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CN104817073B - Method for transferring graphene film to TEM copper net - Google Patents

Method for transferring graphene film to TEM copper net Download PDF

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CN104817073B
CN104817073B CN201510145260.2A CN201510145260A CN104817073B CN 104817073 B CN104817073 B CN 104817073B CN 201510145260 A CN201510145260 A CN 201510145260A CN 104817073 B CN104817073 B CN 104817073B
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graphene
tem copper
electrostatic adsorption
tem
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CN104817073A (en
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张梓晗
吕鹏
杨秋云
王冠中
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University of Science and Technology of China USTC
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Abstract

本发明公开了一种将石墨烯薄膜转移到TEM铜网上的方法,其特征在于:先将TEM铜网吸附在静电吸附膜上,再在其上转移石墨烯薄膜。本发明通过将TEM铜网吸附在静电吸附膜上,宏观上间接扩大了铜网的表面积,使其便于夹取,且在夹取时不直接接触TEM铜网,避免了对其结构的破坏;用此复合基底来转移石墨烯薄膜,容易实现石墨烯到TEM铜网的转移,解决了石墨烯薄膜不易转移到小面积TEM铜网上的困难,且操作简单。The invention discloses a method for transferring a graphene film to a TEM copper net, which is characterized in that: firstly, the TEM copper net is adsorbed on an electrostatic adsorption film, and then the graphene film is transferred thereon. By adsorbing the TEM copper mesh on the electrostatic adsorption film, the present invention indirectly expands the surface area of the copper mesh macroscopically, making it easy to clamp, and does not directly contact the TEM copper mesh during clamping, avoiding damage to its structure; Using this composite substrate to transfer the graphene film can easily realize the transfer of graphene to the TEM copper grid, solve the difficulty that the graphene film is not easy to transfer to the small-area TEM copper grid, and the operation is simple.

Description

一种将石墨烯薄膜转移到TEM铜网上的方法A Method for Transferring Graphene Films to TEM Copper Grids

技术领域technical field

本发明涉及一种将石墨烯薄膜材料转移到TEM铜网上,以便于进行透射电镜测试的方法。The invention relates to a method for transferring a graphene thin film material to a TEM copper grid so as to carry out a transmission electron microscope test.

技术背景technical background

石墨烯是由碳原子的六角形排列形成的具有一个原子厚度的二维平面材料。2004年,英国曼彻斯特大学的Novoselov和Geim通过微机械剥离的方法,成功的从高定向热解石墨上剥离出石墨烯,从此开辟了石墨烯这种二维材料实验调查的可能性。Graphene is a two-dimensional planar material with a thickness of one atom formed by the hexagonal arrangement of carbon atoms. In 2004, Novoselov and Geim of the University of Manchester successfully exfoliated graphene from highly oriented pyrolytic graphite by means of micromechanical exfoliation, which opened up the possibility of experimental investigation of graphene, a two-dimensional material.

由于石墨烯具有优异的电学、光学、热学、力学等性质,使其在纳米电子学、传感器、光学器件、能量转换和存储、环境治理、复合材料以及生物技术领域有着非常广泛的应用前景。Due to its excellent electrical, optical, thermal, and mechanical properties, graphene has a very broad application prospect in the fields of nanoelectronics, sensors, optical devices, energy conversion and storage, environmental governance, composite materials, and biotechnology.

石墨烯的制备方式主要分为两种:自下而上和自上而下。其中,自下而上方法主要包括外延生长法、化学气相沉积法(CVD)、化学小分子合成法;自上而下方法主要包括液相剥离法、机械剥离法等。目前,CVD法生长石墨烯是最为普遍采用的方式,这种方法不仅可以生长大面积的石墨烯薄膜,并在一定范围内控制石墨烯的层数。这种方法制备的石墨烯薄膜已经应用到了透明电极、太阳能电池、场效应晶体管和超级电容器等科研领域里。There are two main ways to prepare graphene: bottom-up and top-down. Among them, the bottom-up method mainly includes epitaxial growth method, chemical vapor deposition (CVD), chemical small molecule synthesis method; the top-down method mainly includes liquid phase exfoliation method, mechanical exfoliation method, etc. At present, the CVD method is the most commonly used method for growing graphene. This method can not only grow large-area graphene films, but also control the number of layers of graphene within a certain range. Graphene films prepared by this method have been applied to scientific research fields such as transparent electrodes, solar cells, field effect transistors and supercapacitors.

然而,无论哪一种方法制备的石墨烯都要进行一些必要的表征,来观察其形貌特征、结晶性能、光学性能、电学性能以及缺陷等,来辅助下一步的研究。目前石墨烯这类二维材料的表征技术已经趋于完善,主要有扫描电镜(SEM)表征,透射电镜(TEM)表征,拉曼(Raman)表征,XPS表征,XRD表征,傅里叶变换红外光谱表征等。表征测试的过程中一般都需要先将材料附着在基底上,如用拉曼表征薄膜性质时,薄膜需要附着在硅基底或者二氧化硅基底上,其对于材料的大小以及基底的大小几乎没有限制,基底面积在需求范围内大小皆可。However, no matter which method is used to prepare graphene, some necessary characterization must be carried out to observe its morphology, crystallization properties, optical properties, electrical properties, and defects, etc., to assist the next step of research. At present, the characterization technology of two-dimensional materials such as graphene has been perfected, mainly including scanning electron microscope (SEM) characterization, transmission electron microscope (TEM) characterization, Raman (Raman) characterization, XPS characterization, XRD characterization, Fourier transform infrared characterization Spectral characterization, etc. In the process of characterization and testing, it is generally necessary to attach the material to the substrate first. For example, when using Raman to characterize the properties of the film, the film needs to be attached to a silicon substrate or a silicon dioxide substrate, which has almost no restrictions on the size of the material and the size of the substrate. , the base area can be any size within the required range.

但是,透射电镜表征材料性质的测试中利用的是铜网基底,人们需要将所要进行测试的材料转移到TEM铜网上才能进行测试。目前将石墨烯转移到TEM铜网上的步骤是:先将旋涂有保护胶层的石墨烯薄膜悬浮在去离子水中,用镊子夹取TEM铜网,伸入到去离子水中将石墨烯捞出,然后浸泡在丙酮中去除保护胶层,去完后再用镊子将转移有石墨烯的铜网从丙酮中取出来。这种方法存在以下几个问题:However, the copper grid substrate is used in the test of the transmission electron microscope to characterize the material properties, and people need to transfer the material to be tested to the TEM copper grid for testing. At present, the steps of transferring graphene to TEM copper grid are as follows: first, suspend the graphene film spin-coated with a protective layer in deionized water, use tweezers to clamp the TEM copper grid, and dip it into deionized water to remove the graphene , and then soaked in acetone to remove the protective adhesive layer, and then use tweezers to remove the graphene-transferred copper grid from the acetone. This method has the following problems:

1、TEM铜网的面积只有几个毫米,直接用镊子夹取非常容易破坏其结构,使得石墨烯薄膜在破损的铜网部位无法自支撑,较易破碎,同时影响观察石墨烯的形貌;且夹取困难;1. The area of the TEM copper mesh is only a few millimeters, and it is very easy to damage its structure by directly clamping it with tweezers, making the graphene film unable to self-support on the damaged copper mesh, and it is easier to break, and at the same time affects the observation of the graphene morphology; And clamping is difficult;

2、用镊子夹着非常小面积的TEM铜网伸入去离子水中捞取石墨烯,操作难度极高,费时费力,完成一个转移需要耗时几小时甚至十几小时,对操作人员的技术水平要求高;2. Use tweezers to hold a very small area of TEM copper mesh and extend it into deionized water to fish out graphene. The operation is extremely difficult and time-consuming. It takes several hours or even more than ten hours to complete a transfer. The technical level of the operator is required. high;

3、在去完保护膜后,还需用镊子将转移有石墨烯的铜网从丙酮中取出来,被镊子夹到的石墨烯结构基本被破坏,而铜网上石墨烯的面积本身就有限,影响测试的效果;3. After removing the protective film, it is necessary to use tweezers to remove the graphene-transferred copper grid from the acetone. The graphene structure caught by the tweezers is basically destroyed, and the graphene area on the copper grid itself is limited. affect the effectiveness of the test;

4、多次用镊子直接接触TEM铜网和石墨烯,极易引入污染物。4. Use tweezers to directly contact the TEM copper mesh and graphene many times, which is very easy to introduce pollutants.

因此,一种可以高效便捷的将石墨烯薄膜转移到TEM铜网上的方法亟待发现。Therefore, an efficient and convenient method for transferring graphene films to TEM copper grids needs to be discovered urgently.

发明内容Contents of the invention

本发明是为避免上述现有技术所存在的不足之处,提供一种可以高效便捷的将石墨烯薄膜转移到TEM铜网上的方法。The present invention provides a method for efficiently and conveniently transferring a graphene film to a TEM copper grid in order to avoid the disadvantages of the above-mentioned prior art.

本发明为解决技术问题采用如下技术方案:The present invention adopts following technical scheme for solving technical problems:

本发明将石墨烯薄膜转移到TEM铜网上的方法,其特点在于按如下步骤进行:The present invention transfers the method for graphene thin film to TEM copper net, and its feature is to carry out as follows:

步骤a、将旋涂有保护胶层的石墨烯薄膜以保护胶层朝上悬浮在去离子水中;Step a, the graphene film that is spin-coated with the protective adhesive layer is suspended in deionized water with the protective adhesive layer facing up;

步骤b、将TEM铜网吸附在静电吸附膜上,所述静电吸附膜的面积至少为所述TEM铜网面积的4倍,且所述静电吸附膜的面积不小于步骤a中所述石墨烯薄膜的面积;Step b, adsorbing the TEM copper mesh on the electrostatic adsorption film, the area of the electrostatic adsorption film is at least 4 times the area of the TEM copper mesh, and the area of the electrostatic adsorption film is not smaller than the graphene described in step a the area of the film;

步骤c、以TEM铜网朝上,用镊子将步骤b中的静电吸附膜伸入到步骤a中的去离子水中,将石墨烯薄膜捞出,并使石墨烯薄膜覆盖所述TEM铜网,从上至下形成保护胶层/石墨烯薄膜/TEM铜网/静电吸附膜复合结构;Step c, with the TEM copper mesh facing up, extend the electrostatic adsorption film in step b into the deionized water in step a with tweezers, pull out the graphene film, and make the graphene film cover the TEM copper mesh, A composite structure of protective adhesive layer/graphene film/TEM copper mesh/electrostatic adsorption film is formed from top to bottom;

步骤d、将步骤c所获得的保护胶层/石墨烯薄膜/TEM铜网/静电吸附膜复合结构自然晾干后,浸泡在丙酮中以去除保护胶层,获得石墨烯薄膜/TEM铜网/静电吸附膜复合结构;Step d, after naturally drying the protective adhesive layer/graphene film/TEM copper mesh/electrostatic adsorption film composite structure obtained in step c, soak in acetone to remove the protective adhesive layer to obtain the graphene film/TEM copper mesh/ Electrostatic adsorption film composite structure;

步骤e、在步骤d所获得的石墨烯薄膜/TEM铜网/静电吸附膜复合结构上,用镊子将TEM铜网连同位于其上的石墨烯薄膜一起从静电吸附膜上取下,石墨烯薄膜即被转移到TEM铜网上。Step e, on the graphene film/TEM copper mesh/electrostatic adsorption film composite structure obtained in step d, the TEM copper mesh is taken off from the electrostatic adsorption film together with the graphene film positioned thereon with tweezers, and the graphene film That is, it is transferred to the TEM copper grid.

本发明将石墨烯薄膜转移到TEM铜网上的方法,其特点也在于:所述静电吸附膜为PET膜、PE膜或PVC膜,优选为PET膜。The method for transferring the graphene film to the TEM copper grid in the present invention is also characterized in that the electrostatic adsorption film is a PET film, a PE film or a PVC film, preferably a PET film.

本发明的方法除了可以将石墨烯薄膜转移到TEM铜网上之外,还可以将其转移到其他面积较小的基底上,如硅片、氧化硅、玻璃片、塑料薄片、蓝宝石片、石英片、金属薄片等,解决了小面积石墨烯转移困难的问题。The method of the present invention can also transfer it to other smaller substrates, such as silicon chips, silicon oxide, glass sheets, plastic sheets, sapphire sheets, and quartz sheets, except that the graphene film can be transferred to the TEM copper grid. , metal flakes, etc., which solve the problem of difficult transfer of small-area graphene.

此外,本发明的方法也可以用于将其他薄膜材料转移到TEM铜网或其他小面积基底上,如氮化硼薄膜、二硫化钼薄膜等。In addition, the method of the present invention can also be used to transfer other thin-film materials to TEM copper grids or other small-area substrates, such as boron nitride thin films, molybdenum disulfide thin films, and the like.

与已有技术相比,本发明有益效果体现在:Compared with the prior art, the beneficial effects of the present invention are reflected in:

1、本发明通过将TEM铜网吸附在静电吸附膜上,宏观上间接扩大了铜网的表面积,使其便于夹取,且在夹取时不直接接触TEM铜网,避免了对其结构的破坏;用此复合基底来转移石墨烯薄膜,容易实现石墨烯到TEM铜网的转移,解决了石墨烯薄膜不易转移到小面积TEM铜网上的困难,且操作简单,将传统的转移方法的时间从数十小时缩减到几分钟,大大提高了石墨烯进行TEM测试的效率;1. The present invention indirectly expands the surface area of the copper mesh macroscopically by adsorbing the TEM copper mesh on the electrostatic adsorption film, making it easy to clamp, and does not directly contact the TEM copper mesh when clamping, avoiding damage to its structure Destruction; use this composite substrate to transfer graphene film, it is easy to realize the transfer of graphene to TEM copper grid, solve the difficulty that graphene film is not easy to transfer to small area TEM copper grid, and the operation is simple, reducing the time of traditional transfer method Reduced from tens of hours to a few minutes, greatly improving the efficiency of graphene for TEM testing;

2、本发明的方法在操作过程中无任何污染物的引入,也不会破坏石墨烯的形貌特征和结构性质,且环保、高效;2. The method of the present invention does not introduce any pollutants during the operation process, nor will it destroy the morphology and structural properties of graphene, and is environmentally friendly and efficient;

附图说明Description of drawings

图1为涂有PMMA的石墨烯薄膜悬浮在去离子水中的照片;Fig. 1 is the photo that the graphene film that is coated with PMMA is suspended in deionized water;

图2为将铜网吸附在PET膜上的照片;Fig. 2 is the photograph that copper mesh is adsorbed on the PET film;

图3和图4为用吸附有铜网的PET膜来捞取去离子水中的石墨烯薄膜的照片;Fig. 3 and Fig. 4 are the photograph that fishes the graphene film in deionized water with the PET film that is adsorbed with copper mesh;

图5为用丙酮刻蚀掉PMMA后的石墨烯薄膜/TEM铜网/PET膜复合结构的照片;Fig. 5 is the photo of the graphene film/TEM copper mesh/PET film composite structure after etching away PMMA with acetone;

图6为用镊子取下转移有石墨烯薄膜的铜网的照片;Fig. 6 is to take off the photo of the copper grid that transfers graphene thin film with tweezers;

图7为将SiO2吸附在PET膜上的照片;Fig. 7 is the photograph that SiO2 is adsorbed on the PET film;

图8和图9为用吸附有SiO2的PET膜来捞取去离子水中的石墨烯薄膜的照片;Fig. 8 and Fig. 9 are to use the PET film that is adsorbed with SiO to fish for the photo of the graphene film in deionized water;

图10为用丙酮刻蚀掉PMMA后的石墨烯薄膜/SiO2/PET膜复合结构的照片;Fig. 10 is the photo of the graphene film/SiO 2 /PET film composite structure after etching away PMMA with acetone;

图11为用镊子取下转移有石墨烯薄膜的SiO2的照片。Figure 11 is a photo of SiO2 transferred with graphene film removed with tweezers.

具体实施方式detailed description

实施例1Example 1

本实施例按照如下步骤将石墨烯薄膜转移至TEM铜网上:In this embodiment, the graphene film is transferred to the TEM copper grid according to the following steps:

步骤a、如图1所示,将旋涂有PMMA保护胶层的石墨烯薄膜以保护胶层朝上悬浮在去离子水中;Step a, as shown in Figure 1, will be spin-coated with the graphene film of PMMA protective adhesive layer to be suspended in deionized water upwards with protective adhesive layer;

步骤b、如图2所示,将TEM铜网吸附在PET膜上;Step b, as shown in Figure 2, the TEM copper mesh is adsorbed on the PET film;

步骤c、如图3和图4所示,以TEM铜网朝上,用镊子将步骤b中的静电吸附膜伸入到步骤a中的去离子水中,将石墨烯薄膜捞出,并使石墨烯薄膜覆盖TEM铜网,从上至下形成保护胶层/石墨烯薄膜/TEM铜网/PET膜复合结构;Step c, as shown in Figure 3 and Figure 4, with the TEM copper grid facing up, use tweezers to extend the electrostatic adsorption film in step b into the deionized water in step a, pull out the graphene film, and make the graphite Graphene film covers TEM copper mesh, forming a composite structure of protective adhesive layer/graphene film/TEM copper mesh/PET film from top to bottom;

步骤d、如图5所示,将步骤c所获得的保护胶层/石墨烯薄膜/TEM铜网/PET膜复合结构自然晾干后,浸泡在丙酮中以去除保护胶层,获得石墨烯薄膜/TEM铜网/PET膜复合结构;Step d, as shown in Figure 5, after naturally drying the protective adhesive layer/graphene film/TEM copper mesh/PET film composite structure obtained in step c, soak in acetone to remove the protective adhesive layer to obtain a graphene film /TEM copper mesh/PET film composite structure;

步骤e、如图6所示,在步骤d所获得的石墨烯薄膜/TEM铜网/静电吸附膜复合结构上,用镊子将TEM铜网连同位于其上的石墨烯薄膜一起从静电吸附膜上取下,石墨烯薄膜即被转移到TEM铜网上。Step e, as shown in Figure 6, on the graphene film/TEM copper mesh/electrostatic adsorption film composite structure obtained in step d, use tweezers to remove the TEM copper mesh together with the graphene film on it from the electrostatic adsorption film Take it off, and the graphene film is transferred to the TEM copper grid.

实施例2Example 2

本发明方法还适用于将石墨烯薄膜转移到小面积二氧化硅基底上,以便于对其进行拉曼测试,具体步骤如下:The method of the present invention is also suitable for transferring the graphene film to a small-area silicon dioxide substrate, so that it can be tested by Raman, and the specific steps are as follows:

a、将旋涂有PMMA保护胶层的石墨烯薄膜以保护胶层朝上悬浮在去离子水中;a, the graphene film that will be spin-coated with PMMA protective adhesive layer is suspended in deionized water with protective adhesive layer upwards;

b、如图7所示,将SiO2片吸附在PET膜上,且SiO2片光滑面朝上。b. As shown in Figure 7, adsorb the SiO 2 sheet on the PET film with the smooth side of the SiO 2 sheet facing upward.

c、如图8和图9所示,以SiO2片朝上,用镊子将步骤b中的静电吸附膜伸入到步骤ac. As shown in Figure 8 and Figure 9, with the SiO2 sheet facing up, use tweezers to extend the electrostatic adsorption film in step b into step a

中的去离子水中,将石墨烯薄膜捞出,并使石墨烯薄膜覆盖SiO2片,从上至下形成保护In the deionized water in , remove the graphene film, and make the graphene film cover the SiO 2 sheet to form a protection from top to bottom

胶层/石墨烯薄膜/SiO2片/PET膜复合结构;Adhesive layer/graphene film/SiO 2 sheets/PET film composite structure;

d、如图10所示,将步骤c所获得的保护胶层/石墨烯薄膜/SiO2片/PET膜复合结构自然晾干后,浸泡在丙酮中以去除保护胶层,获得石墨烯薄膜/SiO2片/PET膜复合结构;d, as shown in Figure 10, after the protective adhesive layer/graphene film/SiO 2 sheets/PET film composite structure obtained in step c is naturally dried, soak in acetone to remove the protective adhesive layer, and obtain the graphene film/ SiO 2 pieces/PET film composite structure;

e、如图11所示,在步骤d所获得的石墨烯薄膜/SiO2片/PET膜复合结构上,用镊子将SiO2片连同位于其上的石墨烯薄膜一起从静电吸附膜上取下,石墨烯薄膜即被转移到SiO2片上。e, as shown in Figure 11, on the graphene film/SiO 2 sheet/PET film composite structure obtained in step d, use tweezers to remove the SiO 2 sheet together with the graphene film on it from the electrostatic adsorption film , the graphene film is transferred onto the SiO2 sheet.

Claims (2)

1.一种将石墨烯薄膜转移到TEM铜网上的方法,其特征在于按如下步骤进行:1. a kind of method that graphene thin film is transferred to TEM copper net, it is characterized in that carry out as follows: 步骤a、将旋涂有保护胶层的石墨烯薄膜以保护胶层朝上悬浮在去离子水中;Step a, the graphene film that is spin-coated with the protective adhesive layer is suspended in deionized water with the protective adhesive layer facing up; 步骤b、将TEM铜网吸附在静电吸附膜上,所述静电吸附膜的面积至少为所述TEM铜网面积的4倍,且所述静电吸附膜的面积不小于步骤a中所述石墨烯薄膜的面积;所述静电吸附膜为PET膜、PE膜或PVC膜;Step b, adsorbing the TEM copper mesh on the electrostatic adsorption film, the area of the electrostatic adsorption film is at least 4 times the area of the TEM copper mesh, and the area of the electrostatic adsorption film is not smaller than the graphene described in step a The area of the film; the electrostatic adsorption film is PET film, PE film or PVC film; 步骤c、以TEM铜网朝上,用镊子将步骤b中的静电吸附膜伸入到步骤a中的去离子水中,将石墨烯薄膜捞出,并使石墨烯薄膜覆盖所述TEM铜网,从上至下形成保护胶层/石墨烯薄膜/TEM铜网/静电吸附膜复合结构;Step c, with the TEM copper mesh facing up, extend the electrostatic adsorption film in step b into the deionized water in step a with tweezers, pull out the graphene film, and make the graphene film cover the TEM copper mesh, A composite structure of protective adhesive layer/graphene film/TEM copper mesh/electrostatic adsorption film is formed from top to bottom; 步骤d、将步骤c所获得的保护胶层/石墨烯薄膜/TEM铜网/静电吸附膜复合结构自然晾干后,浸泡在丙酮中以去除保护胶层,获得石墨烯薄膜/TEM铜网/静电吸附膜复合结构;Step d, after naturally drying the protective adhesive layer/graphene film/TEM copper mesh/electrostatic adsorption film composite structure obtained in step c, soak in acetone to remove the protective adhesive layer to obtain the graphene film/TEM copper mesh/ Electrostatic adsorption film composite structure; 步骤e、在步骤d所获得的石墨烯薄膜/TEM铜网/静电吸附膜复合结构上,用镊子将TEM铜网连同位于其上的石墨烯薄膜一起从静电吸附膜上取下,石墨烯薄膜即被转移到TEM铜网上。Step e, on the graphene film/TEM copper mesh/electrostatic adsorption film composite structure obtained in step d, the TEM copper mesh is taken off from the electrostatic adsorption film together with the graphene film positioned thereon with tweezers, and the graphene film That is, it is transferred to the TEM copper grid. 2.根据权利要求1所述的将石墨烯薄膜转移到TEM铜网上的方法,其特征在于:所述静电吸附膜为PET膜。2. the method that graphene thin film is transferred to TEM copper net according to claim 1, is characterized in that: described electrostatic adsorption film is PET film.
CN201510145260.2A 2015-03-27 2015-03-27 Method for transferring graphene film to TEM copper net Expired - Fee Related CN104817073B (en)

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