[go: up one dir, main page]

CN104075703B - Resonant optical gyroscope based on high-K fluoride resonant cavity - Google Patents

Resonant optical gyroscope based on high-K fluoride resonant cavity Download PDF

Info

Publication number
CN104075703B
CN104075703B CN201410351123.XA CN201410351123A CN104075703B CN 104075703 B CN104075703 B CN 104075703B CN 201410351123 A CN201410351123 A CN 201410351123A CN 104075703 B CN104075703 B CN 104075703B
Authority
CN
China
Prior art keywords
fluoride
signal generator
phase modulator
ring resonator
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201410351123.XA
Other languages
Chinese (zh)
Other versions
CN104075703A (en
Inventor
薛晨阳
张文栋
刘耀英
刘俊
闫树斌
唐军
安盼龙
张志东
郑华
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
North University of China
Original Assignee
North University of China
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by North University of China filed Critical North University of China
Priority to CN201410351123.XA priority Critical patent/CN104075703B/en
Publication of CN104075703A publication Critical patent/CN104075703A/en
Application granted granted Critical
Publication of CN104075703B publication Critical patent/CN104075703B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01CMEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/58Turn-sensitive devices without moving masses
    • G01C19/64Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams
    • G01C19/72Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers
    • G01C19/727Gyrometers using the Sagnac effect, i.e. rotation-induced shifts between counter-rotating electromagnetic beams with counter-rotating light beams in a passive ring, e.g. fibre laser gyrometers using a passive ring resonator

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)

Abstract

The invention discloses a resonant optical gyroscope based on a high-K fluoride resonant cavity. The resonant optical gyroscope comprises a laser, a beam splitter, phase modulators, ring-shaped resonators, a triangular prism, a fluoride wedge-shaped cavity, detectors, lock-in amplifiers, a PI circuit, an adder, a high-voltage amplifier, signal generators and an isolator; the PI circuit is used for modulating optical signals to enable physical quantities extracted from signals output from the detector A and B to be capable of reacting the rotation angle of a carrier, and the frequency of the emergent light of a light source and a modulating voltage of the phase modulators can be respectively changed according to the physical quantities, the feedback of an optical path can be realized, and the purpose that the optical paths propagating in the fluoride wedge-shaped cavity clockwise and anti-clockwise are resonant can be realized.

Description

基于高 K 氟化物谐振腔的谐振式光学陀螺 based on high K Resonant Optical Gyroscope Based on Fluoride Resonant Cavity

技术领域 technical field

本发明属于陀螺技术领域,涉及一种角速率测量装置,具体地说是指一种以Sagnac效应为基础的一种光在闭合光路中传输的方式,使用氟化物楔形腔,利用多光束干涉实现测量角速度的谐振式光学陀螺,具体是一种基于高K氟化物谐振腔的谐振式光学陀螺。 The invention belongs to the technical field of gyroscopes, and relates to an angular rate measuring device, specifically a method of light transmission in a closed optical path based on the Sagnac effect, which uses a fluoride wedge-shaped cavity and is realized by multi-beam interference A resonant optical gyroscope for measuring angular velocity, specifically a resonant optical gyroscope based on a high-K fluoride resonant cavity.

背景技术 Background technique

陀螺惯性器件作为惯导系统中的核心部件,在国土防空、舰船、潜艇的惯性导航系统、导弹轨道控制、飞行器自主导航等陆、海、空、天制导、导航及控制技术领域以及卫星姿态控制、摄像机稳瞄稳像、大地测量、资源勘测、机器人、电子消费品等行业有着广泛的应用背景,其发展对一个国家的国防事业、基础工业以及高科技产业发展具有重要的意义。 As the core component of the inertial navigation system, the gyro-inertial device is used in land, sea, air and space guidance, navigation and control technology fields such as land, sea, air and space guidance, navigation and control technology, as well as satellite attitude Control, camera stabilization, image stabilization, geodetic surveying, resource surveying, robotics, consumer electronics and other industries have a wide range of application backgrounds, and their development is of great significance to the development of a country's national defense, basic industries, and high-tech industries.

目前,陀螺惯性器件主要有传统机械陀螺、光学陀螺(光纤陀螺、激光陀螺)、微机械(MEMS)陀螺等类型。传统的机械式陀螺仪适用于大载体高精度的惯性导航,但普遍存在体积大、启动时间长、存在可动部件等问题,无法满足深空探测、构建深空探测网络等应用领域对器件性能稳定、功耗低、体积小等要求,以及微型化、隐身化武器装备作战使用要求,难以实现“灵便型”测量系统。微机械陀螺仪近年来受到人们广泛关注,发展非常迅速,微陀螺的性能、精度及可靠性逐步提高,但尚未取得根本突破,没有像微加速度计那样在市场上大量应用。微机械惯性器件随着器件的微小化,其质量和动量也随之急剧减小,其灵敏度和分辨率等指标的提高已达到检测极限状态。光学陀螺仪具有结构紧凑,灵敏度高,工作可靠等优点,成为现代导航仪器中不可或缺的关键部分。但光纤陀螺仪需要较为复杂的光电信号处理,成本较高,受温度等环境条件变化影响大,且不易集成。 At present, gyro inertial devices mainly include traditional mechanical gyroscopes, optical gyroscopes (fiber optic gyroscopes, laser gyroscopes), and micromechanical (MEMS) gyroscopes. Traditional mechanical gyroscopes are suitable for high-precision inertial navigation of large carriers, but they generally have problems such as large size, long start-up time, and movable parts, which cannot meet the requirements of device performance in applications such as deep space exploration and construction of deep space detection networks. Requirements such as stability, low power consumption, and small size, as well as the requirements for miniaturization and stealth weapons and equipment for combat use, make it difficult to realize a "handy" measurement system. Micro-mechanical gyroscopes have received widespread attention in recent years and have developed very rapidly. The performance, accuracy and reliability of micro-gyroscopes have gradually improved, but fundamental breakthroughs have not yet been made, and they have not been widely used in the market like micro-accelerometers. With the miniaturization of the micromechanical inertial device, its mass and momentum also decrease sharply, and the improvement of its sensitivity and resolution has reached the detection limit state. Optical gyroscopes have the advantages of compact structure, high sensitivity, and reliable operation, and have become an indispensable key part of modern navigation instruments. However, fiber optic gyroscopes require more complex photoelectric signal processing, are costly, are greatly affected by changes in environmental conditions such as temperature, and are not easy to integrate.

随着全球卫星定位系统的广泛应用和高新技术的快速发展,现代惯性导航系统改变了发展方向,对惯性器件提出了更高的要求。惯性器件须在保证高精度的同时,更要求具备体积小、重量轻、功耗低、可靠性高、易于集成等特点。因此,具有高精度、高灵敏度、高可靠性的谐振式光学陀螺成为了重要的发展方向。 With the wide application of global satellite positioning system and the rapid development of high technology, the modern inertial navigation system has changed its development direction and put forward higher requirements for inertial devices. Inertial devices must have the characteristics of small size, light weight, low power consumption, high reliability, and easy integration while ensuring high precision. Therefore, a resonant optical gyroscope with high precision, high sensitivity and high reliability has become an important development direction.

陀螺是用于测量角速率和角加速度变化的装置。陀螺的主要原理是Sagnac效应,在惯性空间中,Sagnac效应可以描述为:通过检测谐振腔内顺时针和逆时针传播光束输出的频率差来实现谐振腔旋转角速度的测试。当谐振腔静止时,两束光光波频率相同,频差为零;当谐振腔转动时,两束相反方向传播光光波频率发生变化,而且两束光的频差与转速成线性关系,其表达式为:Δf=4AΩ/λL= DΩ/λ(A为谐振腔的面积,D为谐振腔的直径,L为谐振腔的周长,4A/λL为陀螺的标度因子),故测出Δf,就可以知道旋转角速率Ω的值。 Gyroscopes are devices used to measure changes in angular rate and angular acceleration. The main principle of the gyroscope is the Sagnac effect. In the inertial space, the Sagnac effect can be described as: the test of the rotational angular velocity of the resonator is achieved by detecting the frequency difference between the clockwise and counterclockwise beam output in the resonator. When the resonator is stationary, the frequency of the two beams of light waves is the same, and the frequency difference is zero; when the resonator rotates, the frequency of the two beams of light propagating in opposite directions changes, and the frequency difference of the two beams of light is linearly related to the rotational speed, its expression The formula is: Δf=4AΩ/λL= DΩ/λ (A is the area of the resonant cavity, D is the diameter of the resonant cavity, L is the circumference of the resonant cavity, and 4A/λL is the scaling factor of the gyroscope), so Δf is measured , you can know the value of the rotation angular rate Ω.

谐振式光学陀螺是一种新型的角速度传感器,与机械陀螺相比,具有全固态,对中立不敏感、启动快等优点;与环形激光陀螺相比,具有无高电压电源、无机械抖动的特点,另外,还具有重量轻、小体积、高灵敏度、低成本、高可靠性、低功耗等特点;与干涉式光纤陀螺相比,可减小由多匝线圈缠绕引起的温度效应和Shupe误差,采用高相干光源波长稳定性高、检测精度高、动态范围大。 Resonant optical gyroscope is a new type of angular velocity sensor. Compared with mechanical gyroscope, it has the advantages of all solid state, insensitivity to neutral, and fast startup; compared with ring laser gyroscope, it has the characteristics of no high-voltage power supply and no mechanical jitter. , In addition, it also has the characteristics of light weight, small size, high sensitivity, low cost, high reliability, low power consumption, etc. Compared with the interferometric fiber optic gyroscope, it can reduce the temperature effect and Shupe error caused by multi-turn coil winding , using a highly coherent light source with high wavelength stability, high detection accuracy, and large dynamic range.

谐振很窄的单频激光在谐振式光纤陀螺中传播,会改变光纤线芯的折射率,从而引起Kerr效应。顺、逆时针两束光的光强不匹配也可以造成频率误差,从而印象真正陀螺信号检测频差的精度。当谐振腔的精细度很高光强很强时,会使得石英光纤发生手机辐射,造成布里渊散射,而这种受激辐射会使得谐振频率测量及其不稳定。在光纤谐振腔中,把这种经过一次循环而不改变其偏振状态的的性质称为偏振的本征状态。通常,环境中的温度变化或者外界振动等因素的变化都会引起一个由偏振本征态对应的使谐振峰峰值位置的相对变化,从而引起由偏振波动造成的频率差,这将会直接影响陀螺旋转角速度的测量。 The single-frequency laser with very narrow resonance propagates in the resonant fiber optic gyroscope, which will change the refractive index of the fiber core, thereby causing the Kerr effect. The mismatch of the light intensity of the clockwise and anticlockwise two beams of light can also cause a frequency error, thus impressing the accuracy of the true gyro signal detection frequency difference. When the fineness of the resonant cavity is very high and the light intensity is very strong, it will cause mobile phone radiation in the quartz fiber, resulting in Brillouin scattering, and this stimulated radiation will make the measurement of the resonant frequency extremely unstable. In the fiber resonator, the property that the polarization state does not change after one cycle is called the intrinsic state of polarization. Usually, changes in temperature in the environment or changes in external vibrations will cause a relative change in the peak position of the resonance peak corresponding to the polarization eigenstate, thereby causing a frequency difference caused by polarization fluctuations, which will directly affect the gyro rotation. Measurement of angular velocity.

在传统的谐振腔选取中,谐振腔材料大部分使用二氧化硅,因为SiO2具有良好的绝缘性能及稳定的二氧化硅-硅衬底界面,然而由于由二氧化硅制备的谐振腔Q值低,尺寸也只能做到几十um量级,无法满足陀螺导航级的要求。 In the traditional resonant cavity selection, most of the resonant cavity materials use silicon dioxide, because SiO 2 has good insulating properties and stable silicon dioxide-silicon substrate interface, but due to the Q value of the resonant cavity made of silicon dioxide Low, and the size can only be on the order of tens of um, which cannot meet the requirements of gyro navigation.

发明内容 Contents of the invention

本发明的目的是为了解决上述现有技术中存在的问题,而提供一种基于高K氟化物谐振腔的谐振式光学陀螺。 The object of the present invention is to provide a resonant optical gyroscope based on a high-K fluoride resonant cavity in order to solve the above-mentioned problems in the prior art.

本发明是通过如下技术方案实现的: The present invention is achieved through the following technical solutions:

一种基于高K氟化物谐振腔的谐振式光学陀螺,包括集成在硅基板上的激光器、分束器、A相位调制器、B相位调制器、A环形共振器、B环形共振器、三角棱镜、氟化物楔形腔、A探测器、A锁相放大器、PI电路(即增益积分电路)、加法器、高压放大器、C信号发生器、A信号发生器、B探测器、B信号发生器、B锁相放大器、隔离器;A信号发生器、B信号发生器、C信号发生器的结构相同;A相位调制器、B相位调制器结构相同,但在调制过程中设置的调制频率不同;A探测器、B探测器结构相同;氟化物楔形腔是指用精度为0.9999以上的氟化物晶体制作而成的、且周缘为楔形设计的圆盘; A resonant optical gyro based on a high-K fluoride resonator cavity, including a laser integrated on a silicon substrate, a beam splitter, an A phase modulator, a B phase modulator, an A ring resonator, a B ring resonator, and a triangular prism , Fluoride wedge cavity, A detector, A lock-in amplifier, PI circuit (that is, gain integration circuit), adder, high voltage amplifier, C signal generator, A signal generator, B detector, B signal generator, B Lock-in amplifier and isolator; A signal generator, B signal generator, and C signal generator have the same structure; A phase modulator and B phase modulator have the same structure, but the modulation frequency set in the modulation process is different; A detection The detector and B detector have the same structure; the fluoride wedge-shaped cavity refers to a disc made of fluoride crystals with a precision of 0.9999 or more, and the periphery is wedge-shaped;

其中,A相位调制器和B相位调制器上下布置于硅基板的中心位置, A、B相位调制器的右边布置上下分布的A环形共振器和B环形共振器;A、B相位调制器的左边由左至右依次布置激光器、隔离器和分束器,A、B环形共振器的右边由左至右依次布置三角棱镜和氟化物楔形腔;A相位调制器的上方布置B信号发生器,B信号发生器上方布置B锁相放大器;B相位调制器的下方布置A信号发生器,A信号发生器下方布置A锁相放大器;隔离器下方布置高压放大器,高压放大器下方布置加法器,加法器下方布置PI电路;分束器下方布置C信号发生器;A环形共振器上方布置B探测器,B环形共振器下方布置A探测器; Among them, the A phase modulator and the B phase modulator are arranged up and down in the center of the silicon substrate, and the A and B phase modulators are arranged on the right side of the A and B phase modulators, and the A ring resonator and the B ring resonator are arranged up and down; Lasers, isolators and beam splitters are arranged in sequence from left to right, triangular prisms and fluoride wedge cavities are arranged in sequence on the right side of ring resonators A and B from left to right; B signal generator is arranged above A phase modulator, B The B lock-in amplifier is arranged above the signal generator; the A signal generator is arranged under the B phase modulator, and the A lock-in amplifier is arranged under the A signal generator; the high-voltage amplifier is arranged under the isolator, and the adder is arranged under the high-voltage amplifier. The PI circuit is arranged; the C signal generator is arranged under the beam splitter; the B detector is arranged above the A ring resonator, and the A detector is arranged under the B ring resonator;

激光器与隔离器连接,隔离器与分束器连接,分束器分别与A相位调制器和B相位调制器连接,A相位调制器与A环形共振器连接,B相位调制器与B环形共振器连接,A环形共振器的光输出端经准直器垂直对准三角棱镜的一个侧面, B环形共振器的光输出端经准直器垂直对准三角棱镜的另一个侧面,三角棱镜的底面与氟化物楔形腔通过倏逝场耦合(当三角棱镜与氟化物楔形腔的间隙小于4倍的谐振波长时,本来只在棱镜与空气界面处发生全反射的光,也有一部分以倏逝波的形式进入氟化物楔形腔,即进入氟化物型腔的光波会在腔中进行传输和耦合);激光器与高压放大器连接,高压放大器与加法器连接,加法器通过开关与C信号发生器连接,加法器还与PI电路连接,PI电路与A锁相放大器连接,A锁相放大器分别与A信号发生器和A探测器连接,A信号发生器与A相位调制器连接,A探测器与B环形共振器连接;B锁相放大器分别与B信号发生器和B探测器连接,B信号发生器与B相位调制器连接,B探测器与A环形共振器连接。 The laser is connected to the isolator, the isolator is connected to the beam splitter, the beam splitter is connected to the A phase modulator and the B phase modulator respectively, the A phase modulator is connected to the A ring resonator, and the B phase modulator is connected to the B ring resonator connected, the light output end of the A ring resonator is vertically aligned with one side of the triangular prism through the collimator, the light output end of the B ring resonator is vertically aligned with the other side of the triangular prism through the collimator, and the bottom surface of the triangular prism is aligned with the The fluoride wedge-shaped cavity is coupled through the evanescent field (when the gap between the triangular prism and the fluoride wedge-shaped cavity is less than 4 times the resonant wavelength, the light that was originally only totally reflected at the interface between the prism and the air, also partly in the form of evanescent waves Enter the fluoride wedge-shaped cavity, that is, the light wave entering the fluoride cavity will be transmitted and coupled in the cavity); the laser is connected to the high-voltage amplifier, the high-voltage amplifier is connected to the adder, the adder is connected to the C signal generator through the switch, and the adder Also connected with PI circuit, PI circuit is connected with A lock-in amplifier, A lock-in amplifier is respectively connected with A signal generator and A detector, A signal generator is connected with A phase modulator, A detector is connected with B ring resonator Connection; the B lock-in amplifier is respectively connected with the B signal generator and the B detector, the B signal generator is connected with the B phase modulator, and the B detector is connected with the A ring resonator.

进一步的,激光器是具有保偏光纤、谱线很窄的稳定的单频固态激光器,采用具有保偏光纤、谱线很窄的稳定的单频固态激光器是为了保证稳定的工作波长和温度稳定性以及很好的单向性出射;A相位调制器和B相位调制器都是低振幅调制的相位调制器,因为信号发生器只能输出最大10V电压,且低振幅相位调制器可以避免也因高温引起的调制器调制系数变化和相位响应特性变化从而造成性能的不稳定;PI电路是具有很好的反馈的控制电路,只有PI电路能很好的纠偏、调整误差,将谐振腔频率反馈给高压放大器,激光器才能快速地锁定谐振腔的频率;三角棱镜是等腰直角三角棱镜,选择等腰直角棱镜是保证光在棱镜里的对称传输和严格的全反射传输。 Further, the laser is a stable single-frequency solid-state laser with a polarization-maintaining fiber and a narrow spectral line. The use of a stable single-frequency solid-state laser with a polarization-maintaining fiber and a narrow spectral line is to ensure stable operating wavelength and temperature stability. And very good unidirectional output; A phase modulator and B phase modulator are both low-amplitude modulation phase modulators, because the signal generator can only output a maximum voltage of 10V, and the low-amplitude phase modulator can avoid the high temperature The change of the modulator modulation coefficient and the change of the phase response characteristics caused by the modulator lead to unstable performance; the PI circuit is a control circuit with good feedback, and only the PI circuit can correct the deviation and adjust the error well, and feed back the frequency of the resonant cavity to the high voltage Amplifiers and lasers can quickly lock the frequency of the resonant cavity; the triangular prism is an isosceles right-angle triangular prism, and the choice of an isosceles right-angle prism is to ensure the symmetrical transmission and strict total reflection transmission of light in the prism.

氟化物楔形腔的楔形角度θ为20°,楔形角做到20°,Q值更高,即谐振腔局域光的能力越强。 The wedge angle θ of the fluoride wedge cavity is 20°, if the wedge angle reaches 20°, the Q value is higher, that is, the ability of the resonator to localize light is stronger.

工作时,如图1、3所示,光源从激光器中发出,经隔离器ISO隔离,隔离器ISO用于防止反射到激光器的光对其原始输出的频率产生影响,经隔离器输出的光通过分束器分束为光束1和光束2,此时分束器平分的是光强而不是频率,光束1进出A相位调制器后再进出A环形共振器,光束2进出B相位调制器后再进出B环形共振器,A、B环形共振器主要作用是用来指示方向;从A环形共振器出射的调制光从三角棱镜的201侧面垂直的进入三角棱镜,经折射后在三角棱镜203底面发生全反射,再从三角棱镜的202侧面输出;从B环形共振器出射的调制光从三角棱镜的202侧面垂直的进入三角棱镜,经折射后在三角棱镜203底面发生全反射,再从三角棱镜的201侧面输出(如图3所示,设三角棱镜中与A环形共振器对应的一个侧面为201侧面,与B环形共振器对应的一个侧面为202侧面,底面为203底面)。在三角棱镜203底面与氟化物楔形腔的间隔间产生倏逝场而使得两束光波耦合进入三角棱镜,其中经三角棱镜的201侧面进入的光在氟化物楔形腔内形成逆时针CCW光束,经三角棱镜202侧面进入氟化物楔形腔内的光在氟化物楔形腔内形成顺时针CW光束,进入氟化物楔形腔内的逆时针光束CCW循环出来进入B环形共振器,被A探测器检测到,再通过A锁相放大器,进入PI电路、加法器和高压放大器,最后传给激光器,在此,PI电路是用来纠偏、调整误差,从而使激光器的PZT锁定了氟化物楔形腔的频率(逆时针的光束),加法器以及开关作用是在锁频时,打开开关,扫描电压和PI控制电压相加然后传给激光器的PZT从而控制频率。经过B环形共振器进入氟化物楔形腔内的顺时针光束CW循环出来进入A环形共振器,被B探测器检测到,再通过B锁相放大器输出,此时输出的信号即为陀螺的频差信号,从而实现单路闭环控制系统。 When working, as shown in Figures 1 and 3, the light source is emitted from the laser and is isolated by the isolator ISO. The isolator ISO is used to prevent the reflected light from the laser from affecting its original output frequency. The light output by the isolator passes The beam splitter splits the beam into beam 1 and beam 2. At this time, the beam splitter splits the light intensity rather than the frequency. The beam 1 enters and exits the A phase modulator and then enters the A ring resonator, and the beam 2 enters and exits the B phase modulator and then enters and exits. B ring resonator, the main function of A and B ring resonators is to indicate the direction; the modulated light emitted from the A ring resonator enters the triangular prism vertically from the 201 side of the triangular prism, and is completely refracted on the bottom surface of the triangular prism 203. reflection, and then output from the 202 side of the triangular prism; the modulated light emitted from the B ring resonator enters the triangular prism vertically from the 202 side of the triangular prism, and is totally reflected at the bottom of the triangular prism 203 after refraction, and then from the 201 side of the triangular prism Side output (as shown in Figure 3, set the side of the triangular prism corresponding to the ring resonator A as side 201, the side corresponding to the ring resonator B as side 202, and the bottom as the bottom of 203). An evanescent field is generated between the bottom surface of the triangular prism 203 and the interval between the fluoride wedge-shaped cavity so that two beams of light waves are coupled into the triangular prism, wherein the light entering through the side of 201 of the triangular prism forms a counterclockwise CCW beam in the fluoride wedge-shaped cavity, and passes through The light entering the fluoride wedge-shaped cavity from the side of the triangular prism 202 forms a clockwise CW beam in the fluoride wedge-shaped cavity, and the counterclockwise beam CCW entering the fluoride wedge-shaped cavity circulates out and enters the B ring resonator, and is detected by the A detector. Then through the A lock-in amplifier, enter the PI circuit, adder and high-voltage amplifier, and finally pass it to the laser. Here, the PI circuit is used to correct the deviation and adjust the error, so that the PZT of the laser locks the frequency of the fluoride wedge cavity (inverse The beam of the hour hand), the adder and the switch function are to open the switch when the frequency is locked, the scanning voltage and the PI control voltage are added and then transmitted to the PZT of the laser to control the frequency. The clockwise beam CW that enters the fluoride wedge cavity through the B ring resonator circulates out into the A ring resonator, is detected by the B detector, and then output through the B lock-in amplifier. The output signal at this time is the frequency difference of the gyroscope signal, thus realizing a single-channel closed-loop control system.

本发明采用高介电常数(高K)的氟化物材料来代替二氧化硅材料来制备楔形腔,从而得到高Q、高精度的谐振式光学陀螺。本发明为精度更高、灵敏度更高的谐振式光学陀螺仪。以氟化物如氟化锂、氟化镁、氟化钙、氟化钡等高K氟化物为材料制备的谐振腔,具有高Q值,大直径d的优点,可以获得高精细度透射谱输出,从而实现更高分辨率的角速度测量,将现有微机电惯性传感器的测量精度提高两个数量级以上,达0.1-0.01o/h,可满足导航级要求。使用等腰直角三角棱镜作为耦合器,可以保证光路的对称输入和输出,从而减小上述的偏振误差;使用三角棱镜与楔形腔的耦合方式,在固定好棱镜和楔形腔的相对位置后,封装时相比用光纤耦合方式使用紫外固化胶的封装更容易,性能更好。 The invention adopts the fluoride material with high dielectric constant (high K) to replace the silicon dioxide material to prepare the wedge-shaped cavity, thereby obtaining a high-Q, high-precision resonant optical gyroscope. The invention is a resonant optical gyroscope with higher precision and higher sensitivity. The resonant cavity made of fluoride such as lithium fluoride, magnesium fluoride, calcium fluoride, barium fluoride and other high-K fluorides has the advantages of high Q value and large diameter d, and can obtain high-precision transmission spectrum output , so as to achieve higher resolution angular velocity measurement, and improve the measurement accuracy of the existing MEMS inertial sensor by more than two orders of magnitude, reaching 0.1-0.01 o /h, which can meet the requirements of navigation level. Using an isosceles right-angle triangular prism as a coupler can ensure the symmetrical input and output of the optical path, thereby reducing the above-mentioned polarization error; using the coupling method between the triangular prism and the wedge-shaped cavity, after fixing the relative positions of the prism and the wedge-shaped cavity, the packaging Compared with fiber-optic coupling, it is easier to package with UV-curable adhesive and has better performance.

在本发明的基于氟化物谐振腔的谐振式光学陀螺,PI电路对光信号进行调制使得从光电探测器(A探测器、B探测器)输出的信号中提取出能反应载体旋转角速率的物理量,并且根据该物理量分别改变控制光源出射光的频率和相位调制器的调制电压,实现对光路的反馈,最终达到使在氟化物楔形腔中顺逆时针传播的光路都谐振的目的。本发明中通过检测谐振腔(由三角棱镜和氟化物楔形腔构成)中顺逆时针传播的光的频率差,并经过频率-转速转换关系△f=DΩ/λ,间接测量载体的旋转角速率。图5是Sagnac效应的原理图,即,当陀螺不转动的时候,从出射点P发出的两束顺、逆时针光经过相同的光程差后同时传到P点,当陀螺以Ω的角速度转动时,顺时针和逆时针光束向相反方向传输后回到出射点时,P点已经发生了移动变到P’点,因此,可以根据顺逆时针两束光的频差计算得到陀螺转动的角速度。 In the resonant optical gyro based on the fluoride resonant cavity of the present invention, the PI circuit modulates the optical signal so that the physical quantity that can reflect the angular rate of the carrier rotation is extracted from the output signal of the photodetector (A detector, B detector) , and according to the physical quantity, respectively change the frequency of the outgoing light of the control light source and the modulation voltage of the phase modulator to realize the feedback of the optical path, and finally achieve the purpose of resonating the optical paths propagating clockwise and counterclockwise in the fluoride wedge cavity. In the present invention, by detecting the frequency difference of light propagating clockwise and counterclockwise in the resonant cavity (consisting of a triangular prism and a fluoride wedge cavity), and through the frequency-speed conversion relationship △f=DΩ/λ, the angular rate of rotation of the carrier is indirectly measured . Figure 5 is a schematic diagram of the Sagnac effect, that is, when the gyro is not rotating, the two beams of clockwise and counterclockwise light emitted from the exit point P pass to point P at the same time after passing through the same optical path difference. When the gyro is at an angular velocity of Ω When rotating, when the clockwise and counterclockwise light beams travel in opposite directions and return to the exit point, point P has moved to point P'. Therefore, the frequency difference of the gyro rotation can be calculated according to the frequency difference between the two light beams clockwise and counterclockwise. angular velocity.

本发明的有益效果为: The beneficial effects of the present invention are:

1)构成谐振腔的氟化物材料具有很宽的透射波段和很高的透明度,结构简单不潮解,是一种具有优异光学特性的材料; 1) The fluoride material that constitutes the resonant cavity has a wide transmission band and high transparency, and its structure is simple and does not deliquesce. It is a material with excellent optical properties;

2)构成谐振腔(氟化物楔形腔)的尺寸直径可达mm级,从而由氟化物材料制备的谐振腔Q值可达到108-1011,精细度可达105,为陀螺的高灵敏度和高精细度提供了保证,为谐振式陀螺的性能指标达到惯导级和精密级提供了可能; 2) The size and diameter of the resonant cavity (fluoride wedge cavity) can reach mm level, so the Q value of the resonant cavity made of fluoride material can reach 10 8 -10 11 , and the fineness can reach 10 5 , which is the high sensitivity of the gyro It provides a guarantee for high precision and high precision, and makes it possible for the performance index of the resonant gyroscope to reach the inertial navigation level and precision level;

3)等腰直角三角棱镜具有平面全内反射特性,角向选模特性和相位共轭效果,使在振荡过程中光场分布趋于均匀,输出光远场发散角小,低价模输出,光束质量好; 3) The isosceles right-angle triangular prism has the characteristics of plane total internal reflection, angular mode selection and phase conjugation effect, so that the light field distribution tends to be uniform during the oscillation process, the far-field divergence angle of the output light is small, and the low-cost mode output, Good beam quality;

4)楔型谐振腔内光耦合采用的是棱镜耦合,棱镜耦合是通过空间光进行耦合的,在调整好耦合角度后,可以直接进行封装,不同于光纤耦合,若要封装,需要使用紫外固化胶固定,而紫外固化胶的热效应差,温度升高或降低,都会影响折射率,而致使最终输出的透射谱和封装前的透射谱发生变化。在提高耦合效率的基础上,避免了耦合器的损耗以及由于光纤陀螺的模场直径不匹配而产生的光散射等附加损耗及封装问题。 4) The optical coupling in the wedge resonator adopts prism coupling. Prism coupling is coupled through spatial light. After adjusting the coupling angle, it can be directly packaged. Unlike optical fiber coupling, UV curing is required for packaging. The glue is fixed, and the thermal effect of the UV-cured glue is poor, and the temperature rise or fall will affect the refractive index, resulting in changes in the final output transmission spectrum and the transmission spectrum before packaging. On the basis of improving the coupling efficiency, the loss of the coupler and the additional loss and packaging problems such as light scattering caused by the mismatch of the mode field diameter of the fiber optic gyroscope are avoided.

附图说明 Description of drawings

图1为本发明的结构示意图。 Fig. 1 is a structural schematic diagram of the present invention.

图2为本发明中氟化物楔形腔的结构示意图。 Fig. 2 is a schematic structural diagram of a fluoride wedge cavity in the present invention.

图3为图2的局部切面结构图。 FIG. 3 is a partial section structure diagram of FIG. 2 .

图4为本发明中三角棱镜与氟化物楔形腔的耦合原理图。 Fig. 4 is a schematic diagram of the coupling between a triangular prism and a fluoride wedge cavity in the present invention.

图5为Sagnac效应原理图。 Figure 5 is a schematic diagram of the Sagnac effect.

图中:1-激光器、2-分束器、3- A相位调制器、4- B相位调制器、5- A环形共振器、6- B环形共振器、7-三角棱镜、8-氟化物楔形腔、9- A探测器、10- A锁相放大器、11- PI电路、12-加法器、13-高压放大器、14- C信号发生器、15- A信号发生器、16- B探测器、17- B信号发生器、18- C信号发生器、19-隔离器、20-开关。 In the figure: 1-laser, 2-beam splitter, 3-A phase modulator, 4-B phase modulator, 5-A ring resonator, 6-B ring resonator, 7-triangular prism, 8-fluoride Wedge cavity, 9-A detector, 10-A lock-in amplifier, 11-PI circuit, 12-adder, 13-high voltage amplifier, 14-C signal generator, 15-A signal generator, 16-B detector , 17- B signal generator, 18- C signal generator, 19- isolator, 20- switch.

具体实施方式 detailed description

以下结合附图对本发明作进一步地描述: The present invention will be further described below in conjunction with accompanying drawing:

如图1至图5所示,一种基于高K氟化物谐振腔的谐振式光学陀螺,包括集成在硅基板上的激光器1、分束器2、A相位调制器3、B相位调制器4、A环形共振器5、B环形共振器6、三角棱镜7、氟化物楔形腔8、A探测器9、A锁相放大器10、PI电路11、加法器12、高压放大器13、C信号发生器14、A信号发生器15、B探测器16、B信号发生器17、B锁相放大器18、隔离器19;A信号发生器15、B信号发生器17、C信号发生器14的结构相同;A相位调制器3、B相位调制器4结构相同;A探测器9、B探测器16结构相同;氟化物楔形腔8是指用精度为0.9999以上的氟化物晶体制作而成的、且周缘为楔形设计的圆盘; As shown in Figures 1 to 5, a resonant optical gyro based on a high-K fluoride resonator cavity includes a laser 1, a beam splitter 2, an A phase modulator 3, and a B phase modulator 4 integrated on a silicon substrate , A ring resonator 5, B ring resonator 6, triangular prism 7, fluoride wedge cavity 8, A detector 9, A lock-in amplifier 10, PI circuit 11, adder 12, high voltage amplifier 13, C signal generator 14, A signal generator 15, B detector 16, B signal generator 17, B lock-in amplifier 18, isolator 19; A signal generator 15, B signal generator 17, C signal generator 14 have the same structure; A phase modulator 3 and B phase modulator 4 have the same structure; A detector 9 and B detector 16 have the same structure; the fluoride wedge cavity 8 is made of fluoride crystal with an accuracy of 0.9999 or more, and the periphery is wedge-shaped disc;

其中,A相位调制器3和B相位调制器4上下布置于硅基板的中心位置, A、B相位调制器3、4的右边布置上下分布的A环形共振器5和B环形共振器6;A、B相位调制器3、4的左边由左至右依次布置激光器1、隔离器19和分束器2,A、B环形共振器5、6的右边由左至右依次布置三角棱镜7和氟化物楔形腔8;A相位调制器3的上方布置B信号发生器17,B信号发生器17上方布置B锁相放大器18;B相位调制器4的下方布置A信号发生器15,A信号发生器15下方布置A锁相放大器10;隔离器19下方布置高压放大器13,高压放大器13下方布置加法器12,加法器12下方布置PI电路11;分束器2下方布置C信号发生器14;A环形共振器5上方布置B探测器16,B环形共振器6下方布置A探测器9; Wherein, the A phase modulator 3 and the B phase modulator 4 are arranged up and down in the center of the silicon substrate, and the A and B phase modulators 3 and 4 are arranged on the right side of the A ring resonator 5 and the B ring resonator 6 distributed up and down; A , The left side of B phase modulator 3, 4 arranges laser 1, isolator 19 and beam splitter 2 sequentially from left to right, and the right side of A, B ring resonator 5, 6 arranges triangular prism 7 and fluorine in sequence from left to right Compound wedge cavity 8; A B signal generator 17 is arranged above the A phase modulator 3, and a B lock-in amplifier 18 is arranged above the B signal generator 17; A signal generator 15 is arranged below the B phase modulator 4, and the A signal generator A lock-in amplifier 10 is arranged under 15; a high-voltage amplifier 13 is arranged under the isolator 19, an adder 12 is arranged under the high-voltage amplifier 13, and a PI circuit 11 is arranged under the adder 12; a C signal generator 14 is arranged under the beam splitter 2; The B detector 16 is arranged above the resonator 5, and the A detector 9 is arranged below the B ring resonator 6;

激光器1与隔离器19连接,隔离器19与分束器2连接,分束器2分别与A相位调制器3和B相位调制器4连接,A相位调制器3与A环形共振器5连接,B相位调制器4与B环形共振器6连接,A环形共振器5的光输出端经准直器垂直对准三角棱镜7的一个侧面, B环形共振器6的光输出端经准直器垂直对准三角棱镜7的另一个侧面,三角棱镜7的底面与氟化物楔形腔8通过倏逝场耦合;激光器1与高压放大器13连接,高压放大器13与加法器12连接,加法器12通过开关20与C信号发生器14连接,加法器12还与PI电路11连接,PI电路11与A锁相放大器10连接,A锁相放大器10分别与A信号发生器15和A探测器9连接,A信号发生器15与A相位调制器3连接,A探测器9与B环形共振器6连接;B锁相放大器18分别与B信号发生器17和B探测器16连接,B信号发生器17与B相位调制器4连接,B探测器16与A环形共振器5连接。 The laser 1 is connected to the isolator 19, the isolator 19 is connected to the beam splitter 2, the beam splitter 2 is connected to the A phase modulator 3 and the B phase modulator 4 respectively, and the A phase modulator 3 is connected to the A ring resonator 5, The B phase modulator 4 is connected with the B ring resonator 6, the light output end of the A ring resonator 5 is vertically aligned with one side of the triangular prism 7 through the collimator, and the light output end of the B ring resonator 6 is vertical through the collimator Align the other side of the triangular prism 7, the bottom surface of the triangular prism 7 and the fluoride wedge-shaped cavity 8 are coupled through the evanescent field; the laser 1 is connected to the high-voltage amplifier 13, and the high-voltage amplifier 13 is connected to the adder 12, and the adder 12 passes through the switch 20 Be connected with C signal generator 14, adder 12 is also connected with PI circuit 11, and PI circuit 11 is connected with A lock-in amplifier 10, and A lock-in amplifier 10 is connected with A signal generator 15 and A detector 9 respectively, A signal Generator 15 is connected with A phase modulator 3, and A detector 9 is connected with B ring resonator 6; B lock-in amplifier 18 is connected with B signal generator 17 and B detector 16 respectively, and B signal generator 17 is connected with B phase The modulator 4 is connected, and the B detector 16 is connected to the A ring resonator 5 .

在本发明中,三角棱镜7和氟化物楔形腔8构成一个谐振腔,氟化物楔形腔8的结构如图2、3所示,三角棱镜7与氟化物楔形腔8的耦合原理如图4所示; In the present invention, the triangular prism 7 and the fluoride wedge cavity 8 constitute a resonant cavity, the structure of the fluoride wedge cavity 8 is shown in Figures 2 and 3, and the coupling principle of the triangular prism 7 and the fluoride wedge cavity 8 is shown in Figure 4 Show;

本发明的光路、电路走向为: Optical path of the present invention, circuit trend are:

光源从激光器1出射进入隔离器19隔离后进入分束器2分束; The light source exits from the laser 1 and enters the isolator 19 for isolation and then enters the beam splitter 2 for splitting;

经分束器2的光分束后分为光束1和光束2,光束1和光束2分别进入A相位调制器3和B相位调制器4,再通过A环形共振器5和B环形共振器6出来; The light beam split by beam splitter 2 is divided into beam 1 and beam 2, and beam 1 and beam 2 enter A phase modulator 3 and B phase modulator 4 respectively, and then pass through A ring resonator 5 and B ring resonator 6 come out;

从A环形共振器5出射的调制光从与三角棱镜7的201侧面垂直的方向进入棱镜经折射后在棱镜203底面发生全反射从棱镜的202侧面输出,从B环形共振器6出射的调制光从与三角棱镜7的202侧面垂直的方向进入棱镜经折射后在棱镜203底面发生全反射从棱镜的201侧面输出; The modulated light emitted from the A ring resonator 5 enters the prism from the direction perpendicular to the 201 side of the triangular prism 7 and is totally reflected on the bottom surface of the prism 203 after being refracted, and is output from the 202 side of the prism, and the modulated light emitted from the B ring resonator 6 Enter the prism from the direction perpendicular to the 202 side of the triangular prism 7 and output it from the 201 side of the prism at the prism 203 bottom surface after refraction;

这两束光波在三角棱镜7的203底面与氟化物腔的间隔间产生倏逝场而使的两束光波耦合进入三角棱镜7,其中经三角棱镜7 的201侧面进入的光在氟化物腔内形成逆时针CCW光束,经三角棱镜7 的202侧面进入腔内的光在氟化物腔中形成顺时针CW光,进入氟化物谐振腔内的逆时针光束CCW循环出来进入B环形共振器6,被A探测器9检测到; These two beams of light waves generate an evanescent field between the 203 bottom surface of the triangular prism 7 and the gap between the fluoride cavity and the two beams of light waves are coupled into the triangular prism 7, wherein the light entering through the 201 side of the triangular prism 7 is in the fluoride cavity A counterclockwise CCW beam is formed, and the light entering the cavity through the 202 side of the triangular prism 7 forms a clockwise CW light in the fluoride cavity, and the counterclockwise beam CCW entering the fluoride resonator circulates out and enters the B ring resonator 6, which is A detector 9 detects;

如图1所示,CCW方向传输的光束经A探测器9转换为电信号后经A锁相放大器10解调输出,得到用于反馈控制激光光波频率的误差信号,误差信号的存在, PI电路11控制作用一直进行,最终的结果使误差信号为零,此时的激光输出光波频率被锁定在氟化物楔形腔8的CCW方向的谐振频率点处; As shown in Figure 1, the light beam transmitted in the CCW direction is converted into an electrical signal by the A detector 9 and then demodulated and output by the A lock-in amplifier 10 to obtain an error signal for feedback control of the laser light wave frequency. The existence of the error signal, the PI circuit 11 The control function is carried out all the time, and the final result makes the error signal zero, and the frequency of the laser output light wave at this time is locked at the resonant frequency point of the CCW direction of the fluoride wedge cavity 8;

此时的CW方向的谐振光束经B探测器16给B锁相放大器18解调,输出即为陀螺信号,从而实现单路闭环控制系统。 At this time, the resonant light beam in the CW direction is demodulated to the B lock-in amplifier 18 by the B detector 16, and the output is a gyro signal, thereby realizing a single-channel closed-loop control system.

具体实施时,激光器1是具有保偏光纤、谱线很窄的稳定的单频固态激光器;A相位调制器3和B相位调制器4都是低振幅调制的相位调制器;PI电路11是具有很好的反馈的控制电路;三角棱镜7是等腰直角三角棱镜,且其反射率可以通过镀膜实现来达到0.9以上;氟化物楔形腔8的楔形角度θ为20°。 During specific implementation, the laser 1 is a stable single-frequency solid-state laser with a polarization-maintaining optical fiber and a narrow spectral line; the A phase modulator 3 and the B phase modulator 4 are both low-amplitude modulation phase modulators; the PI circuit 11 has A good feedback control circuit; the triangular prism 7 is an isosceles right-angle triangular prism, and its reflectivity can be achieved by coating to reach more than 0.9; the wedge angle θ of the fluoride wedge cavity 8 is 20°.

Claims (2)

1.一种基于高K氟化物谐振腔的谐振式光学陀螺,其特征在于:包括集成在硅基板上的激光器(1)、分束器(2)、A相位调制器(3)、B相位调制器(4)、A环形共振器(5)、B环形共振器(6)、三角棱镜(7)、氟化物楔形腔(8)、A探测器(9)、A锁相放大器(10)、PI电路(11)、加法器(12)、高压放大器(13)、C信号发生器(14)、A信号发生器(15)、B探测器(16)、B信号发生器(17)、B锁相放大器(18)、隔离器(19);A信号发生器(15)、B信号发生器(17)、C信号发生器(14)的结构相同;A相位调制器(3)、B相位调制器(4)结构相同;A探测器(9)、B探测器(16)结构相同;氟化物楔形腔(8)是指用精度为0.9999以上的氟化物晶体制作而成的、且周缘为楔形设计的圆盘; 1. A resonant optical gyro based on a high-K fluoride resonant cavity, characterized in that it includes a laser (1), a beam splitter (2), an A phase modulator (3), and a B phase integrated on a silicon substrate. Modulator (4), A Ring Resonator (5), B Ring Resonator (6), Triangular Prism (7), Fluoride Wedge Cavity (8), A Detector (9), A Lock-in Amplifier (10) , PI circuit (11), adder (12), high voltage amplifier (13), C signal generator (14), A signal generator (15), B detector (16), B signal generator (17), B lock-in amplifier (18), isolator (19); A signal generator (15), B signal generator (17), C signal generator (14) have the same structure; A phase modulator (3), B The phase modulators (4) have the same structure; the A detector (9) and the B detector (16) have the same structure; the fluoride wedge-shaped cavity (8) is made of fluoride crystal with an accuracy of 0.9999 or more, and the peripheral Discs designed for wedges; 其中,A相位调制器(3)和B相位调制器(4)上下布置于硅基板的中心位置, A、B相位调制器(3、4)的右边布置上下分布的A环形共振器(5)和B环形共振器(6);A、B相位调制器(3、4)的左边由左至右依次布置激光器(1)、隔离器(19)和分束器(2),A、B环形共振器(5、6)的右边由左至右依次布置三角棱镜(7)和氟化物楔形腔(8);A相位调制器(3)的上方布置B信号发生器(17),B信号发生器(17)上方布置B锁相放大器(18);B相位调制器(4)的下方布置A信号发生器(15),A信号发生器(15)下方布置A锁相放大器(10);隔离器(19)下方布置高压放大器(13),高压放大器(13)下方布置加法器(12),加法器(12)下方布置PI电路(11);分束器(2)下方布置C信号发生器(14);A环形共振器(5)上方布置B探测器(16),B环形共振器(6)下方布置A探测器(9); Among them, the A phase modulator (3) and the B phase modulator (4) are arranged up and down in the center of the silicon substrate, and the A and B phase modulators (3, 4) are arranged on the right side of the A ring resonator (5) distributed up and down. and B ring resonator (6); the left side of A and B phase modulators (3, 4) arranges laser (1), isolator (19) and beam splitter (2) sequentially from left to right, A and B ring On the right side of the resonator (5, 6), a triangular prism (7) and a fluoride wedge cavity (8) are arranged in sequence from left to right; a B signal generator (17) is arranged above the A phase modulator (3), and the B signal is generated B lock-in amplifier (18) is arranged above the B phase modulator (17); A signal generator (15) is arranged below the B phase modulator (4), and A lock-in amplifier (10) is arranged below the A signal generator (15); A high-voltage amplifier (13) is arranged under the high-voltage amplifier (19), an adder (12) is arranged under the high-voltage amplifier (13), and a PI circuit (11) is arranged under the adder (12); a C signal generator is arranged under the beam splitter (2) (14); A detector B (16) is arranged above the A ring resonator (5), and an A detector (9) is arranged below the B ring resonator (6); 激光器(1)与隔离器(19)连接,隔离器(19)与分束器(2)连接,分束器(2)分别与A相位调制器(3)和B相位调制器(4)连接,A相位调制器(3)与A环形共振器(5)连接,B相位调制器(4)与B环形共振器(6)连接,A环形共振器(5)的光输出端经准直器垂直对准三角棱镜(7)的一个侧面, B环形共振器(6)的光输出端经准直器垂直对准三角棱镜(7)的另一个侧面,三角棱镜(7)的底面与氟化物楔形腔(8)通过倏逝场耦合;激光器(1)与高压放大器(13)连接,高压放大器(13)与加法器(12)连接,加法器(12)通过开关(20)与C信号发生器(14)连接,加法器(12)还与PI电路(11)连接,PI电路(11)与A锁相放大器(10)连接,A锁相放大器(10)分别与A信号发生器(15)和A探测器(9)连接,A信号发生器(15)与A相位调制器(3)连接,A探测器(9)与B环形共振器(6)连接;B锁相放大器(18)分别与B信号发生器(17)和B探测器(16)连接,B信号发生器(17)与B相位调制器(4)连接,B探测器(16)与A环形共振器(5)连接。 The laser (1) is connected to the isolator (19), the isolator (19) is connected to the beam splitter (2), and the beam splitter (2) is respectively connected to the A phase modulator (3) and the B phase modulator (4) , the A phase modulator (3) is connected to the A ring resonator (5), the B phase modulator (4) is connected to the B ring resonator (6), and the light output port of the A ring resonator (5) passes through the collimator Vertically align one side of the triangular prism (7), the light output end of the B ring resonator (6) is vertically aligned with the other side of the triangular prism (7) through the collimator, and the bottom surface of the triangular prism (7) is aligned with the fluoride The wedge cavity (8) is coupled through the evanescent field; the laser (1) is connected to the high-voltage amplifier (13), the high-voltage amplifier (13) is connected to the adder (12), and the adder (12) is generated with the C signal through the switch (20) The adder (14) is connected, the adder (12) is also connected with the PI circuit (11), the PI circuit (11) is connected with the A lock-in amplifier (10), and the A lock-in amplifier (10) is respectively connected with the A signal generator (15 ) is connected with A detector (9), A signal generator (15) is connected with A phase modulator (3), A detector (9) is connected with B ring resonator (6); B lock-in amplifier (18) Connect to the B signal generator (17) and the B detector (16) respectively, the B signal generator (17) is connected to the B phase modulator (4), and the B detector (16) is connected to the A ring resonator (5) . 2.根据权利要求1所述的基于高K氟化物谐振腔的谐振式光学陀螺,其特征在于:氟化物楔形腔(8)的楔形角度θ为20°。 2. The resonant optical gyro based on the high-K fluoride resonant cavity according to claim 1, characterized in that: the wedge angle θ of the fluoride wedge cavity (8) is 20°.
CN201410351123.XA 2014-07-23 2014-07-23 Resonant optical gyroscope based on high-K fluoride resonant cavity Expired - Fee Related CN104075703B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201410351123.XA CN104075703B (en) 2014-07-23 2014-07-23 Resonant optical gyroscope based on high-K fluoride resonant cavity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201410351123.XA CN104075703B (en) 2014-07-23 2014-07-23 Resonant optical gyroscope based on high-K fluoride resonant cavity

Publications (2)

Publication Number Publication Date
CN104075703A CN104075703A (en) 2014-10-01
CN104075703B true CN104075703B (en) 2017-01-11

Family

ID=51597139

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201410351123.XA Expired - Fee Related CN104075703B (en) 2014-07-23 2014-07-23 Resonant optical gyroscope based on high-K fluoride resonant cavity

Country Status (1)

Country Link
CN (1) CN104075703B (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105136133B (en) * 2015-08-17 2017-09-22 中北大学 High linearity, combined type wide range resonance type optical fiber gyro
CN105258690B (en) * 2015-10-28 2017-12-26 北京自动化控制设备研究所 A kind of closed loop control method for magnetic resonance gyroscope instrument magnetic resonance excitation magnetic field
CN107917706B (en) * 2017-11-07 2021-03-30 北京航空航天大学 A Gyroscopic Resonant Cavity Structure with Atomic Gas Dispersion
CN109631872B (en) * 2018-12-26 2022-09-30 中国科学技术大学 Resonant optical gyroscope based on bottle-shaped micro resonant cavity
CN117570954A (en) * 2024-01-15 2024-02-20 中北大学 A resonant optical gyroscope and angular velocity measurement method based on broad-spectrum light source

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10290135A (en) * 1997-04-15 1998-10-27 Seiko Epson Corp Crystal substrate etching method
WO2001009993A1 (en) * 1999-08-02 2001-02-08 Junheng Wang A laser with the resonance cavity including a circular cone prism being top in shape
CN1595064A (en) * 2004-06-18 2005-03-16 东南大学 Optical gyroscope with waveguide construction implemented through organic polymer material and method for preparing same

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10290135A (en) * 1997-04-15 1998-10-27 Seiko Epson Corp Crystal substrate etching method
WO2001009993A1 (en) * 1999-08-02 2001-02-08 Junheng Wang A laser with the resonance cavity including a circular cone prism being top in shape
CN1379924A (en) * 1999-08-02 2002-11-13 王俊恒 A laser with a gyro-shaped conical prism in its resonator
CN1595064A (en) * 2004-06-18 2005-03-16 东南大学 Optical gyroscope with waveguide construction implemented through organic polymer material and method for preparing same

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
谐振式陀螺微球腔谐振频率跟踪锁定技术研究;张建辉等;《半导体光电》;20140430;第35卷(第2期);第373-376页 *
谐振式陀螺检测信号调制技术研究;张建辉等;《传感技术学报》;20130731;第26卷(第7期);第946-949页 *

Also Published As

Publication number Publication date
CN104075703A (en) 2014-10-01

Similar Documents

Publication Publication Date Title
JP5784653B2 (en) Transmission mode RFOG and method for detecting rotation in RFOG
JP5096858B2 (en) Optical resonator gyroscope and method for reducing resonance asymmetry error
CN103471579B (en) A kind of angular velocity detection method adopting two-way full reciprocity coupling light electrical oscillator
CN101886925B (en) Multi-wavelength interference type optical fiber gyro based on carrier modulation
Sanders et al. Development of compact resonator fiber optic gyroscopes
CN104075703B (en) Resonant optical gyroscope based on high-K fluoride resonant cavity
US7362443B2 (en) Optical gyro with free space resonator and method for sensing inertial rotation rate
CN102032905B (en) Optical fiber gyroscope with enhanced slow light effect
CN107084713A (en) Method and device for measuring angular velocity based on photoelectric oscillator
Korkishko et al. Interferometric closed-loop fiber-optic gyroscopes
EP1946043B1 (en) Polarizing cavity for rfog and method for sensing rotation rate of resonator
CN112113556B (en) A high-sensitivity resonant micro-optical gyroscope based on self-injection frequency locking and its detection method
Yao et al. Polarimetry fiber optic gyroscope
Zhang et al. Suppression of residual intensity modulation noise in resonator integrated optic gyro
Sanders et al. Improvements of compact resonator fiber optic gyroscopes
CN1228609C (en) Beat frequency detection method for travelling-wave annular resonance cavity of non-mechanical gyro
Ye et al. High-sensitivity angular velocity measurement based on bidirectional coupled optoelectronic oscillator
US11378401B2 (en) Polarization-maintaining fully-reciprocal bi-directional optical carrier microwave resonance system and angular velocity measurement method thereof
Li et al. IFOG based on rhombic optical path difference bias configuration for high-frequency angular vibration measurement
RU2532997C2 (en) Stabilised solid-state laser gyroscope
US7057734B2 (en) Integrated reaction wheel assembly and fiber optic gyro
Lefèvre Ultimate-performance fiber-optic gyroscope: A reality
Du et al. Improvements of depolarized FOG by intra coil birefringent modulating
Liu et al. Progress toward an inertial grade fiber optic gyroscope
CN103743392B (en) A kind of unicoupler double polarizing light fiber gyroscope

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20170111

Termination date: 20170723

CF01 Termination of patent right due to non-payment of annual fee