure sensor systems according to claim 5, it is characterised in that also include:Power module, it is fixed on second supporting plate (8), for for the temperature control heating module (3) and micro-control module (4) power.
- 8. pressure sensor systems according to any one of claim 1 to 7, it is characterised in that the pressure sensor Module (2) includes:Pressure outer package housing (201) and pressure-sensing device (202);Wherein, the pressure-sensing device (202) is located in the space that the pressure outer package housing (201) is limited.
- 9. pressure sensor systems according to claim 8, it is characterised in that the pressure-sensing device (202) is pressure Resistance pressure transducer or capacitance pressure transducer,.
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| CN107894297B (en) * | 2017-11-07 | 2020-02-18 | 无锡必创传感科技有限公司 | Pressure sensor chip and manufacturing method thereof |
| CN111060236A (en) * | 2018-10-17 | 2020-04-24 | 北京自动化控制设备研究所 | Silicon piezoresistive pressure sensor packaging assembly structure |
| US11248979B2 (en) * | 2019-09-25 | 2022-02-15 | Whirlpool Corporation | Feature in vacuum insulated structure to allow pressure monitoring |
| CN111238698B (en) * | 2020-02-27 | 2021-10-22 | 中国科学院微电子研究所 | A built-in self-test device and test method of a MEMS piezoresistive sensor |
| CN111880585B (en) * | 2020-07-23 | 2024-08-06 | 昆山迈致治具科技有限公司 | Temperature control board |
| CN111982194B (en) * | 2020-08-18 | 2023-03-28 | 成都一通密封股份有限公司 | Wireless pressure and temperature integrated sensor |
| CN112378553B (en) * | 2020-11-06 | 2023-01-17 | 北京自动化控制设备研究所 | A silicon piezoresistive pressure sensor calibrated by online temperature control and its temperature calibration method |
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