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CN104568839A - Biosensor based on cascade connection of optical resonant cavity and reflective polarization converter - Google Patents

Biosensor based on cascade connection of optical resonant cavity and reflective polarization converter Download PDF

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CN104568839A
CN104568839A CN201410790916.1A CN201410790916A CN104568839A CN 104568839 A CN104568839 A CN 104568839A CN 201410790916 A CN201410790916 A CN 201410790916A CN 104568839 A CN104568839 A CN 104568839A
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resonant cavity
optical resonant
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reflective polarization
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CN104568839B (en
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李明宇
刘勇
陈阳晴
于放
唐龙华
何建军
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Zhejiang University ZJU
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Abstract

本发明公开了一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,包括宽带光源、环形器、探测器、光学谐振腔和反射型偏振转换器;环形器的第一端口与宽带光源连接,第二端口与光学谐振腔输入端连接,第三端口与探测器连接;光学谐振腔的输出端与反射型偏振转换器相连接;光学谐振腔内有特异性吸附功能的生物表面膜;生物表面膜与被测液体接触。本发明利用由于被测液体中的待检测成分被生物表面膜吸附后,引起两种偏振态的光在光学谐振腔内的有效折射率变化不同,导致两种偏振态的谐振峰移动不同,从而产生游标效应,放大了传感器透射谱包络的移动,并将其转换为输出功率的变化,降低了传感器的制作成本的同时,大大消除了温度敏感性。

The invention discloses a biosensor based on the cascade connection of an optical resonant cavity and a reflective polarization converter, comprising a broadband light source, a circulator, a detector, an optical resonant cavity and a reflective polarization converter; the first port of the circulator and the broadband The light source is connected, the second port is connected to the input end of the optical resonant cavity, and the third port is connected to the detector; the output end of the optical resonant cavity is connected to the reflective polarization converter; the biological surface film with specific adsorption function in the optical resonant cavity ; The biological surface film is in contact with the liquid to be measured. The present invention utilizes that after the components to be detected in the liquid to be tested are absorbed by the biological surface film, the effective refractive index changes of the two polarization states in the optical resonant cavity are different, resulting in different shifts of the resonance peaks of the two polarization states, thereby A vernier effect is generated, which amplifies the movement of the sensor transmission spectrum envelope and converts it into a change of output power, reduces the manufacturing cost of the sensor, and greatly eliminates the temperature sensitivity.

Description

基于光学谐振腔与反射型偏振转换器级联的生物传感器Biosensor Based on Cascaded Optical Resonator and Reflective Polarization Converter

技术领域 technical field

本发明涉及一种光学生物传感器,尤其涉及一种基于光学谐振腔与反射型偏振转换器级联的生物传感器。 The invention relates to an optical biosensor, in particular to a biosensor based on the cascade connection of an optical resonant cavity and a reflective polarization converter.

背景技术 Background technique

光学传感器是生物医学诊断,环境监测和食品安全等领域非常有前景的检测工具。光学传感器有很多优点:抗电磁干扰性强,无标记检测和易于制备光电子集成芯片。基于绝缘硅(SOI)倏逝波传感器,以其高灵敏度,集成度高和与CMOS工艺兼容等特点,备受国内外研究者的关注。满足谐振条件的光波将被耦合到光学谐振腔内,光波以倏逝波的形式在被测液体内指数衰减。当被测液体发生变化时,光学谐振腔的谐振条件也随之发生变化,通过测量谐振波长移动或者在谐振波长附近固定波长的光能量变化得到被测物质的变化。如何能够提高传感器灵敏度是科研工作者一直关注的问题。高Q值的光学谐振腔虽然能够提高光学生物传感器的灵敏度,但是需要高分辨率的光谱仪或者窄线宽的可调谐激光器,这都增大了光学生物传感器的成本。 Optical sensors are very promising detection tools in areas such as biomedical diagnostics, environmental monitoring, and food safety. Optical sensors have many advantages: strong immunity to electromagnetic interference, label-free detection, and easy fabrication of optoelectronic integrated chips. Based on silicon-on-insulator (SOI) evanescent wave sensor, due to its high sensitivity, high integration and compatibility with CMOS technology, it has attracted the attention of researchers at home and abroad. The light waves satisfying the resonance conditions will be coupled into the optical resonant cavity, and the light waves will decay exponentially in the measured liquid in the form of evanescent waves. When the measured liquid changes, the resonance condition of the optical resonant cavity also changes, and the change of the measured substance can be obtained by measuring the shift of the resonance wavelength or the change of the light energy with a fixed wavelength near the resonance wavelength. How to improve the sensitivity of the sensor is a problem that researchers have been concerned about. Although high-Q optical resonators can improve the sensitivity of optical biosensors, they require high-resolution spectrometers or narrow linewidth tunable lasers, which increase the cost of optical biosensors.

利用双谐振腔级联产生游标效应的光学传感器,无需高分辨率的光谱仪或者窄线宽的激光器,可以在提高传感器灵敏度的同时,大大降低传感器的成本。此种传感器灵敏度被放大的倍率与两个光学谐振腔(传感腔和参考腔)自由光谱范围(FSR)之差成反比,所以构造相等的两个光学谐振腔可以获得最大的灵敏度。然而因为传感腔上包层是被测液体,参考腔上包层是固定的低折射率材料,加上光刻和刻蚀等制作工艺的误差,在实际应用中难以制备具有完全相同FSR的两个光学谐振腔,最终灵敏度大大受到影响;此外,因为传感环与参考环的上包层材料不同,热膨胀系数不同,因此很难消除温度对传感器特性的影响。 The optical sensor using double resonator cascaded to generate the vernier effect does not require a high-resolution spectrometer or a narrow linewidth laser, which can greatly reduce the cost of the sensor while improving the sensitivity of the sensor. The magnification of the sensitivity of this sensor is inversely proportional to the difference in the free spectral range (FSR) of the two optical resonators (sensing cavity and reference cavity), so two optical resonators with equal structures can obtain the maximum sensitivity. However, because the upper cladding of the sensing cavity is the measured liquid, and the upper cladding of the reference cavity is a fixed low-refractive index material, plus the errors of the manufacturing process such as photolithography and etching, it is difficult to prepare the same FSR in practical applications. Two optical resonant cavities, the final sensitivity is greatly affected; moreover, because the upper cladding material of the sensing ring and the reference ring are different, the thermal expansion coefficient is different, so it is difficult to eliminate the influence of temperature on the sensor characteristics.

发明内容 Contents of the invention

本发明的目的在于提供一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,使用光学谐振腔和反射型偏振转换器相结合,利用两种偏振态下光学谐振腔有效折射率变化的不同,形成游标效应,将光谱检测信息转变为透射总输出功率的变化,从而大大降低光学传感器的制作成本;同时,参考光学谐振腔和传感光学谐振腔为同一个谐振腔,解决了两个具有相同FSR的光学谐振腔制作困难的问题,还可以大大消除温度对传感器的影响。 The purpose of the present invention is to provide a biosensor based on the cascade connection of optical resonant cavity and reflective polarization converter, which uses the combination of optical resonant cavity and reflective polarization converter to utilize the effective refractive index change of optical resonant cavity under two polarization states The difference between the two forms a vernier effect, which converts the spectral detection information into the change of the total output power of the transmission, thereby greatly reducing the production cost of the optical sensor; at the same time, the reference optical resonant cavity and the sensing optical resonant cavity are the same resonant cavity, which solves the problem of two It is difficult to make an optical resonant cavity with the same FSR, and it can also greatly eliminate the influence of temperature on the sensor.

本发明的目的是通过以下技术方案来实现的:一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,包括宽带光源、环形器、探测器、光学谐振腔和反射型偏振转换器;所述环形器的第一端口与宽带光源连接;所述环形器的第二端口与光学谐振腔的输入端连接;所述环形器的第三端口与探测器连接;所述光学谐振腔的输出端与反射型偏振转换器相连接;所述光学谐振腔内波导芯层表面有特异性吸附功能的生物表面膜;所述光学谐振腔的生物表面膜与被测液体接触;所述反射型偏振转换器包括偏振转换器和反射镜。 The purpose of the present invention is achieved through the following technical solutions: a biosensor based on optical resonant cavity and reflective polarization converter cascaded, including broadband light source, circulator, detector, optical resonant cavity and reflective polarization converter The first port of the circulator is connected to the broadband light source; the second port of the circulator is connected to the input end of the optical resonant cavity; the third port of the circulator is connected to the detector; the optical resonant cavity The output end is connected with the reflective polarization converter; the surface of the waveguide core layer in the optical resonant cavity has a biological surface film with specific adsorption function; the biological surface film of the optical resonant cavity is in contact with the liquid to be measured; the reflective type The polarization converter includes a polarization converter and mirrors.

进一步地,通过调节生物表面膜的厚度,实现所述光学谐振腔对于TE和TM模式两种偏振光的有效折射率相同,使得所述光学谐振腔对于TE模式的所有谐振频率与对于TM模式的所有谐振频率重合。 Further, by adjusting the thickness of the biological surface film, the effective refractive index of the optical resonant cavity for both TE and TM modes of polarized light is the same, so that all the resonance frequencies of the optical resonant cavity for the TE mode are the same as those for the TM mode All resonant frequencies coincide.

进一步地,所述光学谐振腔内生物表面膜对被测液体中待测物质的特异性吸附,引起所述光学谐振腔的TM模式有效折射率变化剧烈,但TE模式有效折射率变化缓慢,使得所述光学谐振腔对于TE模式的一个谐振频率与对于TM模式的一个谐振频率重合时,其他相邻的谐振峰不完全重合,从而产生游标效应。 Further, the specific adsorption of the biological surface film in the optical resonant cavity to the substance to be tested in the measured liquid causes the effective refractive index of the TM mode of the optical resonant cavity to change drastically, but the effective refractive index of the TE mode changes slowly, so that When a resonant frequency of the optical resonant cavity for the TE mode coincides with a resonant frequency for the TM mode, other adjacent resonant peaks do not completely coincide, thereby producing a vernier effect.

进一步地,所述光学谐振腔具有周期滤波特性,如法布里泊罗腔、或者环形谐振腔。 Further, the optical resonant cavity has periodic filtering characteristics, such as a Fabry Perot cavity or a ring resonant cavity.

进一步地,所述光学谐振腔可采用平面集成光波导,或者分立光学元件,或者光纤构成。 Further, the optical resonant cavity can be formed by using a planar integrated optical waveguide, or discrete optical elements, or optical fibers.

本发明具有的有益效果是:本发明使用输入光源为宽带光源,降低传感器成本;光学谐振腔可采用集成光波导器件,使传感器体积更小,更加便携,易于实现高通量、多参数测量;利用仿生分子修饰技术,在光学谐振腔内修饰有特异性吸附功能的生物表面膜使传感器具有特异性检测功能;利用两种偏振态光的有效折射率随被测物质改变时变化不同,仅用单个光学谐振腔就可以形成游标效应,提高传感器集成度的同时,降低了使用成本;不存在参考谐振腔和传感谐振腔上包层材料热膨胀系数不同,而导致的温度敏感特性;通过调整生物分子修饰膜厚度,非常方便地实现TE和TM模式下两个谐振腔的有效折射率相同,从而显著提高传感器的灵敏度。 The beneficial effects of the present invention are: the present invention uses the input light source as a broadband light source, reducing the cost of the sensor; the optical resonant cavity can use an integrated optical waveguide device, making the sensor smaller in size, more portable, and easy to realize high-throughput and multi-parameter measurement; Using biomimetic molecular modification technology, the biological surface film with specific adsorption function is modified in the optical resonant cavity to make the sensor have specific detection function; the effective refractive index of the two polarization states of light changes with the change of the measured substance, only using A single optical resonant cavity can form a vernier effect, which improves the integration of the sensor and reduces the cost of use; there is no temperature-sensitive characteristic caused by the different thermal expansion coefficients of the cladding materials on the reference resonant cavity and the sensing resonant cavity; by adjusting the biological Molecular modification of the film thickness is very convenient to achieve the same effective refractive index of the two resonant cavities in TE and TM modes, thereby significantly improving the sensitivity of the sensor.

附图说明 Description of drawings

图1为一种基于光学谐振腔与反射型偏振转换器级联的生物传感器示意图; 1 is a schematic diagram of a biosensor based on cascaded optical resonant cavity and reflective polarization converter;

图2为光学生物传感器中光学谐振腔的端面示意图; 2 is a schematic diagram of an end face of an optical resonant cavity in an optical biosensor;

图3为宽带光源的输出光谱曲线示意图; Fig. 3 is a schematic diagram of the output spectrum curve of the broadband light source;

图4为TE和TM模式下波导有效折射率随生物表面膜厚度变化曲线示意图; Fig. 4 is a schematic diagram of the change curve of the effective refractive index of the waveguide with the thickness of the biological surface film in the TE and TM modes;

图5为被测物质发生吸附前后传感器总输出光谱示意图; Figure 5 is a schematic diagram of the total output spectrum of the sensor before and after the measured substance is adsorbed;

图6为探测器接收到光功率和生物表面膜厚度变化关系示意图; Fig. 6 is a schematic diagram of the relationship between the optical power received by the detector and the thickness of the biological surface film;

图中,宽带光源1、环形器2、探测器3、光学谐振腔4、反射型偏振转换器5、环形器2的第一端口21、环形器2的第二端口22、光学谐振腔4的输入端41、环形器2的第三端口23、光学谐振腔4的输出端42、偏振转换器51、反射镜52、光学谐振腔4内波导芯层81、生物表面膜6、被测液体7、波导芯层的下包层82。 In the figure, broadband light source 1, circulator 2, detector 3, optical resonant cavity 4, reflective polarization converter 5, first port 21 of circulator 2, second port 22 of circulator 2, optical resonant cavity 4 Input end 41, third port 23 of circulator 2, output end 42 of optical resonant cavity 4, polarization converter 51, mirror 52, waveguide core layer 81 in optical resonant cavity 4, biological surface film 6, measured liquid 7 , The lower cladding layer 82 of the waveguide core layer.

具体实施方式 Detailed ways

下面结合附图和实施例对本发明作进一步的说明。 The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

实施例 Example

如图1所示,本发明一种基于光学谐振腔与反射型偏振转换器级联的光学生物传感器,包括宽带光源1、环形器2、探测器3、光学谐振腔4和反射型偏振转换器5;环形器2的第一端口21与宽带光源1连接;所述环形器2的第二端口22与光学谐振腔4的输入端41连接;所述环形器2的第三端口23与探测器3连接;所述光学谐振腔4的输出端42与反射型偏振转换器5相连接;所述反射型偏振转换器5包括偏振转换器51和反射镜52。 As shown in Figure 1, the present invention is based on an optical biosensor cascaded with an optical resonant cavity and a reflective polarization converter, including a broadband light source 1, a circulator 2, a detector 3, an optical resonant cavity 4 and a reflective polarization converter 5; the first port 21 of the circulator 2 is connected to the broadband light source 1; the second port 22 of the circulator 2 is connected to the input end 41 of the optical resonant cavity 4; the third port 23 of the circulator 2 is connected to the detector 3; the output end 42 of the optical resonant cavity 4 is connected to the reflective polarization converter 5; the reflective polarization converter 5 includes a polarization converter 51 and a mirror 52.

如图2所示,所述光学谐振腔4内波导芯层81表面有特异性吸附功能的生物表面膜6;所述光学谐振腔的生物表面膜6与被测液体7接触;波导芯层的下包层82为低折射率材料。 As shown in Figure 2, the surface of the waveguide core layer 81 in the optical resonant cavity 4 has a biological surface film 6 with specific adsorption function; the biological surface film 6 of the optical resonant cavity is in contact with the measured liquid 7; The lower cladding layer 82 is a low refractive index material.

宽带光源1发出的光通过环形器2的第一个端口21,从环形器2的第二个端口22进入光学谐振腔4,一种偏振模式的光与生物表面膜6作用后,被反射型偏振转换器5反射后再次进入光学谐振腔4,另外一种偏振模式的光与生物表面膜6再次作用,最后从环形器2的第三个端口23输出到探测器3中。 The light emitted by the broadband light source 1 passes through the first port 21 of the circulator 2, and enters the optical resonant cavity 4 from the second port 22 of the circulator 2. After the light of a polarization mode interacts with the biological surface film 6, it is reflected After being reflected by the polarization converter 5 , it enters the optical resonant cavity 4 again, and the light of another polarization mode interacts with the biological surface film 6 again, and is finally output to the detector 3 from the third port 23 of the circulator 2 .

如图3所示,所述宽带光源1的输出光谱,中心波长在1555nm附近。本实例中选择平面集成光波导中的环形谐振腔作为传感器的光学谐振腔。设计选择SOI(silicon-on-insulator)材料,波导芯层81高度250nm,宽度240m,芯层折射率3.48,下包层82折射率1.444,生物表面膜6的折射率1.52,待测液体的折射率1.33,环形谐振腔的半径为13μm。偏振转换器51采用磁光晶体材料制作而成。TE和TM模式分别表示电场的振动方向平行和垂直于生物表面膜6与波导芯层81的交界面。 As shown in FIG. 3 , the output spectrum of the broadband light source 1 has a center wavelength around 1555 nm. In this example, the ring resonant cavity in the planar integrated optical waveguide is selected as the optical resonant cavity of the sensor. The design selects SOI (silicon-on-insulator) material. The waveguide core layer 81 has a height of 250nm and a width of 240m. The ratio is 1.33, and the radius of the ring resonator is 13 μm. The polarization converter 51 is made of magneto-optic crystal material. The TE and TM modes respectively indicate that the vibration direction of the electric field is parallel to and perpendicular to the interface between the biological surface membrane 6 and the waveguide core layer 81 .

如图4所示,运用仿生分子修饰技术调节生物表面膜6的厚度,当厚度在27nm时(初始状态),TE和TM具有相同的有效折射率。两个偏振模式下的光学谐振腔透射谱重合,因为探测器3接收到的光功率是对整个出射光谱曲线的积分,故此时达到最大的光功率值,出射光谱曲线如图5中实线所示;当被测液体7中的待测物质被生物表面膜6吸附后,生物表面膜6的厚度增加,对于TE模式的有效折射率变化缓慢,对于TM模式的有效折射率变化非常大,导致TE和TM的有效折射率有差异,两个偏振模式下的光学谐振腔出射光谱曲线不重合,此时探测器3接收到的光功率降低,出射光谱曲线如图5中虚线所示。所以可以通过测量整个光谱内的总光功率变化探测生物表面膜厚度的变化,从而得知被测液体7中待测物质成分的含量,如图6所示。此实例中最高灵敏度达0.5dB/nm, 如果最小可测得的功率变化为0.01dB,生物表面膜探测的最小变化厚度为2.0×10-2nm。 As shown in Figure 4, the bionic molecular modification technology is used to adjust the thickness of the biological surface film 6. When the thickness is 27nm (initial state), TE and TM have the same effective refractive index. The transmission spectra of the optical resonator under the two polarization modes overlap, because the optical power received by the detector 3 is the integral of the entire outgoing spectral curve, so the maximum optical power value is reached at this time, and the outgoing spectral curve is shown by the solid line in Figure 5 Show; After the substance to be measured in the measured liquid 7 is adsorbed by the biological surface film 6, the thickness of the biological surface film 6 increases, the effective refractive index for the TE mode changes slowly, and the effective refractive index for the TM mode changes very large, resulting in The effective refractive indices of TE and TM are different, and the output spectrum curves of the optical resonator under the two polarization modes do not overlap. At this time, the optical power received by the detector 3 decreases, and the output spectrum curve is shown as the dotted line in Fig. 5 . Therefore, the change of the film thickness of the biological surface can be detected by measuring the change of the total optical power in the entire spectrum, so as to know the content of the substance to be tested in the liquid 7 to be tested, as shown in FIG. 6 . In this example, the highest sensitivity is 0.5dB/nm. If the smallest measurable power change is 0.01dB, the minimum change thickness of biological surface film detection is 2.0×10 -2 nm.

上述实施例用来解释说明本发明,而不是对本发明进行限制。在本发明的精神和权利要求的保护范围内,对本发明作出的任何修改和改变,都落入本发明的保护范围。 The above-mentioned embodiments are used to illustrate the present invention, but not to limit the present invention. Within the spirit of the present invention and the protection scope of the claims, any modification and change made to the present invention will fall into the protection scope of the present invention.

Claims (5)

1.一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,其特征在于,包括宽带光源(1)、环形器(2)、探测器(3)、光学谐振腔(4)和反射型偏振转换器(5);所述环形器(2)的第一端口(21)与宽带光源(1)连接;所述环形器(2)的第二端口(22)与光学谐振腔(4)的输入端(41)连接;所述环形器(2)的第三端口(23)与探测器(3)连接;所述光学谐振腔(4)的输出端(42)与反射型偏振转换器(5)相连接;所述光学谐振腔(4)内波导芯层(81)表面具有特异性吸附功能的生物表面膜(6);所述光学谐振腔的生物表面膜(6)与被测液体(7)接触;所述反射型偏振转换器(5)包括偏振转换器(51)和反射镜(52)。 1. A biosensor based on cascaded optical resonant cavity and reflective polarization converter, characterized in that it includes a broadband light source (1), a circulator (2), a detector (3), an optical resonant cavity (4) and A reflective polarization converter (5); the first port (21) of the circulator (2) is connected to the broadband light source (1); the second port (22) of the circulator (2) is connected to the optical resonant cavity ( 4) is connected to the input end (41); the third port (23) of the circulator (2) is connected to the detector (3); the output end (42) of the optical resonant cavity (4) is connected to the reflective polarization The converter (5) is connected; the surface of the waveguide core layer (81) in the optical resonant cavity (4) has a biological surface film (6) with a specific adsorption function; the biological surface film (6) of the optical resonant cavity (6) and The measured liquid (7) is in contact; the reflective polarization converter (5) includes a polarization converter (51) and a reflective mirror (52). 2.根据权利要求1所述一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,其特征在于,通过调节生物表面膜(6)的厚度,实现所述光学谐振腔(4)对于TE和TM模式两种偏振光的有效折射率相同,使得所述光学谐振腔(4)对于TE模式的所有谐振频率与对于TM模式的所有谐振频率重合。 2. A biosensor based on cascaded optical resonant cavity and reflective polarization converter according to claim 1, characterized in that the optical resonant cavity (4) is realized by adjusting the thickness of the biological surface film (6). The effective refractive index for both polarized light in TE and TM modes is the same, so that all resonance frequencies of the optical resonant cavity (4) for TE modes coincide with all resonance frequencies for TM modes. 3.根据权利要求1所述一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,其特征在于,所述生物表面膜(6)对被测液体(7)中待测物质的特异性吸附,引起所述光学谐振腔(4)的TM模式有效折射率变化剧烈,但TE模式有效折射率变化缓慢,使得所述光学谐振腔(4)对于TE模式的一个谐振频率与对于TM模式的一个谐振频率重合时,其他相邻的谐振峰不完全重合,从而产生游标效应。 3. A biosensor based on cascaded optical resonant cavity and reflective polarization converter according to claim 1, characterized in that, the biological surface film (6) has a great influence on the measured substance in the measured liquid (7). Specific adsorption causes the effective refractive index of the TM mode of the optical resonant cavity (4) to change drastically, but the effective refractive index of the TE mode changes slowly, so that a resonant frequency of the optical resonant cavity (4) for the TE mode is the same as that for the TM When one resonant frequency of the mode coincides, the other adjacent resonant peaks do not completely coincide, resulting in a vernier effect. 4.根据权利要求1所述一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,其特征在于,所述光学谐振腔(4)具有周期滤波特性的结构,如法布里泊罗腔、或者环形谐振腔。 4. A biosensor based on cascaded optical resonant cavity and reflective polarization converter according to claim 1, characterized in that, the optical resonant cavity (4) has a structure with periodic filtering characteristics, such as Fabry Poi Luo cavity, or ring resonant cavity. 5.根据权利要求1所述一种基于光学谐振腔与反射型偏振转换器级联的生物传感器,其特征在于,所述光学谐振腔(4)可采用平面集成光波导,或者分立光学元件,或者光纤构成。 5. A biosensor based on cascaded optical resonant cavity and reflective polarization converter according to claim 1, characterized in that the optical resonant cavity (4) can use planar integrated optical waveguides or discrete optical components, or fiber optics.
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