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CN104135811A - Multi-probe support capable of moving at three freedom degrees - Google Patents

Multi-probe support capable of moving at three freedom degrees Download PDF

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Publication number
CN104135811A
CN104135811A CN201410397513.0A CN201410397513A CN104135811A CN 104135811 A CN104135811 A CN 104135811A CN 201410397513 A CN201410397513 A CN 201410397513A CN 104135811 A CN104135811 A CN 104135811A
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plate
aluminum alloy
aluminium alloy
stainless steel
probe
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马成毓
刘辉
孙国顺
陈蓬勃
胡鹏
于达仁
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Harbin Institute of Technology Shenzhen
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Harbin Institute of Technology Shenzhen
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Abstract

一种可在三自由度运动的多探针支架,它涉及一种多探针支架。本发明为了解决现有的等离子体推力器实验需要在真空罐中进行,更换探针需要关闭并重新启动真空系统,消耗时间长,而且不同次实验容易产生实验误差的问题。本发明的步进电机安装在升降台上,减速器安装在升降台上并与步进电机连接,铝合金端板、铝合金壁板和不锈钢传动板依次竖直安装在铝合金滑动板上,传动丝杆和多根定位丝杆依次水平穿设在铝合金端板、铝合金壁板和不锈钢传动板上,引线管依次竖直穿过铝合金顶板、铝合金滑动板和铝合金长板,第一直流减速电机安装在铝合金顶板上,第一直流减速电机与引线管之间通过伞齿轮副传动连接。本发明用于判断等离子体推力器实验中。

A multi-probe support capable of moving in three degrees of freedom relates to a multi-probe support. The present invention solves the problem that the existing plasma thruster experiment needs to be carried out in a vacuum tank, and the vacuum system needs to be shut down and restarted to replace the probe, which consumes a long time and is prone to experimental errors in different experiments. The stepping motor of the present invention is installed on the lifting platform, the reducer is installed on the lifting platform and connected with the stepping motor, the aluminum alloy end plate, the aluminum alloy wall plate and the stainless steel transmission plate are installed vertically on the aluminum alloy sliding plate in turn, The transmission screw and multiple positioning screws are installed horizontally on the aluminum alloy end plate, aluminum alloy wall plate and stainless steel transmission plate in turn, and the lead pipe is vertically passed through the aluminum alloy top plate, aluminum alloy sliding plate and aluminum alloy long plate in turn, The first DC decelerating motor is installed on the aluminum alloy top plate, and the first DC decelerating motor is connected to the lead pipe through a bevel gear pair transmission. The invention is used in judging plasma thruster experiments.

Description

一种可在三自由度运动的多探针支架A multi-probe support that can move in three degrees of freedom

技术领域technical field

本发明涉及一种等离子体推力器的诊断探针支架,具体涉及一种可在三自由度运动的多探针支架。The invention relates to a diagnostic probe support of a plasma thruster, in particular to a multi-probe support capable of moving in three degrees of freedom.

背景技术Background technique

探针诊断是判断等离子体推力器实验测量中重要的一种诊断方法,朗缪尔探针是最常用的低温等离子体诊断方法,借助于探针的电流-电压关系,可以确定等离子体的基本参数:电子密度、离子密度、电子温度、等离子体空间电位、悬浮电位和电子能量分布函数等一些列参数,通过这些参数评估推力器的性能参数。Probe diagnosis is an important diagnostic method in judging plasma thruster experimental measurements. Langmuir probe is the most commonly used low-temperature plasma diagnosis method. With the help of the current-voltage relationship of the probe, the basic plasma Parameters: A series of parameters such as electron density, ion density, electron temperature, plasma space potential, levitation potential and electron energy distribution function, etc., through which the performance parameters of the thruster are evaluated.

探针在霍尔推力器的实验测量中主要测量霍尔推力器羽流区的等离子体参数,由于霍尔推力器和多级会切磁场等离子体推力器喷射的羽流是沿中心轴线中心对称的近圆锥形等离子体,因此在测量时只需要测量羽流中沿圆锥母线的一个截面的等离子体参数。In the experimental measurement of the Hall thruster, the probe mainly measures the plasma parameters in the plume area of the Hall thruster, because the plumes ejected by the Hall thruster and the multi-level tangent magnetic field plasma thruster are center-symmetrical along the central axis Therefore, it is only necessary to measure the plasma parameters of a section along the conical generatrix in the plume during the measurement.

在使用探针测量时,需要测量不同截面的等离子体参数,从而得出等离子体参数在空间上的分布和变化规律,有时需要使用不同种类的探针测量不同的等离子体参数,如单探针、双探针、发射探针、多栅探针、法拉第探针等,但实验在真空罐中进行,更换探针需要关闭并重新启动真空系统,消耗时间长,而且不同次实验容易产生实验误差。When using probe measurement, it is necessary to measure the plasma parameters of different cross-sections, so as to obtain the distribution and variation of the plasma parameters in space, and sometimes it is necessary to use different types of probes to measure different plasma parameters, such as a single probe , double probe, emission probe, multi-gate probe, Faraday probe, etc., but the experiment is carried out in a vacuum tank, and the replacement of the probe requires shutting down and restarting the vacuum system, which takes a long time, and different experiments are prone to experimental errors .

发明内容Contents of the invention

本发明的目的是为了解决现有的等离子体推力器实验需要在真空罐中进行,更换探针需要关闭并重新启动真空系统,消耗时间长,而且不同次实验容易产生实验误差的问题。进而提供一种可在三自由度运动的多探针支架。The purpose of the present invention is to solve the problem that the existing plasma thruster experiment needs to be carried out in a vacuum tank, and the replacement of the probe needs to close and restart the vacuum system, which consumes a long time and is prone to experimental errors in different experiments. Furthermore, a multi-probe support capable of moving in three degrees of freedom is provided.

本发明的技术方案是:一种可在三自由度运动的多探针支架包括升降台、步进电机、减速器、铝合金长板、铝合金滑动板、铝合金端板、铝合金壁板、不锈钢传动板、铝合金顶板、第一直流减速电机、伞齿轮副、引线管、探针夹板、传动丝杆、第二直流减速电机和多根定位丝杆,The technical solution of the present invention is: a multi-probe support that can move in three degrees of freedom, including a lifting platform, a stepping motor, a reducer, an aluminum alloy long plate, an aluminum alloy sliding plate, an aluminum alloy end plate, and an aluminum alloy wall plate , stainless steel drive plate, aluminum alloy top plate, first DC geared motor, bevel gear pair, lead pipe, probe splint, drive screw, second DC geared motor and multiple positioning screws,

步进电机固定安装在升降台上,升降台通过螺栓固定在真空罐中,减速器安装在升降台上并通过联轴器与步进电机连接,铝合金长板固定在减速器的输出轴上,铝合金滑动板可滑动安装在铝合金长板上,铝合金端板、铝合金壁板和不锈钢传动板依次竖直安装在铝合金滑动板上,直流减速电机安装在远离铝合金端板一侧的铝合金滑动板上,传动丝杆依次水平穿设在铝合金端板、铝合金壁板和不锈钢传动板上并通过联轴器与第二直流减速电机连接,多根定位丝杆依次水平穿设在铝合金端板、铝合金壁板和不锈钢传动板上并位于传动丝杆的四周,铝合金顶板安装在铝合金壁板和不锈钢传动板的上端面上,引线管依次竖直穿过铝合金顶板、铝合金滑动板和铝合金长板,第一直流减速电机安装在铝合金顶板上,第一直流减速电机与引线管之间通过伞齿轮副传动连接,引线管的上端设有探针夹板。The stepper motor is fixedly installed on the lifting platform, and the lifting platform is fixed in the vacuum tank by bolts, the reducer is installed on the lifting platform and connected with the stepping motor through a coupling, and the aluminum alloy long plate is fixed on the output shaft of the reducer , the aluminum alloy sliding plate can be slidably installed on the aluminum alloy long plate, the aluminum alloy end plate, aluminum alloy wall plate and stainless steel transmission plate are installed vertically on the aluminum alloy sliding plate in turn, and the DC geared motor is installed one distance away from the aluminum alloy end plate On the aluminum alloy sliding plate on the side, the transmission screw rods are horizontally installed on the aluminum alloy end plate, aluminum alloy wall plate and stainless steel transmission plate in turn, and connected with the second DC gear motor through a coupling. It is installed on the aluminum alloy end plate, aluminum alloy wall plate and stainless steel transmission plate and is located around the transmission screw rod. The aluminum alloy top plate is installed on the upper end surface of the aluminum alloy wall plate and the stainless steel transmission plate, and the lead tube passes through it vertically in turn. The aluminum alloy top plate, the aluminum alloy sliding plate and the aluminum alloy long plate, the first DC deceleration motor is installed on the aluminum alloy top plate, the first DC deceleration motor and the lead tube are connected through a bevel gear pair transmission, and the upper end of the lead tube is set With probe clamp.

本发明与现有技术相比具有以下效果:Compared with the prior art, the present invention has the following effects:

1.本发明采用铝合金为材料,质量更轻,成本更低。1. The present invention adopts aluminum alloy as material, which is lighter in weight and lower in cost.

2.本发明将电机放在距等离子体羽流较远的位置,能够保护工作电机不受高温的等离子体的腐蚀,也避免了电机的热沉积,增长了电机的工作寿命。2. In the present invention, the motor is placed far away from the plasma plume, which can protect the working motor from corrosion by high-temperature plasma, avoid thermal deposition of the motor, and increase the working life of the motor.

3.本发明采用旋转式的多探针平台,各探针的测点之间的距离较长,能够尽量减小多探针产生的等离子体鞘层对测量结果的干扰作用,测量的结果准确性更高。3. The present invention adopts a rotating multi-probe platform, and the distance between the measuring points of each probe is longer, which can minimize the interference effect of the plasma sheath generated by the multi-probe on the measurement results, and the measurement results are accurate Sex is higher.

4.本发明根据空间上需要测量的点的位置对探针的位置进行调节,通过控制步进电机能够使探针达到不同的角度,通过控制第一转速直流减速电机能够使探针达到不同的半径位置,通过控制第二转速直流减速电机能够更换不同类型的探针,能够方便地改变探针的不同位置和不同的探针类型对空间中一个锥形截面的等离子体参数进行多方面并较为精确的测量,避免了原先更换探针需要关闭并重新开启真空系统所消耗的时间、资源,和不同次实验所产生的实验误差。4. The present invention adjusts the position of the probe according to the position of the point to be measured in space. The probe can reach different angles by controlling the stepping motor, and the probe can reach different angles by controlling the first rotating speed DC deceleration motor. Radius position, different types of probes can be replaced by controlling the second speed of the DC geared motor, and different positions of the probes and different probe types can be easily changed. The plasma parameters of a conical section in space can be compared in many ways Accurate measurement avoids the time and resources consumed by turning off and restarting the vacuum system when changing the probe, and the experimental errors caused by different experiments.

5.本发明的三自由度是这样实现的:通过控制升降台上步进电机的运动,可以实现探针支架沿竖直方向旋转运动,改变探针的扫描角度;通过控制旋转臂上的直流电机的运动,可以实现沿着臂长方向的直线运动,改变探针与等离子体之间的距离;通过控制滑块上的直流电机的运动,可以实现探针平台的旋转运动,改变不同的探针类型。5. The three degrees of freedom of the present invention are achieved in this way: by controlling the motion of the stepper motor on the lifting platform, the probe holder can be rotated in the vertical direction to change the scanning angle of the probe; by controlling the direct current on the rotating arm The movement of the motor can realize the linear movement along the length of the arm and change the distance between the probe and the plasma; by controlling the movement of the DC motor on the slider, the rotation of the probe platform can be realized and the different probes can be changed. needle type.

附图说明Description of drawings

图1为本发明的装配截面示意图。Fig. 1 is a schematic cross-sectional view of the assembly of the present invention.

图2为本发明的装配外形示意图。Fig. 2 is a schematic diagram of the assembled appearance of the present invention.

图3为本发明的外形示意图。Fig. 3 is a schematic diagram of the appearance of the present invention.

具体实施方式Detailed ways

具体实施方式一:结合图1-图3说明本实施方式,本实施方式的一种可在三自由度运动的多探针支架包括升降台1、步进电机2、减速器3、铝合金长板4、铝合金滑动板5、铝合金端板6、铝合金壁板7、不锈钢传动板8、铝合金顶板9、第一直流减速电机10、伞齿轮副11、引线管12、探针夹板13、传动丝杆14、第二直流减速电机16和多根定位丝杆15,Specific Embodiment 1: This embodiment is described with reference to Fig. 1-Fig. Plate 4, aluminum alloy sliding plate 5, aluminum alloy end plate 6, aluminum alloy wall plate 7, stainless steel transmission plate 8, aluminum alloy top plate 9, first DC gear motor 10, bevel gear pair 11, lead tube 12, probe Splint 13, transmission screw mandrel 14, second DC geared motor 16 and multiple positioning screw mandrels 15,

步进电机2固定安装在升降台1上,升降台1通过螺栓固定在真空罐中,减速器3安装在升降台1上并通过联轴器与步进电机2连接,铝合金长板4固定在减速器3的输出轴上,铝合金滑动板5可滑动安装在铝合金长板4上,铝合金端板6、铝合金壁板7和不锈钢传动板8依次竖直安装在铝合金滑动板5上,直流减速电机10安装在远离铝合金端板6一侧的铝合金滑动板5上,传动丝杆14依次水平穿设在铝合金端板6、铝合金壁板7和不锈钢传动板8上并通过联轴器与第二直流减速电机16连接,多根定位丝杆15依次水平穿设在铝合金端板6、铝合金壁板7和不锈钢传动板8上并位于传动丝杆14的四周,铝合金顶板9安装在铝合金壁板7和不锈钢传动板8的上端面上,引线管12依次竖直穿过铝合金顶板9、铝合金滑动板5和铝合金长板4,第一直流减速电机10安装在铝合金顶板9上,第一直流减速电机10与引线管12之间通过伞齿轮副11传动连接,引线管12的上端设有探针夹板13。The stepper motor 2 is fixedly installed on the lifting platform 1, the lifting platform 1 is fixed in the vacuum tank by bolts, the reducer 3 is installed on the lifting platform 1 and connected with the stepping motor 2 through a coupling, and the aluminum alloy long plate 4 is fixed On the output shaft of the reducer 3, the aluminum alloy sliding plate 5 is slidably installed on the aluminum alloy long plate 4, and the aluminum alloy end plate 6, the aluminum alloy wall plate 7 and the stainless steel transmission plate 8 are vertically installed on the aluminum alloy sliding plate in turn 5, the DC deceleration motor 10 is installed on the aluminum alloy sliding plate 5 on the side away from the aluminum alloy end plate 6, and the transmission screw rod 14 is installed horizontally on the aluminum alloy end plate 6, the aluminum alloy wall plate 7 and the stainless steel transmission plate 8 in turn. and connected to the second DC geared motor 16 through a coupling, and a plurality of positioning screw rods 15 are laid horizontally on the aluminum alloy end plate 6, aluminum alloy wall plate 7 and stainless steel transmission plate 8 in turn, and are located at the center of the transmission screw rod 14. All around, the aluminum alloy top plate 9 is installed on the upper end faces of the aluminum alloy wall plate 7 and the stainless steel transmission plate 8, and the lead tube 12 vertically passes through the aluminum alloy top plate 9, the aluminum alloy sliding plate 5 and the aluminum alloy long plate 4 successively, the first The DC deceleration motor 10 is installed on the aluminum alloy top plate 9, the first DC deceleration motor 10 and the lead pipe 12 are connected by a bevel gear pair 11, and the upper end of the lead pipe 12 is provided with a probe splint 13.

本实施方式升降台的多连杆机构,通过螺栓连接控制连杆两个交点之间的距离,从而通过连杆机构控制升降台的高度变化。便于满足探针支架在竖直方向上的调整。The multi-link mechanism of the lifting platform in this embodiment controls the distance between two intersection points of the connecting rods through bolt connection, thereby controlling the height change of the lifting platform through the link mechanism. It is convenient to meet the adjustment of the probe support in the vertical direction.

本实施方式还包括步进电机固定板,步进电机固定板的截面为凹形,分别在两边厚的地方钻出两个通孔,通过螺栓连接与步进电机和升降台上台面夹紧配合。步进电机位于步进电机固定板和升降台上板之间,由步进电机固定板通过螺栓固定在升降台上,通过调节升降台的高度可以让探针达到合适的测量高度。This embodiment also includes a stepping motor fixing plate. The cross section of the stepping motor fixing plate is concave, and two through holes are respectively drilled in the thick places on both sides, and are clamped and matched with the stepping motor and the upper table of the lifting platform through bolt connection. . The stepper motor is located between the stepper motor fixing plate and the upper plate of the lifting platform, and the stepping motor fixing plate is fixed on the lifting platform by bolts. By adjusting the height of the lifting platform, the probe can reach a suitable measurement height.

本实施方式的步进电机驱动器布置在真空罐外的电路中,通过穿过真空罐的导线与真空罐内部的步进电机连接,用于控制步进电机的运动,计算机与步进电机驱动器进行电路连接,通过计算机上的控制程序控制步进电机驱动器的输出信号,从而控制步进电机的运动。步进电机的转轴上连接一个联轴器,该联轴器的另一端连接减速器的输入轴,将步进电机的轴向转动传动为整个探针支架沿着减速器的输出轴的转动。The stepper motor driver of this embodiment is arranged in the circuit outside the vacuum tank, and is connected with the stepper motor inside the vacuum tank through the wire passing through the vacuum tank to control the movement of the stepper motor. The circuit is connected, and the output signal of the stepper motor driver is controlled by the control program on the computer, thereby controlling the movement of the stepper motor. A shaft coupling is connected to the rotating shaft of the stepping motor, and the other end of the coupling is connected to the input shaft of the reducer, which transmits the axial rotation of the stepping motor to the rotation of the whole probe holder along the output shaft of the reducer.

本实施方式的铝合金长板通过螺栓连接固定在减速器的输出轴上,随着减速器的输出轴进行转动,直流减速电机定位板通过螺栓连接固定在铝合金长板的一端,用来固定第一直流减速电机在铝合金长板上的位置,直流减速电机后夹板通过螺栓连接固定在直流减速电机定位板上,方向与直流减速电机定位板垂直,第一直流减速电机被固定在直流减速电机后夹板和直流减速电机前夹板之间。The aluminum alloy long plate of this embodiment is fixed on the output shaft of the reducer through bolt connection, and as the output shaft of the reducer rotates, the positioning plate of the DC geared motor is fixed on one end of the aluminum alloy long plate through bolt connection for fixing The position of the first DC geared motor on the aluminum alloy long plate, the rear splint of the DC geared motor is fixed on the DC geared motor positioning plate through bolt connection, the direction is perpendicular to the DC geared motor positioning plate, and the first DC geared motor is fixed on Between the rear splint of the DC gear motor and the front splint of the DC gear motor.

本实施方式的定位丝杆的数量为多根,优选数量为4个,4个定位丝杆穿过直流减速电机后夹板和直流减速电机前夹板上的四个通孔,通过拧紧定位丝杆前后的防松双螺母固定直流减速电机后夹板、第一直流减速电机和直流减速电机前夹板的位置。The number of positioning screw rods in this embodiment is multiple, and the preferred number is 4. The four positioning screw rods pass through the four through holes on the rear splint of the DC geared motor and the front splint of the DC geared motor. The anti-loosening double nuts fix the positions of the rear splint of the DC gear motor, the first DC gear motor and the front splint of the DC gear motor.

本实施方式的第一直流减速电机的转轴上连接另一个联轴器,该联轴器的另一端连接传动丝杆,传动丝杆跟随第一直流减速电机转动,不锈钢传动板通过中间的螺纹与传动丝杆配合,定位丝杆穿过不锈钢传动板上的四个通孔,可以保证不锈钢传动板不发生转动,因此传动丝杆的转动会转化成不锈钢传动板沿着铝合金长板的前后移动,不锈钢传动板的底端和铝合金长板接触,可以相互滑动。In this embodiment, the shaft of the first DC geared motor is connected to another coupling, and the other end of the coupling is connected to a transmission screw, and the transmission screw follows the rotation of the first DC geared motor, and the stainless steel transmission plate passes through the middle The thread is matched with the transmission screw, and the positioning screw passes through the four through holes on the stainless steel transmission plate, which can ensure that the stainless steel transmission plate does not rotate, so the rotation of the transmission screw will be converted into the movement of the stainless steel transmission plate along the aluminum alloy long plate Moving back and forth, the bottom end of the stainless steel transmission plate is in contact with the aluminum alloy long plate, and can slide each other.

本实施方式的铝合金顶板通过螺栓连接固定在不锈钢传动板上,方向与不锈钢传动板垂直,铝合金顶板随着不锈钢传动板在铝合金长板上前后移动,铝合金顶板上有通孔用于放置不锈钢引线管。The aluminum alloy top plate of this embodiment is fixed on the stainless steel transmission plate through bolt connection, and the direction is perpendicular to the stainless steel transmission plate. The aluminum alloy top plate moves forward and backward on the aluminum alloy long plate along with the stainless steel transmission plate. Place the stainless steel lead tube.

本实施方式的铝合金壁板通过螺栓连接固定在铝合金顶板上,方向与铝合金顶板垂直,与不锈钢传动板平行,跟随不锈钢传动板在铝合金长板前后移动,定位丝杆穿过铝合金壁板上的四个通孔,铝合金壁板的底端和铝合金长板接触,可以相互滑动。The aluminum alloy wall plate of this embodiment is fixed on the aluminum alloy top plate through bolt connection, the direction is perpendicular to the aluminum alloy top plate, parallel to the stainless steel transmission plate, moves forward and backward on the aluminum alloy long plate following the stainless steel transmission plate, and the positioning screw passes through the aluminum alloy The four through holes on the wall plate, the bottom end of the aluminum alloy wall plate is in contact with the aluminum alloy long plate, and can slide mutually.

本实施方式的铝合金滑动板通过螺栓连接固定在铝合金壁板和不锈钢传动板上,铝合金滑动板在铝合金长板上摩擦滑动,用于稳定探针转塔的位置,铝合金滑动板与铝合金长板接触的地方做成圆角,为了避免摩擦力过大导致卡死的现象。The aluminum alloy sliding plate of this embodiment is fixed on the aluminum alloy wall plate and the stainless steel transmission plate through bolt connection, the aluminum alloy sliding plate frictionally slides on the aluminum alloy long plate, and is used to stabilize the position of the probe turret, the aluminum alloy sliding plate The place in contact with the aluminum alloy long plate is rounded to avoid jamming due to excessive friction.

本实施方式的铝合金长板的一端通过螺栓固定直流电机定位板,在长板中的某点通过螺栓与减速器固定,另一端通过螺栓固定铝合金端板定位板。One end of the aluminum alloy long plate in this embodiment is fixed to the DC motor positioning plate by bolts, and a certain point in the long plate is fixed to the reducer by bolts, and the other end is fixed to the aluminum alloy end plate positioning plate by bolts.

本实施方式的铝合金端板定位板通过螺栓连接与铝合金长板固定。The aluminum alloy end plate positioning plate of this embodiment is fixed to the aluminum alloy long plate through bolt connection.

本实施方式的铝合金端板通过螺栓连接与铝合金端板定位板固定,方向与铝合金端板定位板垂直,定位丝杆穿过铝合金端板上的四个通孔,在铝合金端板的前后两端对定位丝杆采用双螺母防松配合。The aluminum alloy end plate of this embodiment is fixed to the positioning plate of the aluminum alloy end plate through bolt connection, and the direction is perpendicular to the positioning plate of the aluminum alloy end plate. The front and rear ends of the plate adopt double nut anti-loosening fit for the positioning screw.

本实施方式的在直流减速电机前夹板前部的定位丝杆上套上不锈钢毛细管,不锈钢毛细管穿过不锈钢传动板和铝合金壁板,到铝合金端板后端面处。In this embodiment, a stainless steel capillary is placed on the positioning screw at the front part of the front splint of the DC gear motor, and the stainless steel capillary passes through the stainless steel transmission plate and the aluminum alloy wall plate to the rear end surface of the aluminum alloy end plate.

本实施方式的另一块直流减速电机定位板通过螺栓连接固定在铝合金顶板上。Another positioning plate of the DC geared motor in this embodiment is fixed on the aluminum alloy top plate through bolt connection.

本实施方式的第二直流减速电机后夹板通过螺栓连接固定在直流减速电机定位板上,方向与直流减速电机定位板垂直。The rear splint of the second DC geared motor in this embodiment is fixed on the positioning plate of the DC geared motor through bolt connection, and the direction is perpendicular to the positioning plate of the DC geared motor.

本实施方式的第二直流减速电机被固定在直流减速电机后夹板和直流减速电机前夹板之间。The second DC geared motor in this embodiment is fixed between the rear splint of the DC geared motor and the front splint of the DC geared motor.

本实施方式的直流减速电机前保护板通过螺栓固定在铝合金顶板上,保护第二直流减速电机不受前方的羽流中等离子体的腐蚀。The front protective plate of the DC geared motor in this embodiment is fixed on the aluminum alloy top plate by bolts, so as to protect the second DC geared motor from being corroded by the plasma in the front plume.

本实施方式的直流减速电机上保护板通过螺栓固定在直流减速电机前保护板上,保护第二直流减速电机不受上方的羽流中等离子体的腐蚀。The upper protective plate of the DC geared motor in this embodiment is fixed on the front protective plate of the DC geared motor by bolts, so as to protect the second DC geared motor from being corroded by the plasma in the upper plume.

本实施方式的直流减速电机侧保护板通过螺栓固定在直流减速电机上保护板上,保护第二直流减速电机不受两侧的羽流中等离子体的腐蚀。The side protective plate of the DC geared motor in this embodiment is fixed on the upper protective plate of the DC geared motor by bolts, so as to protect the second DC geared motor from being corroded by the plasma in the plume on both sides.

本实施方式的不锈钢引线管通过铝合金顶板上的通孔与铝合金引线通道接触配合。The stainless steel lead pipe of this embodiment is in contact with the aluminum alloy lead channel through the through hole on the aluminum alloy top plate.

本实施方式的探针下夹板为中心带凸台的圆环形结构,凸台的内环面与不锈钢引线管的外环面配合,凸台的径向厚度为5mm,凸台的轴向厚度为10mm,在凸台上攻有径向的螺纹孔,通过拧紧螺栓与不锈钢引线管加紧,探针下夹板中心的圆环为一个沉孔,沉孔面与不锈钢引线管的上端面配合,沉孔面的内径与不锈钢引线管的内径相同,沉孔面的外径稍大于不锈钢引线管的外径。The lower splint of the probe in this embodiment is a ring-shaped structure with a boss in the center. The inner ring surface of the boss matches the outer ring surface of the stainless steel lead tube. The radial thickness of the boss is 5mm, and the axial thickness of the boss is 5mm. The diameter is 10mm, and there is a radial threaded hole on the boss, which is tightened with the stainless steel lead tube by tightening the bolt. The inner diameter of the hole surface is the same as the inner diameter of the stainless steel lead pipe, and the outer diameter of the counterbore surface is slightly larger than the outer diameter of the stainless steel lead pipe.

本实施方式的探针下夹板沿周向均匀钻有四个轴向的通孔,与探针上夹板上同样位置的四个轴向的通孔通过螺栓和螺母配合夹紧。The probe lower splint in this embodiment is uniformly drilled with four axial through holes along the circumferential direction, and the four axial through holes at the same positions on the probe upper splint are clamped by bolts and nuts.

本实施方式的探针下夹板沿周向均匀钻有四个径向的半圆孔,与探针上夹板上同样位置的四个径向的半圆孔将夹在两个半圆孔之间的探针夹紧。The lower clamping plate of the probe in this embodiment is evenly drilled with four radial semicircular holes along the circumferential direction, and the four radial semicircular holes at the same position as the upper clamping plate of the probe will sandwich the probe between the two semicircular holes. Clamp.

本实施方式的探针上夹板为圆形结构,中心存在沉头座,沉头座的直径与探针下夹板上沉孔面的外径相同,在该沉头座中方便布置线。The upper splint of the probe in this embodiment has a circular structure, and there is a countersunk seat in the center. The diameter of the countersunk seat is the same as the outer diameter of the countersunk hole surface on the lower probe splint, and it is convenient to arrange wires in the countersunk seat.

本实施方式的开关位于真空罐外,多个开关分别通过穿过真空罐的导线与真空罐中的第一直流减速电机与第二直流减速电机连接,分别控制第一直流减速电机与第二直流减速电机的正向旋转和反向旋转。The switch of this embodiment is located outside the vacuum tank, and a plurality of switches are respectively connected to the first DC geared motor and the second DC geared motor in the vacuum tank through the wires passing through the vacuum tank to control the first DC geared motor and the second DC geared motor respectively. Two DC geared motors for forward rotation and reverse rotation.

本实施方式的电源位于真空罐外,24V电源与开关通过导线连接。The power supply of this embodiment is located outside the vacuum tank, and the 24V power supply is connected to the switch through wires.

具体实施方式二:结合图1-图3说明本实施方式,本实施方式的多探针支架还包括铝合金管17,铝合金管17固定安装在铝合金长板4的下端面上。如此设置,避免多余的线暴露在等离子体羽流中被烧坏。其它组成和连接关系与具体实施方式一相同。Specific Embodiment 2: This embodiment is described with reference to FIGS. 1-3 . The multi-probe bracket of this embodiment further includes an aluminum alloy tube 17 , which is fixedly installed on the lower end surface of the aluminum alloy long plate 4 . This is done so that excess wire is not exposed to the plasma plume and burns out. Other compositions and connections are the same as in the first embodiment.

具体实施方式三:结合图1-图3说明本实施方式,本实施方式的铝合金管17的横截面形状为U型。如此设置,本实施方式的两块铝合金管定位板通过螺栓连接,分别与铝合金长板和直流减速电机定位板、铝合金端板定位板固定在一起,铝合金管定位板固定在铝合金长板的下面,铝合金管定位板中心有通孔用于安装U型截面铝合金管。本实施方式的U形截面铝合金管穿过铝合金管定位板中央的通孔,通过螺栓加紧固定,U形截面铝合金管中心引线,避免多余的线暴露在等离子体羽流中被烧坏。本实施方式的铝合金引线通道由螺栓连接和铝合金壁板固定,其中一个端面与铝合金顶板配合,另一个端面从管侧面的U形缺口进入U形截面铝合金管内部。其它组成和连接关系与具体实施方式一或二相同。Specific Embodiment Three: This embodiment is described with reference to FIGS. 1-3 . The cross-sectional shape of the aluminum alloy tube 17 in this embodiment is U-shaped. In this way, the two aluminum alloy tube positioning plates in this embodiment are connected by bolts, and are respectively fixed together with the aluminum alloy long plate, the DC gear motor positioning plate, and the aluminum alloy end plate positioning plate, and the aluminum alloy tube positioning plate is fixed on the aluminum alloy tube positioning plate. Below the long plate, there is a through hole in the center of the aluminum alloy tube positioning plate for installing the U-shaped section aluminum alloy tube. In this embodiment, the U-shaped cross-section aluminum alloy tube passes through the through hole in the center of the aluminum alloy tube positioning plate, and is tightened and fixed by bolts. The U-shaped cross-section aluminum alloy tube is lead in the center to prevent redundant wires from being exposed to the plasma plume and being burned. . The aluminum alloy lead wire channel of this embodiment is fixed by bolt connection and aluminum alloy wall plate, one end face fits with the aluminum alloy top plate, and the other end face enters the U-shaped cross-section aluminum alloy tube from the U-shaped notch on the side of the tube. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 2.

具体实施方式四:结合图1-图3说明本实施方式,本实施方式的升降台1包括上板1-1、下板1-2和多连杆机构1-3,上板1-1和下板1-2平行设置,上板1-1和下板1-2之间通过多连杆机构1-3连接,下板1-2通过螺栓连接与真空罐固定连接,上板1-1上开设多个通孔。如此设置,便于满足探针支架在竖直方向上的调整。。其它组成和连接关系与具体实施方式一或三相同。Specific Embodiment Four: This embodiment is described in conjunction with Fig. 1-Fig. The lower plate 1-2 is arranged in parallel, the upper plate 1-1 and the lower plate 1-2 are connected by a multi-link mechanism 1-3, the lower plate 1-2 is fixedly connected to the vacuum tank by bolts, and the upper plate 1-1 A plurality of through holes are opened on it. Such setting facilitates the adjustment of the probe support in the vertical direction. . Other compositions and connections are the same as those in Embodiment 1 or 3.

具体实施方式五:结合图1-图3说明本实施方式,本实施方式的伞齿轮副11的齿数比为1:2。如此设置,本实施方式的1:2伞齿轮中较少齿数的锥齿轮通过螺栓夹紧固定在第二直流减速电机的转轴上,该锥齿轮跟随第二直流减速电机的转轴转动,本实施方式的1:2伞齿轮中较多齿数的锥齿轮通过螺栓夹紧固定在不锈钢引线管上,该锥齿轮带动不锈钢引线管由配套的锥齿轮驱动转动,两个锥齿轮的转轴方向相互垂直。其它组成和连接关系与具体实施方式一或四相同。Embodiment 5: This embodiment is described with reference to FIGS. 1-3 . The gear ratio of the bevel gear pair 11 in this embodiment is 1:2. In this way, the bevel gear with a small number of teeth in the 1:2 bevel gear of this embodiment is clamped and fixed on the shaft of the second DC geared motor by bolts, and the bevel gear follows the rotation of the shaft of the second DC geared motor. The bevel gear with more teeth in the 1:2 bevel gear is clamped and fixed on the stainless steel lead tube by bolts. The bevel gear drives the stainless steel lead tube to rotate by the matching bevel gear. The rotation axes of the two bevel gears are perpendicular to each other. Other compositions and connections are the same as those in Embodiment 1 or Embodiment 4.

虽然本发明已以较佳实施例揭露如上,然而并非用以限定本发明的,本领域技术人员还可以在本发明精神内做其他变化,以及应用到本发明未提及的领域中,当然,这些依据本发明精神所做的变化都应包含在本发明所要求保护的范围内。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Those skilled in the art can also make other changes within the spirit of the present invention, and be applied to fields not mentioned in the present invention. Of course, These changes made according to the spirit of the present invention should be included in the scope of protection of the present invention.

Claims (5)

  1. One kind can be at the multiprobe support of three-degree-of-freedom motion, it is characterized in that: it comprises lifting platform (1), stepping motor (2), decelerator (3), aluminium alloy long slab (4), aluminium alloy sliding panel (5), aluminium alloy end plate (6), aluminium alloy wallboard (7), stainless steel driver plate (8), aluminum alloy roof plate (9), the first DC speed-reducing (10), bevel gear pair (11), fairlead (12), probe clamping plate (13), drive lead screw (14), the second DC speed-reducing (16) and many positioning screw rods (15)
    Stepping motor (2) is fixedly mounted on lifting platform (1), lifting platform (1) is bolted in vacuum tank, decelerator (3) is arranged on lifting platform (1) above and is connected with stepping motor (2) by shaft coupling, aluminium alloy long slab (4) is fixed on the output shaft of decelerator (3), aluminium alloy sliding panel (5) is slidably arranged on aluminium alloy long slab (4), aluminium alloy end plate (6), aluminium alloy wallboard (7) and stainless steel driver plate (8) are vertically arranged on aluminium alloy sliding panel (5) successively, DC speed-reducing (10) is arranged on the aluminium alloy sliding panel (5) away from aluminium alloy end plate (6) one sides, drive lead screw (14) successively level is located in aluminium alloy end plate (6), aluminium alloy wallboard (7) is gone up and is connected with the second DC speed-reducing (16) by shaft coupling with stainless steel driver plate (8), many positioning screw rods (15) successively level are located in aluminium alloy end plate (6), the surrounding of drive lead screw (14) is gone up and be positioned to aluminium alloy wallboard (7) and stainless steel driver plate (8), aluminum alloy roof plate (9) is arranged on the upper surface of aluminium alloy wallboard (7) and stainless steel driver plate (8), fairlead (12) is successively vertically through aluminum alloy roof plate (9), aluminium alloy sliding panel (5) and aluminium alloy long slab (4), the first DC speed-reducing (10) is arranged on aluminum alloy roof plate (9), between the first DC speed-reducing (10) and fairlead (12), by bevel gear pair (11), be in transmission connection, the upper end of fairlead (12) is provided with probe clamping plate (13).
  2. 2. a kind of can, at the multiprobe support of three-degree-of-freedom motion, it is characterized in that according to claim 1: described multiprobe support also comprises aluminium-alloy pipe (17), and aluminium-alloy pipe (17) is fixedly mounted on the lower surface of aluminium alloy long slab (4).
  3. 3. a kind of can, at the multiprobe support of three-degree-of-freedom motion, it is characterized in that according to claim 2: the shape of cross section of described aluminium-alloy pipe (17) is U-shaped.
  4. According to a kind of described in claim 1,2 or 3 can be at the multiprobe support of three-degree-of-freedom motion, it is characterized in that: described lifting platform (1) comprises upper plate (1-1), lower plate (1-2) and multi-connecting-rod mechanism (1-3), upper plate (1-1) and lower plate (1-2) be arranged in parallel, between upper plate (1-1) and lower plate (1-2), by multi-connecting-rod mechanism (1-3), connect, lower plate (1-2) is bolted with vacuum tank and is fixedly connected with, and on upper plate (1-1), offers a plurality of through holes.
  5. 5. according to a kind of can, at the multiprobe support of three-degree-of-freedom motion, it is characterized in that described in claim 1 or 4: the gear ratio of bevel gear pair (11) is 1:2.
CN201410397513.0A 2014-08-13 2014-08-13 Multi-probe support capable of moving at three freedom degrees Pending CN104135811A (en)

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Application publication date: 20141105