CH391128A - Electrostatic immersion lens - Google Patents

Electrostatic immersion lens

Info

Publication number: CH391128A
Authority: CH; Switzerland
Prior art keywords: immersion lens; electrostatic immersion; electrostatic; lens; immersion
Prior art date: 1961-11-22

Application number

CH1359961A

Other languages

German (de)

Inventor

Heinrich Dr Dueker

Original Assignee

Trueb Taeuber & Co Ag

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1961-11-22

Filing date

1961-11-22

Publication date

1965-04-30

1961-11-22 Application filed by Trueb Taeuber & Co Ag filed Critical Trueb Taeuber & Co Ag

1961-11-22 Priority to CH1359961A priority Critical patent/CH391128A/en

1962-11-05 Priority to DET22969A priority patent/DE1188742B/en

1962-11-13 Priority to GB42812/62A priority patent/GB1025674A/en

1962-11-16 Priority to US238239A priority patent/US3201588A/en

1962-11-21 Priority to FR916135A priority patent/FR1339891A/en

1965-04-30 Publication of CH391128A publication Critical patent/CH391128A/en

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/10—Lenses
- H01J37/12—Lenses electrostatic

Landscapes

Chemical & Material Sciences (AREA)
Analytical Chemistry (AREA)
Electron Beam Exposure (AREA)
Electron Sources, Ion Sources (AREA)

CH1359961A 1961-11-22 1961-11-22 Electrostatic immersion lens CH391128A (en)

Priority Applications (5)

Application Number	Priority Date	Filing Date	Title
CH1359961A CH391128A (en)	1961-11-22	1961-11-22	Electrostatic immersion lens
DET22969A DE1188742B (en)	1961-11-22	1962-11-05	Electrostatic immersion objective for an emission microscope
GB42812/62A GB1025674A (en)	1961-11-22	1962-11-13	Electrostatic immersion objective lens
US238239A US3201588A (en)	1961-11-22	1962-11-16	Electrostatic immersion objective comprising an improved intermediate electrode
FR916135A FR1339891A (en)	1961-11-22	1962-11-21	Electrostatic immersion objective

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
CH1359961A CH391128A (en)	1961-11-22	1961-11-22	Electrostatic immersion lens

Publications (1)

Publication Number	Publication Date
CH391128A true CH391128A (en)	1965-04-30

Family

ID=4393764

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CH1359961A CH391128A (en)	1961-11-22	1961-11-22	Electrostatic immersion lens

Country Status (5)

Country	Link
US (1)	US3201588A (en)
CH (1)	CH391128A (en)
DE (1)	DE1188742B (en)
FR (1)	FR1339891A (en)
GB (1)	GB1025674A (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2842527C3 (en) *	1978-09-29	1981-12-17	Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V., 3400 Göttingen	Electrostatic emission lens
GB9016567D0 (en) *	1990-07-27	1990-09-12	Marconi Space Systems Limited	Ion thruster vector control

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US2410658A (en) *	1943-07-16	1946-11-05	Rca Corp	Limiting aperture for electron image devices
US2536878A (en) *	1948-12-03	1951-01-02	Farrand Optical Co Inc	Electron lens
US2759117A (en) *	1952-05-16	1956-08-14	Farrand Optical Co Inc	Electron lens
US2814729A (en) *	1956-10-01	1957-11-26	Gen Electric	X-ray microscope

1961
- 1961-11-22 CH CH1359961A patent/CH391128A/en unknown
1962
- 1962-11-05 DE DET22969A patent/DE1188742B/en active Pending
- 1962-11-13 GB GB42812/62A patent/GB1025674A/en not_active Expired
- 1962-11-16 US US238239A patent/US3201588A/en not_active Expired - Lifetime
- 1962-11-21 FR FR916135A patent/FR1339891A/en not_active Expired

Also Published As

Publication number	Publication date
DE1188742B (en)	1965-03-11
US3201588A (en)	1965-08-17
FR1339891A (en)	1963-10-11
GB1025674A (en)	1966-04-14

Publication	Publication Date	Title
CH447812A (en)	1967-11-30	Photographic developer
AT241154B (en)	1965-07-12	periscope
CH412384A (en)	1966-04-30	Powerful varifocal lens
AT242088B (en)	1965-08-25	Optical brighteners
CH398117A (en)	1965-08-31	Mirror lens
CH424302A (en)	1966-11-15	Fast catadioptric lens
CH391128A (en)	1965-04-30	Electrostatic immersion lens
FR1328735A (en)	1963-05-31	Photoconductor
AT247145B (en)	1966-05-25	Reflectographic copier
CH437846A (en)	1967-06-15	Wide angle lens
CH391460A (en)	1965-04-30	camera
AT232246B (en)	1964-03-10	cover
CH434789A (en)	1967-04-30	Powerful varifocal lens
FR1309907A (en)	1962-11-23	Mirror
CH407746A (en)	1966-02-15	Developing device
FR1316603A (en)	1963-02-01	Projector
FR1285160A (en)	1962-02-16	Periscope
CH372155A (en)	1963-09-30	Shutter
FR1318665A (en)	1963-02-22	Silent camera
AT232467B (en)	1964-03-25	Optical brighteners
AT231944B (en)	1964-02-25	Optical brighteners
AT231942B (en)	1964-02-25	Optical brighteners
AT231941B (en)	1964-02-25	Optical brighteners
BE620092A (en)	1963-01-11	Photoconductor
FR1283137A (en)	1962-01-27	Kaleidoscope