CN104659013A - Electric fuse structure and semiconductor device - Google Patents
Electric fuse structure and semiconductor device Download PDFInfo
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- CN104659013A CN104659013A CN201310582628.2A CN201310582628A CN104659013A CN 104659013 A CN104659013 A CN 104659013A CN 201310582628 A CN201310582628 A CN 201310582628A CN 104659013 A CN104659013 A CN 104659013A
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Abstract
The invention discloses an electric fuse structure and a semiconductor device. The electric fuse structure comprises a substrate, an electric fuse, and a heating structure, wherein the electric fuse is located on the substrate; the electric fuse comprises a fuse, and an anode and a cathode located at two ends of the fuse respectively and connected with the fuse; and the heating structure is located on the substrate, electrically isolated from the electric fuse by a dielectric layer, and is used for transferring generated heat to the electric fuse. The problem that the prior electric fuse has large fusing current can be solved.
Description
Technical Field
The present invention relates to the field of semiconductor technology, and more particularly, to an electrical fuse structure and a semiconductor device including the same.
Background
The fuse structures commonly used at present are generally two types: laser fuse (laser fuse) and electric fuse (E-fuse for short). Laser fuses cut fuses with a laser beam, while electrical fuses blow fuses with a large current. With the development of semiconductor technology, electrical fuses are gradually replacing laser fuses. The electric fuses are classified into several types, such as metal electric fuses, polysilicon electric fuses, and metal silicide electric fuses.
As shown in fig. 1, an electrical fuse 1 of the related art includes: a fuse 10; and an anode 11 and a cathode 12 respectively located at both ends of the fuse 10 and connected to the fuse 10. The electrical fuse 1 may be formed in synchronization with an interconnect line in a metal interconnect structure.
The blowing mechanism of the electrical fuse 1 is as follows: as shown in fig. 2, the cathode 12 of the electrical fuse 1 is electrically connected to the drain of the transistor 2 as the fuse device, the voltage VP is applied to the anode 11, the voltage VG is applied to the gate of the transistor 2, and the source is grounded. Under the combined action of the voltage VP applied to the anode 11 and the voltage VG applied to the gate of the transistor 2, a transient pulse current 3 flowing from the anode 11 to the cathode 12 is generated, the magnitude of the transient pulse current 3 is within the current value range allowing the fuse to be blown, and the fuse 10 generates heat under the action of the transient pulse current 3, so that the position of the fuse 10 heated most is blown. The blowing position of the fuse 10 is defined as the blowing region of the electrical fuse 1.
However, the conventional electric fuse described above has the following disadvantages: 1) the fusing current of the electric fuse is large; 2) because the fuse device providing the fuse current to the electrical fuse may have instability, the fuse current provided by the fuse device to the electrical fuse may fluctuate, resulting in the fuse not being blown and the electrical fuse not functioning.
Disclosure of Invention
The invention aims to solve the problems that: the existing electric fuse has larger fusing current.
Another problem to be solved by the present invention is: the conventional electrical fuse may not be blown due to instability of the blowing device for providing the blowing current to the electrical fuse.
In order to solve the above problems, the present invention provides an electrical fuse structure, including:
a substrate;
an electrical fuse located on the substrate, the electrical fuse comprising: a fuse; the anode and the cathode are respectively positioned at two ends of the fuse and connected with the fuse;
and the heating structure is positioned on the substrate and electrically isolated from the electric fuse by a dielectric layer, and is used for transferring the generated heat to the electric fuse.
Optionally, the material of the electrical fuse is metal.
Optionally, the material of the heating structure is metal.
Optionally, the metal is copper or aluminum.
Optionally, the heating structure includes: a first heating unit located above or below the electric fuse.
Optionally, the heating structure includes: and a second heating unit located at the same layer as the electric fuse.
Optionally, the heating structure includes:
a first heating unit located above or below the electric fuse; and
and a second heating unit located at the same layer as the electric fuse.
Optionally, the first heating unit and the second heating unit are electrically connected through a conductive plug located in the dielectric layer; or,
and the first heating unit and the second heating unit are electrically isolated through the dielectric layer.
Optionally, the number of the first heating units is at least two, and the two first heating units are respectively located above and below the electrical fuse.
Optionally, the projections of the first heating unit and the fuse on the upper surface of the substrate overlap.
Optionally, the fuse has a fuse region, and projections of the first heating unit and the fuse region on an upper surface of the substrate overlap.
Optionally, the second heating unit and the fuse have facing areas.
Optionally, the fuse has a fusing region, and the second heating unit and the fusing region have facing areas.
Optionally, the second heating unit serves as a dummy pattern.
In addition, the invention also provides a semiconductor device which comprises any one of the electric fuse structures.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the electric fuse structure includes: an electrical fuse and a heating structure for transferring heat generated to the electrical fuse. After current is introduced into the heating structure, heat is generated and transferred to the electric fuse. Therefore, the electric fuse can be fused under the combined action of the heat generated by the electric fuse after the electric fuse is introduced with current and the heat transferred to the electric fuse by the heating structure. The electric fuse in the prior art can be fused only under the action of self-generated heat after the electric fuse is introduced with current. Comparing and knowing, when fusing the same electric fuse, the fusing current that lets in to the electric fuse among this technical scheme is less than the fusing current that lets in to the electric fuse among the prior art for electric fuse fusing current among this technical scheme reduces.
Drawings
Fig. 1 is a perspective view of an electric fuse according to the related art;
FIG. 2 is a schematic diagram of one of the fuses of FIG. 1;
FIG. 3 is a perspective view of an electrical fuse structure in a first embodiment of the present invention, showing no substrate and no dielectric layer between the electrical fuse and the heating structure;
FIG. 4 is a top view of the electrical fuse structure of FIG. 3, taken in a direction perpendicular to the upper surface of the substrate, without showing the substrate and the dielectric layer between the electrical fuse and the heating structure;
FIG. 5 is a cross-sectional view taken along section AA in FIG. 4, rotated 90 degrees clockwise;
FIG. 6 is a schematic diagram of one of the fuses of the eFuse structure in one embodiment of the present invention;
FIG. 7 is a top view of an electrical fuse structure in a second embodiment of the present invention, as viewed in a direction perpendicular to an upper surface of a substrate, without showing the substrate and a dielectric layer between the electrical fuse and a heating structure;
FIG. 8 is a cross-sectional view taken along section BB in FIG. 7;
fig. 9 is a plan view of an electric fuse structure in a third embodiment of the present invention, as viewed in a direction perpendicular to an upper surface of a substrate, without showing the substrate and a dielectric layer between the electric fuse and a heating structure;
FIG. 10 is a cross-sectional view taken along section CC in FIG. 9;
fig. 11 is a top view of two first heating units in the electrical fuse structure shown in fig. 9, as viewed in a direction perpendicular to the upper surface of the substrate;
fig. 12 is a plan view of an electric fuse structure in a fourth embodiment of the present invention, as viewed in a direction perpendicular to an upper surface of a substrate, without showing the substrate and a dielectric layer between the electric fuse and a heating structure;
FIG. 13 is a cross-sectional view taken along section DD in FIG. 12;
fig. 14 is a plan view of the first heating unit and the second heating unit in the electric fuse structure shown in fig. 12 as viewed in a direction perpendicular to the upper surface of the substrate;
fig. 15 is a plan view of an electric fuse structure in a fifth embodiment of the present invention, as viewed in a direction perpendicular to an upper surface of a substrate, without showing the substrate and a dielectric layer between the electric fuse and a heating structure;
FIG. 16 is a cross-sectional view taken along section EE of FIG. 15;
fig. 17 is a top view of two first heating units in the electrical fuse structure shown in fig. 15, as viewed in a direction perpendicular to the upper surface of the substrate;
fig. 18 is a plan view of an electric fuse structure in a sixth embodiment of the present invention, as viewed in a direction perpendicular to an upper surface of a substrate, without showing the substrate and a dielectric layer between the electric fuse and a heating structure;
FIG. 19 is a cross-sectional view taken along section FF in FIG. 18;
fig. 20 is a plan view of two first heating units in the electric fuse structure shown in fig. 18 as viewed in a direction perpendicular to the upper surface of the substrate;
FIG. 21 is a plan view of an electric fuse and a second heating unit in a seventh embodiment of the present invention as viewed in a direction perpendicular to an upper surface of a substrate;
fig. 22 is a plan view of the electric fuse and the second heating unit as viewed in a direction perpendicular to the upper surface of the substrate in the eighth embodiment of the present invention.
Detailed Description
As described above, the conventional electrical fuse has a problem of a large blowing current.
In order to solve the above problems, the present invention provides an improved electrical fuse structure, including: an electrical fuse and a heating structure for transferring heat generated to the electrical fuse. Therefore, the electric fuse can be fused under the combined action of the heat generated by the electric fuse after the electric fuse is introduced with current and the heat transferred to the electric fuse by the heating structure. The electric fuse in the prior art can be fused only under the action of self-generated heat after the electric fuse is introduced with current. Comparing and knowing, when fusing the same electric fuse, the fusing current that lets in to the electric fuse among this technical scheme is less than the fusing current that lets in to the electric fuse among the prior art for electric fuse fusing current among this technical scheme reduces.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
First embodiment
As shown in fig. 3 to 5, the electrical fuse structure of the present embodiment includes:
a substrate 100.
An electrical fuse 200 located on a substrate 100, the electrical fuse 200 comprising: a fuse 210; and an anode 220 and a cathode 230 respectively located at both ends of the fuse 210 and connected to the fuse 210.
And a heating structure 400 located on the substrate 100 and electrically isolated from the electrical fuse 200 by the dielectric layer 300. The heating structure 400 includes: two first heating units 410 respectively located above and below the electric fuse 200; two second heating units 420 respectively located at opposite sides of the electrical fuse 200 and located at the same layer as the electrical fuse 200. Both ends of the first heating unit 410 located below the electrical fuse 200 are electrically connected to the two second heating units 420 through the conductive plugs 500, respectively, and both ends of the first heating unit 410 located above the electrical fuse 200 are also electrically connected to the two second heating units 420 through the conductive plugs 500, respectively. The two first heating units 410 are separated by the dielectric layer 300, the two second heating units 420 are separated by the dielectric layer 300, and the first heating units 410 and the second heating units 420 are separated by the dielectric layer 300 except for the conductive plugs 500.
As shown in fig. 6, after the current I1 is applied to the electrical fuse 200 and the current I2 is applied to the input end of the heating structure 400, on one hand, the electrical fuse 200 generates heat under the action of the current I1, and on the other hand, the heating structure 400 applied with the current I2 generates heat and transmits the heat to the electrical fuse 200 through the dielectric layer 300. Therefore, the electrical fuse 200 can be blown by the combined action of the heat generated by the electrical fuse 200 itself and the heat transferred to the electrical fuse 200 by the heating structure 400. The electric fuse in the prior art can be blown only under the action of heat generated after current is introduced into the electric fuse. Comparing and knowing, when fusing the same electric fuse, the fusing current that lets in to the electric fuse among this technical scheme is less than the fusing current that lets in to the electric fuse among the prior art for electric fuse fusing current among this technical scheme reduces.
In the present embodiment, the current I1 may be passed to the electrical fuse 200 in the following manner: the anode 220 of the electrical fuse 200 is applied with a voltage VP, the cathode 230 is electrically connected to the drain of the transistor 610 serving as the fuse device, the gate of the transistor 610 is applied with a voltage VG, and the source is grounded.
In this embodiment, the current I2 may be applied to the input terminal of the heating structure 400 by: one end of one of the first heating units 410 is applied with a voltage VP, one end of the other first heating unit 410 is electrically connected to the drain of the transistor 620, the gate of the transistor 620 is applied with a voltage VG, and the source is grounded.
As mentioned above, the instability of the blowing device for providing the blowing current to the electrical fuse may cause the blowing current provided by the blowing device to the electrical fuse to fluctuate, which results in the failure of the fuse to be blown and the failure of the electrical fuse to function. Because the fusing current introduced into the electrical fuse in the technical scheme is smaller than the fusing current introduced into the electrical fuse in the prior art, under the condition that the fusing device adopted in the technical scheme and the fusing device adopted in the prior art have the same stability performance (namely the fluctuation range of the fusing current provided by the fusing device is the same, for example, the fusing current fluctuates by about 5%), the fluctuation value of the fusing current provided by the fusing device adopted in the technical scheme is smaller than the fluctuation value of the fusing current provided by the fusing device adopted in the prior art. Therefore, the probability that the electric fuse can not be fused in the technical scheme is smaller than the probability that the electric fuse can not be fused in the prior art, and therefore the performance of the electric fuse in the technical scheme is improved.
In addition, the size of the transistor as the fuse device is proportional to the magnitude of the fuse current to be supplied. That is, the larger the transistor is intended to provide the fusing current, the larger the size of the transistor; the smaller the transistor is to provide the blowing current, the smaller the transistor size. Because the fusing current that lets in to the electric fuse among this technical scheme is less than the fusing current that lets in to the electric fuse among the prior art, so the size of the transistor that provides fusing current among this technical scheme to the electric fuse is less than the size of the transistor that provides fusing current among the prior art to the electric fuse, therefore can improve integrated circuit's integrated level.
In the modified example of the present embodiment, the same or different current may be respectively applied to each heating unit in the heating structure 400, as long as each heating unit is applied with current to generate heat, in which case, the heating units are not electrically connected to each other by a conductive plug.
With continued reference to fig. 3 and 5, it can be seen from the blowing mechanism of the electrical fuse 200 that the blowing position of the electrical fuse 200 is located at the position where the most heat is applied in the fuse 210. The blowing position of the fuse 210 is defined as a blowing region 211 (indicated by a dotted line) of the electrical fuse 200. In general, when the shape of the fuse 210 is regular, the blowing region 211 of the fuse 210 is located at the middle of the fuse 210, so that the distance between the blowing region 211 and the anode 220 is almost equal to the distance between the blowing region 211 and the cathode 230. In practical applications, the specific location of the fuse 211 in the electrical fuse 200 may be measured by using finite element simulation software.
In the present embodiment, the projections of the two first heating units 410 on the upper surface of the substrate 100 are overlapped with the projections of the blowing regions 211 of the fuses 210 on the upper surface of the substrate 100, the two first heating units 410 cross the fuses 210, and the projections of the two first heating units 410 on the upper surface of the substrate 100 are overlapped. Since the projections of the two first heating units 410 on the upper surface of the substrate 100 are overlapped with the projections of the blowing regions 211 of the fuses 210 on the upper surface of the substrate 100, the heat generated by the two first heating units 410 can be more transferred to the blowing regions 211 of the fuses 210, and thus the fuses 210 can be blown more easily.
In other embodiments, the projection of the first heating unit 410 on the upper surface of the substrate 100 may not overlap with the projection of the fusing region 211 of the fuse 210 on the upper surface of the substrate 100. In addition, the projections of the two first heating units 410 on the upper surface of the substrate 100 may not overlap. In this case, the heat generated by the first heating unit 410 can still be transferred to the blowing region 211 of the fuse 210, but the heat that can be transferred to the blowing region 211 of the fuse 210 is relatively small.
In the embodiment, the two second heating units 420 have opposite areas to the blowing regions 211 of the fuse 210, so that heat generated by the two second heating units 420 can be more transferred to the blowing regions 211 of the fuse 210, and the fuse 210 is easier to blow.
In other embodiments, the second heating unit 420 may not have a facing area with the blowing region 211 of the fuse 210. In this case, the heat generated by the second heating unit 420 can still be transferred to the blowing region 211 of the fuse 210, but the heat that can be transferred to the blowing region 211 of the fuse 210 is relatively small.
In other embodiments, only one first heating unit 410 may be included in the heating structure 400, and the first heating unit 410 may be located above or below the electrical fuse 200; alternatively, the heating structure 400 may include only one second heating unit 420, and the second heating unit 420 may be located on any side of the electrical fuse 200; alternatively, the heating structure 400 may include only one first heating unit 410 and one second heating unit 420, the first heating unit 410 may be located above or below the electrical fuse 200, and the second heating unit 420 may be located on any side of the electrical fuse 200.
It should be noted that both the electrical fuse 200 and the heating structure 400 can be formed simultaneously with the interconnection lines in the metal interconnection structure in the present invention; the conductive plug 500 may be formed simultaneously with the conductive plug in the metal interconnection structure. In a specific embodiment, the material of each of the electrical fuse 200 and the heating structure 400 may be a metal, such as copper or aluminum.
In other embodiments, other materials suitable for fusing may be used for the electrical fuse 200. Other materials that generate heat when an electric current is applied may be used for the heating structure 400.
When the electrical fuse 200 and the heating structure 400 are formed in synchronization with the interconnection line in the metal interconnection structure, the second heating unit 420 in the heating structure 400 has the following effects in addition to the effect of generating heat transferred to the electrical fuse 200: the dummy pattern is used to reduce adverse effects caused by the non-uniformity of the circuit layout density of the region where the electric fuse structure is located and the circuit layout density of the metal interconnection structure.
As can be seen from the above, since the electrical fuse 200, the heating structure 400 and the conductive plug 500 in the present disclosure can be formed simultaneously with the metal interconnection structure, no additional manufacturing process is required.
In this embodiment, the substrate 100 is formed with devices (not shown), such as transistors, capacitors, resistors, and the like. Dielectric layer 300 may be a single dielectric layer or a stack of dielectric layers. In an embodiment, the dielectric layer 300 may be a dielectric material such as silicon oxide, silicon nitride, silicon oxynitride, etc.
In the present embodiment, the fuse 210, the first heating unit 410, and the second heating unit 420 are all linear. The first heating unit 410 is perpendicular to the fuse 210, and the second heating unit 420 is parallel to the fuse 210.
In other embodiments, the second heating unit 420 may not be parallel to the fuse 210. In this case, the heat generated by the second heating unit 420 can still be transferred to the blowing region 211 of the fuse 210, but the heat that can be transferred to the blowing region 211 of the fuse 210 is relatively small.
Second embodiment
The difference between the second embodiment and the first embodiment is that: in the second embodiment, as shown in fig. 7 and 8 in combination, the number of the first heating units in the heating structure 400 is three, and the number is one first heating unit 411 located below the electrical fuse 200, and two first heating units 412 located above the electrical fuse 200 and spaced apart from each other.
Wherein the projection of the first heating unit 411 on the upper surface of the substrate 100 overlaps the projection of the blowing region 211 of the fuse 210 on the upper surface of the substrate 100, and the first heating unit 411 crosses the fuse 210; the first heating unit 411 is electrically connected to the second heating unit 421 and the second heating unit 422 through the conductive plug 500. Of the two first heating units 412 located above the electrical fuse 200, one of the first heating units 412 is electrically connected to the second heating unit 421 through the conductive plug 500, and the other of the first heating units 412 is electrically connected to the second heating unit 422 through the conductive plug 500, and the extending directions of the two first heating units 412 both cross the fuse 210.
In the technical solution of the present embodiment, referring to fig. 6, the manner of applying the current I1 to the electrical fuse 200 may refer to the first embodiment, and is not described herein again. The current I2 may be applied to the input of the heating structure 400 by: of the two first heating units 412 located above the electrical fuse 200, one first heating unit 412 is applied with the voltage VP, the other first heating unit 412 is electrically connected to the drain of the transistor 620, the gate of the transistor 620 is applied with the voltage VG, and the source is grounded.
As a modification of the present embodiment, the positions of two first heating units 412 located above the electrical fuse 200 and the position of one first heating unit 411 located below the electrical fuse 200 may be exchanged. In this case, the manner in which the current I2 is passed to the heating structure 400 may be unchanged.
Third embodiment
The difference between the third embodiment and the first embodiment is that: in the third embodiment, as shown in conjunction with fig. 9 to 11, the first heating unit 413 located below the electric fuse 200 includes: the heating apparatus includes a heating unit 4131, a heating unit 4132, a heating unit 4133, a heating unit 4134, and a heating unit 4135 which are connected end to end in sequence and have a straight shape, wherein the heating unit 4133, the heating unit 4131, and the heating unit 4135 are parallel to each other, the heating unit 4131 and the heating unit 4135 are positioned on a straight line, the heating unit 4132 and the heating unit 4131 are at an angle of 90 degrees, and the heating unit 4134 and the heating unit 4135 are at an angle of 90 degrees.
The first heating unit 414 located above the electric fuse 200 is the same shape as the first heating unit 413. The first heating unit 414 includes: the heating unit 4141, the heating unit 4142, the heating unit 4143, the heating unit 4144, and the heating unit 4145 are connected end to end in sequence and are formed in a straight line, wherein the heating unit 4143, the heating unit 4141, and the heating unit 4145 are parallel to each other, the heating unit 4141 and the heating unit 4145 are positioned on a straight line, the heating unit 4142 and the heating unit 4141 are at an angle of 90 degrees, and the heating unit 4144 and the heating unit 4145 are at an angle of 90 degrees.
The projections of the heating part 4132 of the first heating unit 413 and the heating part 4142 of the first heating unit 414 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 423 on the upper surface of the substrate 100, and both the heating part 4132 and the heating part 4142 are electrically connected to the second heating unit 423 through the conductive plug 500.
The projections of the heating part 4134 of the first heating unit 413 and the heating part 4144 of the first heating unit 414 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 424 on the upper surface of the substrate 100, and the heating part 4134 and the heating part 4144 are electrically connected to the second heating unit 424 through the conductive plug 500.
The heating part 4133 of the first heating unit 413 and the heating part 4143 of the first heating unit 414 overlap a projection of the upper surface of the substrate 100 and overlap a projection of the blowing region 211 of the fuse 210 on the upper surface of the substrate 100, and the heating part 4133 and the heating part 4143 cross the fuse 210.
Although two adjacent heating portions of the first heating unit 413 and two adjacent heating portions of the second heating unit 414 are separated by a dotted line in fig. 11, in reality, the two adjacent heating portions of the first heating unit 413 and the second heating unit 414 are integrally formed.
In the technical solution of this embodiment, both the manner of applying current to the electrical fuse 200 and the manner of applying current to the heating structure 400 may refer to the first embodiment, and are not described herein again.
Fourth embodiment
The difference between the fourth embodiment and the first embodiment is that: in the fourth embodiment, as shown in conjunction with fig. 12 to 14, the first heating unit 415 located below the electrical fuse 200 includes: a heating unit 4151, a heating unit 4152, a heating unit 4153, a heating unit 4154, and a heating unit 4155, which are connected end to end in sequence and have a straight shape, wherein the heating unit 4153, the heating unit 4151, and the heating unit 4155 are parallel to each other, and the heating unit 4151 and the heating unit 4155 are respectively located at opposite sides of the heating unit 4153; heating unit 4152 and heating unit 4151 are at 90 degrees to each other, heating unit 4154 and heating unit 4155 are at 90 degrees to each other, and heating unit 4152 and heating unit 4154 are located on opposite sides of heating unit 4153, respectively.
The first heating unit 416 located above the electric fuse 200 has the same shape as the first heating unit 415. The first heating unit 416 includes: a heating part 4161, a heating part 4162, a heating part 4163, a heating part 4164, and a heating part 4165 which are connected end to end in sequence and are linear, wherein the heating part 4163, the heating part 4161, and the heating part 4165 are parallel to each other, and the heating part 4161 and the heating part 4165 are respectively positioned at two opposite sides of the heating part 4163; the heating unit 4162 and the heating unit 4161 are at 90 degrees to each other, the heating unit 4164 and the heating unit 4165 are at 90 degrees to each other, and the heating unit 4162 and the heating unit 4164 are respectively located at opposite sides of the heating unit 4163.
The projections of the heating part 4152 of the first heating unit 415 and the heating part 4162 of the first heating unit 416 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 425 on the upper surface of the substrate 100, and the heating part 4152 and the heating part 4162 are electrically connected to the second heating unit 425 through the conductive plug 500.
The projections of the heating part 4154 of the first heating unit 415 and the heating part 4164 of the first heating unit 416 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 426 on the upper surface of the substrate 100, and the heating part 4154 and the heating part 4164 are electrically connected to the second heating unit 426 through the conductive plug 500.
The heating part 4153 of the first heating unit 415, the heating part 4163 of the first heating unit 416 overlap a projection of the upper surface of the substrate 100 and overlap a projection of the blowing region 211 of the fuse 210 on the upper surface of the substrate 100, and the heating part 4153 and the heating part 4163 cross the fuse 210.
Although two adjacent heating portions of the first heating unit 415 and two adjacent heating portions of the second heating unit 416 are separated by a dotted line in fig. 14, in reality, the two adjacent heating portions of the first heating unit 415 and the second heating unit 416 are integrally formed.
In the technical solution of this embodiment, both the manner of applying current to the electrical fuse 200 and the manner of applying current to the heating structure 400 may refer to the first embodiment, and are not described herein again.
Fifth embodiment
The difference between the fifth embodiment and the third embodiment is that: in the fifth embodiment, as shown in conjunction with fig. 15 to 17, the first heating unit 413 located below the electric fuse 200 further includes: a heating unit 4136 connected to the heating unit 4131 and forming an angle of 90 degrees with each other, the heating unit 4136 being disposed opposite to the heating unit 4132; a heating part 4137 connected to the heating part 4135 and forming an angle of 90 degrees with each other, and the heating part 4137 is provided to face the heating part 4134. The heating portion 4136 and the heating portion 4137 are both linear.
The first heating unit 414 located above the electrical fuse 200 further includes: a heating part 4146 connected to the heating part 4141 and forming an angle of 90 degrees with each other, the heating part 4146 being provided to face the heating part 4142; a heating unit 4147 connected to the heating unit 4145 and forming an angle of 90 degrees with each other, and the heating unit 4147 and the heating unit 4144 are provided in a straight line shape and face each other.
The projections of the heating part 4136 of the first heating unit 413 and the heating part 4146 of the first heating unit 414 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 423 on the upper surface of the substrate 100, and the heating part 4136 and the heating part 4146 are electrically connected with the second heating unit 423 through one or more (three conductive plugs are taken as an example in the figure) conductive plugs 500, so that one ends of the first heating unit 413 and the first heating unit 414 are short-circuited.
The projections of the heating part 4137 of the first heating unit 413 and the heating part 4147 of the first heating unit 414 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 424 on the upper surface of the substrate 100, and the heating part 4137 and the heating part 4147 are electrically connected with the second heating unit 424 through one or more (three conductive plugs are taken as an example in the figure) conductive plugs 500, so that the other ends of the first heating unit 413 and the first heating unit 414 are short-circuited. In other words, in the solution of the present embodiment, two ends of the first heating unit 413 are respectively short-circuited with two ends of the first heating unit 414.
The heating part 4133 of the first heating unit 413 and the heating part 4143 of the first heating unit 414 overlap a projection of the upper surface of the substrate 100 and overlap a projection of the blowing region 211 of the fuse 210 on the upper surface of the substrate 100, and the heating part 4133 and the heating part 4143 cross the fuse 210.
Although two adjacent heating portions of the first heating unit 413 and two adjacent heating portions of the second heating unit 414 are separated by a dotted line in fig. 17, in reality, the two adjacent heating portions of the first heating unit 413 and the second heating unit 414 are integrally formed.
In the technical solution of the present embodiment, referring to fig. 6, the manner of applying the current I1 to the electrical fuse 200 may refer to the first embodiment, and is not described herein again. The current I2 may be applied to the input of the heating structure 400 in the following manner: the first heating unit 413 has one end to which a voltage VP is applied and the other end electrically connected to the drain of the transistor 620, and the gate of the transistor 620 has a voltage VG applied thereto and the source thereof is grounded. Alternatively, the current I2 may be applied to the heating structure 400 in the following manner: the second heating unit 414 has one end to which a voltage VP is applied, the other end electrically connected to the drain of the transistor 620, the gate of the transistor 620 to which a voltage VG is applied, and the source thereof grounded.
Sixth embodiment
The difference between the sixth embodiment and the fourth embodiment is that: in the sixth embodiment, as shown in fig. 18 to 20 in conjunction, the first heating unit 415 located below the electrical fuse 200 further includes: a heating part 4156 connected to the heating part 4151 and forming an angle of 90 degrees with each other, the heating part 4156 being provided to face the heating part 4152; a heating unit 4157 connected to the heating unit 4135 and formed at 90 degrees to each other, the heating unit 4157 and the heating unit 4154 being provided to face each other, and both the heating unit 4156 and the heating unit 4157 being linear.
The first heating unit 416 located above the electrical fuse 200 further includes: a heating part 4166 connected to the heating part 4161 and forming an angle of 90 degrees with each other, the heating part 4166 being disposed opposite to the heating part 4162; a heating part 4167 connected to the heating part 4135 and formed at 90 degrees to each other, the heating part 4167 and the heating part 4164 being provided to face each other, and both the heating part 4166 and the heating part 4167 being linear.
The projections of the heating part 4156 of the first heating unit 415 and the heating part 4166 of the first heating unit 416 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 425 on the upper surface of the substrate 100, and the heating part 4156 and the heating part 4166 are electrically connected with the second heating unit 425 through more than one (three conductive plugs are taken as an example in the figure) conductive plugs 500, so that one end of the first heating unit 415 and one end of the first heating unit 416 are short-circuited.
The projections of the heating part 4157 of the first heating unit 415 and the heating part 4167 of the first heating unit 416 on the upper surface of the substrate 100 are overlapped with the projection of the second heating unit 426 on the upper surface of the substrate 100, and the heating part 4157 and the heating part 4167 are electrically connected with the second heating unit 426 through one or more conductive plugs 500 (three conductive plugs are taken as an example in the figure), so that the other ends of the first heating unit 415 and the first heating unit 416 are short-circuited. In other words, in the solution of the present embodiment, two ends of the first heating unit 415 are respectively short-circuited with two ends of the first heating unit 416.
The heating part 4153 of the first heating unit 415, the heating part 4163 of the first heating unit 416 overlap a projection of the upper surface of the substrate 100 and overlap a projection of the blowing region 211 of the fuse 210 on the upper surface of the substrate 100, and the heating part 4153 and the heating part 4163 cross the fuse 210.
Although two adjacent heating portions of the first heating unit 415 and two adjacent heating portions of the second heating unit 416 are separated by a dotted line in fig. 20, in reality, the two adjacent heating portions of the first heating unit 415 and the second heating unit 416 are integrally formed.
In the technical solution of the present embodiment, referring to fig. 6, the manner of applying the current I1 to the electrical fuse 200 may refer to the first embodiment, and is not described herein again. The current I2 may be applied to the input of the heating structure 400 in the following manner: the first heating unit 415 has one end to which a voltage VP is applied, the other end electrically connected to the drain of the transistor 620, the gate of the transistor 620 to which a voltage VG is applied, and the source thereof grounded. Alternatively, the current I2 may be applied to the heating structure 400 in the following manner: the second heating unit 416 has one end to which a voltage VP is applied, the other end electrically connected to the drain of the transistor 620, the gate of the transistor 620 to which a voltage VG is applied, and the source thereof grounded.
Seventh embodiment
The seventh embodiment differs from any of the embodiments described above in that: as shown in fig. 21, the fuse 210 of the electrical fuse 200 is U-shaped, and the fuse 210 includes: a fuse portion 2101, a fuse portion 2102 and a fuse portion 2103 which are connected end to end in sequence and are in a straight line shape, wherein the fuse portion 2101 is connected with an anode 220, the fuse portion 2103 is connected with a cathode 230, the fuse portion 2102 and the fuse portion 2101 form an angle of 90 degrees with each other, the fuse portion 2102 and the fuse portion 2103 form an angle of 90 degrees with each other, the fuse portion 2101 and the fuse portion 2103 are arranged to face each other, and a fusing region 211 is positioned in the fuse portion 2102; the two second heating units 420 located at opposite sides of the fuse 210 are also U-shaped and arranged in parallel with the fuse 210.
Eighth embodiment
The eighth embodiment differs from any of the embodiments described above in that: as shown in fig. 22, the fuse 210 of the electrical fuse 200 includes: a fuse portion 2101, a fuse portion 2102 and a fuse portion 2103 which are connected end to end in sequence and are in a straight line shape, wherein the fuse portion 2101 is connected with the anode 220, the fuse portion 2103 is connected with the cathode 230, the fuse portion 2102 and the fuse portion 2101 form an angle of 90 degrees with each other, the fuse portion 2102 and the fuse portion 2103 form an angle of 90 degrees with each other, the extending direction of the fuse portion 2101 is opposite to the extending direction of the fuse portion 2103, and the fusing region 211 is positioned in the fuse portion 2102; the second heating units 420a and 420b located on opposite sides of the fuse 210 are L-shaped, wherein a portion of the second heating unit 420a is disposed opposite to the fuse portion 2102, the other portion is disposed opposite to the fuse portion 2103, a portion of the second heating unit 420b is disposed opposite to the fuse portion 2102, and the other portion is disposed opposite to the fuse portion 2101.
It should be noted that, in the technical solution of the present invention, the shape of the electrical fuse, the shape and number of the first heating units, the shape and number of the second heating units, the relative position of the first heating units and the electrical fuse in the direction parallel to the upper surface of the substrate, and the relative position of the second heating units and the electrical fuse in the direction parallel to the upper surface of the substrate should not be limited to the given embodiments and the drawings. In a specific application, the shape and the number of the first heating unit and the second heating unit in the heating structure, and the relative position between the first heating unit, the second heating unit and the electrical fuse in a direction parallel to the upper surface of the substrate can be adjusted according to the actual shape of the electrical fuse, so that the heat generated by the heating structure can be transferred to the electrical fuse to the maximum extent.
On the basis of the electric fuse structure, the invention also provides a semiconductor device which comprises the electric fuse structure of any one of the embodiments.
In the present invention, each embodiment is written in a progressive manner, and the differences from the previous embodiments are emphasized, and the same parts in each embodiment can be referred to the previous embodiments.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.
Claims (15)
1. An electrical fuse structure, comprising:
a substrate;
an electrical fuse located on the substrate, the electrical fuse comprising: a fuse; the anode and the cathode are respectively positioned at two ends of the fuse and connected with the fuse;
and the heating structure is positioned on the substrate and electrically isolated from the electric fuse by a dielectric layer, and is used for transferring the generated heat to the electric fuse.
2. The electrical fuse structure of claim 1, wherein a material of the electrical fuse is a metal.
3. The electrical fuse structure of claim 1, wherein a material of the heating structure is a metal.
4. An electrical fuse structure according to claim 2 or 3, characterized in that the metal is copper or aluminium.
5. The electrical fuse structure of claim 1, wherein the heating structure comprises: a first heating unit located above or below the electric fuse.
6. The electrical fuse structure of claim 1, wherein the heating structure comprises: and a second heating unit located at the same layer as the electric fuse.
7. The electrical fuse structure of claim 1, wherein the heating structure comprises:
a first heating unit located above or below the electric fuse; and
and a second heating unit located at the same layer as the electric fuse.
8. The electrical fuse structure of claim 7, wherein the first heating element and the second heating element are electrically connected by a conductive plug located within the dielectric layer; or,
and the first heating unit and the second heating unit are electrically isolated through the dielectric layer.
9. The efuse structure according to claim 5 or 7, wherein the number of the first heating units is at least two, and the two first heating units are respectively located above and below the efuse.
10. The electrical fuse structure of claim 5 or 7, wherein projections of the first heating unit and the fuse on an upper surface of the substrate overlap.
11. The electrical fuse structure of claim 10, wherein the fuse has a fuse region, and projections of the first heating unit and the fuse region on an upper surface of a substrate overlap.
12. The electrical fuse structure of claim 6 or 7, wherein the second heating unit and fuse have facing areas.
13. The electrical fuse structure of claim 12, wherein the fuse has a fuse region, and the second heating unit and the fuse region have facing areas.
14. The electrical fuse structure of claim 6 or 7, wherein the second heating unit acts as a dummy pattern.
15. A semiconductor device comprising the electrical fuse structure of any one of claims 1 to 14.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310582628.2A CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310582628.2A CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
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| Publication Number | Publication Date |
|---|---|
| CN104659013A true CN104659013A (en) | 2015-05-27 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310582628.2A Pending CN104659013A (en) | 2013-11-19 | 2013-11-19 | Electric fuse structure and semiconductor device |
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| CN (1) | CN104659013A (en) |
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| CN109244040A (en) * | 2018-07-23 | 2019-01-18 | 珠海市杰理科技股份有限公司 | Chip fuse structure and chip |
| CN110994561A (en) * | 2019-04-30 | 2020-04-10 | 宁德时代新能源科技股份有限公司 | Battery safety protection system and processing method |
| CN114038834A (en) * | 2021-10-29 | 2022-02-11 | 上海华力集成电路制造有限公司 | Layout structure of efuse fuse |
| EP4386830A1 (en) * | 2022-12-12 | 2024-06-19 | GlobalFoundries U.S. Inc. | Fuse structure with metal heater and heat spreading structure for fuse body |
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