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CN104409408A - Manufacture method of rigid substrate and flexible display - Google Patents

Manufacture method of rigid substrate and flexible display Download PDF

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Publication number
CN104409408A
CN104409408A CN201410720087.XA CN201410720087A CN104409408A CN 104409408 A CN104409408 A CN 104409408A CN 201410720087 A CN201410720087 A CN 201410720087A CN 104409408 A CN104409408 A CN 104409408A
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CN
China
Prior art keywords
groove
rigid substrates
flexible display
flexible
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201410720087.XA
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Chinese (zh)
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CN104409408B (en
Inventor
胡明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chengdu Vistar Optoelectronics Co Ltd
Original Assignee
Kunshan Guoxian Photoelectric Co Ltd
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Publication date
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Priority to CN201410720087.XA priority Critical patent/CN104409408B/en
Publication of CN104409408A publication Critical patent/CN104409408A/en
Application granted granted Critical
Publication of CN104409408B publication Critical patent/CN104409408B/en
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00Organic light-emitting devices
    • H10K50/80Constructional details
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00Manufacture or treatment specially adapted for the organic devices covered by this subclass

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)

Abstract

The invention discloses a manufacture method of a rigid substrate and a flexible display. A groove is formed in a region where the flexible display is formed on the rigid substrate, and the total area of the groove in the surface where the flexible display is formed on the rigid substrate is 10-50 percent of the surface area of the rigid substrate. According to the method, the groove is formed in the rigid substrate, by loading an adhesion agent in the groove, the adhesion between the groove position and a flexible substrate in the flexible display is realized, the adhesion area between the groove and the flexible substrate can be set according to the adhesion force, the more is the adhesion area, the higher the adhesion force between the groove and the flexible substrate is, as the area of the groove coated with the adhesion agent is controllable, the adhesion force between the groove and the flexible substrate is controllable, the use amount of the adhesion agent can be reduced and can be minimized, then the purpose that the groove and the flexible substrate are adhered to each other can be achieved, and as the area of the used adhesion agent is relatively small and the glass substrate adopts a structure easy to peel, the peeling technology can be simply accomplished.

Description

The manufacture method of a kind of rigid substrates and flexible display
Technical field
The present invention relates to Display Technique field, be specifically related to the manufacture method of a kind of rigid substrate substrate and flexible display.
Background technology
Flexible display is the display based on flexible organic material, can be curled, fold, even as a part for wearable computer, have application widely.Traditional flexible display mainly adopts thickness to be less than the flexible base, board of 100 microns, such as: ultra-thin glass, stainless steel film and plastic basis material etc.Because flexible base, board exists frangible, an easy problem such as fold and distortion, in actual production process, the general and rigid substrates of flexible base, board is attached to and has come together that thin film transistor (TFT) array makes, OLED makes and the operation such as encapsulation, finally, by suitable stripping means, rigid substrates is peeled off again, to complete the making of flexible display.Therefore, how flexible parent metal and rigid substrates suitably adhered to and peel off and become one of key technology that flexible display makes; At present, in flexible display manufacturing process, flexible parent metal needs are temporarily bonding prevents flexible base, board warpage song or distortion in fabrication on the rigid substrate, but can bring difficulty to later stage stripping.
The method of common stripping rigid substrates comprises employing laser radiation method and water-bath wet method.Laser radiation method utilizes laser emission to heat the amorphous silicon membrane (sacrifice layer) between flexible base, board and rigid substrates, makes it become polysilicon, thus realize peeling off; Water-bath wet method utilizes the mode of water-bath that the germanium sull between flexible base, board and rigid substrates is reacted, thus realize peeling off.Although these two kinds of stripping meanss improve the peeling effect of flexible base, board and rigid substrates to a certain extent by continuous improving technique condition, but its stripping technology is complicated, amorphous silicon membrane and germanium sull are peeled off problem that is clean, that damage with flexible base, board and are still existed, and the process conditions also more difficult control of peeling off, be unfavorable for making high-quality flexible display, and in laser irradiation method in amorphous silicon sacrifice layer cost of manufacture and water-bath wet method germanium sull bond layer use amount a lot, all can bring Flexible Displays
The cost of manufacture of device increases.
Summary of the invention
For this reason, to be solved by this invention is simplify follow-up stripping technology, reduces the use amount of binding agent, reduces cost of manufacture, the invention provides and a kind ofly there is the use that can decrease bonding agent, the rigid substrate substrate of summary later stage stripping technology and the manufacture method of flexible display.
On the one hand, the invention provides a kind of rigid substrates, on described rigid substrates shaping described flexible display region in be provided with groove, on the surface of the shaping described Flexible Displays of described rigid substrates, the gross area of described groove is the 10-50% of described rigid substrates surface area.
Described groove comprises the first closed groove of head and the tail, and it is positioned at the marginal position of described flexible display forming area.
Be provided with multiple linear second groove in the region that the first groove that described head and the tail close surrounds, it is positioned at the medium position of described flexible display installation region.
Described linear second groove is latticed.
Also be provided with the 3rd groove structure that at least one head and the tail is closed in the region that described first groove surrounds, it is positioned at the medium position of described flexible display installation region, and multiple described 3rd groove is arranged in concentric with described first groove.
Described rigid substrates is formed with the sunk area for shaping described flexible display, described groove is arranged in described sunk area.
The recess heights of sunk area is 5 μm ~ 200 μm; The border width of the relatively described sunk area projection of described rigid substrates is 5mm ~ 50mm, and the width of described groove is 10mm ~ 100mm.
On the other hand, present invention also offers a kind of manufacture method of flexible display, said method comprising the steps of:
Step one: make the rigid substrates with preceding claim;
Step 2: add binding agent in groove on the rigid substrate, and make binding agent fill up described groove;
Step 3: make flexible base, board on the rigid substrate, makes itself and rigid substrates bonding, and make flexible display on obtained flexible base, board;
Step 4: remove the binding agent between flexible base, board and rigid substrates, makes obtained flexible display and rigid substrates be separated.
Described in described step 3, flexible base, board is produced in the depression of described rigid substrates.
Removal in described step 4 method of binding agent between flexible base, board and rigid substrates is: removed the binding agent bonding with flexible base, board in groove by solubilize or water-bath wet method
The present invention has following beneficial effect relative to prior art:
A the present invention is provided with groove on the rigid substrate, by at the in-built binding agent of groove, the flexible base, board realized in groove location place and flexible display bonds, the bond area of groove and flexible base, board can be set according to the size of cohesive force, the larger cohesive force therebetween of bond area is stronger, because the groove area being coated with binding agent is controlled, make the cohesive force of existence between the two also controlled, the use of binding agent can be reduced, bonding agent use amount is made to reach minimum, the object that the two is bonded together can be realized, like this can the glass technology in summary later stage, successful, bonding agent is removed by solubilize or water-bath wet method, peel off glass substrate, make flexible display.Owing to using the structure being easy to peel off of the relatively little and glass substrate of the area of bonding agent, stripping technology simply completes, and can not cause the damage of the clean and flexible parent metal of stripping.
B. the present invention is also provided with sunk area in the internal plane of rigid substrates, the size of sunk area is corresponding with the size of the flexible base, board of institute lay, the first groove and the second groove is provided with in sunk area, when laying flexible base, board, flexible base, board is arranged in formed sunk area, contribute to the preparation of flexible display like this, prevent flexible base, board edge from being pressed from both sides bad, at utmost utilize flexible base, board.
Accompanying drawing explanation
In order to make content of the present invention be more likely to be clearly understood, below according to a particular embodiment of the invention and by reference to the accompanying drawings, the present invention is further detailed explanation, wherein
Fig. 1 is the rigid substrates structural representation of the first structure provided by the invention;
Fig. 2 is the rigid substrates structural representation of the second structure provided by the invention;
Fig. 3 is the rigid substrates structural representation of the third structure provided by the invention;
Fig. 4 is the rigid substrates structural representation of the 4th kind of structure provided by the invention;
Fig. 5 is structural representation when binding agent is housed in Fig. 3;
Fig. 6 is the rigid substrates vertical view of Fig. 1;
Fig. 7 is the rigid substrates vertical view of Fig. 3;
Fig. 8 is the rigid substrates vertical view of Fig. 4;
Fig. 9 is the rigid substrates structural representation with the 5th kind of structure provided by the present invention;
Figure 10 is the rigid substrates vertical view scribbling flexible base, board;
Figure 11 is the cross section structure schematic diagram of Figure 10;
Figure 12 is the structural representation after flexible display provided by the present invention and rigid substrates bond.
In figure: 1-rigid substrates; 2-groove, 21-first groove, 22-second groove, 23-the 3rd groove; 3-sunk area; 4-binding agent; 5-flexible base, board; 6-TFT array pattern; 7-organic luminescent device layer; 8-encapsulated layer.
Embodiment
For making the object, technical solutions and advantages of the present invention clearly, below in conjunction with accompanying drawing, embodiment of the present invention is described further in detail.
Embodiment 1
As shown in Figure 1, the invention provides a kind of rigid substrates, for the making of flexible display, the installed position being positioned at flexible display on the rigid substrate 1 forms groove 2, the gross area of its further groove 2 is the 10-50% of rigid substrates 1 area, here the area of rigid substrates 1 shared by groove 2 can be made little as much as possible, as long as meet bonding fixing flexible display.
Embodiment 2
In order to protect flexible display; the present invention is formed with the sunk area 3 for shaping flexible display in the plane of rigid substrates 1; the part of rigid substrates 1 opposing recesses region 3 projection is used for the region of the clip gripping of transmission mechanism in subsequent manufacturing processes; prevent flexible base, board 5 edge from being pressed from both sides bad, at utmost utilize flexible parent metal.In sunk area 3, form the first groove 21, it is closed in head and the tail, is arranged in sunk area 3, and is placed in the marginal position in flexible display installation region.As shown in Fig. 2 and Fig. 6 structure.
Make a kind of rigid support base material of glass substrate as flexible display with multiple groove 2, rigid substrates 1 wherein can be obtained by etching glass or other substrate, wherein d1 equals the thickness of flexible base, board 5 is 5 ~ 200 μm, d2 is the width of groove 2, remain 10mm ~ 100mm, under guaranteeing that the bonding agent smeared in groove 2 can ensure that flexible base, board 5 adheres to the prerequisite do not departed from, make follow-up stripping process simple as much as possible.D3 is the border width of rigid substrates 1; remain 5mm ~ 50mm; provide support beyond power can also protect flexible display for giving the making of flexible display; as the region of the clip gripping of transmission mechanism in some manufacture crafts of follow-up TFT; prevent flexible base, board base material edge from being pressed from both sides bad, at utmost utilize flexible base, board base material.
Embodiment 3
In order to strengthen the cementitiousness of rigid substrates to flexible display, in sunk area 3, be also provided with the groove 2 of another kind of type, i.e. linear second groove 22, linear second groove 22 wherein can be multiple linearly distribution, and it is positioned at the medium position of described flexible display installation region.As shown in Figure 3 and Figure 7.
Wherein the groove-width dimension of the second groove structure 22 is 10mm ~ 100mm.
Embodiment 4
On the basis of embodiment 3, second groove 22 of the present invention in sunk area 3 is latticed, specifically as shown in Fig. 9 structure.
Embodiment 5
In the region that the first groove 21 surrounds, be also provided with the 3rd groove 23 of at least one closed connection in head and the tail, it is positioned at the medium position of flexible display installation region, as shown in Fig. 4 and Fig. 8 structure; In fig. 8, the first groove 22 adopts rectangular configuration, and the region being positioned at rectangular configuration is also provided with the 3rd groove 23, and these two grooves are preferably in arranging with one heart.
The first groove 21, second groove 22 in the various embodiments described above can be identical with the sectional dimension of the 3rd groove 23, also can adopt different sectional dimensions respectively.
The cross section structure of certain first groove 21, second groove 22 and the 3rd groove 23 is not limited to the structure described in above-described embodiment, also can be other version, the combining structure of above-mentioned three kinds of grooves 2 can certainly be adopted, the space of an accommodating binding agent is mainly provided, as shown in Fig. 5 to Fig. 9 structure, be such as other grid or parallel channel shape, final purpose is under the bonding agent guaranteeing to smear in groove can ensure that flexible base, board can adhere to the prerequisite do not departed from, also make bonding agent use amount reach minimum, make follow-up stripping process simple as much as possible.
In addition, present invention also offers a kind of preparation method of flexible display, preparation method wherein comprises the following steps:
Step one: make the rigid substrates 1 had described in above-described embodiment;
Step 2: add binding agent 4 in groove 2 on the rigid substrate 1, and make binding agent 4 fill up described groove;
Step 3: make flexible base, board 5 on the rigid substrate 1, makes itself and rigid substrates 1 bonding, and obtained flexible base, board 5 makes flexible display;
Step 4: remove the binding agent 4 between flexible base, board 5 and rigid substrates 1, makes obtained flexible display and rigid substrates 1 be separated.
The method wherein removing the binding agent 4 between flexible base, board 5 and rigid substrates 1 in step 4 is: removed the binding agent bonding with flexible base, board in groove by solubilize or water-bath wet method.
As shown in Figure 10 to Figure 11, after filling bonding agent 4 in groove 2 on aforementioned obtained rigid substrates, here rigid substrates 1 can be glass substrate or other rigid substrates adopted, make flexible base, board 5 (polyimide film (PI film) or glass film or stainless steel film) on the glass substrate
It is made to be attached on rigid substrate.
As shown in figure 12, after flexible base, board 5 is formed tft array pattern 6 and organic luminescent device layer 7 (at least comprising negative electrode, electric transmission, hole transport and organic luminous layer), encapsulating organic light emitting device layer forms encapsulated layer 8.Remove bonding agent by solubilize or water-bath wet method, peel off glass substrate, make flexible display.Owing to using the structure being easy to peel off of the relatively little and glass substrate of the area of bonding agent, stripping technology simply completes, and can not cause the damage of the clean and flexible parent metal of stripping.
Obviously, above-described embodiment is only for clearly example being described, and the restriction not to execution mode.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all execution modes.And thus the apparent change of extending out or variation be still among protection scope of the present invention.

Claims (10)

1. a rigid substrates, for the making of flexible display, it is characterized in that, on described rigid substrates shaping described flexible display region in be provided with groove, on the surface of the shaping described Flexible Displays of described rigid substrates, the gross area of described groove is the 10-50% of described rigid substrates surface area.
2. rigid substrates according to claim 1, is characterized in that, described groove comprises the first closed groove of head and the tail, and it is positioned at the marginal position of described flexible display forming area.
3. rigid substrates according to claim 2, is characterized in that, be provided with multiple linear second groove in the region that the first groove that described head and the tail close surrounds, it is positioned at the medium position of described flexible display installation region.
4. rigid substrates according to claim 3, is characterized in that, described linear second groove is latticed.
5. rigid substrates according to claim 2, it is characterized in that, the 3rd groove structure that at least one head and the tail is closed is also provided with in the region that described first groove surrounds, it is positioned at the medium position of described flexible display installation region, and multiple described 3rd groove is arranged in concentric with described first groove.
6., according to the arbitrary described rigid substrates of claim 1-5, it is characterized in that, described rigid substrates is formed with the sunk area for shaping described flexible display, described groove is arranged in described sunk area.
7. rigid substrates according to claim 6, is characterized in that, the recess heights of sunk area is 5 μm-200 μm; The border width of the relatively described sunk area projection of described rigid substrates is 5mm-50mm, and the width of described groove is 10mm-100mm.
8. a manufacture method for flexible display, is characterized in that, said method comprising the steps of:
Step one: make and there is the arbitrary described rigid substrates of claim 1-7;
Step 2: add binding agent in groove on the rigid substrate, and make binding agent fill up described groove;
Step 3: make flexible base, board on the rigid substrate, makes itself and rigid substrates bonding, and make flexible display on obtained flexible base, board;
Step 4: remove the binding agent between flexible base, board and rigid substrates, makes obtained flexible display and rigid substrates be separated.
9. the manufacture method of flexible display according to claim 8, is characterized in that, described in described step 3, flexible base, board is produced in the depression of described rigid substrates.
10. the manufacture method of flexible display according to claim 9, it is characterized in that, the method for binding agent between flexible base, board and rigid substrates of the removal in described step 4 is: removed the binding agent bonding with flexible base, board in groove by solubilize or water-bath wet method.
CN201410720087.XA 2014-12-02 2014-12-02 A kind of preparation method of rigid substrates and flexible display Active CN104409408B (en)

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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104943320A (en) * 2015-05-18 2015-09-30 京东方科技集团股份有限公司 Base plate laminating method
CN105137634A (en) * 2015-08-05 2015-12-09 深圳市华星光电技术有限公司 Flexible display panel manufacturing method and substrate assembly for making display panel
CN106057864A (en) * 2016-08-23 2016-10-26 武汉华星光电技术有限公司 Flexible display panel and preparation method thereof
CN106129269A (en) * 2016-06-24 2016-11-16 京东方科技集团股份有限公司 A kind of preparation method of flexible display substrates
CN106229421A (en) * 2016-08-24 2016-12-14 昆山工研院新型平板显示技术中心有限公司 Flexible base board manufacture method and flexible base board
CN106328683A (en) * 2016-10-11 2017-01-11 武汉华星光电技术有限公司 Flexible OLED display and the preparing method thereof
WO2017124700A1 (en) * 2016-01-21 2017-07-27 Boe Technology Group Co., Ltd. Carrier substrate assembly, and fabrication method of flexible display substrate
WO2017161919A1 (en) * 2016-03-23 2017-09-28 大连东方科脉电子股份有限公司 Bendable display substrate film, preparation method therefor, and display device
CN107359282A (en) * 2017-07-12 2017-11-17 武汉华星光电半导体显示技术有限公司 display panel and preparation method thereof, display
CN107742618A (en) * 2017-10-24 2018-02-27 京东方科技集团股份有限公司 Preparation method, flexible panel and the display device of flexible panel
CN107808927A (en) * 2017-10-31 2018-03-16 云谷(固安)科技有限公司 The separation method and carrier substrate of display module and carrier substrate
CN108962915A (en) * 2017-11-30 2018-12-07 广东聚华印刷显示技术有限公司 composite substrate and preparation method thereof
CN109273491A (en) * 2018-08-29 2019-01-25 Oppo(重庆)智能科技有限公司 Glass substrate, display panel and preparation method, display screen assembly and electronic device
CN110782800A (en) * 2019-11-21 2020-02-11 昆山国显光电有限公司 Display panel and display device
CN110867518A (en) * 2019-10-17 2020-03-06 云谷(固安)科技有限公司 A kind of preparation method of flexible display panel
CN111384101A (en) * 2018-12-28 2020-07-07 乐金显示有限公司 Flexible display device and electronic device including flexible display device
CN112768116A (en) * 2020-12-09 2021-05-07 华南师范大学 Preparation method of flexible transparent conductive electrode with low surface roughness
CN115482725A (en) * 2021-05-31 2022-12-16 乐金显示有限公司 Foldable laminated and foldable display device and manufacturing method thereof

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CN102651331A (en) * 2011-06-14 2012-08-29 京东方科技集团股份有限公司 Substrate tray and method for manufacturing flexible electronic device
CN103682176A (en) * 2013-12-06 2014-03-26 京东方科技集团股份有限公司 Manufacturing method for rigid substrate and flexible display device and rigid substrate

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US20090029527A1 (en) * 2002-04-24 2009-01-29 E Ink Corporation Processes for forming backplanes for electro-optic displays
CN102651331A (en) * 2011-06-14 2012-08-29 京东方科技集团股份有限公司 Substrate tray and method for manufacturing flexible electronic device
CN103682176A (en) * 2013-12-06 2014-03-26 京东方科技集团股份有限公司 Manufacturing method for rigid substrate and flexible display device and rigid substrate

Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104943320A (en) * 2015-05-18 2015-09-30 京东方科技集团股份有限公司 Base plate laminating method
CN105137634A (en) * 2015-08-05 2015-12-09 深圳市华星光电技术有限公司 Flexible display panel manufacturing method and substrate assembly for making display panel
WO2017124700A1 (en) * 2016-01-21 2017-07-27 Boe Technology Group Co., Ltd. Carrier substrate assembly, and fabrication method of flexible display substrate
WO2017161919A1 (en) * 2016-03-23 2017-09-28 大连东方科脉电子股份有限公司 Bendable display substrate film, preparation method therefor, and display device
CN106129269A (en) * 2016-06-24 2016-11-16 京东方科技集团股份有限公司 A kind of preparation method of flexible display substrates
CN106129269B (en) * 2016-06-24 2019-01-29 京东方科技集团股份有限公司 A kind of preparation method of flexible display substrates
CN106057864A (en) * 2016-08-23 2016-10-26 武汉华星光电技术有限公司 Flexible display panel and preparation method thereof
CN106057864B (en) * 2016-08-23 2019-11-05 武汉华星光电技术有限公司 A kind of flexible display panels and preparation method thereof
CN106229421A (en) * 2016-08-24 2016-12-14 昆山工研院新型平板显示技术中心有限公司 Flexible base board manufacture method and flexible base board
CN106229421B (en) * 2016-08-24 2018-08-14 昆山工研院新型平板显示技术中心有限公司 Flexible base board production method and flexible base board
CN106328683A (en) * 2016-10-11 2017-01-11 武汉华星光电技术有限公司 Flexible OLED display and the preparing method thereof
CN106328683B (en) * 2016-10-11 2019-04-30 武汉华星光电技术有限公司 Flexible OLED display and method of making the same
CN107359282A (en) * 2017-07-12 2017-11-17 武汉华星光电半导体显示技术有限公司 display panel and preparation method thereof, display
WO2019010749A1 (en) * 2017-07-12 2019-01-17 武汉华星光电半导体显示技术有限公司 Display panel, manufacturing method therefor, and display
CN107742618A (en) * 2017-10-24 2018-02-27 京东方科技集团股份有限公司 Preparation method, flexible panel and the display device of flexible panel
CN107742618B (en) * 2017-10-24 2020-07-03 京东方科技集团股份有限公司 Manufacturing method of flexible panel, flexible panel and display device
CN107808927A (en) * 2017-10-31 2018-03-16 云谷(固安)科技有限公司 The separation method and carrier substrate of display module and carrier substrate
CN107808927B (en) * 2017-10-31 2020-06-09 云谷(固安)科技有限公司 Separation method of display module and carrier substrate and carrier substrate
CN108962915A (en) * 2017-11-30 2018-12-07 广东聚华印刷显示技术有限公司 composite substrate and preparation method thereof
CN109273491A (en) * 2018-08-29 2019-01-25 Oppo(重庆)智能科技有限公司 Glass substrate, display panel and preparation method, display screen assembly and electronic device
CN111384101A (en) * 2018-12-28 2020-07-07 乐金显示有限公司 Flexible display device and electronic device including flexible display device
CN111384101B (en) * 2018-12-28 2023-12-19 乐金显示有限公司 Flexible display device and electronic apparatus including the same
CN110867518A (en) * 2019-10-17 2020-03-06 云谷(固安)科技有限公司 A kind of preparation method of flexible display panel
CN110867518B (en) * 2019-10-17 2022-08-16 云谷(固安)科技有限公司 Preparation method of flexible display panel
CN110782800A (en) * 2019-11-21 2020-02-11 昆山国显光电有限公司 Display panel and display device
CN112768116A (en) * 2020-12-09 2021-05-07 华南师范大学 Preparation method of flexible transparent conductive electrode with low surface roughness
CN115482725A (en) * 2021-05-31 2022-12-16 乐金显示有限公司 Foldable laminated and foldable display device and manufacturing method thereof

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