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CH421911A - Process for crucible-free melt zone treatment of a rod made of crystalline semiconductor material, induction heating coil arrangement for carrying out the process and silicon rod produced by this process - Google Patents

Process for crucible-free melt zone treatment of a rod made of crystalline semiconductor material, induction heating coil arrangement for carrying out the process and silicon rod produced by this process

Info

Publication number
CH421911A
CH421911A CH11064A CH11064A CH421911A CH 421911 A CH421911 A CH 421911A CH 11064 A CH11064 A CH 11064A CH 11064 A CH11064 A CH 11064A CH 421911 A CH421911 A CH 421911A
Authority
CH
Switzerland
Prior art keywords
crucible
carrying
semiconductor material
induction heating
heating coil
Prior art date
Application number
CH11064A
Other languages
German (de)
Inventor
R Crosby Lloyd
M Stewart Herbert
Original Assignee
Dow Corning
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dow Corning filed Critical Dow Corning
Publication of CH421911A publication Critical patent/CH421911A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/16—Heating of the molten zone
    • C30B13/20—Heating of the molten zone by induction, e.g. hot wire technique
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/22—Furnaces without an endless core
    • H05B6/30—Arrangements for remelting or zone melting
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/90—Apparatus characterized by composition or treatment thereof, e.g. surface finish, surface coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Manufacture And Refinement Of Metals (AREA)
CH11064A 1963-01-08 1964-01-07 Process for crucible-free melt zone treatment of a rod made of crystalline semiconductor material, induction heating coil arrangement for carrying out the process and silicon rod produced by this process CH421911A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US250148A US3249406A (en) 1963-01-08 1963-01-08 Necked float zone processing of silicon rod

Publications (1)

Publication Number Publication Date
CH421911A true CH421911A (en) 1966-10-15

Family

ID=22946486

Family Applications (1)

Application Number Title Priority Date Filing Date
CH11064A CH421911A (en) 1963-01-08 1964-01-07 Process for crucible-free melt zone treatment of a rod made of crystalline semiconductor material, induction heating coil arrangement for carrying out the process and silicon rod produced by this process

Country Status (6)

Country Link
US (1) US3249406A (en)
BE (1) BE642180A (en)
CH (1) CH421911A (en)
DE (1) DE1195420B (en)
GB (2) GB1022790A (en)
NL (2) NL302045A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1802524B1 (en) * 1968-10-11 1970-06-04 Siemens Ag Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
EP3945147A1 (en) * 2020-07-28 2022-02-02 Novel Crystal Technology, Inc. Single crystal manufacturing apparatus and method

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3489875A (en) * 1966-10-27 1970-01-13 Ajax Magnethermic Corp Apparatus for induction heating of slabs
US3424886A (en) * 1966-10-27 1969-01-28 Ajax Magnethermic Corp Induction heating
US3612806A (en) * 1970-02-26 1971-10-12 Park Ohio Industries Inc Inductor for internal heating
US3989468A (en) * 1973-11-22 1976-11-02 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods
USRE29824E (en) * 1973-11-22 1978-11-07 Siemens Aktiengesellschaft Apparatus for crucible-free zone melting of semiconductor crystal rods
US4045181A (en) * 1976-12-27 1977-08-30 Monsanto Company Apparatus for zone refining
JP2759604B2 (en) * 1993-10-21 1998-05-28 信越半導体株式会社 Induction heating coil

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL69280C (en) * 1944-10-18
US2481008A (en) * 1945-06-27 1949-09-06 Induction Heating Corp Multiturn split inductor
US2481071A (en) * 1945-07-25 1949-09-06 Chrysler Corp High-frequency induction heating device
DE1031893B (en) * 1952-08-01 1958-06-12 Standard Elektrik Ag Process for the outer shaping of semiconductor arrangements, in particular for rectifier and amplifier purposes with semiconductors made of germanium or silicon
US2972525A (en) * 1953-02-26 1961-02-21 Siemens Ag Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance
US2825120A (en) * 1954-05-11 1958-03-04 Eastman Kodak Co Synthetic filament
GB831305A (en) * 1955-01-11 1960-03-30 Ass Elect Ind Improvements relating to the refining of heavy metals by zone melting
US3002821A (en) * 1956-10-22 1961-10-03 Texas Instruments Inc Means for continuous fabrication of graded junction transistors
US3046100A (en) * 1958-01-20 1962-07-24 Du Pont Zone melting of semiconductive material
US3065062A (en) * 1958-06-03 1962-11-20 Wacker Chemie Gmbh Process for purifying and recrystallizing metals, non-metals, their compounds or alloys
US3023091A (en) * 1959-03-02 1962-02-27 Raytheon Co Methods of heating and levitating molten material
NL249428A (en) * 1959-03-16
NL108958C (en) * 1959-05-29
US2990259A (en) * 1959-09-03 1961-06-27 Paul L Moody Syringe-type single-crystal furnace
US3100250A (en) * 1961-04-07 1963-08-06 Herczog Andrew Zone melting apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1802524B1 (en) * 1968-10-11 1970-06-04 Siemens Ag Device for crucible-free zone melting of a crystalline rod, in particular a semiconductor rod
EP3945147A1 (en) * 2020-07-28 2022-02-02 Novel Crystal Technology, Inc. Single crystal manufacturing apparatus and method
US11725299B2 (en) 2020-07-28 2023-08-15 Novel Crystal Technology, Inc. Single crystal manufacturing apparatus and method
US12163246B2 (en) 2020-07-28 2024-12-10 Novel Crystal Technology, Inc. Single crystal manufacturing apparatus and method

Also Published As

Publication number Publication date
NL302045A (en)
DE1195420B (en) 1965-06-24
NL126241C (en)
GB995399A (en) 1965-06-16
GB1022790A (en) 1966-03-16
BE642180A (en) 1964-07-17
US3249406A (en) 1966-05-03

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