CN104511703B - Ceramic head and lead wire bonder - Google Patents

Abstract

The ceramic head and the lead wire bonding machine provided by the present invention, wherein, the interior of the ceramic head is provided with a firing chamber for forming a firing ball, the first surface is provided with a first air hole communicating with the firing chamber, and the inside of the ceramic head is also A first channel for feeding protective gas into the ball burning chamber is provided, a second air hole is provided on the first surface, and a second channel for feeding protective gas into the second air hole is provided inside the ceramic head. The wire bonding machine of the present invention includes the ceramic head of the present invention. The ceramic head of the present invention adopts two paths of gas to respectively protect the burning ball area and the welding line area, respectively controls the gas consumption, and achieves the best protection effect with the minimum gas consumption. When the ceramic head of the present invention is used for copper wire welding, the protective gas forms an inert reducing atmosphere at the ball burning position to prevent the copper wire from being oxidized. At the same time, the protective gas forms an annular airflow and reaches the welding wire area to prevent the copper wire from being oxidized during welding , The two protective gases work together to ensure the quality of copper wire welding.

Description

Ceramic Head and Wire Bonding Machine

technical field

The invention relates to the welding of basic electrical components, in particular to a ceramic head and a lead wire welding machine.

Background technique

Fully automatic wire bonding machine is a semiconductor production equipment that connects chip pads and package pins with metal wires. At present, as the cost requirements of the semiconductor market become more and more stringent, mainstream manufacturers are looking for cheaper bonding wire materials to replace gold wires. After a lot of experiments, it is found that copper wire has better electrical properties than gold wire, and the cost is much lower than gold wire, so copper wire welding has become a development trend.

However, there is a fatal flaw in copper wire welding - it is easy to oxidize. When the ceramic head of the prior art is used for copper wire welding by the traditional method, an oxide layer film is easily formed on the welding bonding surface, which affects the bonding strength and further affects the product quality. At present, the mainstream way to solve the above problems is to blow the shielding gas to the welding line area to ensure the welding quality, but because it is a single-channel gas, the gas flow cannot be controlled separately to meet the protection requirements of different parts, the gas consumption is large, and the protection The effect is not ideal.

Contents of the invention

The purpose of the present invention is to provide a ceramic head and a lead wire bonding machine which can guarantee the welding quality more comprehensively.

In the ceramic head of the present invention, a firing chamber for forming a firing ball is provided inside the ceramic head, a first air hole communicating with the firing ball chamber is provided on the first surface of the ceramic head, and the ceramic head The interior of the ceramic head is also provided with a first channel for introducing protective gas into the burning ball chamber, the first surface is also provided with a second air hole, and the interior of the ceramic head is also provided with a channel for feeding the second air hole The second channel leading to the protective gas.

In the ceramic head of the present invention, the second surface of the ceramic head corresponding to the first surface is provided with a third air hole communicating with the ball firing chamber.

In the ceramic head of the present invention, the first air hole is not connected to the second air hole.

In the ceramic head of the present invention, there are a plurality of second air holes, and the plurality of second air holes surround the first air hole on the first surface, and the plurality of second air holes are all connected to the interior of the ceramic head. The cavity communicates with the second channel.

In the ceramic head of the present invention, the second channel is parallel to the first channel.

In the ceramic head of the present invention, a firing pin is arranged in the first channel, and the firing pin extends toward the ball burning cavity.

In the ceramic head of the present invention, a positioning piece is provided between the firing pin and the inner wall of the first passage to keep the firing pin at the center of the first passage.

In the ceramic head of the present invention, wherein, the positioning member is in the shape of a ring, the center of the positioning member is provided with a central hole for the firing pin to pass through, and the outer peripheral wall of the positioning member is in contact with the first passage The inner wall of the center hole is fitted to keep the firing pin in the center hole at the center of the first channel.

The ceramic head of the present invention, wherein, the third surface of the ceramic head connecting the first surface and the second surface is provided with a groove for connecting the trachea, and the first end of the second channel communicates with the cavity , the first end of the second channel communicates with the round hole at the bottom of the groove.

The wire bonding machine of the present invention includes a ceramic head, and the ceramic head is the ceramic head of the present invention.

The ceramic head of the present invention adopts two paths of gas to respectively protect the burning ball area and the welding line area, respectively controls the gas consumption, and achieves the best protection effect with the minimum gas consumption.

Because the lead wire bonding machine of the present invention adopts the lead wire bonding machine of the present invention, better protection effect is obtained, and the product quality is greatly improved.

When the ceramic head of the present invention is used for copper wire welding, the protective gas forms an inert reducing atmosphere at the position of the burning ball, which prevents the oxidation of the copper wire, and can also reduce the oxide layer on the surface of the copper wire, so as to ensure the quality of the burning ball and prevent uneven spherical shape. At the same time, the shielding gas reaches the front end of the ceramic head to form a circular airflow, and reaches the welding wire area to prevent the copper wire from being oxidized during welding. The two paths of shielding gas work together to ensure the welding quality of the copper wire.

Description of drawings

Fig. 1 is the front view of the structural representation of the embodiment of ceramic head of the present invention;

Fig. 2 is the main sectional view of the schematic structural view of the embodiment of the ceramic head of the present invention;

Fig. 3 is the plan view of the structural schematic diagram of the embodiment of ceramic head of the present invention;

Fig. 4 is the B-B sectional view of Fig. 3;

Fig. 5 is a C-C sectional view of Fig. 1 .

detailed description

Embodiments of the wire bonding machine of the present invention include embodiments of the ceramic head of the present invention.

As shown in Fig. 1, Fig. 2 and Fig. 5, the embodiment of the ceramic head of the present invention is a cube structure, including a first surface 11, a second surface 12 opposite to the first surface 11 and connecting the first surface 11 and the second surface. side of surface 12.

The interior of the embodiment of the ceramic head of the present invention is provided with a sintered ball chamber 1 for forming a sintered ball, and the first surface 11 of the embodiment of the ceramic head of the present invention is provided with a first air hole 2 communicating with the sintered ball chamber 1, The inside of the embodiment of the ceramic head of the present invention is also provided with a first channel 21 for passing protective gas into the burning ball cavity 1, and a second air hole 3 is also provided on the first surface 11. The embodiment of the ceramic head of the present invention A second channel 22 for passing protective gas into the second air hole 3 is also provided inside.

The ceramic head of the present invention adopts two paths of gas to respectively protect the burning ball area and the welding line area, respectively controls the gas consumption, and achieves the best protection effect with the minimum gas consumption.

When utilizing the ceramic head of the present invention to carry out copper wire welding, the shielding gas reaches the burning ball cavity 1 for forming the burning ball through the first channel 21 of the ceramic head——the burning ball position, and an inert reducing atmosphere is formed at the burning ball position to prevent Oxidation of the copper wire can also reduce the oxide layer on the surface of the copper wire to ensure the quality of the ball and prevent the spherical shape from being uneven; at the same time, the shielding gas reaches the front end of the ceramic head through the second channel 22 of the ceramic head to form a circular air flow, and reaches the welding head. wire area to prevent the copper wire from being oxidized during soldering. These two shielding gases work together to ensure the quality of copper wire welding.

In the embodiment of the ceramic head of the present invention, the second surface 12 of the ceramic head corresponding to the first surface 11 is provided with a third air hole 4 communicating with the ball burning cavity 1 .

Embodiment of the ceramic head of the present invention, wherein, the diameter of the second air hole 3 is smaller than the diameter of the ball burning chamber 1, so that when the ceramic head of the present invention is used for copper wire welding, the gas forms a vortex flow in the ball burning chamber 1 . Since the opening of the second air hole 3 is small, it can effectively prevent the gas from flowing out quickly, and realize full utilization of the shielding gas.

In the embodiment of the ceramic head of the present invention, the first air hole 2 and the second air hole 3 are not connected.

In the embodiment of the ceramic head of the present invention, there are multiple second air holes 3 , and the plurality of second air holes 3 surround the first air hole 2 on the first surface 11 . Among the plurality of second air holes 3 , the distances between adjacent second air holes 3 are equal, thereby ensuring uniform flow out. The plurality of second air holes 3 communicate with the cavity 6 inside the ceramic head, and the cavity 6 communicates with the second channel 22 .

The embodiment of the ceramic head of the present invention is a flat box shape, the area of the first surface 11 and the second surface 12 is relatively large, and the area of the side is relatively small.

The side surface includes a third surface 13 , a fourth surface 16 , a fifth surface 14 and a sixth surface 17 connected in sequence, wherein the third surface 13 corresponds to the fifth surface 14 . The ceramic head of the present invention includes a burning ball end 10 for forming a burning ball and a connecting end 40 for passing through a protective gas, the fifth surface 14 is located on the burning ball end 10, the third surface 13 is located on the connecting end 40, and the third surface 13 is located on the connecting end 40. The five-surface 14 is an arc surface, and the width of the ball-burning end 10 is greater than that of the connecting end 40, thereby ensuring the formation of the vortex airflow and better realizing the full utilization of the shielding gas.

In the embodiment of the ceramic head of the present invention, the ball burning chamber 1 and the cavity 6 are both inside the ball burning end 10, wherein the cavity 6 is located between the ball burning chamber 1 and the fifth surface 14, correspondingly, a plurality of The connecting line of the central axis of the second air hole 3 forms a circular arc, the above-mentioned circular arc is located between the first air hole 2 and the fifth surface 14, and the above-mentioned circular arc semi-encloses the first air hole 2, thereby further ensuring the vortex air flow Formation, enhance the protective effect, and better realize the full utilization of the protective gas.

In an embodiment of the ceramic head of the present invention, the second channel 22 is parallel to the first channel 21 .

In the embodiment of the ceramic head of the present invention, a firing pin 30 is arranged inside the first channel 21 , and the firing pin 30 extends toward the ball burning cavity 1 .

In the embodiment of the ceramic head of the present invention, the extension line of the firing pin 30 intersects the central axis of the ball burning chamber 1 and the central axis of the first air hole 2, and the extension line of the firing pin 30 and the center axis of the ball burning chamber 1 Both the central axis and the central axis of the first air hole 2 are vertical.

As shown in FIG. 3 and FIG. 4 , in the embodiment of the ceramic head of the present invention, a positioning member 7 is provided between the firing pin 30 and the inner wall of the first passage 21, in order to keep the firing pin 30 in the first passage 21 central location. The positioning piece 7 is circular, and the center of the positioning piece 7 is provided with a central hole 71 for the firing pin 30 to pass through. The central hole of the member 7, thereby keeping the firing pin 30 in the central hole 71 at the center of the first channel 21.

The positioning part 7 is designed in the embodiment of the ceramic head of the present invention to realize the positioning of the firing pin 30 under the premise of not affecting the size of the airflow. This design can ensure the protection effect and the consistency of the burning ball.

The embodiment of the ceramic head of the present invention, wherein, the third surface 13 connecting the first surface 11 and the second surface 12 of the ceramic head is provided with a groove 9 for connecting the air pipe, and the first end of the second channel 22 is connected to the hollow The cavity 6 communicates, and the second end of the second channel 22 communicates with the round hole at the bottom 91 of the groove 9 .

The ceramic head of the present invention can effectively prevent the copper wire from being oxidized in the area of the burning ball and the welding wire, improve the bonding strength, and further improve the quality of the welding wire.

The ball-burning end 10 of the ceramic head of the present invention is provided with two gas flow passages, one of which protects the ball-burning area, and the other one protects the welding area through the circularly arranged downward blowing holes.

The ceramic head and the lead wire bonding machine of the present invention use two paths of gas to protect the burning ball area and the wire bonding area respectively, respectively control the gas consumption, and achieve the best protection effect with the minimum gas consumption.

The above is only a preferred embodiment of the present invention, it should be pointed out that, for those of ordinary skill in the art, without departing from the principle of the present invention, some improvements and modifications can also be made, and these improvements and modifications can also be made. It should be regarded as the protection scope of the present invention.

Claims (5)

1. a kind of ceramic head, the burning spherical cavity being internally provided with for forming burning ball of described ceramic head, the first of described ceramic head It is provided with surface and burns, with described, the first pore that spherical cavity connects, the inside of described ceramic head is additionally provided with for described burning ball Chamber be passed through protective gas first passage it is characterised in that

Second pore is additionally provided with described first surface, the inside of described ceramic head is additionally provided with for described second pore It is passed through the second channel of protective gas, the second surface corresponding with first surface of described ceramic head is provided with and described burning 3rd pore of spherical cavity connection；

Described second pore is multiple, and multiple second pores are in described first surface around described first pore, multiple second gas Kong Junyu is located at the cavity connection of the inside of described ceramic head, and described cavity is connected with described second channel；

Wherein, it is provided with igniting needle in described first passage, described igniting needle stretches to described burning spherical cavity；

It is provided with keeper, described keeper is circular, described fixed between the inwall of described igniting needle and described first passage The centre bore being provided centrally with passing through for described igniting needle of position part, the periphery wall of described keeper and described first passage Inwall is fitted, and is located at the center of described first passage with the described igniting needle keeping described center in the hole.

2. ceramic head according to claim 1 is not it is characterised in that described first pore is connected with described second pore.

3. ceramic head according to claim 1 is it is characterised in that described second channel is parallel with described first passage.

4. ceramic head according to claim 1 is it is characterised in that the connection first surface of described ceramic head, second surface The 3rd surface on be provided with groove for connecting trachea, the first end of described second channel is connected with described cavity, described The first end of second channel is connected with the circular hole of the bottom land of described groove.

5. a kind of lead bonding equipment, including ceramic head, described ceramic head is the ceramic head as described in any one of claim 1-4.