CA949435A - Liquid phase diffusion technique - Google Patents

Liquid phase diffusion technique

Info

Publication number: CA949435A
Authority: CA; Canada
Prior art keywords: liquid phase; phase diffusion; diffusion technique; technique; liquid
Prior art date: 1970-10-28
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

CA117,620A

Other languages

English (en)

Other versions

CA117620S (fr

Inventor

Marc Ilegems

Morton B. Panish

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

AT&T Corp

Original Assignee

Western Electric Co Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1970-10-28

Filing date

1971-07-07

Publication date

1974-06-18

1971-07-07 Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc

1974-06-18 Application granted granted Critical

1974-06-18 Publication of CA949435A publication Critical patent/CA949435A/en

Status Expired legal-status Critical Current

Classifications

- H10P32/16—
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C10/00—Solid state diffusion of only metal elements or silicon into metallic material surfaces
- C23C10/18—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions
- C23C10/20—Solid state diffusion of only metal elements or silicon into metallic material surfaces using liquids, e.g. salt baths, liquid suspensions only one element being diffused
- C23C10/22—Metal melt containing the element to be diffused
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/914—Doping
- Y10S438/918—Special or nonstandard dopant

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Engineering & Computer Science (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Led Devices (AREA)
Crystals, And After-Treatments Of Crystals (AREA)

CA117,620A 1970-10-28 1971-07-07 Liquid phase diffusion technique Expired CA949435A (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US8479070A	1970-10-28	1970-10-28

Publications (1)

Publication Number	Publication Date
CA949435A true CA949435A (en)	1974-06-18

Family

ID=22187217

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
CA117,620A Expired CA949435A (en)	1970-10-28	1971-07-07	Liquid phase diffusion technique

Country Status (8)

Country	Link
US (1)	US3725149A (de)
BE (1)	BE774390A (de)
CA (1)	CA949435A (de)
DE (1)	DE2153565B2 (de)
FR (1)	FR2110063A5 (de)
GB (1)	GB1363524A (de)
IT (1)	IT942754B (de)
NL (1)	NL7114635A (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE2754833A1 (de) *	1977-12-09	1979-06-13	Ibm Deutschland	Phosphordiffusionsverfahren fuer halbleiteranwendungen
US4624871A (en) *	1985-10-17	1986-11-25	Fiziko-Mekhanichesky Institut Imeni Karpenko Akademii Nauk Ukrainskoi Ssr	Method of producing multicomponent diffusion coatings on metal articles and apparatus for performing same
US20090239363A1 (en) *	2008-03-24	2009-09-24	Honeywell International, Inc.	Methods for forming doped regions in semiconductor substrates using non-contact printing processes and dopant-comprising inks for forming such doped regions using non-contact printing processes
US8053867B2 (en) *	2008-08-20	2011-11-08	Honeywell International Inc.	Phosphorous-comprising dopants and methods for forming phosphorous-doped regions in semiconductor substrates using phosphorous-comprising dopants
US8324089B2 (en) *	2009-07-23	2012-12-04	Honeywell International Inc.	Compositions for forming doped regions in semiconductor substrates, methods for fabricating such compositions, and methods for forming doped regions using such compositions
US8629294B2 (en)	2011-08-25	2014-01-14	Honeywell International Inc.	Borate esters, boron-comprising dopants, and methods of fabricating boron-comprising dopants
US8975170B2 (en)	2011-10-24	2015-03-10	Honeywell International Inc.	Dopant ink compositions for forming doped regions in semiconductor substrates, and methods for fabricating dopant ink compositions

1970
- 1970-10-28 US US00084790A patent/US3725149A/en not_active Expired - Lifetime
1971
- 1971-07-07 CA CA117,620A patent/CA949435A/en not_active Expired
- 1971-10-25 BE BE774390A patent/BE774390A/xx unknown
- 1971-10-25 NL NL7114635A patent/NL7114635A/xx unknown
- 1971-10-26 FR FR7138423A patent/FR2110063A5/fr not_active Expired
- 1971-10-26 IT IT70515/71A patent/IT942754B/it active
- 1971-10-27 DE DE2153565A patent/DE2153565B2/de active Pending
- 1971-10-28 GB GB5013671A patent/GB1363524A/en not_active Expired

Also Published As

Publication number	Publication date
BE774390A (fr)	1972-02-14
US3725149A (en)	1973-04-03
NL7114635A (de)	1972-05-03
DE2153565B2 (de)	1974-01-03
DE2153565A1 (de)	1972-05-10
FR2110063A5 (de)	1972-05-26
IT942754B (it)	1973-04-02
GB1363524A (en)	1974-08-14

Publication	Publication Date	Title
CA950745A (en)	1974-07-09	Carbonated liquid
CA929793A (en)	1973-07-10	Liquid booster device
CA963305A (en)	1975-02-25	Liquid developer
CA951213A (en)	1974-07-16	Plural phase liquid detergent
CA991501A (en)	1976-06-22	Liquid detergents
CA931777A (en)	1973-08-14	Liquid dispenser
CA949435A (en)	1974-06-18	Liquid phase diffusion technique
AU470119B2 (en)	1976-03-04	Liquid detergent
CA848902A (en)	1970-08-11	Liquid developer
AU1099070A (en)	1971-08-05	Liquid agitator
AU447436B2 (en)	1972-06-22	Liquid 2-hydroxy-4-alkoxybenzophenones
CA841440A (en)	1970-05-12	Liquid measures
AU2336670A (en)	1972-06-22	Liquid 2-hydroxy-4-alkoxybenzophenones
CA844422A (en)	1970-06-16	Liquid dispenser
CA832859A (en)	1970-01-27	Liquid dispenser
CA832862A (en)	1970-01-27	Liquid dispenser
CA842495A (en)	1970-05-26	Liquid dispenser
CA843261A (en)	1970-06-02	Liquid dispenser
CA854545A (en)	1970-10-27	Liquid dispenser
CA853950A (en)	1970-10-20	Liquid pumps
CA857244A (en)	1970-12-01	Liquid fuels
CA834795A (en)	1970-02-17	Liquid aerator
AU451096B2 (en)	1972-07-06	Liquid reservoirs
CA848095A (en)	1970-07-28	Liquid device
CA857865A (en)	1970-12-08	Running-in liquid