CN104568830A - Photoelectric gas sensor and detection device - Google Patents
Photoelectric gas sensor and detection device Download PDFInfo
- Publication number
- CN104568830A CN104568830A CN201410787609.8A CN201410787609A CN104568830A CN 104568830 A CN104568830 A CN 104568830A CN 201410787609 A CN201410787609 A CN 201410787609A CN 104568830 A CN104568830 A CN 104568830A
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- gas
- photoelectric
- laser source
- detector
- tunable laser
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- 238000001514 detection method Methods 0.000 title abstract description 8
- 238000010521 absorption reaction Methods 0.000 claims abstract description 33
- 230000003287 optical effect Effects 0.000 claims abstract description 19
- 238000009434 installation Methods 0.000 claims description 10
- 230000005540 biological transmission Effects 0.000 claims description 6
- 239000011248 coating agent Substances 0.000 claims description 4
- 238000000576 coating method Methods 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 238000005488 sandblasting Methods 0.000 claims description 3
- 238000005259 measurement Methods 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 50
- 238000005516 engineering process Methods 0.000 description 3
- 238000005065 mining Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002091 carbon monoxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000003034 coal gas Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
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- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention relates to the technical field of gas sensors, and particularly relates to a photoelectric gas sensor and a detection device comprising the photoelectric gas sensor. The detection device comprises a shell, a cover plate, a gas absorption cell, a tunable laser source, a detector and an optical path structure. According to the photoelectric gas sensor, the laser source and the detector are respectively arranged on each side of the gas absorption cell, a modulated laser beam emitted from the tunable laser source is reflected for multiple times by virtue of a plurality of reflective prisms in the optical path structure, and is received by the detector, so that the size of the sensor is greatly reduced; and the optical path is increased by means of the optical path structure, so that the signal to noise ratio and measurement accuracy of detection can be improved. The tunable laser source and the detector of the sensor are convenient to assemble and easy to replace.
Description
Technical field
The present invention relates to gas sensor technical field, particularly relate to a kind of photoelectric gas sensor and a kind of pick-up unit comprising this photoelectric gas sensor.
Background technology
Excellent characteristics such as in recent years, along with environmentally safe requirement grows to even greater heights, various gas detection technology emerges in an endless stream, and wherein infrared Absorption technology is large with its investigative range, and precision is high, and the life-span is long and become study hotspot.
Optical type gas sensor comprises infrared absorption type, spectral absorption type, fluorescent type, chemical optical fibre material type etc., main based on infrared absorption type gas analyzer, because the infrared absorption peak of gas with various is different, detect gas by measuring and analyze infrared absorption peak.
Optical type gas sensor has high vibration resistance and contamination resistance, combine with computing machine, energy follow-on test analytical gas, the function there is automatic calibration, automatically running, precision is high, reaction is fast, simultaneously because its general cost of structural relation is high, is mainly used in environment measuring and control in the industrial and mining enterprises such as oil, mining, semi-conductor industry and family.In oil, petrochemical industry, mining industry, sulfuretted hydrogen, carbon monoxide, chlorine, methane and flammable hydrocarbon mainly detect gas.Main is in the semiconductor industry detect phosphorus, arsenic and silane.Mainly detect the leakage of coal gas and liquefied gas in family and whether ventilate.
Gas sensor of the prior art adopts lasing light emitter and detector relative position to be the air chamber structure of orthoscopic mostly, when the volume of sensor is restricted, optical path length is restricted, gas to be measured is abundant not to the absorption of light, thus cause that the detection signal to noise ratio (S/N ratio) of gas sensor is low, measuring accuracy is not high, and be also unfavorable for the miniaturization of equipment.
Given this, the defect overcome existing for the prior art is the art problem demanding prompt solution.
Summary of the invention
The technical problem to be solved in the present invention is to provide a kind of photoelectric gas sensor.
The present invention adopts following technical scheme:
A kind of photoelectric gas sensor, comprising:
Housing;
Be located at the cover plate of described case top;
For providing the gas absorption cell absorbing volume for object gas to be measured, described gas absorption cell is by the cavity institute formation of structure between housing and cover plate, described gas absorption cell bottom center offers multiple air hole, is provided with two optical transmission windows bottom described gas absorption cell;
Be located at a tunable laser source below described housing and a detector, wherein, described detector is the optical sensor receiving the modulating lasering beam that described tunable laser source produces, and the laser beam exits mouth of described tunable laser source, the laser beam entrance port of described detector are corresponding with two optical transmission windows respectively to be arranged;
Multiple reflection light channel structure, comprises the multiple reflective prism being laid in described multiple air hole periphery, and the modulating lasering beam sent from tunable laser source is received by described detector through the multiple reflections of described multiple reflective prism.
In some embodiments, below described housing, be respectively equipped with the first installation portion for fixed tuneable lasing light emitter and the second installation portion for fixed detector.
In some embodiments, described cover plate is provided with metal screen.
In some embodiments, the inwall of described gas absorption cell is through sandblasting and coating film treatment.
In some embodiments, in one of them of described multiple air hole, be provided with the temperature sensor for temperature in feedback gas absorption cell.
In some embodiments, this sensor is also provided with an electronic processors, for controlling described tunable laser source and producing measuring-signal.
In some embodiments, described tunable laser source is chip of laser.
The technical matters that the present invention will solve further is to provide a kind of photoelectric gas pick-up unit, and this device comprises above-mentioned photoelectric gas sensor.
Compared with prior art, beneficial effect of the present invention is: lasing light emitter and detector are located at a side of gas absorption cell by photoelectric gas sensor of the present invention respectively, the multiple reflections of the modulating lasering beam that tunable laser source sends multiple reflective prism in light channel structure is received by described detector, substantially reduces the volume of sensor; And add light path by light channel structure, be conducive to improving detection signal to noise ratio (S/N ratio) and measuring accuracy; Sensor tunable laser source of the present invention and detector easy for installation, be easy to change.
Accompanying drawing explanation
Fig. 1 is the perspective view of a kind of photoelectric gas sensor that the embodiment of the present invention provides;
Fig. 2 is the main TV structure schematic diagram of the sensor of photoelectric gas shown in Fig. 1.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
First, it should be noted that, in an illustrative manner the concrete structure of integrated form cell structure and feature will be described below, should not be understood as any restriction that the present invention is formed.Secondly, any one technical characteristic of mentioned in following specific embodiment (specifically describe or imply open), and be directly displayed or implicit any one technical characteristic in various figures, still can between these technical characteristics (or its equivalent), proceed combination in any or delete, thus obtain other embodiments more that may directly do not mention in the present invention.
Refer to shown in Fig. 1 to Fig. 2, schematically illustrated the basic structure of a photoelectric gas pick-up unit embodiment by these accompanying drawings by way of example.As shown in above-mentioned accompanying drawing, in the embodiment that this provides, this photoelectric gas pick-up unit comprises: housing 11, cover plate 12, gas absorption cell, tunable laser source 141, detector 142 and light channel structure, be described in detail these ingredients below.
The top of housing 11 is located at by cover plate 12; Gas absorption cell is by the cavity institute formation of structure between housing 11 and cover plate 12, for providing absorption volume for object gas to be measured, in addition, gas absorption cell bottom center offers multiple air hole 131, is provided with two optical transmission window (not shown) bottom gas absorption cell.
Tunable laser source 141 and a detector 142, tunable laser source 141 produces modulating lasering beam, and detector 142 is the optical sensors receiving this modulating lasering beam.The laser beam exits mouth of tunable laser source 141, the laser beam entrance port of detector 142 are corresponding with two optical transmission windows respectively to be arranged.Multiple reflection light channel structure comprises the multiple reflective prism 15 being laid in multiple air hole 131 periphery, and the modulating lasering beam sent from tunable laser source 141 is detected device 142 through the multiple reflections of described multiple reflective prism 15 and receives.
Be that the air chamber structure of orthoscopic is different from the lasing light emitter adopted in prior art and detector relative position, lasing light emitter and detector are encapsulated in integrated optical transceiving device by photoelectric gas sensor of the present invention, and just a side of gas absorption cell is located at respectively by lasing light emitter and detector, and by light channel structure by the laser coupled from lasing light emitter outgoing in detector, when the volume of sensor is restricted, add optical path length, the absorption of gas to be measured to light is abundant, improve detection signal to noise ratio (S/N ratio) and the measuring accuracy of photoelectric gas sensor, and be conducive to the miniaturization of equipment, in addition, in sensor tunable laser source and detector easy for installation, be easy to change.
Shown in Fig. 1, in one preferred embodiment, the first installation portion 1101 and the second installation portion 1102, first installation portion 1101 is respectively equipped with for fixed tuneable lasing light emitter 141, second installation portion 1102 for fixed detector 142 below housing 11.
Multiple reflective prism 15 outside surface in the light channel structure of the present embodiment is coated with reflectance coating, can realize the function of reflecting prism, concrete arrangement mode only need meet the modulating lasering beam making to send from tunable laser source 141 and finally be detected device 142 through multiple reflections and receive.Those skilled in the art also can adjust the quantity of reflective prism 15 and position according to spirit of the present invention, thus realize the different gas absorption light path of different optical path lengths.
In addition, cover plate 12 is provided with metal screen (not shown), is used for preventing the dusty gas absorption cells such as dust inner, and further, the inwall of gas absorption cell, through sandblasting and coating film treatment, is used for preventing inwall to the reflection of light and playing etch-proof effect.
Be provided with the temperature sensor 132 for temperature in feedback gas absorption cell in one of them of multiple air hole 131, the temperature in feedback gas absorption cell, realize ambient temperature compensation in time when fluctuation appears in temperature, reach the object improving measuring accuracy further.
In addition, photoelectric gas sensor of the present invention is also provided with an electronic processors, for controlling described tunable laser source and producing measuring-signal; Tunable laser source 141 can be classes of semiconductors chip of laser.
The embodiment of the present invention additionally provides a kind of photoelectric gas pick-up unit, comprises the photoelectric gas sensor of above-described embodiment.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. a photoelectric gas sensor, is characterized in that, this sensing device comprises:
Housing;
Be located at the cover plate of described case top;
For providing the gas absorption cell absorbing volume for object gas to be measured, described gas absorption cell is by the cavity institute formation of structure between housing and cover plate, described gas absorption cell bottom center offers multiple air hole, is provided with two optical transmission windows bottom described gas absorption cell;
Be located at a tunable laser source below described housing and a detector, wherein, described detector is the optical sensor receiving the modulating lasering beam that described tunable laser source produces, and the laser beam exits mouth of described tunable laser source, the laser beam entrance port of described detector are corresponding with two optical transmission windows respectively to be arranged;
Multiple reflection light channel structure, comprises the multiple reflective prism being laid in described multiple air hole periphery, and the modulating lasering beam sent from tunable laser source is received by described detector through the multiple reflections of described multiple reflective prism.
2. photoelectric gas sensing device according to claim 1, is characterized in that, is respectively equipped with the first installation portion for fixed tuneable lasing light emitter and the second installation portion for fixed detector below described housing.
3. photoelectric gas sensing device according to claim 1, is characterized in that, described cover plate is provided with metal screen.
4. photoelectric gas sensing device according to claim 1, is characterized in that, the inwall of described gas absorption cell is through sandblasting and coating film treatment.
5. photoelectric gas sensing device according to claim 1, is characterized in that, is provided with the temperature sensor for temperature in feedback gas absorption cell in one of them of described multiple air hole.
6. photoelectric gas sensing device according to claim 1, is characterized in that, is also provided with an electronic processors, for controlling described tunable laser source and producing measuring-signal.
7. photoelectric gas sensing device according to claim 1, is characterized in that, described tunable laser source is chip of laser.
8. a photoelectric gas pick-up unit, is characterized in that, comprises the photoelectric gas sensor described in any one of claim 1 to 7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787609.8A CN104568830A (en) | 2014-12-18 | 2014-12-18 | Photoelectric gas sensor and detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410787609.8A CN104568830A (en) | 2014-12-18 | 2014-12-18 | Photoelectric gas sensor and detection device |
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| Publication Number | Publication Date |
|---|---|
| CN104568830A true CN104568830A (en) | 2015-04-29 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410787609.8A Pending CN104568830A (en) | 2014-12-18 | 2014-12-18 | Photoelectric gas sensor and detection device |
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| CN (1) | CN104568830A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106706857A (en) * | 2017-01-07 | 2017-05-24 | 武汉六九传感科技有限公司 | Special light source drive module for gas detection |
| CN106706488A (en) * | 2016-12-30 | 2017-05-24 | 武汉六九传感科技有限公司 | Laser atmospheric monitoring equipment for large-area operation |
| CN109001154A (en) * | 2018-06-13 | 2018-12-14 | 贾良权 | The efficient measuring system of seed vitality based on laser absorption spectroscopy |
| CN111537453A (en) * | 2020-04-23 | 2020-08-14 | 山东省科学院激光研究所 | A two-dimensional multi-point reflection long optical path gas sensor probe and gas sensor |
| CN113029953A (en) * | 2021-03-18 | 2021-06-25 | 北京微芯区块链与边缘计算研究院 | Spectrum type gas sensor |
| GB2628718A (en) * | 2023-03-31 | 2024-10-02 | Servomex Group Ltd | Method and apparatus for use in optical gas absorption measurements |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109001154A (en) * | 2018-06-13 | 2018-12-14 | 贾良权 | The efficient measuring system of seed vitality based on laser absorption spectroscopy |
| CN111537453A (en) * | 2020-04-23 | 2020-08-14 | 山东省科学院激光研究所 | A two-dimensional multi-point reflection long optical path gas sensor probe and gas sensor |
| CN113029953A (en) * | 2021-03-18 | 2021-06-25 | 北京微芯区块链与边缘计算研究院 | Spectrum type gas sensor |
| GB2628718A (en) * | 2023-03-31 | 2024-10-02 | Servomex Group Ltd | Method and apparatus for use in optical gas absorption measurements |
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Application publication date: 20150429 |