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CH428947A - Manufacturing process of an integrated circuit - Google Patents

Manufacturing process of an integrated circuit

Info

Publication number
CH428947A
CH428947A CH126866A CH126866A CH428947A CH 428947 A CH428947 A CH 428947A CH 126866 A CH126866 A CH 126866A CH 126866 A CH126866 A CH 126866A CH 428947 A CH428947 A CH 428947A
Authority
CH
Switzerland
Prior art keywords
integrated circuit
manufacturing process
manufacturing
integrated
circuit
Prior art date
Application number
CH126866A
Other languages
French (fr)
Inventor
Kohl Victor
Huebner Kurt
Original Assignee
Centre Electron Horloger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Electron Horloger filed Critical Centre Electron Horloger
Priority to CH126866A priority Critical patent/CH428947A/en
Priority to AT64367A priority patent/AT262383B/en
Priority to NL6701103A priority patent/NL6701103A/xx
Priority to GB3551/67A priority patent/GB1117713A/en
Priority to BE693141D priority patent/BE693141A/xx
Priority to DE19671619949 priority patent/DE1619949A1/en
Priority to FR92980A priority patent/FR1509644A/en
Priority to SE1347/67A priority patent/SE309453B/xx
Publication of CH428947A publication Critical patent/CH428947A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B33/00—Silicon; Compounds thereof
    • C01B33/02—Silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/24—Deposition of silicon only
    • H10P14/24—
    • H10P14/3411—
    • H10W10/019—
    • H10W10/10—
    • H10W74/43—

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CH126866A 1966-01-31 1966-01-31 Manufacturing process of an integrated circuit CH428947A (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
CH126866A CH428947A (en) 1966-01-31 1966-01-31 Manufacturing process of an integrated circuit
AT64367A AT262383B (en) 1966-01-31 1967-01-23 Process for manufacturing an integrated circuit
NL6701103A NL6701103A (en) 1966-01-31 1967-01-24
GB3551/67A GB1117713A (en) 1966-01-31 1967-01-24 Method of manufacture of an integrated circuit
BE693141D BE693141A (en) 1966-01-31 1967-01-25
DE19671619949 DE1619949A1 (en) 1966-01-31 1967-01-26 Process for manufacturing an integrated circuit
FR92980A FR1509644A (en) 1966-01-31 1967-01-30 Manufacturing process of an integrated circuit
SE1347/67A SE309453B (en) 1966-01-31 1967-01-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH126866A CH428947A (en) 1966-01-31 1966-01-31 Manufacturing process of an integrated circuit

Publications (1)

Publication Number Publication Date
CH428947A true CH428947A (en) 1967-01-31

Family

ID=4206417

Family Applications (1)

Application Number Title Priority Date Filing Date
CH126866A CH428947A (en) 1966-01-31 1966-01-31 Manufacturing process of an integrated circuit

Country Status (8)

Country Link
AT (1) AT262383B (en)
BE (1) BE693141A (en)
CH (1) CH428947A (en)
DE (1) DE1619949A1 (en)
FR (1) FR1509644A (en)
GB (1) GB1117713A (en)
NL (1) NL6701103A (en)
SE (1) SE309453B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2359510A1 (en) * 1976-07-20 1978-02-17 Siemens Ag SEMICONDUCTOR COMPONENT CONTAINING A PROTECTIVE LAYER ACHIEVING A PASSIVATION

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5635024B2 (en) * 1973-12-14 1981-08-14
JPS6022497B2 (en) * 1974-10-26 1985-06-03 ソニー株式会社 semiconductor equipment
JPS5718341B2 (en) * 1974-12-11 1982-04-16
DE102007032577B4 (en) 2007-07-09 2011-07-21 ADC GmbH, 14167 End closure for telecommunications and data technology

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2359510A1 (en) * 1976-07-20 1978-02-17 Siemens Ag SEMICONDUCTOR COMPONENT CONTAINING A PROTECTIVE LAYER ACHIEVING A PASSIVATION

Also Published As

Publication number Publication date
DE1619949A1 (en) 1970-07-30
AT262383B (en) 1968-06-10
BE693141A (en) 1967-07-03
GB1117713A (en) 1968-06-19
FR1509644A (en) 1968-01-12
NL6701103A (en) 1967-08-01
SE309453B (en) 1969-03-24

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