CN104833686B - X-ray magnification imaging system - Google Patents

Abstract

The invention discloses an X-ray magnified imaging system. The X-ray magnified imaging system includes: an X-ray light source; an X-ray light source lens. The micro-focus spot coherent light source for irradiating the sample; the phase magnification grating, set behind the sample, is used to collect and modulate the X-rays irradiated on the sample and generate diffraction self-imaging effect; the analysis absorption magnification grating, set behind the phase magnification grating, is located At the position of the self-imaging plane corresponding to the diffraction self-imaging effect, the analysis absorption amplification grating is used to collect and process the X-rays from the phase amplification grating, and convert the phase information into identifiable light intensity information; the X-ray detector is set at After the analysis absorption amplification grating, it is close to the exit end of the analysis absorption amplification grating, which is used to detect and collect the information of the sample. The invention can greatly improve the resolution and application range of the X-ray magnified imaging system.

Description

X-ray magnification imaging system

technical field

The invention relates to the technical field of optical imaging, in particular to an X-ray magnified imaging system.

Background technique

At present, X-ray gratings have important applications in the fields of life, energy, environment, food, etc. Since X-ray gratings are very precise optical devices, they have high requirements for manufacturing technology, especially the production of high-quality two-dimensional X-ray gratings Therefore, how to make high-quality two-dimensional X-ray gratings has attracted the attention of relevant researchers. Existing methods for fabricating gratings mainly use mechanical scribing, holographic lithography, electron beam lithography, X-ray lithography and micro-plating techniques, etc., but the "aspect ratio" of the X-ray gratings produced by these methods is not Large, and these methods have difficulties in fabricating two-dimensional high-energy X-ray gratings with a large "aspect ratio", mainly because high-energy X-rays have stronger penetrating ability than low-energy X-rays. Therefore, the existing X-ray gratings do not meet the requirements of all walks of life for larger "aspect ratio" X-ray gratings.

In addition, when using conventional X-ray absorption contrast imaging technology to perform X-ray imaging analysis on substances composed of carbon, hydrogen, oxygen and other elements, due to the low resolution, it cannot meet the actual needs. In addition, another key factor in the development of X-ray phase-contrast imaging technology is how to obtain an ideal and relatively low-cost micro-focus spot X-ray coherent light source, and the ideal coherent light is a synchrotron radiation source, but synchrotron radiation is expensive and inconvenient promote.

Contents of the invention

In view of this, the purpose of the embodiments of the present invention is to provide an X-ray magnifying imaging system, which can greatly improve the resolution and application range of the X-ray magnifying imaging system by using an X-ray magnifying grating with a large aspect ratio.

Further speaking, the X-ray magnified imaging system includes: an X-ray light source; an X-ray light source lens, the entrance end of which is provided with the X-ray light source for converging the X-rays emitted by the X-ray light source and obtaining A micro-focus spot coherent light source; a phase amplification grating, arranged behind the sample, used to collect and modulate the X-rays irradiated on the sample and generate a diffraction self-imaging effect; an analysis absorption amplification grating, arranged on the phase amplification grating Afterwards, at the position of the self-imaging plane corresponding to the diffractive self-imaging effect, the analytical absorption amplification grating is used to collect and process the X-rays from the phase amplification grating, and convert the phase information therein into identifiable light intensity Information; the X-ray detector is arranged behind the analytical absorption amplification grating, close to the exit end of the analytical absorption amplification grating, and is used to detect and collect the information of the sample.

Optionally, in some embodiments, the phase amplification grating and the analysis absorption amplification grating are tapered polycapillary X-ray gratings, which are respectively drawn from a plurality of silicate glass or lead glass single capillaries; wherein, the The shapes of the phase amplification grating and the analysis absorption amplification grating along the respective length directions are conical surface segments, parabolic surface segments or other quadric surface segments.

Optionally, in some embodiments, the sample is placed between the micro-focus spot coherent light source and the phase amplification grating, close to the entrance end of the phase amplification grating; the X-ray detector is arranged at the analysis The absorption magnifying grating is close to its exit end.

Optionally, in some embodiments, the X-ray magnified imaging system further includes: an information processing device, connected to the X-ray detector, for extracting, analyzing and processing the information of the sample.

Optionally, in some embodiments, the phase amplification grating and the analysis absorption amplification grating have a grating period in the range of 0.01-20 microns, and an aspect ratio in the range of 10-100000; wherein, the grating period is adjacent single The length of the central line of the hollow channel of the capillary; the aspect ratio is the ratio of the length of the grating to half of the corresponding grating period.

Optionally, in some embodiments, the value range of the length H1 of the phase amplification grating along its horizontal central circumference is 0.1-20 cm, and the value range of the entrance diameter D1 is 1-200 mm, The value range of the outlet diameter D2 is 4-400 millimeters; the value range of the length H2 of the analytical absorption amplification grating along its horizontal center circumference is 0.1-15 cm, and the value range of the inlet diameter D3 is 8-500 mm, the value range of the outlet diameter D4 is: 12-600 mm.

Optionally, in some embodiments, the X-ray source lens is a single/polycapillary silicate glass or lead glass lens, the range of the entrance focal length F1 is 1-30 cm, and the range of the exit focal length F2 is 1-30 cm. 40 mm, the diameter of the exit focal spot is in the range of 0.05-20 microns, the length L1 is in the range of 5-200 mm, the diameter of the inlet end D _in1 is in the range of 3-40 mm, and the diameter of the outlet end D _out1 is in the range of 1-20 mm.

Optionally, in some embodiments, the diameter of the exit focal spot of the X-ray source lens is 1 micron, the length L1 is 50 mm, the diameter D _in1 of the entrance end is 10 mm, and the diameter D _{out1 of} the exit end is 1 mm The grating period of the phase amplification grating is 2 microns, the aspect ratio is 1300, and the diameter D1 of the entrance end and the diameter D2 of the exit end are 8 millimeters and 12 millimeters respectively; The grating period of the analysis absorption amplification grating is 2 microns, and the height The width ratio is 900, and the diameter D3 of the inlet end and the diameter D4 of the outlet end are 15 mm and 18 mm, respectively.

Optionally, in some embodiments, the cross-sections of the phase amplification grating and the analysis absorption amplification grating along the direction perpendicular to their horizontal centerlines have quadrilateral shapes; wherein, the hollow single capillary constituting the polycapillary X-ray grating The outline shape is hexagonal or circular.

Optionally, in some embodiments, a plurality of single capillaries constituting the X-ray source lens, phase magnification grating, and analysis absorption magnification grating are closely arranged, and the single capillary at the central position is one, and the number of layers where it is located defines is 1, then the number of single capillaries on each layer from inside to outside is 6(n-1), where n is the number of layers, n>1, and the inner diameters of each single capillary are the same.

Compared with the prior art, each embodiment of the present invention has the following advantages:

After adopting the technical solution of the embodiment of the present invention, since the X-ray magnified imaging system of the present invention adopts the phase magnification grating and the analysis absorption magnification grating with a relatively large "aspect ratio", not only the manufacturing process is simple, but the raw material price is relatively cheap, which is convenient for popularization , and it is suitable for a wide range of X-ray energy, especially for high-energy X-rays, and can obtain high-spatial-resolution imaging effects through low-spatial-resolution detectors, thus greatly improving the resolution and scope of use.

In addition, the X-ray magnification imaging system adopts the combination of the laboratory X-ray light tube and the X-ray light source lens to obtain the micro-focus spot coherent light source, which can reduce the cost while improving performance, and is easy to promote. It has potential important applications and wide scope of use.

More features and advantages of the embodiments of the present invention will be described in the following specific implementation manners.

Description of drawings

The drawings constituting a part of the embodiments of the present invention are used to provide a further understanding of the embodiments of the present invention, and the schematic embodiments of the present invention and their descriptions are used to explain the present invention, and do not constitute improper limitations to the present invention. In the attached picture:

FIG. 1 is a schematic diagram of the composition of an X-ray magnified imaging system provided by an embodiment of the present invention;

Fig. 2 is a schematic structural view of an X-ray light source lens in an embodiment of the present invention;

3 is a schematic cross-sectional view of the X-ray source lens along the axis of symmetry perpendicular to its center in the embodiment of the present invention;

Fig. 4 is a schematic diagram of the main structure of the phase amplification grating in the embodiment of the present invention;

Fig. 5 is a schematic diagram of the main structure of the analysis absorption amplification grating in the embodiment of the present invention;

Fig. 6 is a schematic cross-sectional view of a phase amplification grating or an analysis absorption amplification grating along the axis of symmetry perpendicular to its center in an embodiment of the present invention.

Explanation of reference signs

1 X-ray light source

2 capillary X-ray source lens

3 micro-focus spot light source

4 samples

5 Phase Amplified Gratings

6 Analyzing Absorption Amplified Gratings

7 X-ray detectors

Detailed ways

The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments can be combined with each other.

Below in conjunction with accompanying drawing, each preferred embodiment of the present invention is described further:

Based on the analysis of the performance of the existing X-ray grating and its manufacturing method, the inventors of the present invention have carried out a large amount of capillary X-ray optical device development and application research, and produced a kind of X-ray source lens and a lens with a larger "height and width". Ratio" polycapillary X-ray magnifying grating, and then proposes an X-ray magnifying imaging system using the X-ray source lens and polycapillary X-ray grating.

With reference to Fig. 1, it is the composition schematic diagram of the X-ray magnifying imaging system of the embodiment of the present invention, and X-ray magnifying imaging system comprises: X-ray light source 1, X-ray light source lens 2, phase amplifying grating 5, analysis absorbing amplifying grating 6, and X-ray detector7. in:

The entrance end of the X-ray source lens 2 is provided with an X-ray source 1, and the X-ray source lens 2 is used to converge the X-rays emitted by the X-ray source 1 to obtain a micro-focus spot coherent light source 3, which is used to irradiate the sample 4. The phase amplifying grating 5 is arranged behind the sample 4, and is used for collecting and modulating the X-rays irradiated on the sample 4 and generating a diffraction self-imaging effect to obtain interference fringes.

The analysis absorption amplification grating 6 is arranged behind the phase amplification grating 5, and is located at the position of the self-imaging plane corresponding to the diffractive self-imaging effect, so that the distance between the analysis absorption amplification grating 6 and the phase amplification grating 5 meets the grating phase contrast imaging condition, and the analysis The absorption amplifying grating 6 is used to collect and process the X-rays from the phase amplifying grating 5 , and convert the phase information therein into light intensity information recognizable by the X-ray detector 7 . The X-ray detector 7 is arranged behind the analysis absorption amplification grating 6 and close to the exit end of the analysis absorption amplification grating 6 , and the X-ray detector 7 is used for detecting and collecting information of the sample 4 .

Further speaking, the X-ray source lens 2, the phase amplification grating 5 and the analysis absorption amplification grating 6 can be drawn from silicate glass or lead glass capillary, wherein the hollow part of the capillary is the space part where X-rays pass through the grating, The single capillary wall is the part that absorbs and prevents X-rays from passing through. In the above embodiment, the X-ray beams emitted by the X-ray source 1 are collected and converged by the X-ray source lens 2 to obtain a high-power micro-focus spot coherent light source 3, which is used to irradiate to On the sample 4, the rays irradiated on the sample 4 are transmitted to the phase amplification grating 5, and the phase amplification grating 5 modulates the wavefronts of these coherent lights to generate the Talbot (Tabot) self-imaging effect (also known as diffractive self-imaging effect), the X-rays modulated by the phase amplification grating 5 irradiate the analysis absorption amplification grating 6, and the analysis absorption amplification grating 6 is placed at the position of the self-imaging plane corresponding to the above-mentioned self-imaging effect, thereby obtaining Moire interference fringes, and the phase The information is converted into identifiable light intensity information, which is then detected and collected by the X-ray detector 7 . In this way, information about the sample 4 can be extracted from the signal detected by the X-ray detector 7 .

Further speaking, in the above embodiment, the sample 4 is placed between the micro-focus spot coherent light source 3 and the phase amplification grating 5 , close to the entrance of the phase amplification grating 5 . The X-ray detector 7 is arranged after analyzing the absorption amplification grating 6 close to its exit end.

The X-ray magnified imaging system in the above-mentioned embodiment has been described above, and the main optical devices in the above-mentioned are further described below:

1. X-ray light source lens

Here, the X-ray source lens 2 in the above-mentioned embodiments is illustrated, and any of the following X-ray source lenses 2 can be selected for each of the above-mentioned embodiments:

1) Performance

The X-ray light source lens 2 is adopted in the above-mentioned embodiment, so that a micro-focus spot coherent light source 3 can be obtained by combining a high-power large-focus spot X-ray light source with a capillary X-ray light source lens technology, and the micro-focus spot coherent light source 3 can overcome existing micro The focal spot coherent light source has problems such as high cost and low power. Therefore, the above-mentioned X-ray magnification imaging system can use a laboratory large focal spot X-ray light tube as a light source. For example, the X-ray light source 1 can be a laboratory X-ray light tube, and the power The range is 3-9000 watts. In this way, it is not only convenient to popularize the X-ray magnified imaging system, but also has a wide application range.

2) shape

Referring to FIG. 2 , it is a schematic diagram of the main structure of the X-ray source lens 2 .

As shown in FIG. 2 , in the above-mentioned embodiments, the shape of the X-ray source lens 2 along its length direction can be a conical surface segment, a parabolic surface segment or other quadric surface segments according to actual needs.

3) Composition

The X-ray light source lens 2 can be a single capillary silicate glass or lead glass lens, and can also be a polycapillary silicate glass or lead glass lens, that is, a single hole or porous solid without support. Wherein, the capillary is hollow, and the X-ray is totally reflected on the inner wall of the hollow tube of the capillary to change the propagation direction. For example, in the above embodiments, the X-ray light source lens 2 can be a multi-channel optical device, which can converge and diverge X-rays to obtain a micro-focus spot coherent light source for X-ray grating phase-contrast imaging.

As shown in Figure 3, the profile of X-ray light source lens 2 along the cross section perpendicular to its centerline direction is regular hexagon, and it is made of many single capillaries (marked as B among the figure), the cross section of single capillary The outline is round. A plurality of single capillaries are closely arranged to form the X-ray light source lens 2. If the number of layers where a single capillary in the middle is located is defined as 1, then the number of single capillaries on each layer from the inside to the outside is 6(n-1), where n >1 is the number of layers, and the inner diameter of the single capillary can be the same or different.

4) Geometric parameters

As shown in Figure 2-3, X-ray light source lens 2 geometric parameters include: entrance focal length F1 (the entrance end of X-ray light source lens 2 to the distance of X-ray source), exit focal length F2 (exit end of X-ray light source lens 2 to The distance at the focal spot of its exit), the length L1 of the capillary X-ray light source lens 2, the diameter of the lens entrance D _in1 , the diameter of the exit D _out1 , and the maximum size D _max1 (the diameter of the circular capillary X-ray converging lens , for the polygonal capillary X-ray converging lens, its opposite side distance).

Wherein, optionally, the length L1 range of the X-ray light source lens 2 can be 5-200 millimeters, the range of the entrance diameter D _in1 of the lens can be 3-40 millimeters, and the range of the outlet diameter D _out1 of the lens can be 1-200 millimeters. 20 mm, the range of the entrance focal length F1 is 1-30 cm, the range of the exit focal length F2 is 1-40 mm, and the range of the maximum dimension D _max1 is 3-20 mm. The X-ray light source lens 2 is applicable to the X-ray energy range of 1-150keV.

For example, the length L1 of the X-ray light source lens 2 may be 50 mm, the diameter D _in1 of the entrance end may be 10 mm, the diameter D _out1 of the exit end may be 1 mm, and the applicable X-ray energy range may be 80 keV.

5) Physical parameters

i) The diameter of the focal spot at the exit, that is, the diameter of the micro-focus spot coherent light source 3, can range from 0.05 to 50 microns. For example, a lens that can form a focal spot of 0.1 um, 1 um or 20 um can be selected according to actual needs.

ii) Power density gain, that is: when the X-ray converging lens 2 is placed in the optical path and when the lens is not placed, the X-ray intensity ratio at the focal spot of the lens on an equal unit area, and the value range can be 100-10000.

2. X-ray magnifying grating

The X-ray amplifying grating mentioned here includes a phase amplifying grating 5 and an analysis absorption amplifying grating 6, and the following is an illustration of the two. The above-mentioned embodiments can choose any of the following phase amplifying gratings 5 and analysis absorption amplifying gratings 6:

1) Performance

In the above-mentioned X-ray magnification imaging system, the polycapillary X-ray magnification grating, that is, the phase magnification grating 5 and the analysis absorption magnification grating 6 is used to realize magnification imaging, which not only has a large aspect ratio, high resolution, but also has a wide range of applicable energy , especially suitable for high-energy X-rays, thereby overcoming the shortcomings of existing X-ray gratings, making the X-ray magnification imaging system have important and wider scientific research and application values. Therefore, the phase contrast magnification imaging system based on the X-ray grating is particularly suitable for the phase contrast magnification imaging research of tiny samples, and it can be said that the above embodiments further develop the X-ray phase contrast imaging technology.

2) Composition

In the above-mentioned embodiments, the phase amplification grating 5 and the analysis absorption amplification grating 6 are porous solids without support, which are respectively drawn from a plurality of silicate glass or lead glass single capillaries.

It should be noted that, in the above embodiments, the X-ray light source lens 2, the phase amplification grating 5 and the analysis absorption amplification grating 6 can be manufactured by composite drawing of a glass mother tube by a drawing machine. For example: the glass mother tube is drawn through a wire drawing furnace to produce single capillaries, and then these single capillaries are used for compound drawing to obtain a multi-capillary X-ray grating that meets the requirements. Wherein, the wire drawing furnace has a heater and a manual or automatic wire drawing device. The glass mother tube is a thick-walled glass tube, and the material can be silicate glass or lead glass. Correspondingly, the material of the single capillary is silicate glass or lead glass. Here, through the selection of appropriate glass materials and control techniques, the requirements of all walks of life for high-energy X-ray gratings with a large "aspect ratio" can be met, and at the same time, the requirements for low-energy X-ray gratings with a large "aspect ratio" can also be met. It can be said that the multi-capillary X-ray grating manufacturing method will bring revolutionary innovations in the field of grating manufacturing, especially in the field of high-energy grating manufacturing. In particular, the above-mentioned embodiment uses a wire drawing machine to draw silicate or lead glass polycapillary X-ray gratings, which not only simplifies the grating manufacturing process, but also facilitates popularization because of the low price of raw materials, making the polycapillary X-ray gratings important. Its scientific research and application value have important applications in life, energy, environment, food and other sciences.

3) shape

Referring to FIGS. 4-5 , they are schematic diagrams of the main structures of the phase amplification grating 5 and the analysis absorption amplification grating 6 respectively. In the above embodiments, the phase amplification grating 5 and the analysis absorption amplification grating 6 are tapered polycapillary X-ray gratings, and the shapes along their length directions are conical surface segments, parabolic surface segments or other quadric surface segments.

Since the above-mentioned embodiment adopts the tapered X-ray grating, it has a zoom function, which can reduce the requirement of the imaging system for the high spatial resolution detector. For example, the above-mentioned X-ray detection can adopt the spatial resolution detector, and its spatial resolution range can be 0.01-200 microns. In other words, the above-mentioned embodiments can utilize detection with low spatial resolution to obtain imaging effects with high spatial resolution. The X-ray magnification imaging system based on the polycapillary X-ray magnification grating can perform phase contrast imaging, for example, sample imaging analysis in the fields of medicine and biology.

4) Geometric parameters

As shown in Figure 4, the geometric parameters of the phase amplification grating 5 include the length H1, the diameter of the entrance end D2 and the diameter of the exit end D3, etc., wherein:

i) The length H1 of the phase amplification grating 5 along the direction of its horizontal central circumference, which can range from 0.1 to 20 centimeters;

ii) The diameter of the inlet end D1, the value range can be: 1-200 mm;

iii) The diameter D2 of the outlet end may range from 4 mm to 400 mm.

As shown in Figure 5, the geometric parameters of the analysis absorption amplification grating 6 include length H2, diameter D3 of the entrance end and diameter D4 of the exit end, etc., wherein:

i) Analyzing the length H2 of the absorption amplification grating 6 along the direction of its horizontal central perimeter, the value range may be: 0.1-15 cm;

ii) The diameter of the inlet end D3, the value range can be: 8-500 mm;

iii) The outlet diameter D4 may range from 12 mm to 600 mm.

5) Physical parameters

i) grating period

As shown in Figure 6, the phase amplifying grating 5 and the analysis absorption amplifying grating 6 are quadrilateral in cross section along the direction perpendicular to their respective horizontal centerlines. The part is the wall of the single capillary, which is used to absorb and block X-rays, and the white part is the hollow part of the single capillary, which is the channel for X-rays to pass through the grating. Here, the length of the line connecting the centers of adjacent channels is defined as the grating period p1.

Wherein, optionally, the grating period of the phase amplification grating 5 and the analysis absorption amplification grating 6 may range from 0.01 to 20 microns, and the aspect ratio may range from 10 to 100,000. In addition, the diameter range of the phase amplification grating 5 and the analysis absorption amplification grating 6 along the interface perpendicular to their respective central symmetry axes can be 1-800 mm, and the applicable X-ray energy range can be 1-150 keV.

ii) aspect ratio

As shown in FIGS. 4-6 , the ratios of the lengths H1 and H2 of the grating to half the period of the corresponding grating are defined as the "aspect ratio" corresponding to the corresponding grating.

Here, taking the phase amplification grating 5 as an example, the aspect ratio of the phase amplification grating 5 is the ratio of its length H1 to half of the grating period. Optionally, the grating period of the phase amplification grating 5 can be 2-8 microns, the aspect ratio can be 1300-1500, the diameter D1 of the entrance end can be 8-10 mm, and the diameter D2 of the exit end can be 12-14 mm. The energy of X-rays can be 80-100keV, and the material of the grating can be lead glass.

As another example, the grating period range of the analytical absorption amplification grating 6 can be 2-6 microns, the aspect ratio can be 900-1200, the diameter D3 of the entrance end can be 15-18 mm, and the diameter D4 of the exit end can be 18-20 mm. The energy of the X-rays used can be 80-100keV, and the material of the grating can be lead glass.

As an optional implementation, in the above embodiments, the X-ray magnified imaging system may also include an information processing device connected to the X-ray detector 7 for extracting the information of the sample 4, and This information is analyzed and processed. Here, the information processing device may be configured according to actual application requirements. In this way, by using the X-ray magnified imaging system of the above embodiment, the information of the sample 4 can be extracted from the detected signal of the X-ray detector 7, and analyzed and processed by the information processing device according to specific requirements.

To sum up, compared with the prior art, the X-ray magnified imaging system proposed by each embodiment of the present invention has the following advantages:

The X-ray magnifying imaging system proposed by each embodiment of the present invention adopts an X-ray magnifying grating with a relatively large "aspect ratio", that is, a phase magnifying grating and an analytical absorption magnifying grating. Moreover, it is suitable for a wide range of X-ray energy, especially for high-energy X-rays, and can obtain high-spatial-resolution imaging effects through low-spatial-resolution detectors, which can greatly improve the resolution and use of the X-ray magnification imaging system. scope.

In addition, the X-ray magnification imaging system of each embodiment of the present invention adopts the combination of the laboratory X-ray light tube and the X-ray light source lens to obtain the micro-focus spot coherent light source, which can reduce the cost while improving the performance, and is easy to promote. It has potentially important applications and a wide range of applications.

In addition, those skilled in the art should understand that the imaging systems of the above embodiments may also include other auxiliary devices that facilitate imaging, such as test benches, bracket accessories for optical elements, adjustment device accessories, etc., which belong to this devices commonly used in the field, so no further description is given.

The above descriptions are only preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included in the scope of the present invention. within the scope of protection.

Claims (8)

1. a kind of X ray amplifies imaging system, which is characterized in that including：

X-ray source (1)；

X-ray source lens (2), arrival end are provided with the X-ray source (1), for assembling the X-ray source (1) The X ray of transmitting simultaneously obtains micro- focal spot coherent source (3) for irradiating sample (4)；

Phase amplification grating (5), is set to after the sample (4), for collecting and modulating the X after irradiating the sample (4) Ray simultaneously generates diffraction self_imaging effect；

Analysis absorbs amplification grating (6), is set to after the phase amplification grating (5), positioned at the diffraction self_imaging effect It is corresponding from imaging plane position, it is described analysis absorb amplification grating (6) for collect and handle from the phase amplify Phase information therein is converted to identifiable intensity signal by the X ray of grating (5)；

X-ray detector (7) is arranged on after the analysis absorption amplification grating (6), is absorbed close to the analysis and is amplified grating (6) the port of export, for detecting and collecting the information of the sample (4)；

Wherein, it is multi-capillary X-ray grating that the phase amplification grating (5) and analysis, which absorb amplification grating (6), respectively by more Root silicate glass or lead glass single capillary are drawn；The phase amplification grating (5) and analysis absorb amplification grating (6) It is taper surface section, parabolic type face section or other quadratic surface sections along the shape on respective length direction；The phase amplification Grating (5) and the analysis absorb ranging from 0.01-20 microns of the screen periods of amplification grating (6), the ranging from 10- of depth-width ratio 100000；The phase amplification grating (5) and the analysis absorb amplification grating (6) along perpendicular to respective central symmetry axes The diameter range at interface is 1-800 millimeters.

2. X ray according to claim 1 amplifies imaging system, which is characterized in that the sample (4) is positioned over described micro- Between focal spot coherent source (3) and phase amplification grating (5), close to the arrival end of phase amplification grating (5)；The X is penetrated Line detector (7) is arranged on the analysis and absorbs its close port of export after amplification grating (6).

3. X ray according to claim 1 amplifies imaging system, which is characterized in that further includes：

Information processing unit is connect with the X-ray detector (7), for extracting and analyzing and processing the letter of the sample (4) Breath.

4. X ray according to claim 3 amplifies imaging system, it is characterised in that：

The value range of the phase amplification grating (5) along the length H1 on its horizontal centre contour direction are 0.1-20 centimetres, The value range of arrival end diameter D1 is 1-200 millimeters, and the value range of port of export diameter D2 is 4-400 millimeters；

The value range that the analysis absorbs amplification grating (6) along the length H2 on its horizontal centre contour direction is 0.1-15 lis Rice, the value range of arrival end diameter D3 is 8-500 millimeters, and the value range of port of export diameter D4 is：12-600 millimeters.

5. X ray according to claim 4 amplifies imaging system, which is characterized in that the X-ray source lens (2) are Single multi- capillary silicate glass or lead glass lens, ranging from 1-30 centimetres of entrance focal length F1, the model of outlet focal length F2 It is 1-40 millimeters to enclose, and the diameter range for exporting focal spot is 0.05-50 microns, and ranging from 5-200 millimeters of length L1, arrival end is straight Diameter D_in1Ranging from 3-40 millimeters, port of export diameter D_out1Ranging from 1-20 millimeters.

6. X ray according to claim 5 amplifies imaging system, it is characterised in that：

The diameter range of the outlet focal spot of the X-ray source lens (2) is 1 micron, and length L1 is 50 millimeters, arrival end diameter D_in1It is 10 millimeters, port of export diameter D_out1It is 1 millimeter；

The screen periods of the phase amplification grating (5) are 2 microns, and depth-width ratio 1300, arrival end diameter D1 and the port of export are straight Diameter D2 is respectively 8 millimeters and 12 millimeters；

The screen periods that the analysis absorbs amplification grating (6) are 2 microns, depth-width ratio 900, arrival end diameter D3 and the port of export Diameter D4 is respectively 15 millimeters and 18 millimeters.

7. X ray according to claim 6 amplifies imaging system, which is characterized in that the phase is amplified grating (5) and divided It is quadrangle that analysis, which absorbs amplification grating (6) along the shape perpendicular to the cross section in its horizontal center line direction,；Wherein, described in composition The contours profiles of the hollow single capillary of multi-capillary X-ray grating are hexagon or circle.

8. X ray according to claim 7 amplifies imaging system, which is characterized in that forms the X-ray source lens (2), phase amplification grating (5) and analysis absorb multiple single capillary close-packed arrays of amplification grating (6), positioned at center Single capillary be one, where the number of plies be defined as 1, then from inside to outside the number of the single capillary on each layer be 6 (n-1), Wherein n be the number of plies, n>1, the internal diameter size of each single capillary is identical.