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CA1028144A - Tow-axis moire fringe displacement transducer - Google Patents

Tow-axis moire fringe displacement transducer

Info

Publication number
CA1028144A
CA1028144A CA235,764A CA235764A CA1028144A CA 1028144 A CA1028144 A CA 1028144A CA 235764 A CA235764 A CA 235764A CA 1028144 A CA1028144 A CA 1028144A
Authority
CA
Canada
Prior art keywords
tow
axis
displacement transducer
moire fringe
fringe displacement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA235,764A
Other languages
English (en)
French (fr)
Inventor
Richard B. Zipin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Corp
Original Assignee
Bendix Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bendix Corp filed Critical Bendix Corp
Application granted granted Critical
Publication of CA1028144A publication Critical patent/CA1028144A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34707—Scales; Discs, e.g. fixation, fabrication, compensation
    • G01D5/34715—Scale reading or illumination devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G01B11/005—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines
    • G01B11/007—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates coordinate measuring machines feeler heads therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CA235,764A 1974-11-25 1975-09-18 Tow-axis moire fringe displacement transducer Expired CA1028144A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US05/526,778 US3957378A (en) 1974-11-25 1974-11-25 Two-axis moire fringe displacement transducer

Publications (1)

Publication Number Publication Date
CA1028144A true CA1028144A (en) 1978-03-21

Family

ID=24098762

Family Applications (1)

Application Number Title Priority Date Filing Date
CA235,764A Expired CA1028144A (en) 1974-11-25 1975-09-18 Tow-axis moire fringe displacement transducer

Country Status (6)

Country Link
US (1) US3957378A (de)
JP (2) JPS5177352A (de)
CA (1) CA1028144A (de)
DE (1) DE2550840C2 (de)
FR (1) FR2292215A1 (de)
GB (1) GB1513898A (de)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4546347A (en) * 1981-05-18 1985-10-08 Mouse Systems Corporation Detector for electro-optical mouse
DE3234471C1 (de) * 1982-09-17 1983-08-25 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
DE3234470C2 (de) * 1982-09-17 1985-11-21 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Mehrkoordinaten-Tastkopf
JPS60250201A (ja) * 1984-05-25 1985-12-10 Agency Of Ind Science & Technol 投影像の二次元的な変位測定装置
US4782327A (en) * 1985-01-02 1988-11-01 Victor B. Kley Computer control
US4942621A (en) * 1988-11-15 1990-07-17 Msc Technologies, Inc. Method for mapping scanned pixel data
US4984287A (en) * 1988-11-15 1991-01-08 Msc Technologies, Inc. Method for orienting a dual mouse optical scanner
EP0392085B1 (de) * 1989-04-12 1992-04-15 Landis & Gyr Betriebs AG Anordnung zur Messung einer Spurabweichung einer bewegbaren Folienbahn
US5390424A (en) * 1990-01-25 1995-02-21 Renishaw Metrology Limited Analogue probe
US5052807A (en) * 1990-06-28 1991-10-01 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Three dimensional moire pattern alignment
US5390423A (en) * 1991-01-22 1995-02-21 Renishaw Plc Analogue probe
DE4105433C2 (de) * 1991-02-21 1994-05-19 Heidenhain Gmbh Dr Johannes Einrichtung zur Konturformprüfung an einer Bearbeitungs- oder Meßmaschine
US5204524A (en) * 1991-03-22 1993-04-20 Mitutoyo Corporation Two-dimensional optical encoder with three gratings in each dimension
US6660997B2 (en) * 2001-04-26 2003-12-09 Creo Srl Absolute position Moiré type encoder for use in a control system
US7256871B2 (en) * 2004-07-27 2007-08-14 Asml Netherlands B.V. Lithographic apparatus and method for calibrating the same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1220152B (de) * 1963-08-23 1966-06-30 Wenczler & Heidenhain Vorrichtung zum verkantungsfehlerfreien Messen von Laengen
US3330964A (en) * 1963-09-09 1967-07-11 Itck Corp Photoelectric coordinate measuring system
US3578979A (en) * 1968-04-23 1971-05-18 Tajima Seisakusho Kk Electrical signal generating apparatus having a scale grid
DE2003492A1 (de) * 1970-01-27 1971-08-12 Leitz Ernst Gmbh Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens
GB1383744A (en) * 1971-06-01 1974-02-12 Ferranti Ltd Indicating devices
US3768911A (en) * 1971-08-17 1973-10-30 Keuffel & Esser Co Electro-optical incremental motion and position indicator
US3806254A (en) * 1971-12-08 1974-04-23 Information Storage Systems Agc servo system having error signal responsive to a non-extinguishable intensity light energy signal
US3867038A (en) * 1972-11-27 1975-02-18 Baird Atomic Inc Optical alignment system
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer

Also Published As

Publication number Publication date
DE2550840C2 (de) 1984-07-26
FR2292215A1 (fr) 1976-06-18
DE2550840A1 (de) 1976-05-26
GB1513898A (en) 1978-06-14
JPS6025912U (ja) 1985-02-21
JPS5177352A (de) 1976-07-05
US3957378A (en) 1976-05-18
FR2292215B1 (de) 1978-05-12

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