CN104885217A - Multiple die stacking for two or more die - Google Patents
Multiple die stacking for two or more die Download PDFInfo
- Publication number
- CN104885217A CN104885217A CN201380067609.4A CN201380067609A CN104885217A CN 104885217 A CN104885217 A CN 104885217A CN 201380067609 A CN201380067609 A CN 201380067609A CN 104885217 A CN104885217 A CN 104885217A
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- microelectronic element
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- module
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06K—GRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
- G06K19/00—Record carriers for use with machines and with at least a part designed to carry digital markings
- G06K19/06—Record carriers for use with machines and with at least a part designed to carry digital markings characterised by the kind of the digital marking, e.g. shape, nature, code
- G06K19/067—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components
- G06K19/07—Record carriers with conductive marks, printed circuits or semiconductor circuit elements, e.g. credit or identity cards also with resonating or responding marks without active components with integrated circuit chips
- G06K19/077—Constructional details, e.g. mounting of circuits in the carrier
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Abstract
一种微电子封装(1310)可包括具有第一表面和第二表面(1341,1342)的衬底(1340),以及第一微电子元件和第二微电子元件(1320,1330)。衬底(1340)可具有在第一表面(1341)处的多个衬底触点(1347a,1347b)和在第二表面(1342)处的多个端子(1350)。微电子元件(1320,1330)的元件触点(1324,1334)可与相应的衬底触点(1347a,1347b)相联接。第二微电子元件(1330)的前表面(1331)可部分地覆盖且附接至第一微电子元件(1320)的后表面(1322)。第一微电子元件(1320)的元件触点(1324)可布置在面阵中且与衬底触点(1347a)倒装芯片键合。第二微电子元件(1330)的元件触点(1334)可通过导电块(1375)与衬底触点(1347b)相联接。
A microelectronic package (1310) can include a substrate (1340) having first and second surfaces (1341, 1342), and first and second microelectronic elements (1320, 1330). The substrate (1340) may have a plurality of substrate contacts (1347a, 1347b) at the first surface (1341) and a plurality of terminals (1350) at the second surface (1342). Component contacts (1324, 1334) of microelectronic components (1320, 1330) may be coupled to corresponding substrate contacts (1347a, 1347b). The front surface (1331) of the second microelectronic element (1330) may partially cover and be attached to the rear surface (1322) of the first microelectronic element (1320). The element contacts (1324) of the first microelectronic element (1320) may be arranged in an area array and flip-chip bonded to the substrate contacts (1347a). The element contacts (1334) of the second microelectronic element (1330) can be coupled to the substrate contacts (1347b) through conductive bumps (1375).
Description
相关申请的交叉引用Cross References to Related Applications
本申请是2012年10月23日提交的美国专利申请No.13/658,401的继续申请,美国专利申请No.13/658,401是2011年11月29日提交的美国专利申请No.13/306,203的部分继续申请,美国专利申请No.13/306,203要求2011年4月21日提交的美国临时专利申请No.61/477,820的权益,其公开内容通过引用并入本文。以下的共同所有的申请通过引用并入本文,包括:均在2011年4月21日申请的美国临时专利申请61/477,877、61/477/883以及61/477,967。This application is a continuation of U.S. Patent Application No. 13/658,401, filed October 23, 2012, which is a part of U.S. Patent Application No. 13/306,203, filed November 29, 2011 Continuing the application, US Patent Application No. 13/306,203 claims the benefit of US Provisional Patent Application No. 61/477,820, filed April 21, 2011, the disclosure of which is incorporated herein by reference. The following commonly owned applications are incorporated herein by reference, including: US Provisional Patent Applications 61/477,877, 61/477/883, and 61/477,967, all filed April 21, 2011.
背景技术Background technique
本发明涉及堆叠微电子组件,制造这种组件的方法,以及用于这种组件的部件。The present invention relates to stacked microelectronic assemblies, methods of making such assemblies, and components for such assemblies.
半导体芯片通常设为单独的预封装单元。标准芯片具有带有大的前面的扁平矩形体,该前面具有连接到芯片的内部电路的触点。每个单独的芯片典型地安装在封装中,封装再安装在电路板例如印制电路板上,封装将芯片的触点连接到电路板的导体。在很多常规的设计中,芯片封装在电路板中占用的面积比芯片本身的面积大很多。Semiconductor chips are usually provided as individual prepackaged units. A standard chip has a flat rectangular body with a large front face that has contacts that connect to the chip's internal circuitry. Each individual chip is typically mounted in a package, which is then mounted on a circuit board, such as a printed circuit board, and the package connects the contacts of the chip to the conductors of the circuit board. In many conventional designs, the chip package occupies a much larger area on the circuit board than the chip itself.
如参考具有前面的扁平芯片的本公开中所使用的“芯片的面积”应被理解为指的是所述前面的面积。在“倒装芯片”设计中,芯片的前面面对封装衬底的面,即,通过焊球或其他连接元件将芯片载体与芯片上的触点直接键合到芯片载体的触点。通过覆盖芯片的前面的端子又可以将芯片载体键合到电路板。“倒装芯片”设计提供相对紧凑的布置;每个芯片占用的电路板的面积等于或稍大于芯片的前面的面积,例如在共同转让的美国专利5,148,265、5,148,266和5,679,977中的某些实施例中所公开的,其全部公开内容通过引用并入本文。"Area of a chip" as used in this disclosure with reference to a flat chip having a front should be understood to refer to the area of said front. In a "flip-chip" design, the front side of the chip faces the side of the package substrate, ie, the chip carrier is bonded directly to the contacts on the chip carrier via solder balls or other connecting elements. The chip carrier can in turn be bonded to the circuit board by covering the terminals on the front of the chip. The "flip-chip" design provides a relatively compact arrangement; each chip occupies an area of the circuit board equal to or slightly larger than the front face of the chip, such as in certain embodiments of commonly assigned U.S. Patents 5,148,265, 5,148,266, and 5,679,977 disclosed, the entire disclosure of which is incorporated herein by reference.
某些创新的安装技术提供的紧密度接近或等于常规倒装芯片键合的紧密度。可以在等于或稍大于芯片本身的面积的电路板的面积中容置单个芯片的封装通常被称为“芯片级封装”。Certain innovative mounting techniques provide closeness close to or equal to that of conventional flip-chip bonding. A package that can accommodate a single chip in an area of a circuit board that is equal to or slightly larger than the area of the chip itself is commonly referred to as a "chip scale package."
除了最小化被微电子组件占用的电路板的平面面积,还需要生产一种垂直于电路板平面的整体高度或尺寸较小的芯片封装。这种薄的微电子封装允许将其中安装有封装的电路板紧挨着相邻结构放置,由此减小包含电路板的产品的整体尺寸。In addition to minimizing the board's planar area occupied by the microelectronic components, there is a need to produce a chip package with a reduced overall height or size perpendicular to the board's plane. Such thin microelectronic packages allow the circuit board in which the package is mounted to be placed in close proximity to adjacent structures, thereby reducing the overall size of the product containing the circuit board.
已经提出用于在单个封装或模块中设置多个芯片的各种提议。在常规的“多芯片模块”中,芯片并排地安装在单个封装衬底上,然后可以将该封装衬底安装至电路板。这种方法只是提供芯片所占用的电路板的总面积的有限减小。总面积仍然大于模块中各个芯片的总表面积。Various proposals have been made for arranging multiple chips in a single package or module. In conventional "multi-chip modules," chips are mounted side-by-side on a single packaging substrate, which can then be mounted to a circuit board. This approach provides only a limited reduction in the overall area of the circuit board occupied by the chip. The total area is still larger than the total surface area of the individual chips in the module.
还已经提出将多个芯片封装在“堆叠”布置(即多个芯片放置成一个在另一个之上的布置)中。在堆叠布置中,可以将多个芯片安装在比芯片的总面积小的电路板的面积中。例如,在上述的美国专利5,679,977、5,148,265以及5,347,159的某些实施例中公布了一些堆叠芯片布置,其全部公开内容通过引用并入本文。也通过引用并入本文的美国专利4,941,033公开一种布置,其中芯片一个在另一个之上地堆叠,且通过与芯片相关联的所谓的“布线膜”上的导体彼此互连。It has also been proposed to package multiple chips in a "stacked" arrangement (ie an arrangement in which multiple chips are placed one above the other). In a stacked arrangement, multiple chips can be mounted in an area of the circuit board that is smaller than the total area of the chips. For example, stacked die arrangements are disclosed in certain embodiments in the aforementioned US Patents 5,679,977, 5,148,265, and 5,347,159, the entire disclosures of which are incorporated herein by reference. US Patent 4,941,033, also incorporated herein by reference, discloses an arrangement in which chips are stacked one on top of the other and are interconnected to each other by conductors on a so-called "wiring film" associated with the chips.
尽管多芯片封装已取得一定发展,但为了使其尺寸最小化及提高其性能,仍需要进一步的改进。本发明的特点将通过以下描述的微电子组件的构造实现。Although multi-chip packaging has made some progress, further improvements are still needed in order to minimize its size and improve its performance. The features of the present invention will be realized by the construction of the microelectronic assembly described below.
发明内容Contents of the invention
根据本发明的方面,一种微电子封装可包括具有相对的第一表面及第二表面的衬底,以及具有面对衬底的第一表面的前表面的第一微电子元件和第二微电子元件。衬底可具有在第一表面处的多个衬底触点和在第二表面处的多个端子,用于将微电子封装连接至封装外部的至少一个部件。每个微电子元件具有在其前表面处的多个元件触点。每个微电子元件的元件触点可与相应的衬底触点相联接。第二微电子元件的前表面可部分地覆盖且附接至第一微电子元件的后表面。第一微电子元件的元件触点可布置在面阵中且与第一组衬底触点倒装芯片键合。第二微电子元件的元件触点可通过导电块与第二组衬底触点相联接。According to aspects of the invention, a microelectronic package may include a substrate having opposing first and second surfaces, and a first microelectronic element and a second microelectronic element having a front surface facing the first surface of the substrate. Electronic component. The substrate can have a plurality of substrate contacts at the first surface and a plurality of terminals at the second surface for connecting the microelectronic package to at least one component external to the package. Each microelectronic element has a plurality of element contacts at its front surface. The element contacts of each microelectronic element can be coupled with corresponding substrate contacts. The front surface of the second microelectronic element can partially cover and be attached to the rear surface of the first microelectronic element. The element contacts of the first microelectronic element can be arranged in an area array and flip-chip bonded to the first set of substrate contacts. The element contacts of the second microelectronic element can be coupled to the second set of substrate contacts through the conductive bumps.
在一个特定示例中,第二微电子元件的元件触点可突出于第一微电子元件的侧边缘之外。在一个实施例中,第一微电子元件和第二微电子元件中的至少一个包括存储器元件。在一个示例性实施例中,微电子封装还可包括从至少一些衬底触点延伸至端子的多个引线。该引线可用于携载地址信号以在第一微电子元件和第二微电子元件中的至少一个中对存储器元件寻址。在一个示例中,至少一些端子可用于携载各个端子与第一微电子元件和第二微电子元件中的每个之间的信号或参考电位中的至少一个。In one particular example, the element contacts of the second microelectronic element can protrude beyond the side edges of the first microelectronic element. In one embodiment, at least one of the first microelectronic element and the second microelectronic element includes a memory element. In an exemplary embodiment, the microelectronic package may also include a plurality of leads extending from at least some of the substrate contacts to the terminals. The leads can be used to carry address signals to address the memory element in at least one of the first microelectronic element and the second microelectronic element. In one example, at least some of the terminals can be used to carry at least one of a signal or a reference potential between the respective terminal and each of the first and second microelectronic elements.
在一个实施例中,微电子封装还可包括多个第三微电子元件,每个第三微电子元件电连接至衬底。在一个特定示例中,多个第三微电子元件可布置成堆叠结构,每个第三微电子元件具有与一个相邻的第三微电子元件的前表面或后表面相面对的前表面或后表面。在一个实施例中,多个第三微电子元件可布置成平面结构,每个第三微电子元件具有与一个相邻的第三微电子元件的外围表面相面对的外围表面。In one embodiment, the microelectronic package may further include a plurality of third microelectronic elements, each third microelectronic element being electrically connected to the substrate. In a specific example, a plurality of third microelectronic elements can be arranged in a stacked structure, each third microelectronic element having a front surface or a front surface or a rear surface facing an adjacent third microelectronic element. back surface. In one embodiment, a plurality of third microelectronic elements may be arranged in a planar configuration, each third microelectronic element having a peripheral surface facing a peripheral surface of an adjacent third microelectronic element.
在一个示例性实施例中,第二微电子元件可包括易失性RAM,每个第三微电子元件可包括非易失性闪存,且第一微电子元件可包括主要用于控制外部组件与第二微电子元件和第三微电子元件之间的数据传送的处理器。在一个示例中,第二微电子元件可包括易失性帧缓冲存储器元件,每个第三微电子元件可包括非易失性闪存,且第一微电子元件可包括图形处理器。In one exemplary embodiment, the second microelectronic element can include volatile RAM, each third microelectronic element can include non-volatile flash memory, and the first microelectronic element can include A processor for data transfer between the second microelectronic element and the third microelectronic element. In one example, the second microelectronic element can include a volatile frame buffer memory element, each third microelectronic element can include a non-volatile flash memory, and the first microelectronic element can include a graphics processor.
在一个特定实施例中,一种系统可包括多个上述微电子封装、电路板和处理器。微电子封装的端子与电路板的板触点电连接。每个微电子封装可用于在时钟周期内传送N个并行数据位,处理器可用于在时钟周期内传送M个并行数据位,且M大于或等于N。在一个特定示例中,一种系统可包括一个上述微电子封装,以及电连接至该微电子封装的一个或多个其他电子部件。在一个实施例中,系统还可包括壳体,上述微电子封装和其他电子部件安装至该壳体。In a particular embodiment, a system may include a plurality of the above-described microelectronic packages, circuit boards, and processors. The terminals of the microelectronic package are electrically connected to the board contacts of the circuit board. Each microelectronic package can be used to transfer N parallel data bits in a clock cycle, and the processor can be used to transfer M parallel data bits in a clock cycle, and M is greater than or equal to N. In a particular example, a system may include a microelectronic package as described above, and one or more other electronic components electrically connected to the microelectronic package. In one embodiment, the system may also include a housing to which the above-described microelectronic package and other electronic components are mounted.
根据本发明的另一方面,一种模块可包括具有第一表面和第二表面的模块卡,第一微电子元件和第二微电子元件具有面对模块卡的第一表面的前表面。模块卡可具有多个平行的暴露的边缘触点,该边缘触点邻近第一表面和第二表面中的至少一个的边缘,用于当模块插入插口时,与插口相应的触点对接。模块卡可具有在第一表面上的多个卡触点。每个微电子元件可具有在其前表面处的多个元件触点。每个微电子元件的元件触点可与相应的卡触点相联接。第二微电子元件的前表面可部分地覆盖且附接至第一微电子元件的后表面。第一微电子元件的元件触点可布置在面阵中且与第一组卡触点倒装芯片键合。第二微电子元件的元件触点通过导电块与第二组卡触点相联接。According to another aspect of the invention, a module may include a module card having a first surface and a second surface, the first microelectronic element and the second microelectronic element having a front surface facing the first surface of the module card. The module card may have a plurality of parallel exposed edge contacts adjacent an edge of at least one of the first and second surfaces for mating with corresponding contacts of the receptacle when the module is inserted into the receptacle. The module card may have a plurality of card contacts on the first surface. Each microelectronic element may have a plurality of element contacts at its front surface. The element contacts of each microelectronic element can be coupled with corresponding card contacts. The front surface of the second microelectronic element can partially cover and be attached to the rear surface of the first microelectronic element. The element contacts of the first microelectronic element may be arranged in an area array and flip-chip bonded to the first set of card contacts. The component contacts of the second microelectronic component are coupled to the second set of card contacts through the conductive bumps.
在一个示例性实施例中,第二微电子元件的元件触点可突出于第一微电子元件的侧边缘之外。在一个示例中,边缘触点可暴露在模块卡的第一表面或第二表面中的至少一个处。在一个特定实施例中,第一微电子元件和第二微电子元件中的至少一个可包括存储器元件。在一个实施例中,模块可包括从至少一些卡触点延伸至边缘触点的多个引线。该引线可用于携载地址信号以在第一微电子元件和第二微电子元件中的至少一个中对存储器元件寻址。在一个特定示例中,至少一些边缘触点可用于携载各个边缘触点与第一微电子元件和第二微电子元件中的每个之间的信号或参考电位中的至少一个。In one exemplary embodiment, the element contacts of the second microelectronic element may protrude beyond the side edges of the first microelectronic element. In one example, the edge contacts may be exposed at at least one of the first surface or the second surface of the module card. In a particular embodiment, at least one of the first microelectronic element and the second microelectronic element can include a memory element. In one embodiment, a module may include a plurality of leads extending from at least some of the card contacts to the edge contacts. The leads can be used to carry address signals to address the memory element in at least one of the first microelectronic element and the second microelectronic element. In one particular example, at least some of the edge contacts can be used to carry at least one of a signal or a reference potential between the respective edge contact and each of the first and second microelectronic elements.
在一个特定示例中,模块还可包括多个第三微电子元件,每个第三微电子元件电连接至模块卡。在一个示例中,多个第三微电子元件可布置成堆叠结构,每个第三微电子元件具有与一个相邻的第三微电子元件的前表面或后表面相面对的前表面或后表面。在一个特定实施例中,多个第三微电子元件可布置成平面结构,每个第三微电子元件具有与一个相邻的第三微电子元件的外围表面相面对的外围表面。In one particular example, the module may also include a plurality of third microelectronic elements, each third microelectronic element being electrically connected to the module card. In one example, a plurality of third microelectronic elements may be arranged in a stacked structure, each third microelectronic element having a front surface or a rear surface facing a front surface or a rear surface of an adjacent third microelectronic element. surface. In a particular embodiment, a plurality of third microelectronic elements may be arranged in a planar configuration, each third microelectronic element having a peripheral surface facing a peripheral surface of an adjacent third microelectronic element.
在一个实施例中,第二微电子元件可包括易失性RAM,每个第三微电子元件可包括非易失性闪存,且第一微电子元件可包括主要用于控制外部组件与第二微电子元件和第三微电子元件之间的数据传送的处理器。在一个特定示例中,第二微电子元件可包括易失性帧缓冲存储器元件,每个第三微电子元件可包括非易失性闪存,且第一微电子元件可包括图形处理器。In one embodiment, the second microelectronic element can include volatile RAM, each third microelectronic element can include non-volatile flash memory, and the first microelectronic element can include a A processor for data transfer between the microelectronic element and the third microelectronic element. In one particular example, the second microelectronic element can include a volatile frame buffer memory element, each third microelectronic element can include a non-volatile flash memory, and the first microelectronic element can include a graphics processor.
在一个示例性实施例中,一种系统可包括多个上述的模块、电路板和处理器。模块的暴露的触点插入至与电路板电连接的对接插口。每个模块用于在时钟周期内传送N个并行数据位,处理器用于在时钟周期内传送M个并行数据位,且M大于或等于N。在一个示例中,一种系统可包括上述的模块,以及电连接至该模块的一个或多个其他电子部件。在一个特定实施例中,系统还可包括壳体,上述模块和其他电子部件安装至该壳体。In an exemplary embodiment, a system may include a plurality of the modules, circuit boards and processors described above. The exposed contacts of the module are plugged into mating sockets that are electrically connected to the circuit board. Each module is used to transmit N parallel data bits in a clock cycle, and the processor is used to transmit M parallel data bits in a clock cycle, and M is greater than or equal to N. In one example, a system may include the module described above, and one or more other electronic components electrically connected to the module. In a particular embodiment, the system may also include a housing to which the aforementioned modules and other electronic components are mounted.
附图说明Description of drawings
图1A是根据本发明实施例的堆叠微电子组件的示意性剖视图;1A is a schematic cross-sectional view of a stacked microelectronic assembly according to an embodiment of the present invention;
图1B是沿着图1A中的线1B-1B的图1A的堆叠组件的仰剖视图;1B is a bottom cross-sectional view of the stack assembly of FIG. 1A along line 1B-1B in FIG. 1A;
图1C是沿着图1B中的线1C-1C的图1B的堆叠组件的侧剖视图;1C is a side cross-sectional view of the stacked assembly of FIG. 1B along line 1C-1C in FIG. 1B;
图2是根据另一个实施例的具有倒装芯片键合的微电子元件的堆叠微电子组件的示意性剖视图;2 is a schematic cross-sectional view of a stacked microelectronic assembly having flip-chip bonded microelectronic elements according to another embodiment;
图3是根据另一个实施例的具有面朝上的微电子元件的堆叠微电子组件的示意性剖视图;3 is a schematic cross-sectional view of a stacked microelectronic assembly with upward facing microelectronic elements according to another embodiment;
图4是根据另一个实施例的具有模块卡中单个开口以供线键合延伸穿过附接至两个微电子元件的堆叠微电子组件的示意性剖视图。4 is a schematic cross-sectional view of a stacked microelectronic assembly having a single opening in a module card for wire bonds to extend through attached to two microelectronic elements, according to another embodiment.
图5是根据另一个实施例的具有引线键合的堆叠微电子组件的示意性剖视图;5 is a schematic cross-sectional view of a stacked microelectronic assembly with wire bonds according to another embodiment;
图6是根据另一个实施例的具有加长的焊料触点的堆叠微电子组件的示意性剖视图;6 is a schematic cross-sectional view of a stacked microelectronic assembly with elongated solder contacts according to another embodiment;
图7A是根据另一个实施例的具有带有位于其边缘附近的触点的微电子元件的堆叠微电子组件的示意性剖视图;7A is a schematic cross-sectional view of a stacked microelectronic assembly having microelectronic elements with contacts located near their edges according to another embodiment;
图7B是沿着图7A中的线7B-7B的图7A的堆叠封装的仰剖视图;7B is a bottom cross-sectional view of the stacked package of FIG. 7A along line 7B-7B in FIG. 7A;
图7C是示出用于图7B中的一部分的触点的可选布置的局部视图;Figure 7C is a partial view showing an alternative arrangement of contacts for a portion of Figure 7B;
图8是图1B的堆叠组件的仰剖视图的变型,其中一个微电子元件具有方向为大致垂直于另一个微电子元件的多行中心触点的多行中心触点;8 is a variation of the bottom cross-sectional view of the stacked assembly of FIG. 1B in which one microelectronic element has rows of center contacts oriented generally perpendicular to rows of center contacts of another microelectronic element;
图9A是根据另一个实施例的具有引线框架的堆叠微电子组件的示意性剖视图;9A is a schematic cross-sectional view of a stacked microelectronic assembly with a lead frame according to another embodiment;
图9B是沿着图9A中的线9B-9B的图9A的堆叠组件的仰剖视图;9B is a bottom cross-sectional view of the stack assembly of FIG. 9A along line 9B-9B in FIG. 9A;
图9C是沿着图9B中的线9C-9C的图9B的堆叠组件的侧剖视图;9C is a side cross-sectional view of the stack assembly of FIG. 9B along line 9C-9C in FIG. 9B;
图10A是根据另一个实施例的具有多个堆叠微电子元件(未示出密封剂)的堆叠微电子组件的示意性俯视图;10A is a schematic top view of a stacked microelectronic assembly having a plurality of stacked microelectronic elements (encapsulant not shown), according to another embodiment;
图10B是沿着图10A中的线10B-10B的图10A的堆叠组件的侧剖视图;10B is a side cross-sectional view of the stacked assembly of FIG. 10A along line 10B-10B in FIG. 10A;
图10C是根据另一个实施例的具有多个相互相邻的微电子元件的堆叠微电子组件的示意性俯视图;10C is a schematic top view of a stacked microelectronic assembly having a plurality of mutually adjacent microelectronic elements according to another embodiment;
图11是根据另一个实施例的包括两个相互键合的模块卡的堆叠微电子组件的示意性立体图;Figure 11 is a schematic perspective view of a stacked microelectronic assembly comprising two interbonded module cards according to another embodiment;
图12是根据一个实施例的包括多个模块的系统的示意图;Figure 12 is a schematic diagram of a system comprising multiple modules according to one embodiment;
图13A是根据另一个实施例的堆叠微电子封装的示意性剖视图;13A is a schematic cross-sectional view of a stacked microelectronic package according to another embodiment;
图13B是沿着图13A中的线13A-13A的图13A所示的堆叠封装的仰剖视图;13B is a bottom cross-sectional view of the stacked package shown in FIG. 13A along line 13A-13A in FIG. 13A;
图14A至图14E是由图13A中阴影部分14显示的图13A的堆叠微电子封装的一部分的变型的局部剖视图;14A-14E are partial cross-sectional views of variations of a portion of the stacked microelectronic package of FIG. 13A shown by shaded portion 14 in FIG. 13A;
图15是根据另一个实施例的具有延长的焊料触点的堆叠微电子封装的示意性剖视图;15 is a schematic cross-sectional view of a stacked microelectronic package with elongated solder contacts according to another embodiment;
图16是根据本发明的一个实施例的一种系统的示意图。Figure 16 is a schematic diagram of a system according to an embodiment of the present invention.
具体实施方式Detailed ways
参考图1A至图1C,根据本发明的实施例的模块10可包括第一微电子元件20、第二微电子元件30和具有暴露的边缘触点50的模块卡40。第一密封剂60可覆盖微电子元件20和30,以及模块卡40的一部分。Referring to FIGS. 1A-1C , a module 10 according to an embodiment of the present invention may include a first microelectronic element 20 , a second microelectronic element 30 and a module card 40 having exposed edge contacts 50 . First encapsulant 60 may cover microelectronic elements 20 and 30 , as well as a portion of module card 40 .
在一些实施例中,第一微电子元件20和第二微电子元件30中的至少一个可为半导体芯片、晶片或类似的。例如,第一微电子元件20和第二微电子元件30中的一个或两个可包括存储器元件,如DRAM。正如在此所用的,“存储器元件”是指多个存储单元布置成阵列,与电路一起用于存储和从中检索数据,例如用于通过电接口的传输数据。在一个特定示例中,模块10可包括在单列直插内存模块(SIMM)或双列直插式内存模块(DIMM)中。In some embodiments, at least one of first microelectronic element 20 and second microelectronic element 30 may be a semiconductor chip, wafer, or the like. For example, one or both of the first microelectronic element 20 and the second microelectronic element 30 may include a memory element, such as a DRAM. As used herein, "memory element" refers to a plurality of memory cells arranged in an array with circuitry for storing and retrieving data therefrom, eg, for transferring data over an electrical interface. In one particular example, module 10 may be included in a single inline memory module (SIMM) or a dual inline memory module (DIMM).
第一微电子元件20可具有前表面21,远离前表面21的后表面22,以及在前表面和后表面之间延伸的侧边缘23。电触点24暴露在第一微电子元件20的前表面21处。正如在此所述的,第一微电子元件20的电触点24也可指代“芯片触点”。如在本发明所使用的,导电元件“暴露在”结构的表面处的状态表示导电元件可用于与在垂直于结构的表面方向上从结构外部朝着结构的表面移动的理论点接触。因此,暴露在结构的表面处的端子或其他导电元件可从这样的表面突出;可与这样的表面平齐;或者可相对于这样的表面凹入并通过结构中的孔或凹入部暴露。第一微电子元件20的触点24暴露在第一微电子元件的中心区域25内的前表面21处。例如,触点24可布置成邻近前表面21的中心的一行或平行的两行。The first microelectronic element 20 may have a front surface 21, a rear surface 22 remote from the front surface 21, and a side edge 23 extending between the front surface and the rear surface. Electrical contacts 24 are exposed at the front surface 21 of the first microelectronic element 20 . As described herein, the electrical contacts 24 of the first microelectronic element 20 may also be referred to as "chip contacts." As used herein, the state that a conductive element is "exposed" at a surface of a structure means that the conductive element is available for contact with a theoretical point moving in a direction perpendicular to the surface of the structure from outside the structure towards the surface of the structure. Accordingly, a terminal or other conductive element exposed at a surface of a structure may protrude from such surface; may be flush with such surface; or may be recessed relative to such surface and exposed through a hole or recess in the structure. The contacts 24 of the first microelectronic element 20 are exposed at the front surface 21 within the central region 25 of the first microelectronic element. For example, the contacts 24 may be arranged in one row adjacent the center of the front surface 21 or in two parallel rows.
第二微电子元件30可具有前表面31,远离前表面31的后表面32,以及在前表面和后表面之间延伸的侧边缘33。电触点34暴露在第一微电子元件30的前表面31处。正如在此所述的,第二微电子元件30的电触点34也可指代“芯片触点”。第二微电子元件30的触点34暴露在第二微电子元件的中心区域35内的前表面31处。例如,触点34可布置成邻近前表面31的中心的一行或平行的两行。The second microelectronic element 30 may have a front surface 31, a rear surface 32 remote from the front surface 31, and a side edge 33 extending between the front surface and the rear surface. Electrical contacts 34 are exposed at the front surface 31 of the first microelectronic element 30 . As described herein, the electrical contacts 34 of the second microelectronic element 30 may also be referred to as "chip contacts." Contacts 34 of the second microelectronic element 30 are exposed at the front surface 31 within the central region 35 of the second microelectronic element. For example, the contacts 34 may be arranged in one row adjacent the center of the front surface 31 or in two parallel rows.
如图1A和1C所示,第一微电子元件20和第二微电子元件30相互堆叠。在一些实施例中,第二微电子元件30的前表面31和第一微电子元件20的后表面22相互面对。第二微电子元件30的前表面31的至少一部分可覆盖第一微电子元件20的后表面22的至少一部分。第二微电子元件30的中心区域35的至少一部分可以突出超过第一微电子元件20的侧边缘23。相应地,第二微电子元件30的触点34可放置在突出超过第一微电子元件20的侧边缘23的位置处。As shown in Figures 1A and 1C, a first microelectronic element 20 and a second microelectronic element 30 are stacked on top of each other. In some embodiments, the front surface 31 of the second microelectronic element 30 and the rear surface 22 of the first microelectronic element 20 face each other. At least a portion of the front surface 31 of the second microelectronic element 30 may cover at least a portion of the rear surface 22 of the first microelectronic element 20 . At least a portion of the central region 35 of the second microelectronic element 30 may protrude beyond the side edge 23 of the first microelectronic element 20 . Correspondingly, the contacts 34 of the second microelectronic element 30 may be placed at positions protruding beyond the side edge 23 of the first microelectronic element 20 .
微电子组件10可进一步包括具有相对地面对的第一表面41和第二表面42的模块卡40。一个或多个导电触点44可暴露在模块卡40的第二表面42处。模块卡40可进一步包括一个或多个孔,例如第一孔45和第二孔46。如图1A和图1C所示,第一微电子元件20和第二微电子元件30各自的前表面21和31可面对模块卡40的第一表面41。The microelectronic assembly 10 may further include a module card 40 having oppositely facing first and second surfaces 41 , 42 . One or more conductive contacts 44 may be exposed at the second surface 42 of the module card 40 . The module card 40 may further include one or more holes, such as a first hole 45 and a second hole 46 . As shown in FIGS. 1A and 1C , the respective front surfaces 21 and 31 of the first microelectronic element 20 and the second microelectronic element 30 may face the first surface 41 of the module card 40 .
模块卡40可部分地或全部地由任何适当的介质材料制成。例如,模块卡40可包括相对刚性的板状材料,例如纤维增强环氧树脂的厚层,例如,Fr-4板或Fr-5板。不论使用何种材料,模块卡40可包括单层的或多层的介质材料。在特定实施例中,模块卡40基本上可由具有低于百万分之三十每摄氏度(“30ppm/℃”)的热膨胀系数的材料组成。Module card 40 may be partially or fully fabricated from any suitable dielectric material. For example, module card 40 may comprise a relatively rigid sheet-like material, such as a thick layer of fiber reinforced epoxy, eg, Fr-4 board or Fr-5 board. Regardless of the material used, module card 40 may comprise a single layer or multiple layers of dielectric material. In a particular embodiment, module card 40 may consist essentially of a material having a coefficient of thermal expansion of less than thirty parts per million degrees Celsius ("30 ppm/°C").
如图1所示,模块卡40可延伸超过第一微电子元件20的侧边缘23和第二微电子元件30的侧边缘33。模块卡40的第一表面41可与第一微电子元件20的前表面21并列。As shown in FIG. 1 , the module card 40 may extend beyond the side edge 23 of the first microelectronic element 20 and the side edge 33 of the second microelectronic element 30 . The first surface 41 of the module card 40 can be juxtaposed with the front surface 21 of the first microelectronic element 20 .
在图1A至图1C描述的实施例中,模块卡40包括基本上与第一微电子元件20的中心区域25对齐的第一孔45和基本上与第二微电子元件30的中心区域35对齐的第二孔46,由此分别通过第一孔和第二孔接触触点24和34。第一孔45和第二孔46可在模块卡40的第一表面41和第二表面42之间延伸。如图1B所示,孔45和46可与各个第一微电子元件20和第二微电子元件30的相应芯片触点24或34对齐。In the embodiment depicted in FIGS. 1A-1C , the module card 40 includes a first aperture 45 substantially aligned with the central region 25 of the first microelectronic element 20 and substantially aligned with the central region 35 of the second microelectronic element 30. The second hole 46 of the contact hole 46 thereby contacts the contacts 24 and 34 through the first hole and the second hole, respectively. The first hole 45 and the second hole 46 may extend between the first surface 41 and the second surface 42 of the module card 40 . As shown in FIG. 1B , apertures 45 and 46 may be aligned with respective chip contacts 24 or 34 of respective first 20 and second 30 microelectronic elements.
模块卡40也可包括暴露在其第二表面42处的导电触点44和在触点44与暴露的边缘触点50之间延伸的导电迹线55。导电迹线55将触点44电联结至暴露的边缘触点50。在特定实施例中,触点44可为各个迹线55的端部。Module card 40 may also include conductive contacts 44 exposed at its second surface 42 and conductive traces 55 extending between contacts 44 and exposed edge contacts 50 . Conductive traces 55 electrically couple contacts 44 to exposed edge contacts 50 . In a particular embodiment, contacts 44 may be ends of respective traces 55 .
在特定实施例中,模块卡40可具有多个平行的暴露的边缘触点50,这些触点50邻近第一表面41和第二表面42中至少一个的内插边缘43,用于当模块10插入插口(图12所示)时,与该插口相应的触点对接。如图1B所示,可对内插边缘43进行定位,使得孔45和46中的每一个具有在背离模块卡40的内插边缘43的方向上延伸的长度L。一些或所有的边缘触点50可暴露在模块卡40的第一表面41或第二表面42中的一个或两个处。In certain embodiments, the module card 40 may have a plurality of parallel exposed edge contacts 50 adjacent the inset edge 43 of at least one of the first surface 41 and the second surface 42 for use when the module 10 When inserted into the socket (shown in Figure 12), it is butted with the corresponding contact of the socket. As shown in FIG. 1B , inset edge 43 may be positioned such that holes 45 and 46 each have a length L extending in a direction away from inset edge 43 of module card 40 . Some or all of the edge contacts 50 may be exposed at one or both of the first surface 41 or the second surface 42 of the module card 40 .
暴露的边缘触点50和内插边缘43可被设计尺寸以插入系统其他连接器的相应的插口(图12),例如,可设置在主板上。这种暴露的边缘触点50可适合在这种插口连接器内与多个相应的弹簧触点(图12)对接。这种弹簧触点可设置在每个槽的单边或多边上,以与相应的暴露的边缘触点50对接。在一个示例中,至少一些边缘触点50可用于携载各个边缘触点与第一微电子元件20和第二微电子元件30中的每个之间的信号或参考电位中的至少一个。The exposed edge contacts 50 and the inset edges 43 may be sized to plug into corresponding receptacles (FIG. 12) of other connectors in the system, such as may be provided on a motherboard. Such exposed edge contacts 50 may be adapted to mate with corresponding spring contacts (FIG. 12) within such a receptacle connector. Such spring contacts may be provided on one or more sides of each slot to interface with corresponding exposed edge contacts 50 . In one example, at least some of the edge contacts 50 can be used to carry at least one of a signal or a reference potential between the respective edge contact and each of the first microelectronic element 20 and the second microelectronic element 30 .
如图1A至图1C所示,电连接或引线70可将第一微电子元件20的触点24和第二微电子元件30的触点34连接至暴露的边缘触点50。引线70可包括线键合71和72,以及导电迹线55。在一个实施例中,引线70可考虑用于将微电子元件20和30都电连接至模块卡40。在特定示例中,引线70可用于携载地址信号以在第一微电子元件20和第二微电子元件30中的至少一个中对存储器元件寻址。As shown in FIGS. 1A-1C , electrical connections or leads 70 may connect the contacts 24 of the first microelectronic element 20 and the contacts 34 of the second microelectronic element 30 to the exposed edge contacts 50 . Leads 70 may include wire bonds 71 and 72 , and conductive trace 55 . In one embodiment, leads 70 are contemplated for electrically connecting both microelectronic elements 20 and 30 to module card 40 . In a particular example, the leads 70 can be used to carry address signals to address memory elements in at least one of the first microelectronic element 20 and the second microelectronic element 30 .
正如在此所使用的,“引线”是在两个导电元件之间延伸的电连接的一部分或全部,例如引线70包括线键合71和导电迹线55。该导电迹线55从第一微电子元件20的一个触点24延伸穿过第一孔45至一个暴露的边缘触点50。As used herein, a "lead" is part or all of an electrical connection extending between two conductive elements, for example lead 70 including wire bond 71 and conductive trace 55 . The conductive trace 55 extends from a contact 24 of the first microelectronic element 20 through the first aperture 45 to an exposed edge contact 50 .
在一个示例中,模块10可包括多个在孔45和46内从第一微电子20和第二微电子元件30中至少一个的芯片触点24和34延伸至暴露的边缘触点50的引线70。在特定示例中,引线70可包括在模块卡40上的导电迹线55和从导电迹线延伸至第一微电子20和第二微电子元件30中至少一个的芯片触点24和34的线键合71、72。In one example, module 10 may include a plurality of leads extending within holes 45 and 46 from chip contacts 24 and 34 of at least one of first microelectronic 20 and second microelectronic element 30 to exposed edge contacts 50. 70. In a particular example, leads 70 may include conductive traces 55 on module card 40 and wires extending from the conductive traces to chip contacts 24 and 34 of at least one of first microelectronic 20 and second microelectronic element 30. Bond 71, 72.
在图1B所示,引线70的导电迹线55可沿模块卡40的第二表面42延伸。在特定示例中,引线70的导电迹线55可沿着模块卡40的第一表面41延伸,或引线的导电迹线可沿着模块卡的第一表面41和第二表面42延伸。导电迹线55的部分可沿着模块卡40的表面41或42在大致平行于孔45和46的长度L的方向上从各个触点24和34延伸至暴露的边缘触点50。在特定实施例中,导电迹线55可以沿着模块卡40的表面41或42的方式布置,使得引线70在各个触点24和34与暴露的边缘触点50之间的长度可被最小化。As shown in FIG. 1B , the conductive traces 55 of the leads 70 may extend along the second surface 42 of the module card 40 . In particular examples, the conductive traces 55 of the leads 70 may extend along the first surface 41 of the module card 40 , or the conductive traces of the leads may extend along the first surface 41 and the second surface 42 of the module card. Portions of conductive traces 55 may extend from respective contacts 24 and 34 to exposed edge contacts 50 along surface 41 or 42 of module card 40 in a direction generally parallel to length L of holes 45 and 46 . In certain embodiments, the conductive traces 55 can be arranged along the surface 41 or 42 of the module card 40 in such a way that the length of the leads 70 between the respective contacts 24 and 34 and the exposed edge contacts 50 can be minimized. .
线键合71和72中的每一个可延伸穿过各个第一孔45或第二孔46,且可将各个触点24或34电联结至模块卡40的相应触点44。线键合71和72的形成过程可包括通过孔45、46将键合工具插入,以将导电触点24、34电连接至模块卡40的相应导电触点44。Each of the wire bonds 71 and 72 may extend through a respective first hole 45 or second hole 46 and may electrically couple a respective contact 24 or 34 to a corresponding contact 44 of the module card 40 . The forming process of wire bonds 71 and 72 may include inserting a bonding tool through holes 45 , 46 to electrically connect conductive contacts 24 , 34 to corresponding conductive contacts 44 of module card 40 .
在特定实施例中,线键合71和72中的每个可为包括多个方向上相互大致平行的线键合的多线键合。这种包括多个线键合71、72的多线键合结构可提供在触点24或34与模块卡40的相应触点44之间的平行导电通路。In a particular embodiment, each of wire bonds 71 and 72 may be a multi-wire bond including wire bonds in multiple directions substantially parallel to each other. Such a multi-wire bond structure including multiple wire bonds 71 , 72 may provide parallel conductive paths between contacts 24 or 34 and corresponding contacts 44 of module card 40 .
间隔片12可位于第二微电子元件30的前表面31和模块卡40的第一表面41的一部分之间。这种间隔片12可以由例如介质材料(例如硅二极管)、半导体材料(例如硅)、或一层或多层的粘合剂制成。如果间隔件12包括粘合剂,粘合剂可以将第二微电子元件30连接至模块卡40。在一个实施例中,间隔片12在基本垂直于模块卡40的第一表面41的竖直方向V上可具有与第一微电子元件20的在前表面21和后表面22之间的的厚度T2基本相等的厚度T1。The spacer 12 may be located between the front surface 31 of the second microelectronic element 30 and a portion of the first surface 41 of the module card 40 . Such a spacer 12 may be made of, for example, a dielectric material (such as a silicon diode), a semiconducting material (such as silicon), or one or more layers of adhesive. If the spacer 12 includes an adhesive, the adhesive can connect the second microelectronic element 30 to the module card 40 . In one embodiment, the spacer 12 may have a thickness equal to that of the first microelectronic element 20 between the front surface 21 and the rear surface 22 in a vertical direction V substantially perpendicular to the first surface 41 of the module card 40. T2 is substantially equal to the thickness of T1.
在特定实施例中,间隔片12可被具有面对模块卡40的第一表面41的缓冲芯片代替。在一个示例中,这种缓冲芯片可倒装芯片键合至暴露在模块卡40的第一表面41处的触点。这种缓冲芯片可用于帮助提供微电子元件20、30中的每一个关于模块10的外部部件的阻抗隔离。In a particular embodiment, the spacer 12 may be replaced by a buffer chip having a first surface 41 facing the module card 40 . In one example, such a buffer chip may be flip-chip bonded to contacts exposed at the first surface 41 of the module card 40 . Such a buffer chip may be used to help provide impedance isolation of each of the microelectronic elements 20 , 30 from components external to the module 10 .
一个或多个粘合剂层14可位于第一微电子元件20和模块卡40之间,第一微电子元件20和第二微电子元件30之间,第二微电子元件30和间隔片12之间,以及间隔片12和模块卡40之间。这种粘合剂层14可包括用于将模块10的上述部件相互键合的粘合剂。在特定实施例中,一个或多个粘合剂层14可在模块卡40的第一表面41和第一微电子元件20的第一表面21之间延伸。在一个实施例中,一个或多个粘合剂层14可将第二微电子元件30的前表面31的至少一部分附接至第一微电子元件20的后表面22的至少一部分。One or more adhesive layers 14 may be located between the first microelectronic element 20 and the module card 40, between the first microelectronic element 20 and the second microelectronic element 30, between the second microelectronic element 30 and the spacer 12 Between, and between the spacer 12 and the module card 40. Such an adhesive layer 14 may include an adhesive for bonding the above-mentioned components of the module 10 to each other. In particular embodiments, one or more adhesive layers 14 may extend between first surface 41 of module card 40 and first surface 21 of first microelectronic element 20 . In one embodiment, one or more adhesive layers 14 may attach at least a portion of the front surface 31 of the second microelectronic element 30 to at least a portion of the rear surface 22 of the first microelectronic element 20 .
在一个示例中,每个粘合剂层14可部分地或全部地由晶元粘贴粘合剂制成,且可由低弹性模量材料(例如硅酮弹性体)组成。在一个实施例中,晶元粘贴粘合剂可为兼容的。在另一个示例中,如果两个微电子元件20和30是由相同材料形成的常规半导体芯片,每个粘合剂层14可部分地或全部地由一薄层高弹性模量粘合剂或焊料制成,这是因为,响应于温度变化,微电子元件将趋于一致地扩张或收缩。无论使用何种材料,每个粘合剂层14可在其中包括单个层或多个层。在间隔片12由粘合剂制成的特定实施例中,位于间隔片12、第二微电子元件30和模块卡40之间的粘合剂层14可被省略。In one example, each adhesive layer 14 may be partially or entirely made of a die attach adhesive and may be composed of a low elastic modulus material such as a silicone elastomer. In one embodiment, the die attach adhesive may be compatible. In another example, if the two microelectronic elements 20 and 30 are conventional semiconductor chips formed of the same material, each adhesive layer 14 may be partially or completely formed by a thin layer of high elastic modulus adhesive or solder because, in response to temperature changes, microelectronic components will tend to expand or contract in unison. Regardless of the material used, each adhesive layer 14 may comprise a single layer or multiple layers therein. In certain embodiments where the spacer sheet 12 is made of adhesive, the adhesive layer 14 between the spacer sheet 12, the second microelectronic element 30 and the module card 40 may be omitted.
模块10也可包括第一密封剂60和第二密封剂65。第一密封剂60可覆盖,例如,第一微电子元件20和第二微电子元件30的各自的后表面22和32,以及模块卡40的第一表面41的部分。在特定实施例中,第一密封剂60可为包胶模(overmold)。一个或多个密封剂65可覆盖第一微电子元件20和第二微电子元件30的暴露在各自的孔45和46之内的前表面21和31,模块卡40的第二表面42的部分,触点24、34和44,以及延伸在各个触点24、34与相应的触点44之间的线键合71和72。在特定实施例中,第二密封剂65可覆盖延伸在芯片触点24、34与模块卡40之间的引线70的部分。The module 10 may also include a first encapsulant 60 and a second encapsulant 65 . The first encapsulant 60 may cover, for example, the respective rear surfaces 22 and 32 of the first and second microelectronic elements 20 and 30 , and portions of the first surface 41 of the module card 40 . In certain embodiments, the first encapsulant 60 may be an overmold. One or more encapsulants 65 may cover the front surfaces 21 and 31 of the first microelectronic element 20 and the second microelectronic element 30 exposed within the respective apertures 45 and 46, portions of the second surface 42 of the module card 40 , contacts 24 , 34 and 44 , and wire bonds 71 and 72 extending between each contact 24 , 34 and the corresponding contact 44 . In particular embodiments, the second encapsulant 65 may cover portions of the leads 70 extending between the chip contacts 24 , 34 and the module card 40 .
在一种根据特定实施例的工艺中,第一密封剂60可注射到第一微电子元件20和第二微电子元件30的各自的后表面22和32上,以及模块卡40的第一表面41上。在一种根据一个示例的工艺中,第二密封剂65可注射进第一孔45和第二孔46内,使得引线70在芯片触点24、34和模块卡40之间的部分被第二密封剂覆盖。In a process according to certain embodiments, a first encapsulant 60 may be injected onto the respective rear surfaces 22 and 32 of the first microelectronic element 20 and the second microelectronic element 30, and the first surface of the module card 40. 41 on. In a process according to one example, the second encapsulant 65 may be injected into the first hole 45 and the second hole 46 such that the portion of the lead 70 between the chip contacts 24 , 34 and the module card 40 is second sealed. Sealant coverage.
图2是关于图1A至图1C所述的实施例的变型。在此变型中,模块210与上述的模块10相同,除了第一微电子元件220倒装芯片键合至模块卡240的第一表面241上,而不是线键合至模块卡的第二表面。Figure 2 is a variation of the embodiment described with respect to Figures 1A-1C. In this variant, the module 210 is identical to the module 10 described above, except that the first microelectronic element 220 is flip chip bonded to the first surface 241 of the module card 240 instead of wire bonded to the second surface of the module card.
导电触点224暴露在第一微电子元件220的前表面221处。导电触点或芯片触点224可通过例如导电块273电连接至暴露在模块卡240的第一表面241处的导电触点247。导电块273可包括具有较低熔融温度的易熔金属,例如,焊料,锡或包括多种金属的低熔混合物。可选地,导电块273可包括可湿性金属,例如,铜或其他具有高于焊料或其他易熔金属的熔融温度的贵金属或者非贵金属。在特定实施例中,导电块273可包括散布在介质中的导电材料,例如,导电胶、金属填充胶、焊料填充胶、各向同性的导电胶或各向异性的导电胶。Conductive contacts 224 are exposed at the front surface 221 of the first microelectronic element 220 . Conductive contacts or chip contacts 224 may be electrically connected to conductive contacts 247 exposed at first surface 241 of module card 240 through, for example, conductive bumps 273 . The conductive bump 273 may include a fusible metal having a lower melting temperature, for example, solder, tin, or a low-melting mixture including multiple metals. Alternatively, conductive mass 273 may comprise a wettable metal such as copper or other noble or non-noble metal that has a higher melting temperature than solder or other fusible metal. In certain embodiments, the conductive block 273 may include a conductive material dispersed in a medium, such as conductive paste, metal-filled paste, solder-filled paste, isotropic conductive paste, or anisotropic conductive paste.
导电迹线(未在图2中示出)可沿着模块卡240的第一表面241从导电触点247延伸至在模块卡的内插边缘(例如图1B和图1C示出的内插边缘43)处的暴露的边缘触点。正如在上述的模块10中,第二微电子元件230的芯片触点234可通过延伸穿过模块卡的孔246的线键合272电连接至模块卡240的相应的导电触点244。导电迹线也可沿着模块卡240的第二表面242从导电触点244延伸至在模块卡的内插边缘(例如图1B和图1C示出的内插边缘43)处的暴露的边缘触点。Conductive traces (not shown in FIG. 2 ) may extend from the conductive contacts 247 along the first surface 241 of the module card 240 to an interposer edge (such as that shown in FIGS. 1B and 1C ) of the module card. 43) at the exposed edge contacts. As in module 10 described above, chip contacts 234 of second microelectronic element 230 may be electrically connected to corresponding conductive contacts 244 of module card 240 by wire bonds 272 extending through holes 246 of the module card. Conductive traces may also extend from conductive contacts 244 along second surface 242 of module card 240 to exposed edge contacts at an insertion edge of the module card (such as insertion edge 43 shown in FIGS. 1B and 1C ). point.
图3是关于图1A至图1C所述的实施例的另一种变型。在此变型中,模块310与上述的模块10相同,除了第一微电子元件320放置成其后表面322面对模块卡340的第一表面341,以及其前表面321的至少部分面对且部分地覆盖第二微电子元件330的前表面331的至少部分。第一微电子元件320的后表面322可通过一个或多个粘合剂层(例如图1A和图1C所示的粘合剂层14)附接至模块卡340的第一表面341。导电触点324a和324b(共同地为导电触点324)可暴露在第一微电子元件320的前表面321处。第一微电子元件320的芯片触点324可包括导电触点324a和/或324b的任何结构。Figure 3 is another variant of the embodiment described with respect to Figures 1A-1C. In this variant, the module 310 is identical to the module 10 described above, except that the first microelectronic element 320 is placed with its rear surface 322 facing the first surface 341 of the module card 340, and at least part of its front surface 321 facing and partially ground covering at least a portion of the front surface 331 of the second microelectronic element 330. The rear surface 322 of the first microelectronic element 320 may be attached to the first surface 341 of the module card 340 by one or more adhesive layers, such as the adhesive layer 14 shown in FIGS. 1A and 1C . Conductive contacts 324 a and 324 b (collectively conductive contacts 324 ) may be exposed at front surface 321 of first microelectronic element 320 . The chip contacts 324 of the first microelectronic element 320 may include any configuration of conductive contacts 324a and/or 324b.
第一微电子元件320的导电触点324a可暴露在第一微电子元件的中心区域325内的第一表面321处。例如,触点324a可布置成邻近前表面321的中心的一行或平行的两行。导电触点324a可通过例如线键合371a电连接至暴露在模块卡340的第一表面341处的导电触点347。The conductive contacts 324a of the first microelectronic element 320 may be exposed at the first surface 321 within the central region 325 of the first microelectronic element. For example, the contacts 324a may be arranged in one row adjacent to the center of the front surface 321 or in two parallel rows. Conductive contacts 324a may be electrically connected to conductive contacts 347 exposed at first surface 341 of module card 340 by, for example, wire bonds 371a.
第一微电子元件320的导电触点324b可暴露在第一微电子元件的侧边缘323附近的前表面321处。例如,触点324b可布置成邻近第一微电子元件320的侧边缘323的一行或平行的两行。导电触点324b可(通过,例如线键合371b)电连接至暴露在模块卡340的第一表面341处的导电触点347。The conductive contacts 324b of the first microelectronic element 320 may be exposed at the front surface 321 near the side edges 323 of the first microelectronic element. For example, the contacts 324b may be arranged in one row adjacent the side edge 323 of the first microelectronic element 320 or in two parallel rows. Conductive contacts 324b may be electrically connected (via, eg, wire bonds 371b ) to conductive contacts 347 exposed at first surface 341 of module card 340 .
同图2类似,导电迹线(未在图3中示出)可分别沿着模块卡340的第一表面341和第二表面342从导电触点347和344延伸至在模块卡的内插边缘处(例如图1B和图1C所示的内插边缘43)的暴露的边缘触点。Similar to FIG. 2 , conductive traces (not shown in FIG. 3 ) may extend from conductive contacts 347 and 344 along the first surface 341 and second surface 342 of the module card 340 to the interposer edge of the module card, respectively. The exposed edge contacts at (eg, interpolation edge 43 shown in FIGS. 1B and 1C ).
尽管图3所示的实施例示出第二微电子元件330通过线键合372电连接至模块卡340,但是在其他实施例中,第二微电子元件可通过各种其他方式电连接至模块卡,包括例如,引线键合(如图5所示)或利用焊料的倒装芯片键合(如图6和图7所示)。Although the embodiment shown in FIG. 3 shows the second microelectronic element 330 electrically connected to the module card 340 by wire bonds 372, in other embodiments, the second microelectronic element may be electrically connected to the module card by various other means. , including, for example, wire bonding (as shown in FIG. 5 ) or flip-chip bonding using solder (as shown in FIGS. 6 and 7 ).
图4是根据图1A至图1C所述的实施例的另一种变型。在此变型中,模块410与上述的模块10相同,除了第一微电子元件410和第二微电子元件420通过延伸穿过在模块卡的第一表面441和第二表面442之间延伸的共同的孔446的各个线键合471和472电连接至模块卡440,而不是让每个微电子元件通过延伸穿过模块卡的各个分开的孔的线键合电连接至模块卡。FIG. 4 is another variant of the embodiment described with reference to FIGS. 1A to 1C . In this variation, the module 410 is identical to the module 10 described above, except that the first microelectronic element 410 and the second microelectronic element 420 extend through a common The respective wire bonds 471 and 472 of the holes 446 are electrically connected to the module card 440, rather than having each microelectronic element electrically connected to the module card by wire bonds extending through respective separate holes of the module card.
如图4所示,第一微电子元件420的导电触点424可暴露在第一微电子元件的侧边缘423附近的前表面421处。例如,触点424可布置成邻近第一微电子元件420的侧边缘423的行。导电触点424可通过例如线键合471电连接至暴露在模块卡440的第二表面442的导电触点444。As shown in FIG. 4, the conductive contacts 424 of the first microelectronic element 420 may be exposed at the front surface 421 near the side edges 423 of the first microelectronic element. For example, the contacts 424 may be arranged in rows adjacent to the side edge 423 of the first microelectronic element 420 . The conductive contacts 424 may be electrically connected to the conductive contacts 444 exposed on the second surface 442 of the module card 440 by, for example, wire bonds 471 .
第二微电子元件430的导电触点434可暴露在第二微电子元件的中心区域435内的前表面431处。例如,触点434可布置成接近前表面431的中心的行。导电触点434可通过例如线键合472电连接至暴露在模块卡440的第二表面442的导电触点444。The conductive contacts 434 of the second microelectronic element 430 may be exposed at the front surface 431 within the central region 435 of the second microelectronic element. For example, contacts 434 may be arranged in rows proximate the center of front surface 431 . The conductive contacts 434 may be electrically connected to the conductive contacts 444 exposed on the second surface 442 of the module card 440 by, for example, wire bonds 472 .
在图4所示的实施例中,模块410可包括单个第二密封剂465。例如,第二密封剂465可覆盖,暴露在单个共同孔446之内的微电子元件420和430各自的前表面421和431的部分,模块卡440的第二表面442的部分,触点424、434和444,以及在各个触点424、434与相应的触点444之间延伸的线键合471和472。In the embodiment shown in FIG. 4 , module 410 may include a single second encapsulant 465 . For example, the second encapsulant 465 may cover, portions of the respective front surfaces 421 and 431 of the microelectronic elements 420 and 430 exposed within the single common aperture 446, portions of the second surface 442 of the module card 440, the contacts 424, 434 and 444 , and wire bonds 471 and 472 extending between each contact 424 , 434 and the corresponding contact 444 .
图5是根据图1A至图1C所述的实施例的另一种变型。在此变型中,模块510与上述的模块10相同,除了第一微电子元件520倒装芯片键合至模块卡540的第一表面541(同图2所示的方式),且第二微电子元件530通过从导电迹线延伸至芯片触点534的引线键合574a和574b(共同地为引线键合574)而不是通过线键合电连接至模块卡540。FIG. 5 is another variant of the embodiment described with reference to FIGS. 1A to 1C . In this variation, the module 510 is identical to the module 10 described above, except that the first microelectronic element 520 is flip-chip bonded to the first surface 541 of the module card 540 (in the same manner as shown in FIG. 2 ), and the second microelectronic Component 530 is electrically connected to module card 540 by wire bonds 574 a and 574 b (collectively wire bonds 574 ) extending from conductive traces to chip contacts 534 , rather than by wire bonds.
如图5所示,第二微电子元件530的导电触点534a和534b(共同地为导电触点534)可暴露在第二微电子元件的中心区域535内的前表面531处。例如,触点534可布置成邻近前表面531的中心的一行或平行的两行。一些导电触点534a可通过例如引线键合574a电连接至暴露在模块卡540的第二表面542的导电触点544。其他的导电触点534b可通过例如引线键合574b电连接至暴露在模块卡540的第一表面541的导电触点547。如图5所示,导电触点544和547可为各个引线键合574a和引线键合574b的导电触点部分。As shown in FIG. 5, conductive contacts 534a and 534b (collectively conductive contacts 534) of second microelectronic element 530 may be exposed at front surface 531 within central region 535 of the second microelectronic element. For example, the contacts 534 may be arranged in one row adjacent the center of the front surface 531 or in two parallel rows. Some of the conductive contacts 534a may be electrically connected to the conductive contacts 544 exposed on the second surface 542 of the module card 540 by, for example, wire bonds 574a. The other conductive contacts 534b may be electrically connected to the conductive contacts 547 exposed on the first surface 541 of the module card 540 by, for example, wire bonds 574b. As shown in FIG. 5, conductive contacts 544 and 547 may be conductive contact portions of respective wire bonds 574a and 574b.
形成引线键合574的工艺可大致如共同转让的美国专利5,915,752和5,489,749中描述的,其公开内容通过引用并入本文。在引线键合过程中,每个引线570可通过工具(如热超声键合工具)被向下移位与相应的导电触点534接合。这种键合工具可通过孔546插入,以将引线570电连接至相应的导电触点534。引线570的脆弱部分可能会在此过程中断裂。The process for forming wire bonds 574 may be substantially as described in commonly assigned US Patent Nos. 5,915,752 and 5,489,749, the disclosures of which are incorporated herein by reference. During the wire bonding process, each wire 570 may be displaced downwardly by a tool, such as a thermosonic bonding tool, to engage a corresponding conductive contact 534 . Such a bonding tool may be inserted through holes 546 to electrically connect leads 570 to corresponding conductive contacts 534 . The fragile portion of lead 570 may break in the process.
图6是关于图1A至图1C所述的实施例的另一种变型。在此变型中,模块610与上述的模块10相同,除了第一微电子元件620倒装芯片键合至模块卡640的第一表面641(同图2所示的方式),且第二微电子元件630通过在第二微电子元件的导电触点634与暴露在模块卡的第一表面处的导电触点647之间延伸的导电块675,而不是通过线键合倒装芯片键合至模块卡的第一表面。在特定实施例中,模块卡640可能没有延伸穿过在其第一表面641和第二表面642之间的孔(如图1A所示的孔45和46)的引线。FIG. 6 is another variation of the embodiment described with respect to FIGS. 1A-1C . In this variation, the module 610 is identical to the module 10 described above, except that the first microelectronic element 620 is flip-chip bonded to the first surface 641 of the module card 640 (in the same manner as shown in FIG. 2 ), and the second microelectronic The element 630 is flip-chip bonded to the module by a conductive bump 675 extending between the conductive contact 634 of the second microelectronic element and the conductive contact 647 exposed at the first surface of the module card, rather than by wire bonding. The first face of the card. In certain embodiments, module card 640 may not have leads extending through holes between its first surface 641 and second surface 642 (such as holes 45 and 46 shown in FIG. 1A ).
同上述的模块10类似,第二微电子元件630的导电触点634可暴露在第二微电子元件的中心区域635内的前表面631处。例如,触点634可布置成邻近前表面631的中心的一行或平行的两行。Similar to the module 10 described above, the conductive contacts 634 of the second microelectronic element 630 may be exposed at the front surface 631 within the central region 635 of the second microelectronic element. For example, the contacts 634 may be arranged in one row adjacent the center of the front surface 631 or in two parallel rows.
导电块675可为,例如,细长的焊料连接,焊球或参考导电块273的上述任何其他材料。这种导电块675可延伸穿过间隔片612与第一微电子元件620的侧边缘623之间的空隙,以将第二微电子元件630与模块卡640电连接。Conductive bump 675 may be, for example, an elongated solder connection, a solder ball, or any other material described above with reference to conductive bump 273 . Such conductive bumps 675 may extend across the gap between the spacer 612 and the side edge 623 of the first microelectronic element 620 to electrically connect the second microelectronic element 630 to the module card 640 .
图7A和图7B是关于图6所述的实施例的另一种变型。在此变型中,模块710与上述的模块610相同,除了第二微电子元件730通过在位于邻近第二微电子元件的侧边缘733的导电触点734与暴露在模块卡的第一表面处的导电触点747之间延伸的导电块775倒装芯片键合至模块卡740的第一表面741,而不是让导电块在暴露在第二微电子元件的中心区域内的第二微电子元件的前表面处的导电触点之间延伸。7A and 7B are another variation of the embodiment described with respect to FIG. 6 . In this variation, the module 710 is identical to the module 610 described above, except that the second microelectronic element 730 communicates with the conductive contact 734 located adjacent the side edge 733 of the second microelectronic element to the contact surface exposed at the first surface of the module card. The conductive bumps 775 extending between the conductive contacts 747 are flip-chip bonded to the first surface 741 of the module card 740, rather than having the conductive bumps on the surface of the second microelectronic element exposed in the central region of the second microelectronic element. Extending between the conductive contacts at the front surface.
第一微电子元件720可具有在第一微电子元件的第一表面721处的多个元件触点724。元件触点724可与第一组衬底触点747a联接,使得元件触点与衬底触点倒装芯片键合。如图7B所示,元件触点724和第一组衬底触点747a中的每个可布置成面阵结构。The first microelectronic element 720 may have a plurality of element contacts 724 at a first surface 721 of the first microelectronic element. The component contacts 724 can be coupled with the first set of substrate contacts 747a such that the component contacts are flip-chip bonded to the substrate contacts. As shown in FIG. 7B, each of the component contacts 724 and the first set of substrate contacts 747a may be arranged in an area array configuration.
在特定示例中,第二微电子元件730的前表面731处的触点734可布置成邻近第二微电子元件的侧边缘733的列,使得触点734可突出超过第一微电子元件720的侧边缘723。元件触点734可与第二组衬底触点747b联接,使得元件触点与衬底触点倒装芯片键合。In a particular example, the contacts 734 at the front surface 731 of the second microelectronic element 730 can be arranged in columns adjacent to the side edges 733 of the second microelectronic element such that the contacts 734 can protrude beyond the sides of the first microelectronic element 720. side edge 723 . The component contacts 734 may be coupled with a second set of substrate contacts 747b such that the component contacts are flip-chip bonded to the substrate contacts.
尽管触点724,734和747布置成图示的触点平行列,但是本发明也考虑了触点的其他布置方式。例如,尽管图7B没有显示出来,但是至少一个触点可设置在相邻的触点列之间。在另一示例中(例如图7C所示),触点可包括一列触点,其中列轴719延伸穿过这列触点724中的大部分,即这列触点724中的大部分相对于列轴719居中。但是,在这种列中,一个或多个触点724可能不会相对于列轴719居中,比如触点724’这种情况。在此情况下,尽管这个(或这些)触点可能没有相对于列轴719居中,但因为离特定列的轴719比其离其他列的轴更近,所以这些一个或多个触点724’可看作是特定列的部分。列轴719可延伸穿过上述未相对于列轴居中的一个或多个触点,或在一些情况下,未居中的触点可能离列轴更远,使得列轴719可能甚至不穿过该列的这些未居中的触点。在一列或甚至多列中可能有一个、几个或很多触点没有相对于各自列的轴居中。Although the contacts 724, 734, and 747 are shown arranged in parallel columns of contacts, other arrangements of the contacts are contemplated by the present invention. For example, although not shown in FIG. 7B, at least one contact may be disposed between adjacent columns of contacts. In another example (eg, as shown in FIG. 7C ), the contacts may comprise a column of contacts, wherein the column axis 719 extends through a majority of the column of contacts 724, ie most of the column of contacts 724 is relative to Column axis 719 is centered. However, in such columns, one or more of the contacts 724 may not be centered relative to the column axis 719, as is the case with contacts 724'. In this case, although the contact (or contacts) may not be centered with respect to the column axis 719, the one or more contacts 724' Can be seen as a section of a specific column. Column axis 719 may extend through one or more of the contacts described above that are not centered relative to the column axis, or in some cases, the uncentered contacts may be farther from the column axis such that column axis 719 may not even pass through the column axis. columns of these uncentered contacts. There may be one, several or many contacts in a column or even multiple columns that are not centered relative to the axes of the respective columns.
另外,微电子元件720、730和衬底740很可能包含成组而非成列的触点724,734,747,例如触点的环状、多边形状或甚至分散式分布的布置。In addition, microelectronic elements 720, 730 and substrate 740 are likely to contain contacts 724, 734, 747 in groups rather than columns, such as rings, polygons, or even distributed arrangements of contacts.
在一个实施例中,同上述模块610类似,模块卡740可以没有延伸穿过其第一表面741和第二表面742之间的孔的引线。In one embodiment, like the module 610 described above, the module card 740 may have no leads extending through the aperture between the first surface 741 and the second surface 742 thereof.
图8是关于图1B所述的实施例的另一种变型。在此变型中,模块810与上述的模块10相同,除了第一微电子元件820的多行导电触点824可大体上垂直于第二微电子元件830的多行导电触点834。在这个实施例中,第二孔846(类似于图1B所示的第二孔46)可具有在背离模块卡840的内插边缘843的方向上延伸的长度L。第一孔845可具有在大体平行于模块卡840的内插边缘843且大体垂直于第二孔846的长度L的方向上延伸的长度L’。FIG. 8 is another variation of the embodiment described with respect to FIG. 1B . In this variation, the module 810 is identical to the module 10 described above, except that the rows of conductive contacts 824 of the first microelectronic element 820 may be substantially perpendicular to the rows of conductive contacts 834 of the second microelectronic element 830 . In this embodiment, the second hole 846 (similar to the second hole 46 shown in FIG. 1B ) may have a length L extending in a direction away from the insertion edge 843 of the module card 840 . The first hole 845 may have a length L' extending in a direction generally parallel to the insertion edge 843 of the module card 840 and generally perpendicular to the length L of the second hole 846 .
引线870可包括与图1B所示的导电迹线55的图案相同的导电迹线855a的图案。引线870可进一步包括从暴露在模块卡840的第二表面842处的导电触点844b延伸至暴露的边缘触点850的导电迹线855a的可选图案。在特定实施例中,导电迹线855b中的一些可在第一孔845的侧边缘848周围延伸。Leads 870 may include the same pattern of conductive traces 855a as the pattern of conductive traces 55 shown in FIG. 1B . Leads 870 may further include an optional pattern of conductive traces 855a extending from conductive contacts 844b exposed at second surface 842 of module card 840 to exposed edge contacts 850 . In a particular embodiment, some of the conductive traces 855b may extend around the side edge 848 of the first hole 845 .
图9是关于图1A至图1C所述的实施例的一种变型。在此变型中,模块910与上述的模块10相同,除了第一微电子元件920和第二微电子元件930安装在引线框架980上,而不是安装在模块卡上(例如图1A所示的模块卡40)。在特定实施例中,第一微电子元件920和第二微电子元件930各自的前表面921和931可面对引线框架980的第一表面981,且每个微电子元件电连接至引线框架。Figure 9 is a variation of the embodiment described with respect to Figures 1A-1C. In this variation, the module 910 is identical to the module 10 described above, except that the first microelectronic element 920 and the second microelectronic element 930 are mounted on a lead frame 980 rather than on a module card (such as the module shown in FIG. 1A ). card 40). In certain embodiments, the respective front surfaces 921 and 931 of the first microelectronic element 920 and the second microelectronic element 930 can face the first surface 981 of the lead frame 980 and each microelectronic element is electrically connected to the lead frame.
美国专利No.7,176,506和No.6,765,287示出且描述了引线框架结构的示例,其公开内容通过引用并入本文。通常,引线框架(例如引线框架980)是一种由导电金属(如铜)层形成的结构,且图案化成包括多个引线或导电迹线部分985的片段。在示例性实施例中,第一微电子元件920和第二微电子元件930中的至少一个可直接安装在引线上,该引线可在微电子元件之下延伸。在这个实施例中,微电子元件上的触点924、934可通过焊球或类似的电连接至各个引线。然后引线可用于形成与多种其他导电结构的电连接,用于携载到达或来自第一微电子元件920和第二微电子元件930的电子信号电位。当结构组件完整时(包括在其上形成密封剂960),临时元件,比如框架(未示出),可从引线框架980的引线中去除,以形成单独的引线或导电迹线部分985。Examples of leadframe structures are shown and described in US Patent Nos. 7,176,506 and 6,765,287, the disclosures of which are incorporated herein by reference. Typically, a lead frame, such as lead frame 980 , is a structure formed from a layer of conductive metal, such as copper, and patterned into segments that include a plurality of leads or conductive trace portions 985 . In an exemplary embodiment, at least one of the first microelectronic element 920 and the second microelectronic element 930 may be directly mounted on a lead, which may extend under the microelectronic element. In this embodiment, the contacts 924, 934 on the microelectronic element may be electrically connected to the respective leads by solder balls or the like. The leads can then be used to form electrical connections to various other conductive structures for carrying electrical signal potentials to or from the first microelectronic element 920 and the second microelectronic element 930 . When the structural assembly is complete (including forming encapsulant 960 thereon), a temporary element, such as a frame (not shown), may be removed from the leads of leadframe 980 to form individual leads or conductive trace portions 985 .
第一微电子元件920可通过在第一微电子元件的前表面921与引线框架的第一表面981之间延伸的一个或多个粘合剂层914附接至引线框架980。这种粘合剂层914可类似于以上参考图1A至图1C描述的粘合剂层14。间隔片912可附接至引线框架980,一个或多个粘合剂层914在间隔片的前表面913和引线框架的第一表面981之间延伸。第二微电子元件930的前表面931的至少部分可部分地覆盖第一微电子元件920的后表面922以及间隔片912的后表面915。第二微电子元件930的前表面931可通过一个或多个粘合剂层914附接至第一微电子元件920的后表面922以及间隔片912的后表面915。The first microelectronic element 920 may be attached to the lead frame 980 by one or more adhesive layers 914 extending between the front surface 921 of the first microelectronic element and the first surface 981 of the lead frame. Such adhesive layer 914 may be similar to adhesive layer 14 described above with reference to FIGS. 1A-1C . A spacer 912 may be attached to the lead frame 980 with one or more adhesive layers 914 extending between the front surface 913 of the spacer and the first surface 981 of the lead frame. At least a portion of the front surface 931 of the second microelectronic element 930 may partially cover the rear surface 922 of the first microelectronic element 920 and the rear surface 915 of the spacer 912 . The front surface 931 of the second microelectronic element 930 may be attached to the rear surface 922 of the first microelectronic element 920 and the rear surface 915 of the spacer 912 by one or more adhesive layers 914 .
如图9A至9C所示,电连接或引线970可将第一微电子元件920的触点924和第二微电子元件930的触点934连接至暴露的模块触点950。引线970可包括线键合971和972,以及引线框架980的导电迹线部分985。在特定示例中,引线970可用于携载地址信号以在第一微电子元件920和第二微电子元件930中的至少一个中对存储器元件寻址。As shown in FIGS. 9A through 9C , electrical connections or leads 970 may connect contacts 924 of first microelectronic element 920 and contacts 934 of second microelectronic element 930 to exposed module contacts 950 . Leads 970 may include wire bonds 971 and 972 , and conductive trace portion 985 of lead frame 980 . In a particular example, the leads 970 can be used to carry address signals to address memory elements in at least one of the first microelectronic element 920 and the second microelectronic element 930 .
在一个示例中,引线框架980可限定在引线框架的第一表面981与相对于第一表面981的第二表面982之间延伸的第一间隙945和第二间隙946。第一间隙945可与第一微电子元件920的芯片触点924对齐,使得线键合971可在芯片触点924与引线框架的第二表面982之间延伸穿过第一间隙。第二间隙946可与第二微电子元件930的芯片触点934对齐,使得线键合972可在芯片触点934与引线框架的第二表面982之间延伸穿过第二间隙。In one example, the lead frame 980 can define a first gap 945 and a second gap 946 extending between a first surface 981 of the lead frame and a second surface 982 opposite the first surface 981 . The first gap 945 can be aligned with the chip contact 924 of the first microelectronic element 920 such that the wire bond 971 can extend through the first gap between the chip contact 924 and the second surface 982 of the lead frame. The second gap 946 can be aligned with the chip contact 934 of the second microelectronic element 930 such that the wire bond 972 can extend through the second gap between the chip contact 934 and the second surface 982 of the lead frame.
模块910也可包括覆盖第一微电子元件920、第二微电子元件930和部分引线框架980的密封剂960,使得暴露的模块触点950可暴露在密封剂的内插部分961的下表面962处。密封剂960也可覆盖触点924、934,以及在各个触点924、934与引线框架980之间延伸的线键合971、972。当模块910插入插口时,密封剂960的内插部分961可具有与相应的插口(图12所示)对接的合适的尺寸和形状。The module 910 may also include an encapsulant 960 covering the first microelectronic element 920, the second microelectronic element 930, and a portion of the lead frame 980 such that the exposed module contacts 950 may be exposed on the lower surface 962 of the interposer portion 961 of the encapsulant. place. Encapsulant 960 may also cover contacts 924 , 934 , as well as wire bonds 971 , 972 extending between each contact 924 , 934 and lead frame 980 . The inset portion 961 of the sealant 960 may have a suitable size and shape to interface with a corresponding socket (shown in FIG. 12 ) when the module 910 is inserted into the socket.
在特定实施例中,模块910可具有邻近第一表面981和第二表面982中至少一个的内插边缘983的多个平行的暴露的模块触点950,用于当模块910插入插口时,与插口(图12所示)的相应的触点对接。模块触点950中的一些或全部可暴露在引线框架980的第一表面981和第二表面982中的一个或两个上。In certain embodiments, the module 910 may have a plurality of parallel exposed module contacts 950 adjacent the inset edge 983 of at least one of the first surface 981 and the second surface 982 for contact with the module when the module 910 is inserted into the receptacle. The corresponding contacts of the socket (shown in Figure 12) are butted. Some or all of the module contacts 950 may be exposed on one or both of the first surface 981 and the second surface 982 of the lead frame 980 .
图10A和图10B是关于图2所述的实施例的一种变型。在此变型中,模块1010与上述的模块210相同,除了模块1010还包括安装在模块卡1040上的一叠第三微电子元件1090。10A and 10B are a variation on the embodiment described with respect to FIG. 2 . In this variation, module 1010 is identical to module 210 described above, except that module 1010 also includes a stack of third microelectronic elements 1090 mounted on module card 1040 .
同图2类似,第一微电子元件1020倒装芯片键合至模块卡1040的第一表面1041。第一微电子元件1020的导电触点或芯片触点1024可通过例如导电块1073电连接至暴露在模块卡1040的第一表面1041处的导电触点1047。第二微电子元件1030的芯片触点1034可通过延伸穿过模块卡的孔1046的线键合1072电连接至模块卡1040的相应的导电触点1044。导电迹线(未在图10A和图10B中示出)可沿着模块卡1040的第一表面1041和/或第二表面1042从导电触点1044和1047延伸至暴露在模块卡的内插边缘(例如边缘1043或边缘1043a)处的边缘触点1050。如图10B所示,边缘触点1050可暴露在第一表面1041处,或第二表面1042处,或第一表面和第二表面处。Similar to FIG. 2 , the first microelectronic element 1020 is flip-chip bonded to the first surface 1041 of the module card 1040 . Conductive contacts or chip contacts 1024 of first microelectronic element 1020 may be electrically connected to conductive contacts 1047 exposed at first surface 1041 of module card 1040 through, for example, conductive bumps 1073 . The chip contacts 1034 of the second microelectronic element 1030 can be electrically connected to corresponding conductive contacts 1044 of the module card 1040 by wire bonds 1072 extending through the holes 1046 of the module card. Conductive traces (not shown in FIGS. 10A and 10B ) may extend along the first surface 1041 and/or second surface 1042 of the module card 1040 from the conductive contacts 1044 and 1047 to the interposer edges exposed on the module card. Edge contacts 1050 at (eg, edge 1043 or edge 1043a). As shown in FIG. 10B , the edge contacts 1050 may be exposed at the first surface 1041 , or at the second surface 1042 , or at both the first surface and the second surface.
这叠第三微电子元件1090可为任意数目,包括,例如图10B所示的两个第三微电子元件1090a和1090b。第三微电子元件1090可通过互连结构相互连接,和/或与边缘触点1050连接。例如,下第三微电子元件1090a可通过倒装芯片键合、线键合、引线键合或其他互连结构与暴露在模块卡1040的表面处的触点连接。一个或多个上第三微电子元件1090b可通过延伸穿过下第三微电子元件1090a的导电通孔、线键合、引线键合或其他互连结构与模块卡1040的触点连接。The stack of third microelectronic elements 1090 can be any number including, for example, the two third microelectronic elements 1090a and 1090b shown in FIG. 1OB. The third microelectronic elements 1090 may be connected to each other and/or to the edge contacts 1050 by an interconnect structure. For example, the lower third microelectronic element 1090a may be connected to contacts exposed at the surface of the module card 1040 by flip-chip bonding, wire bonding, wire bonding, or other interconnect structures. One or more upper third microelectronic elements 1090b may be connected to contacts of module card 1040 by conductive vias, wire bonds, wire bonds, or other interconnect structures extending through lower third microelectronic elements 1090a.
在示例性实施例中,模块1010可配置为用作固态存储驱动。在这种示例中,第一微电子元件1020可包括主要用于执行逻辑功能的半导体芯片,例如固态驱动控制器,且第二微电子元件1030可包括存储器存储元件,例如易失性RAM(如DRAM)。第三微电子元件1090可包括存储器存储元件,例如非易失性闪存。第一微电子元件1020可包括专用处理器,专用处理器用于解除系统(例如图12的系统1200)的中央处理单元对出入包括在第二微电子元件1030和第三微电子元件1090中的存储器存储元件的数据的传输的管理。这种包括固态驱动控制器的第一微电子元件1020可以提供至和从系统(例如系统1100)的母板(例如,图12所示的电路板1202)上的数据总线的直接存储访问。In an exemplary embodiment, module 1010 may be configured to function as a solid state storage drive. In such an example, the first microelectronic element 1020 may include a semiconductor chip primarily for performing logic functions, such as a solid-state drive controller, and the second microelectronic element 1030 may include a memory storage element, such as a volatile RAM (such as DRAM). The third microelectronic element 1090 may include a memory storage element, such as non-volatile flash memory. The first microelectronic element 1020 may include a dedicated processor for unlocking the central processing unit of a system (such as the system 1200 of FIG. 12 ) to access memory included in the second microelectronic element 1030 and the third microelectronic element 1090. Management of the transfer of data for storage elements. Such a first microelectronic element 1020 including a solid state drive controller may provide direct memory access to and from a data bus on a motherboard (eg, circuit board 1202 shown in FIG. 12 ) of a system (eg, system 1100 ).
在另一实施例中,模块1010可配置为用作图形模块,例如可插入笔记本电脑的PCI显卡插槽。在这种示例中,第一微电子元件1020可包括主要用于执行逻辑功能的半导体芯片,例如图形处理器,且第二微电子元件1030可包括存储器存储元件,例如易失性RAM(如DRAM),其可用作计算图形绘制的易失性帧缓冲器。每个第三微电子元件1090可包括存储器存储元件(例如非易失性闪存)。In another embodiment, module 1010 can be configured to function as a graphics module, such as a PCI graphics card slot that can be inserted into a laptop computer. In such an example, the first microelectronic element 1020 may include a semiconductor chip primarily for performing logic functions, such as a graphics processor, and the second microelectronic element 1030 may include a memory storage element, such as a volatile RAM (such as a DRAM ), which can be used as a volatile framebuffer for computational graphics drawing. Each third microelectronic element 1090 may include a memory storage element (eg, non-volatile flash memory).
图10C是关于图10A和图10B所述的实施例的一种变型。在此变型中,模块1010’与上述的模块1010相同,除了模块1010’包括安装在模块卡1040上的相互相邻的而非堆叠的多个第三微电子元件1090’。同模块1010类似,第三微电子元件1090’可通过任何互连结构(例如倒装芯片键合、线键合、引线键合或其他互连结构)与暴露在模块卡1040的表面处的触点相连。模块1010’可用于与模块1010相同的示例性功能,例如固态内存驱动或图形模块。Figure 10C is a variation on the embodiment described with respect to Figures 10A and 10B. In this variation, the module 1010' is identical to the module 1010 described above, except that the module 1010' includes a plurality of third microelectronic elements 1090' mounted on the module card 1040 adjacent to each other rather than stacked. Similar to the module 1010, the third microelectronic element 1090' can be connected to contacts exposed at the surface of the module card 1040 by any interconnection structure, such as flip-chip bonding, wire bonding, wire bonding, or other interconnection structure. The dots are connected. Module 1010' may be used for the same exemplary functions as module 1010, such as a solid state memory drive or a graphics module.
图11描述了包括根据上述任一实施例的第一模块1110a和第二模块1110b(例如图1A至图1C所述的模块10)的部件1100。第一模块1110a和第二模块1110b可通过至少一个层1165相互键合,使得模块的各个模块卡1140的第二表面1142相互面对。在特定实施例中,上述至少一个层1165可为单个共同的密封剂(如图1A和1B所示的第二密封剂65)。在另一示例中,上述至少一个层1165可为类似于参考图1A至图1C所述的粘合剂层14的一个或多个粘合剂层。FIG. 11 depicts a component 1100 comprising a first module 1110a and a second module 1110b according to any of the embodiments described above, such as the module 10 described in FIGS. 1A-1C . The first module 1110a and the second module 1110b may be bonded to each other by at least one layer 1165 such that the second surfaces 1142 of the respective module cards 1140 of the modules face each other. In certain embodiments, the at least one layer 1165 described above may be a single common encapsulant (such as the second encapsulant 65 shown in FIGS. 1A and 1B ). In another example, the at least one layer 1165 may be one or more adhesive layers similar to the adhesive layer 14 described with reference to FIGS. 1A-1C .
部件1100可具有邻近部件的内插边缘1143的一行或多行平行的暴露的边缘触点1150。第一模块1110a和第二模块1110b中的每一个可具有一行暴露在各个模块卡1140的第一表面1141处的边缘触点1150,使得当部件1100插入插口时,这种边缘触点可以适合于与插口(类似于图12所示的插口)的相应的触点对接。Component 1100 may have one or more parallel rows of exposed edge contacts 1150 adjacent an interpolated edge 1143 of the component. Each of the first module 1110a and the second module 1110b can have a row of edge contacts 1150 exposed at the first surface 1141 of the respective module card 1140, so that when the component 1100 is inserted into the socket, such edge contacts can be adapted to Mate with corresponding contacts of a socket (similar to the socket shown in Figure 12).
参考图1A至图10所述的模块和部件可用于构建多种电子系统,例如图12所示的系统1200。例如,根据本发明进一步实施例的系统1200包括上述的多个模块或部件1206,以及其他电子部件1208和1210。The modules and components described with reference to FIGS. 1A to 10 can be used to construct various electronic systems, such as the system 1200 shown in FIG. 12 . For example, a system 1200 according to a further embodiment of the present invention includes a number of modules or components 1206 as described above, as well as other electronic components 1208 and 1210 .
系统1200可包括多个插口1205,每个插口包括在插口一侧或两侧的多个触点1207,使得每个插口1205可适合于与相应的模块或部件1206的相应的暴露的边缘触点或暴露的模块触点对接。在所示的示例性系统1200中,系统可包括电路板或主板1202(例如柔性印刷电路板),电路板包括将模块或部件1206彼此互连的很多个导体1204,在图12中仅示出其中一个导体。然而,这只是示例性的;可以使用用于制造模块或部件1206之间的电连接的任何适当的结构。System 1200 may include a plurality of sockets 1205, each socket including a plurality of contacts 1207 on one or both sides of the socket, such that each socket 1205 may be adapted to contact a corresponding exposed edge of a corresponding module or component 1206 or exposed module contact mating. In the illustrated exemplary system 1200, the system may include a circuit board or motherboard 1202 (such as a flexible printed circuit board) including a plurality of conductors 1204 interconnecting modules or components 1206 to one another, only shown in FIG. one of the conductors. However, this is exemplary only; any suitable structure for making electrical connections between modules or components 1206 may be used.
在特定实施例中,系统1200还可包括处理器(如半导体芯片1208),使得每个模块或部件1206可用于在时钟周期内传送N个并行数据位,且处理器可用于在时钟周期内传送M个并行数据位,M大于或等于N。In a particular embodiment, system 1200 may also include a processor (such as semiconductor chip 1208), such that each module or component 1206 may be used to transfer N parallel data bits in a clock cycle, and the processor may be used to transfer N parallel data bits in a clock cycle. M parallel data bits, where M is greater than or equal to N.
在一个示例中,系统1200可包括用于在时钟周期内传送32个并行数据位的处理器芯片1208,且该系统也可包括四个模块1206(例如参考图1A至1C所述的模块10),每个模块1206用于在时钟周期内传送8个并行数据位(即每个模块1206可包括第一微电子元件和第二微电子元件,两个微电子元件中的每个用于在时钟周期内传送4个并行数据位)。In one example, system 1200 may include a processor chip 1208 for transferring 32 parallel data bits per clock cycle, and the system may also include four modules 1206 (eg, modules 10 described with reference to FIGS. 1A through 1C ) , each module 1206 is used to transmit 8 parallel data bits in a clock cycle (that is, each module 1206 may include a first microelectronic element and a second microelectronic element, each of the two microelectronic elements is used to transmit 8 parallel data bits during a clock cycle 4 parallel data bits are transferred in one cycle).
在另一个示例中,系统1200可包括用于在个时钟周期内传送64个并行数据位的处理器芯片1208,且该系统也可包括四个模块1206(例如参考图12所述的部件1000),每个模块1206用于在时钟周期内传送16个并行数据位(即每个模块1206可包括两组第一微电子元件和第二微电子元件,四个微电子元件中的每一个用于在时钟周期内传送4个并行数据位)。In another example, the system 1200 may include a processor chip 1208 for transferring 64 parallel data bits in a clock cycle, and the system may also include four modules 1206 (such as the component 1000 described with reference to FIG. 12 ) , each module 1206 is used to transmit 16 parallel data bits in a clock cycle (that is, each module 1206 may include two sets of first microelectronic elements and second microelectronic elements, and each of the four microelectronic elements is used for 4 parallel data bits are transferred in one clock cycle).
在图12所述的示例中,部件1208是半导体芯片且部件1210是显示屏,但任何其他部件可用于系统1200中。当然,尽管为了说明的清楚性,在图12中仅示出了两个额外的部件1208和1210,但系统可以包括任何数量的这种部件。In the example depicted in FIG. 12 , component 1208 is a semiconductor chip and component 1210 is a display screen, but any other components may be used in system 1200 . Of course, although only two additional components 1208 and 1210 are shown in FIG. 12 for clarity of illustration, the system may include any number of such components.
模块或部件1206和部件1208及1210安装在共用的壳体1201(以虚线示意地示出)中,并在必要时彼此电互连以形成期望的电路。壳体1201被示为在例如移动电话或个人数字助理中可用的类型的便携式壳体,屏幕1210可以暴露在壳体的表面处。在结构1206包括感光元件(例如成像芯片)的实施例中,还可以设置透镜1211或其他光学装置用于将光导向到该结构。此外,图12所示的简化的系统只是示例性的;可以使用上述的结构制造其他系统,包括通常被认为是固定结构的系统,例如台式电脑、路由器等。Module or component 1206 and components 1208 and 1210 are mounted in a common housing 1201 (shown schematically in phantom) and are electrically interconnected with each other as necessary to form the desired electrical circuit. Housing 1201 is shown as a portable housing of the type found in, for example, mobile phones or personal digital assistants, and screen 1210 may be exposed at the surface of the housing. In embodiments where structure 1206 includes a photosensitive element (eg, an imaging chip), a lens 1211 or other optical device may also be provided for directing light to the structure. Furthermore, the simplified system shown in FIG. 12 is exemplary only; other systems can be fabricated using the structures described above, including systems that are generally considered to be fixed structures, such as desktop computers, routers, and the like.
图13A和图13B是关于图7A和图7B所述的实施例的一种变型。在此变型中,微电子封装1310与上述的模块710相同,除了微电子封装1310包括安装至衬底1340而非模块卡的微电子元件1320和1330,且微电子封装1310具有用于与部件而非边缘触点互连的端子1350。在一个实施例中,同上述模块710类似,衬底1340可以没有延伸穿过衬底的孔的引线。Figures 13A and 13B are a variation on the embodiment described with respect to Figures 7A and 7B. In this variation, microelectronic package 1310 is identical to module 710 described above, except that microelectronic package 1310 includes microelectronic elements 1320 and 1330 mounted to substrate 1340 rather than a module card, and microelectronic package 1310 has Terminals 1350 for non-edge contact interconnections. In one embodiment, similar to module 710 described above, substrate 1340 may have no leads extending through holes in the substrate.
第一微电子元件1320可具有面对衬底1340的第一表面1341的前表面1321。第一微电子元件1320可具有在第一微电子元件的前表面1321处的多个元件触点1324。元件触点1324可与第一组衬底触点1347a联接,使得元件触点与衬底触点倒装芯片键合。如图13B所示,元件触点1324和第一组衬底触点1347a都可布置成面阵结构。The first microelectronic element 1320 may have a front surface 1321 facing a first surface 1341 of the substrate 1340 . The first microelectronic element 1320 can have a plurality of element contacts 1324 at the front surface 1321 of the first microelectronic element. The component contacts 1324 can be coupled with the first set of substrate contacts 1347a such that the component contacts are flip-chip bonded to the substrate contacts. As shown in FIG. 13B, both the component contacts 1324 and the first set of substrate contacts 1347a may be arranged in an area array configuration.
第二微电子元件1330可具有面对衬底1340的第一表面1341的前表面1331。第二微电子元件1330的前表面1331可部分地覆盖第一微电子元件1320的后表面1322,且可例如通过粘合剂层1314附接至后表面1322。The second microelectronic element 1330 may have a front surface 1331 facing the first surface 1341 of the substrate 1340 . Front surface 1331 of second microelectronic element 1330 may partially cover rear surface 1322 of first microelectronic element 1320 and may be attached to rear surface 1322 , for example, by adhesive layer 1314 .
第二微电子元件1330可具有在其前表面1331处的多个元件触点1334。元件触点1334可与第二组衬底触点1347b联接,使得元件触点与衬底触点倒装芯片键合。如图13B所示,元件触点1334和第二组衬底触点1347b都可布置成列结构。The second microelectronic element 1330 can have a plurality of element contacts 1334 at its front surface 1331 . Component contacts 1334 may be coupled with a second set of substrate contacts 1347b such that the component contacts are flip-chip bonded to the substrate contacts. As shown in Figure 13B, both the component contacts 1334 and the second set of substrate contacts 1347b may be arranged in a column configuration.
尽管触点1324、1334和1347布置成示出的平行的触点列,但是如以上参考图7A-7C所述的,本发明也考虑了触点的其他布置方式。Although contacts 1324, 1334, and 1347 are shown arranged in parallel contact columns, other arrangements of contacts are contemplated by the present invention, as described above with reference to FIGS. 7A-7C.
衬底1340可进一步包括在第二表面1342处的多个端子1350,用于将微电子封装1310连接至封装外部的一个部件。导电块1351可布置在端子1350的暴露的表面上。这种导电块1351可为,例如,焊球或参考导电块273上述任何其他材料。在一个示例中,外部部件可为在下文参考图16描述的电路板(如电路板1602)。Substrate 1340 may further include a plurality of terminals 1350 at second surface 1342 for connecting microelectronic package 1310 to a component external to the package. A conductive bump 1351 may be disposed on an exposed surface of the terminal 1350 . Such conductive bumps 1351 may be, for example, solder balls or any other material described above with reference to conductive bumps 273 . In one example, the external component may be a circuit board (eg, circuit board 1602 ) as described below with reference to FIG. 16 .
触点1324和1334可通过例如各个导电块1373和1375电连接至各组衬底触点1347a和1347b。导电块1373可为,例如,焊球或参考导电块273的上述任何其他材料。导电块1375可为,例如,细长的焊料连接,焊球或参考导电块273的上述任何其他材料。Contacts 1324 and 1334 may be electrically connected to respective sets of substrate contacts 1347a and 1347b through, for example, respective conductive bumps 1373 and 1375 . Conductive bump 1373 may be, for example, a solder ball or any other material described above with reference to conductive bump 273 . Conductive bump 1375 may be, for example, an elongated solder connection, a solder ball, or any other material described above with reference to conductive bump 273 .
如图14A所示,在图13A和图13B的实施例的变型中,导电块1375和/或导电块1373可至少部分由导电接线柱1475代替。导电接线柱可包括沉积(如涂覆或电镀)在开口之内的部分,第二微电子元件的触点1434暴露在开口内。例如,导电接线柱1475可在延伸至少部分穿过密封剂1460的相应的孔1476中通过沉积金属或其他导电材料(如导电基体材料)而形成,且利用了例如美国专利公开No.2012/0126389所述的工艺,其公开内容通过引用并入本文。As shown in FIG. 14A , in a variation of the embodiment of FIGS. 13A and 13B , conductive bumps 1375 and/or conductive bumps 1373 may be at least partially replaced by conductive studs 1475 . The conductive posts may include portions deposited (eg, coated or plated) within the openings in which the contacts 1434 of the second microelectronic element are exposed. For example, conductive studs 1475 may be formed by depositing metal or other conductive material, such as a conductive matrix material, in corresponding holes 1476 extending at least partially through encapsulant 1460, and utilizing, for example, U.S. Patent Publication No. 2012/0126389 The process, the disclosure of which is incorporated herein by reference.
在另一个变型中,如图14B所示,接线柱可包括多个突出远离第二微电子元件1430的元件触点1434而朝向相应的衬底触点1447b的截头锥形接线柱1477。每个接线柱1477基本上包括大体刚性的导电材料,例如,金属(如铜或铝)。在一个实施例中,接线柱1477可由刻蚀一种结构(例如附接至触点的连续的或非连续的金属片)形成。导电块1473可设置在接线柱1477和衬底触点1447b之间以提供其间的电连接。如图14B所示,接线柱1477可为锥形,使得每个接线柱具有大于邻近衬底触点1447b的第二宽度的邻近元件触点1434的第一宽度。In another variation, as shown in FIG. 14B, the posts may include a plurality of frustoconical posts 1477 protruding away from the element contacts 1434 of the second microelectronic element 1430 toward the corresponding substrate contacts 1447b. Each stud 1477 essentially comprises a substantially rigid conductive material, for example, a metal such as copper or aluminum. In one embodiment, post 1477 may be formed by etching a structure such as a continuous or discontinuous sheet of metal attached to a contact. A conductive bump 1473 may be disposed between the post 1477 and the substrate contact 1447b to provide an electrical connection therebetween. As shown in FIG. 14B , studs 1477 may be tapered such that each stud has a first width adjacent component contact 1434 that is greater than a second width adjacent substrate contact 1447b.
参见图14C,在图14B的实施例的变型中,接线柱可包括多个突出远离衬底触点1447b而朝向相应的第二微电子元件1430的元件触点1434的截头锥形接线柱1478。导电块1473可设置在接线柱1478和元件触点1434之间以提供其间的电连接。如图14C所示,接线柱1478可为锥形,使得每个接线柱具有大于邻近元件触点1434的第二宽度的邻近衬底触点1447b的第一宽度。Referring to FIG. 14C , in a variation of the embodiment of FIG. 14B , the posts may include a plurality of frustoconical posts 1478 protruding away from the substrate contacts 1447b toward the element contacts 1434 of the corresponding second microelectronic element 1430 . Conductive bumps 1473 may be disposed between terminal posts 1478 and component contacts 1434 to provide electrical connection therebetween. As shown in FIG. 14C , studs 1478 may be tapered such that each stud has a first width adjacent substrate contact 1447b that is greater than a second width adjacent element contact 1434 .
参见图14D,在另一个变型中,至少一些导电块1375可被导电接线柱1479a和1479b代替,接线柱1479a从第二微电子元件1430的元件触点1434朝向一些相应的衬底触点1447b延伸,且接线柱1479b从衬底触点朝向接线柱1479a延伸。导电块1473可设置在导电接线柱1479a和1479b之间以提供其间的电连接。如图14D所示,线柱1479a和1479b都可以是锥形,使得每个接线柱具有大于邻近导电块1473的第二宽度的邻近元件触点1434或衬底触点1447b的第一宽度。14D, in another variation, at least some of the conductive bumps 1375 may be replaced by conductive posts 1479a and 1479b, the posts 1479a extending from the element contacts 1434 of the second microelectronic element 1430 toward some of the corresponding substrate contacts 1447b. , and stud 1479b extends from the substrate contact toward stud 1479a. Conductive bump 1473 may be disposed between conductive posts 1479a and 1479b to provide electrical connection therebetween. As shown in FIG. 14D , both studs 1479a and 1479b may be tapered such that each stud has a first width adjacent to component contact 1434 or substrate contact 1447b that is greater than a second width adjacent to conductive bump 1473 .
参见图14E,在图14B的实施例的另一个变型中,细长的焊料连接1480可设置在衬底触点1447b与第二微电子元件1430的相应的元件触点1434之间的接线柱1477周围,以提供接线柱和衬底触点之间的电连接。图14B、14C和14D的任一实施例所示的导电块1473可被在元件触点1434和衬底触点1447b之间的各个接线柱1477,1478和1479周围延伸的被细长的焊料连接1480代替。Referring to FIG. 14E , in another variation on the embodiment of FIG. 14B , elongated solder connections 1480 may be provided at post 1477 between substrate contacts 1447b and corresponding element contacts 1434 of second microelectronic element 1430 around to provide an electrical connection between the post and the substrate contacts. The conductive bumps 1473 shown in any of the embodiments of FIGS. 14B, 14C, and 14D may be connected by elongated solder strips extending around respective posts 1477, 1478, and 1479 between component contacts 1434 and substrate contacts 1447b. 1480 instead.
图15是关于图6所述的实施例的一种变型。在此变型中,微电子封装1510与上述的模块610相同,除了微电子封装1510包括安装至衬底1540而非模块卡的微电子元件1520和1530,且微电子封装1510具有暴露在第二表面1542处的用于将封装1510与另一部件互连的端子1550,而不是图6所示实施例中的边缘触点。在一个实施例中,同上述模块610类似,衬底1540可以没有延伸穿过衬底的孔的引线。FIG. 15 is a variation of the embodiment described with respect to FIG. 6 . In this variation, microelectronic package 1510 is identical to module 610 described above, except that microelectronic package 1510 includes microelectronic elements 1520 and 1530 mounted to substrate 1540 rather than a module card, and microelectronic package 1510 has a surface exposed on a second surface. Terminals 1550 at 1542 for interconnecting package 1510 with another component are used instead of edge contacts as in the embodiment shown in FIG. 6 . In one embodiment, similar to module 610 described above, substrate 1540 may have no leads extending through holes in the substrate.
类似于上述模块10,第二微电子元件1530的导电触点1534可暴露在第二微电子元件的中心区域1535内的前表面1531处。例如,触点1534可布置成成邻近前表面1531的中心的一行或平行的两行。Similar to the module 10 described above, the conductive contacts 1534 of the second microelectronic element 1530 may be exposed at the front surface 1531 within the central region 1535 of the second microelectronic element. For example, the contacts 1534 may be arranged in one row adjacent the center of the front surface 1531 or in two parallel rows.
导电块1575可为,例如,细长的焊料连接,焊球或参考导电块273的上述任何其他材料。这种导电块1575可延伸穿过间隔片1512与第一微电子元件1520的侧边缘1523之间的空隙,以将第二微电子元件1530与衬底1540电连接。Conductive bump 1575 may be, for example, an elongated solder connection, a solder ball, or any other material described above with reference to conductive bump 273 . Such conductive bumps 1575 can extend across the gap between the spacer 1512 and the side edges 1523 of the first microelectronic element 1520 to electrically connect the second microelectronic element 1530 to the substrate 1540 .
图15所示的导电块1575可被元件触点1534和衬底触点1547b(如图14A至14E所示)之间的任一可选连接代替。The conductive bump 1575 shown in Figure 15 may be replaced by any alternative connection between the component contact 1534 and the substrate contact 1547b (shown in Figures 14A to 14E).
参考图13A至图15所述的任一微电子封装可包括额外的微电子元件,例如图10A和10B所示的第三微电子元件1090a和1090b(共同地为第三微电子元件1090),以及图10C所示的第三微电子元件1090’。Any of the microelectronic packages described with reference to FIGS. 13A-15 may include additional microelectronic elements, such as third microelectronic elements 1090 a and 1090 b (collectively third microelectronic element 1090 ) shown in FIGS. 10A and 10B , and the third microelectronic element 1090' shown in FIG. 10C.
在特定实施例中,微电子封装1310(或1510)可包括,在类似于图10B所示的微电子元件布置的构造中,安装在衬底1340的第一表面1341上的一叠第三微电子元件1090。在这种实施例中,第三微电子元件1090a和1090b都具有面对衬底的第一表面1341的表面,该表面与微电子元件1320和1330的前表面1321和1331所面对的衬底的表面相同。这种包括第三微电子元件1090的衬底1340还可具有第二表面1342处的用于与另一部件互连的端子1350,而不是图10B所示的边缘触点。在这种实施例中,这一堆叠中可有任何数目的第三微电子元件1090,包括,例如图10B所示的实施例中的两个第三微电子元件1090a和1090b。In a particular embodiment, microelectronic package 1310 (or 1510) may include, in a configuration similar to the microelectronic element arrangement shown in FIG. 10B , a stack of third microelectronic components mounted on first surface 1341 of substrate 1340 Electronic components 1090. In such an embodiment, the third microelectronic elements 1090a and 1090b each have a surface facing the first surface 1341 of the substrate, which is the same substrate facing the front surfaces 1321 and 1331 of the microelectronic elements 1320 and 1330. of the same surface. Such a substrate 1340 including the third microelectronic element 1090 may also have terminals 1350 at the second surface 1342 for interconnection with another component, rather than the edge contacts shown in FIG. 10B . In such embodiments, there may be any number of third microelectronic elements 1090 in the stack, including, for example, the two third microelectronic elements 1090a and 1090b in the embodiment shown in FIG. 1OB.
在一个示例中,微电子封装1310(或1510)可包括,在类似于图10C所示的微电子元件布置的构造中,安装在衬底1340的第一表面1341上的相邻的而非堆叠的多个第三微电子元件1090’。在这种实施例中,每个第三微电子元件1090’可具有面对衬底的第一表面1341的一个表面,该表面与微电子元件1320和1330的前表面1321和1331所面对的衬底的表面相同。这种包括第三微电子元件1090’的衬底1340还可具有第二表面1342处的用于与另一部件互连的端子1350,而不是图10C所示的边缘触点。在这种实施例中,这一堆叠中可有任何数目的第三微电子元件1090’,包括,例如图10C所示的实施例中的四个第三微电子元件1090’。In one example, microelectronic package 1310 (or 1510 ) may include, in a configuration similar to the microelectronic element arrangement shown in FIG. 10C , adjacent rather than stacked A plurality of third microelectronic elements 1090'. In such an embodiment, each third microelectronic element 1090' can have a surface facing the first surface 1341 of the substrate that is opposite to the front surfaces 1321 and 1331 of the microelectronic elements 1320 and 1330. The surfaces of the substrates are the same. Such a substrate 1340 including a third microelectronic element 1090' may also have terminals 1350 at the second surface 1342 for interconnection with another component, rather than the edge contacts shown in FIG. 1OC. In such embodiments, there may be any number of third microelectronic elements 1090' in the stack, including, for example, four third microelectronic elements 1090' in the embodiment shown in FIG. 1OC.
参考图1A至图15所述的模块和微电子封装可被用来构造多种电子系统,例如图16所示的系统1600。例如,根据本发明的进一步实施例的系统1600包括一个或多个模块或部件1606(例如上述微电子封装1310)以及其他电子部件1608和1610。The modules and microelectronic packages described with reference to FIGS. 1A-15 can be used to construct a variety of electronic systems, such as the system 1600 shown in FIG. 16 . For example, system 1600 according to further embodiments of the invention includes one or more modules or components 1606 (eg, microelectronic package 1310 described above) and other electronic components 1608 and 1610 .
在所示的示例性系统1600中,系统可包括电路板、主板或扩展板1602(例如柔性印刷电路板),电路板包括将模块或部件1606彼此互连的很多个导体1604,在图16中仅示出其中一个导体。这种电路板1602可传输到达或来自包括在系统1600内的微电子封装和/或微电子组件的信号。然而,这只是示例性的;可以使用用于制造模块或部件1606之间的电连接的任何适当的结构。In the exemplary system 1600 shown, the system may include a circuit board, motherboard, or expander 1602 (such as a flexible printed circuit board) that includes a plurality of conductors 1604 that interconnect modules or components 1606 to one another, in FIG. 16 Only one of the conductors is shown. Such circuit board 1602 may transmit signals to and from microelectronic packages and/or microelectronic assemblies included within system 1600 . However, this is exemplary only; any suitable structure for making electrical connections between modules or components 1606 may be used.
在特定实施例中,系统1600还可包括处理器(如半导体芯片1608),使得每个模块或部件1606可用于在时钟周期内传送N个并行数据位,且处理器可用于在时钟周期内传送M个并行数据位,M大于或等于N。In a particular embodiment, system 1600 may also include a processor (such as semiconductor chip 1608), such that each module or component 1606 may be used to transfer N parallel data bits in a clock cycle, and the processor may be used to transfer N parallel data bits in a clock cycle. M parallel data bits, where M is greater than or equal to N.
在图16所述的示例中,部件1608是半导体芯片且部件1610是显示屏,但任何其他部件可用于系统1600中。当然,尽管为了说明的清楚性,在图16中仅示出了两个额外的部件1608和1610,但系统1600可以包括任何数量的这种部件。In the example depicted in FIG. 16 , component 1608 is a semiconductor chip and component 1610 is a display screen, but any other components may be used in system 1600 . Of course, although only two additional components 1608 and 1610 are shown in FIG. 16 for clarity of illustration, system 1600 may include any number of such components.
模块或部件1606和部件1608及1610可安装在共用的壳体1601(以虚线示意地示出)中,并在必要时彼此电互连以形成期望的电路。壳体1601被示为在例如移动电话或个人数字助理中可用的类型的便携式壳体,屏幕1610可以暴露在壳体的表面处。在结构1606包括感光元件(例如成像芯片)的实施例中,还可以设置透镜1611或其他光学装置用于将光导向到该结构。此外,图16所示的简化的系统只是示例性的;可以使用上述的结构制造其他系统,包括通常被认为是固定结构的系统,例如台式电脑、路由器等。Module or component 1606 and components 1608 and 1610 may be mounted in a common housing 1601 (shown schematically in phantom) and electrically interconnected with each other as necessary to form the desired electrical circuit. Housing 1601 is shown as a portable housing of the type found in, for example, mobile phones or personal digital assistants, and screen 1610 may be exposed at the surface of the housing. In embodiments where structure 1606 includes a photosensitive element (eg, an imaging chip), a lens 1611 or other optical device may also be provided for directing light to the structure. Furthermore, the simplified system shown in FIG. 16 is exemplary only; other systems may be fabricated using the structures described above, including systems that are generally considered to be fixed structures, such as desktop computers, routers, and the like.
根据本发明的模块或部件的一个潜在优势在于(例如图1A至图1C所示的模块10,其中第一微电子元件的表面覆盖第二微电子元件的后表面的至少一部分)可用于提供,将一个特定的暴露的边缘触点(例如暴露的边缘触点50)与暴露在一个特定的微电子元件(例如第一微电子元件20)的前表面处的一个特定的电触点(例如电触点24)电连接的较短的引线。在相邻引线之间的寄生电容是相当大的,尤其是在具有高触点密度和小间距的微电子组件中。在具有较短的引线70的微电子组件中(如模块10),可以减小寄生电容,尤其是相邻引线间的寄生电容。One potential advantage of modules or components according to the present invention (such as module 10 shown in FIGS. Connecting a particular exposed edge contact (such as exposed edge contact 50) to a particular electrical contact (such as an electrical contact) exposed at the front surface of a particular microelectronic element (such as first microelectronic element 20) Contacts 24) are electrically connected shorter leads. The parasitic capacitance between adjacent leads is considerable, especially in microelectronic assemblies with high contact density and small pitch. In microelectronic assemblies having shorter leads 70, such as module 10, parasitic capacitance, especially between adjacent leads, can be reduced.
根据本发明的模块或部件的另一个潜在优势在于,如上所述,其可用于提供相似长度的引线(如引线70),例如将数据输入/输出信号端子(例如暴露的边缘触点50)与第一微电子元件20和第二微电子元件30的各自的前表面处的电触点24、34电连接。在系统(例如包括多个模块或部件1206的系统1200)中,具有相对相似长度的引线70,可以允许每个微电子元件和暴露的边缘触点之间的数据输入/输出信号的传播延迟可以相对地高度匹配。Another potential advantage of a module or component according to the invention is that, as described above, it can be used to provide leads of similar length (such as leads 70), for example connecting data input/output signal terminals (such as exposed edge contacts 50) with The electrical contacts 24, 34 at the respective front surfaces of the first microelectronic element 20 and the second microelectronic element 30 are electrically connected. In a system, such as system 1200 including multiple modules or components 1206, having leads 70 of relatively similar lengths can allow for the propagation delay of data input/output signals between each microelectronic element and exposed edge contacts to be Relatively high match.
根据本发明的模块或部件的另一个潜在优势在于,如上所述,其可用于提供相似长度的引线(如引线70),然后,例如,可将共享时钟信号端子和/或共享数据选通信号端子(例如,暴露的边缘触点50)与第一微电子元件20和第二微电子元件30的各自的前表面处的电触点24、34电连接。数据选通信号端子或时钟信号端子或两者可以具有至各个微电子元件20和微电子元件30的大致相同的加载和导电路径长度,而且至每个微电子元件的路径长度可相对较短。Another potential advantage of a module or component according to the invention is that, as described above, it can be used to provide leads of similar length (such as lead 70), and then, for example, a shared clock signal terminal and/or a shared data strobe signal can be The terminals (eg, exposed edge contacts 50 ) are electrically connected to the electrical contacts 24 , 34 at the respective front surfaces of the first microelectronic element 20 and the second microelectronic element 30 . The data strobe signal terminals or the clock signal terminals or both may have approximately the same loading and conduction path lengths to each microelectronic element 20 and microelectronic element 30, and the path lengths to each microelectronic element may be relatively short.
在前述的任一或所有模块或部件中,第一微电子元件或第二微电子元件中的一个或多个的后表面可在完成制作后至少部分地暴露在微电子组件的外表面处。因此,在参考图1A至1C所述的组件中,第一微电子元件20和第二微电子元件30的各自的后表面22和32中的一个或两个可部分地或完全暴露在已完成的模块10内。虽然包胶模(如第一密封剂60)或其他密封或封装结构可接触或被设置成邻近微电子元件,但是后表面22和32可被部分地或完全暴露。In any or all of the foregoing modules or components, the rear surface of one or more of the first microelectronic element or the second microelectronic element may be at least partially exposed at the outer surface of the microelectronic assembly after fabrication is complete. Therefore, in the assembly described with reference to FIGS. within the module 10. While an overmold (eg, first encapsulant 60 ) or other sealing or encapsulating structure may contact or be disposed adjacent to the microelectronic element, rear surfaces 22 and 32 may be partially or fully exposed.
在上述任一实施例中,微电子组件可包括由金属、石墨或任何其他合适的导热材料制成的散热器。在一个实施例中,散热器包括邻近第一微电子元件设置的金属层。金属层可暴露在第一微电子元件的后表面上。可选地,散热器可包括至少覆盖第一微电子元件的后表面的包胶模或密封剂。In any of the embodiments described above, the microelectronic assembly may include a heat sink made of metal, graphite, or any other suitable thermally conductive material. In one embodiment, the heat spreader includes a metal layer disposed adjacent to the first microelectronic element. A metal layer can be exposed on the rear surface of the first microelectronic element. Optionally, the heat spreader may include an overmold or encapsulant covering at least the rear surface of the first microelectronic element.
尽管已经参考特定实施例对本发明进行了描述,应该理解的是这些实施例仅仅是对本发明的原理和应用的说明。因此,应理解的是,在不脱离通过所附权利要求限定的本发明的精神和范围的情况下,可以对上述说明性实施例进行各种修改以及可以设计其他布置。Although the invention has been described with reference to specific embodiments, it should be understood that these embodiments are merely illustrative of the principles and applications of the invention. It is therefore to be understood that various modifications may be made to the above-described illustrative embodiments, and that other arrangements may be devised, without departing from the spirit and scope of the invention as defined by the appended claims.
应理解的是,各个从属权利要求及其中列举的特征可以以不同的方式与原始权利要求中的特征相结合。还应理解的是,结合各个实施例描述的特征可与所述实施例的其他特征共享。It shall be understood that the individual dependent claims and the features recited therein may be combined in different ways with features of the original claims. It should also be understood that features described in connection with various embodiments may be shared with other features of the described embodiments.
工业实用性Industrial Applicability
本发明具有广泛的工业实用性,包括但不限于微电子封装及微电子封装的制造方法。The invention has wide industrial applicability, including but not limited to microelectronic packaging and the manufacturing method of microelectronic packaging.
权利要求书(按照条约第19条的修改)Claims (as amended under Article 19 of the Treaty)
1.一种微电子封装,包括:1. A microelectronic package comprising:
衬底,所述衬底具有相对的第一表面和第二表面,以及在所述第一表面处的多个衬底触点和在所述第二表面处的多个端子,用于将所述微电子封装连接到所述封装外部的至少一个部件;以及a substrate having opposing first and second surfaces, and a plurality of substrate contacts at the first surface and a plurality of terminals at the second surface for connecting the the microelectronic package is connected to at least one component external to the package; and
第一微电子元件和第二微电子元件,所述第一微电子元件和第二微电子元件分别具有面对所述衬底的第一表面的前表面,每个微电子元件具有在其所述前表面处的多个元件触点,每个微电子元件的所述元件触点与相应的所述衬底触点相联接,所述第二微电子元件的所述前表面部分覆盖且附接至所述第一微电子元件的后表面,所述第二微电子元件的所述元件触点暴露在所述第二微电子元件的所述前表面的中心区域内,A first microelectronic element and a second microelectronic element each having a front surface facing the first surface of the substrate, each microelectronic element having a a plurality of element contacts at the front surface, the element contacts of each microelectronic element being coupled to corresponding substrate contacts, the front surface of the second microelectronic element partially covering and attached to connected to the rear surface of the first microelectronic element, the element contacts of the second microelectronic element exposed in a central region of the front surface of the second microelectronic element,
其中所述第一微电子元件的所述元件触点布置在面阵中且与第一组所述衬底触点倒装芯片键合,所述第二微电子元件的所述元件触点通过导电块与第二组所述衬底触点相联接。wherein said element contacts of said first microelectronic element are arranged in an area array and are flip-chip bonded to a first set of said substrate contacts, said element contacts of said second microelectronic element are A conductive block is coupled to a second set of said substrate contacts.
2.根据权利要求1所述的微电子封装,其中所述第二微电子元件的所述元件触点突出于所述第一微电子元件的侧边缘之外。2. The microelectronic package of claim 1, wherein the element contacts of the second microelectronic element protrude beyond a side edge of the first microelectronic element.
3.根据权利要求1所述的微电子封装,其中所述第一微电子元件和第二微电子元件中的至少一个包括存储器元件。3. The microelectronic package of claim 1, wherein at least one of the first and second microelectronic elements comprises a memory element.
4.根据权利要求3所述的微电子封装,还包括从至少一些所述衬底触点延伸至所述端子的多个引线,其中所述引线可用于携载地址信号以在所述第一微电子元件和第二微电子元件中的至少一个中对所述存储器元件寻址。4. A microelectronic package as claimed in claim 3 , further comprising a plurality of leads extending from at least some of said substrate contacts to said terminals, wherein said leads are operable to carry address signals for use in said first The memory element is addressed in at least one of the microelectronic element and the second microelectronic element.
5.根据权利要求1所述的微电子封装,其中至少一些所述端子可用于携载所述各个端子与所述第一微电子元件和第二微电子元件中的每个之间的信号或参考电位中的至少一个。5. A microelectronic package as claimed in claim 1 , wherein at least some of said terminals are operable to carry signals or signals between said respective terminals and each of said first and second microelectronic elements. at least one of the reference potentials.
6.根据权利要求1所述的微电子封装,还包括多个第三微电子元件,每个第三微电子元件电连接至所述衬底。6. The microelectronic package of claim 1, further comprising a plurality of third microelectronic elements, each third microelectronic element being electrically connected to the substrate.
7.根据权利要求6所述的微电子封装,其中所述多个第三微电子元件布置成堆叠结构,每个所述第三微电子元件具有与一个相邻的所述第三微电子元件的前表面或后表面相面对的前表面或后表面。7. The microelectronic package according to claim 6, wherein said plurality of third microelectronic elements are arranged in a stacked configuration, each of said third microelectronic elements having an adjacent third microelectronic element The front surface or the rear surface facing the front surface or the rear surface.
8.根据权利要求6所述的微电子封装,其中所述多个第三微电子元件布置成平面结构,每个所述第三微电子元件具有与一个相邻的所述第三微电子元件的外围表面相面对的外围表面。8. The microelectronic package according to claim 6 , wherein said plurality of third microelectronic elements are arranged in a planar configuration, each said third microelectronic element having an adjacent third microelectronic element The peripheral surfaces of the facing peripheral surfaces.
9.根据权利要求6所述的微电子封装,其中所述第二微电子元件包括易失性RAM,每个所述第三微电子元件包括非易失性闪存,且所述第一微电子元件包括主要用于控制外部组件与所述第二微电子元件和第三微电子元件之间的数据传送的处理器。9. The microelectronic package of claim 6, wherein said second microelectronic elements comprise volatile RAM, each of said third microelectronic elements comprises non-volatile flash memory, and said first microelectronic The element includes a processor primarily for controlling data transfer between external components and said second and third microelectronic elements.
10.根据权利要求6所述的微电子封装,其中所述第二微电子元件包括易失性帧缓冲存储器元件,每个所述第三微电子元件包括非易失性闪存,且所述第一微电子元件包括图形处理器。10. A microelectronic package as claimed in claim 6, wherein said second microelectronic elements comprise volatile frame buffer memory elements, each of said third microelectronic elements comprises non-volatile flash memory, and said first A microelectronic component includes a graphics processor.
11.根据权利要求1所述的微电子封装,其中第二微电子元件的所述元件触点布置成邻近所述第二微电子元件的所述前表面的中心的一行或平行的两行。11. The microelectronic package of claim 1, wherein the element contacts of a second microelectronic element are arranged in one row or two parallel rows adjacent to the center of the front surface of the second microelectronic element.
12.根据权利要求1所述的微电子封装,其中所述导电块为细长的焊料连接。12. The microelectronic package of claim 1, wherein the conductive bumps are elongated solder connections.
13.一种系统,包括多个根据权利要求1所述的微电子封装、电路板和处理器,所述微电子封装的所述端子与所述电路板的板触点电连接,每个微电子封装用于在时钟周期内传送N个并行数据位,所述处理器用于在时钟周期内传送M个并行数据位,M大于或等于N。13. A system comprising a plurality of microelectronic packages, circuit boards and processors according to claim 1, said terminals of said microelectronic packages being electrically connected to board contacts of said circuit board, each microelectronic The electronic package is used to transmit N parallel data bits in a clock cycle, and the processor is used to transmit M parallel data bits in a clock cycle, where M is greater than or equal to N.
14.一种系统,包括根据权利要求1所述的微电子封装,以及电连接至所述微电子封装的一个或多个其他电子部件。14. A system comprising the microelectronic package of claim 1 and one or more other electronic components electrically connected to the microelectronic package.
15.根据权利要求14所述的系统,还包括壳体,所述微电子封装和所述其他电子部件安装至所述壳体。15. The system of claim 14, further comprising a housing, the microelectronic package and the other electronic components being mounted to the housing.
16.一种模块,包括:16. A module comprising:
模块卡,所述模块卡具有第一表面,第二表面和多个平行的暴露的边缘触点,所述边缘触点邻近所述第一表面和第二表面中的至少一个的边缘,用于当所述模块插入插口时,与插口相应的触点对接,所述模块卡具有在所述第一表面上的多个卡触点;以及A module card having a first surface, a second surface and a plurality of parallel exposed edge contacts adjacent an edge of at least one of the first and second surfaces for mating with corresponding contacts of the socket when the module is inserted into the socket, the module card having a plurality of card contacts on the first surface; and
第一微电子元件和第二微电子元件,所述第一微电子元件和第二微电子元件分别具有面对所述模块卡的所述第一表面的前表面,每个微电子元件具有在其所述前表面处的多个元件触点,每个微电子元件的所述元件触点与相应的所述卡触点相联接,所述第二微电子元件的所述前表面部分覆盖且附接至所述第一微电子元件的后表面,所述第二微电子元件的所述元件触点暴露在所述第二微电子元件的所述前表面的中心区域内,A first microelectronic element and a second microelectronic element each having a front surface facing the first surface of the module card, each microelectronic element having a a plurality of element contacts at said front surface thereof, said element contacts of each microelectronic element being coupled to corresponding said card contacts, said front surface of said second microelectronic element partially covering and attached to the rear surface of the first microelectronic element, the element contacts of the second microelectronic element exposed in a central region of the front surface of the second microelectronic element,
其中所述第一微电子元件的所述元件触点布置在面阵中且与第一组所述卡触点倒装芯片键合,所述第二微电子元件的所述元件触点通过导电块与第二组所述卡触点相联接。wherein the element contacts of the first microelectronic element are arranged in an area array and are flip-chip bonded to a first set of the card contacts, and the element contacts of the second microelectronic element are electrically conductive A block is coupled to a second set of said card contacts.
17.根据权利要求16所述的模块,其中所述第二微电子元件的所述元件触点突出于所述第一微电子元件的侧边缘之外。17. The module of claim 16, wherein the element contacts of the second microelectronic element protrude beyond a side edge of the first microelectronic element.
18.根据权利要求16所述的模块,其中所述边缘触点暴露在所述模块卡的所述第一表面或第二表面中的至少一个处。18. The module of claim 16, wherein the edge contacts are exposed at at least one of the first or second surfaces of the module card.
19.根据权利要求16所述的模块,其中所述第一微电子元件和第二微电子元件中的至少一个包括存储器元件。19. The module of claim 16, wherein at least one of the first and second microelectronic elements comprises a memory element.
20.根据权利要求19所述的模块,还包括从至少一些所述卡触点延伸至所述边缘触点的多个引线,其中所述引线可用于携载地址信号以在所述第一微电子元件和第二微电子元件中的至少一个中对所述存储器元件寻址。20. The module of claim 19, further comprising a plurality of leads extending from at least some of said card contacts to said edge contacts, wherein said leads are operable to carry address signals for use in said first micro The memory element is addressed in at least one of the electronic component and the second microelectronic component.
21.根据权利要求16所述的模块,其中至少一些所述边缘触点可用于携载所述各个边缘触点与所述第一微电子元件和第二微电子元件中的每个之间的信号或参考电位中的至少一个。21. The module of claim 16, wherein at least some of the edge contacts are operable to carry contact between the respective edge contacts and each of the first and second microelectronic elements. at least one of signal or reference potential.
22.根据权利要求16所述的模块,还包括多个第三微电子元件,每个第三微电子元件电连接至所述模块卡。22. The module of claim 16, further comprising a plurality of third microelectronic elements, each third microelectronic element electrically connected to the module card.
23.根据权利要求22所述的模块,所述多个第三微电子元件布置成堆叠结构,每个所述第三微电子元件具有与一个相邻的所述第三微电子元件的前表面或后表面相面对的前表面或后表面。23. The module of claim 22 , the plurality of third microelectronic elements arranged in a stacked configuration, each of the third microelectronic elements having a front surface opposite to an adjacent third microelectronic element. Or the front surface or the back surface facing the back surface.
24.根据权利要求22所述的模块,所述多个第三微电子元件布置成平面结构,每个所述第三微电子元件具有与一个相邻的所述第三微电子元件的外围表面相面对的外围表面。24. The module of claim 22 , the plurality of third microelectronic elements arranged in a planar configuration, each of the third microelectronic elements having a peripheral surface that is adjacent to an adjacent third microelectronic element. facing peripheral surfaces.
25.根据权利要求22所述的模块,其中所述第二微电子元件包括易失性RAM,每个所述第三微电子元件包括非易失性闪存,且所述第一微电子元件包括主要用于控制外部组件与所述第二微电子元件和第三微电子元件之间的数据传送的处理器。25. The module of claim 22, wherein the second microelectronic elements comprise volatile RAM, each of the third microelectronic elements comprises non-volatile flash memory, and the first microelectronic elements comprise A processor primarily for controlling data transfers between external components and said second and third microelectronic elements.
26.根据权利要求22所述的模块,其中所述第二微电子元件包括易失性帧缓冲存储器元件,每个所述第三微电子元件包括非易失性闪存,且所述第一微电子元件包括图形处理器。26. The module of claim 22, wherein said second microelectronic elements comprise volatile frame buffer memory elements, each of said third microelectronic elements comprises non-volatile flash memory, and said first microelectronic elements Electronic components include graphics processors.
27.根据权利要求16所述的模块,其中第二微电子元件的所述元件触点布置成邻近所述第二微电子元件的所述前表面的中心的一行或平行的两行。27. The module of claim 16, wherein the element contacts of a second microelectronic element are arranged in one row or two parallel rows adjacent to the center of the front surface of the second microelectronic element.
28.根据权利要求16所述的模块,其中所述导电块为细长的焊料连接。28. The module of claim 16, wherein the conductive bumps are elongated solder connections.
29.一种系统,包括多个根据权利要求16所述的模块、电路板和处理器,所述模块的所述暴露的触点插入至与所述电路板电连接的对接插口,每个模块用于在时钟周期内传送N个并行数据位,所述处理器用于在时钟周期内传送M个并行数据位,且M大于或等于N。29. A system comprising a plurality of modules, circuit boards and processors according to claim 16, said exposed contacts of said modules being plugged into mating sockets electrically connected to said circuit board, each module For transmitting N parallel data bits in a clock cycle, the processor is used for transmitting M parallel data bits in a clock cycle, and M is greater than or equal to N.
30.一种系统,包括根据权利要求16所述的模块,以及电连接至所述模块的一个或多个其他电子部件。30. A system comprising the module of claim 16, and one or more other electronic components electrically connected to the module.
31.根据权利要求30所述的系统,还包括壳体,所述模块和所述其他电子部件安装至所述壳体。31. The system of claim 30, further comprising a housing, the module and the other electronic components being mounted to the housing.
Claims (27)
Applications Claiming Priority (3)
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| US12431465B2 (en) | 2020-12-31 | 2025-09-30 | Yibu Semiconductor Co., Ltd. | Chip package and method of forming chip packages |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201423954A (en) | 2014-06-16 |
| WO2014066153A1 (en) | 2014-05-01 |
| WO2014066153A4 (en) | 2014-06-19 |
| KR20150074168A (en) | 2015-07-01 |
| TWI503947B (en) | 2015-10-11 |
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Application publication date: 20150902 |