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CH420670A - Messeinrichtung mit einem Elektronenmikroskop - Google Patents

Messeinrichtung mit einem Elektronenmikroskop

Info

Publication number
CH420670A
CH420670A CH175464A CH175464A CH420670A CH 420670 A CH420670 A CH 420670A CH 175464 A CH175464 A CH 175464A CH 175464 A CH175464 A CH 175464A CH 420670 A CH420670 A CH 420670A
Authority
CH
Switzerland
Prior art keywords
measuring device
electron microscope
microscope
electron
measuring
Prior art date
Application number
CH175464A
Other languages
English (en)
Inventor
Victor Crewe Albert
Original Assignee
Atomic Energy Commission
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Atomic Energy Commission filed Critical Atomic Energy Commission
Publication of CH420670A publication Critical patent/CH420670A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/14—Lenses magnetic
    • H01J37/141—Electromagnetic lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/147—Arrangements for directing or deflecting the discharge along a desired path
    • H01J37/15—External mechanical adjustment of electron or ion optical components

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CH175464A 1963-04-22 1964-02-14 Messeinrichtung mit einem Elektronenmikroskop CH420670A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US274878A US3191028A (en) 1963-04-22 1963-04-22 Scanning electron microscope

Publications (1)

Publication Number Publication Date
CH420670A true CH420670A (de) 1966-09-15

Family

ID=23049974

Family Applications (1)

Application Number Title Priority Date Filing Date
CH175464A CH420670A (de) 1963-04-22 1964-02-14 Messeinrichtung mit einem Elektronenmikroskop

Country Status (5)

Country Link
US (1) US3191028A (de)
BE (1) BE646087A (de)
CH (1) CH420670A (de)
DE (1) DE1439828B2 (de)
GB (1) GB1065847A (de)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1074625A (en) * 1963-04-24 1967-07-05 Ass Elect Ind Improvements relating to magnetic spectrometers
GB1052542A (de) * 1964-01-21
US3327114A (en) * 1964-06-23 1967-06-20 Alfred F Diorio Low-angle x-ray diffraction camera comprising releasably connected sections and adjustable beam apertures and stops
US3435207A (en) * 1966-01-06 1969-03-25 Gen Electric Apparatus for measuring velocity of low energy electrons
DE1564674B1 (de) * 1966-07-27 1971-07-29 Siemens AG, 1000 Berlin u 8000 Munchf An der Pumpe arbeitendes Korpuskular strahlgerat, insbesondere Elektronenmikros kop, mit einem Ablenksystem fur den Korpus kularstrahl und einer Objektschleusenvor richtung
FR1553218A (de) * 1967-02-03 1969-01-10
DE1614126B1 (de) * 1967-02-27 1970-11-19 Max Planck Gesellschaft Korpuskularstrahlmikroskop,insbesondere Elektronenmikroskop,mit einer durch das Vorfeld einer Objektivlinse gebildeten Kondensorlinse und einer Bereichsblende
DE1614618B1 (de) * 1967-09-29 1971-01-28 Siemens Ag Korpuskularstrahlgeraet,insbesondere Elektronenmikroskop,mit Mitteln zur farbigen Wiedergabe von ein zu untersuchendes Praeparat charakterisierenden Eigenschaften einer von dem Praeparat kommenden Korpuskularstrahlung
US3628014A (en) * 1969-12-22 1971-12-14 Boeing Co Scanning electron microscope with color display means
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
US3678333A (en) * 1970-06-15 1972-07-18 American Optical Corp Field emission electron gun utilizing means for protecting the field emission tip from high voltage discharges
CA924422A (en) * 1970-09-17 1973-04-10 V. Crewe Albert Electron microscope
JPS5217392B1 (de) * 1970-09-18 1977-05-14
DE2151167C3 (de) * 1971-10-14 1974-05-09 Siemens Ag, 1000 Berlin Und 8000 Muenchen Elektronenstrahl-Mikroanalysator mit Auger-Elektronen-Nachweis
US3783281A (en) * 1972-02-03 1974-01-01 Perkin Elmer Corp Electron microscope
US4020387A (en) * 1972-02-14 1977-04-26 American Optical Corporation Field emission electron gun
US3931519A (en) * 1972-02-14 1976-01-06 American Optical Corporation Field emission electron gun
US3931517A (en) * 1972-02-14 1976-01-06 American Optical Corporation Field emission electron gun
US3925664A (en) * 1972-02-14 1975-12-09 American Optical Corp Field emission electron gun
US3881125A (en) * 1972-08-17 1975-04-29 Tektronix Inc Separable-chamber electron-beam tube including means for puncturing a pressure seal therein
JPS532755B2 (de) * 1973-08-22 1978-01-31
US3932749A (en) * 1974-03-22 1976-01-13 Varian Associates Electron gun
US4399360A (en) * 1980-08-08 1983-08-16 University Patents, Inc. Transmission electron microscope employing sequential pixel acquistion for display
GB9302886D0 (en) * 1993-02-12 1993-03-31 Fisons Plc Multiple-detector system for detecting charged particles
US8314386B2 (en) 2010-03-26 2012-11-20 Uchicago Argonne, Llc High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
JP6124679B2 (ja) * 2013-05-15 2017-05-10 日本電子株式会社 走査荷電粒子顕微鏡および画像取得方法
CN112228494A (zh) * 2020-09-24 2021-01-15 中国科学院微电子研究所 主动减震系统及具有其的扫描电子显微镜

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103584A (en) * 1963-09-10 Electron microanalyzer system
NL53538C (de) * 1937-02-18
US2372422A (en) * 1944-02-17 1945-03-27 Rca Corp Electron microanalyzer
US2418317A (en) * 1944-04-27 1947-04-01 Rca Corp Electronic gun adjustment
US2447260A (en) * 1945-06-21 1948-08-17 Research Corp Electron microspectroscope
US2444700A (en) * 1945-10-26 1948-07-06 Rca Corp Method of operating electron guns
DE1064168B (de) * 1958-06-20 1959-08-27 Zeiss Carl Fa Einrichtung zur Erzeugung und Formung eines Ladungstraegerstrahles

Also Published As

Publication number Publication date
DE1439828B2 (de) 1973-04-19
US3191028A (en) 1965-06-22
DE1439828A1 (de) 1969-01-30
BE646087A (de) 1964-07-31
GB1065847A (en) 1967-04-19

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