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CH426739A - Process for producing rod-shaped, crystalline semiconductor material by drawing from a melt located in the crucible - Google Patents

Process for producing rod-shaped, crystalline semiconductor material by drawing from a melt located in the crucible

Info

Publication number
CH426739A
CH426739A CH1366663A CH1366663A CH426739A CH 426739 A CH426739 A CH 426739A CH 1366663 A CH1366663 A CH 1366663A CH 1366663 A CH1366663 A CH 1366663A CH 426739 A CH426739 A CH 426739A
Authority
CH
Switzerland
Prior art keywords
crucible
shaped
semiconductor material
crystalline semiconductor
melt located
Prior art date
Application number
CH1366663A
Other languages
German (de)
Inventor
Theodor Dr Rummel
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH426739A publication Critical patent/CH426739A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
    • C30B15/20—Controlling or regulating
    • C30B15/22—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal
    • C30B15/28—Stabilisation or shape controlling of the molten zone near the pulled crystal; Controlling the section of the crystal using weight changes of the crystal or the melt, e.g. flotation methods
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1004—Apparatus with means for measuring, testing, or sensing
    • Y10T117/1008—Apparatus with means for measuring, testing, or sensing with responsive control means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032—Seed pulling

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
CH1366663A 1962-12-07 1963-11-07 Process for producing rod-shaped, crystalline semiconductor material by drawing from a melt located in the crucible CH426739A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES82753A DE1245317B (en) 1962-12-07 1962-12-07 Process for the production of rod-shaped, crystalline semiconductor material by drawing from a melt located in the crucible

Publications (1)

Publication Number Publication Date
CH426739A true CH426739A (en) 1966-12-31

Family

ID=7510573

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1366663A CH426739A (en) 1962-12-07 1963-11-07 Process for producing rod-shaped, crystalline semiconductor material by drawing from a melt located in the crucible

Country Status (5)

Country Link
US (1) US3259467A (en)
CH (1) CH426739A (en)
DE (1) DE1245317B (en)
GB (1) GB1008300A (en)
NL (1) NL300759A (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1434527A (en) * 1972-09-08 1976-05-05 Secr Defence Growth of crystalline material
CH580805A5 (en) * 1975-04-14 1976-10-15 Prolizenz Ag
JPS5912633B2 (en) * 1975-04-28 1984-03-24 （株） ビ−イ−イ− Diameter deviation detection method in Yusho pulling device
DE3735879C2 (en) * 1987-10-23 1995-07-20 Leybold Ag Method and device for sintering ceramic blanks
US5560759A (en) * 1994-11-14 1996-10-01 Lucent Technologies Inc. Core insertion method for making optical fiber preforms and optical fibers fabricated therefrom
JP3109564B2 (en) * 1995-03-27 2000-11-20 大倉電気株式会社 Weight measuring device for grown crystal

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2908004A (en) * 1957-05-10 1959-10-06 Levinson John Temperature control for crystal pulling
DE1153908B (en) * 1958-04-22 1963-09-05 Siemens Ag Method and device for crucible-free zone melting with changing the spacing of the rod ends
GB904100A (en) * 1959-09-11 1962-08-22 Siemens Ag A process for zone-by-zone melting of a rod of semi-conductor material using an induction coil as the heating means and an automatic arrangement for controlling the current through the coil
US2992311A (en) * 1960-09-28 1961-07-11 Siemens Ag Method and apparatus for floatingzone melting of semiconductor rods

Also Published As

Publication number Publication date
US3259467A (en) 1966-07-05
NL300759A (en)
DE1245317B (en) 1967-07-27
GB1008300A (en) 1965-10-27

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