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BRPI1007908A2 - instalação de revestimento por plasma e método para revestir ou tratar a superfície de um substrato - Google Patents

instalação de revestimento por plasma e método para revestir ou tratar a superfície de um substrato

Info

Publication number
BRPI1007908A2
BRPI1007908A2 BRPI1007908A BRPI1007908A BRPI1007908A2 BR PI1007908 A2 BRPI1007908 A2 BR PI1007908A2 BR PI1007908 A BRPI1007908 A BR PI1007908A BR PI1007908 A BRPI1007908 A BR PI1007908A BR PI1007908 A2 BRPI1007908 A2 BR PI1007908A2
Authority
BR
Brazil
Prior art keywords
coating
substrate
surface treatment
installation
plasma
Prior art date
Application number
BRPI1007908A
Other languages
English (en)
Inventor
Christoph Hollenstein
Malko Gindrat
Philippe Guittienne
Original Assignee
Sulzer Metco Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sulzer Metco Ag filed Critical Sulzer Metco Ag
Publication of BRPI1007908A2 publication Critical patent/BRPI1007908A2/pt

Links

Classifications

    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/32—Plasma torches using an arc
    • H05H1/34—Details, e.g. electrodes, nozzles
    • H05H1/3405—Arrangements for stabilising or constricting the arc, e.g. by an additional gas flow
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/513—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using plasma jets

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Chemical Vapour Deposition (AREA)
  • Nozzles (AREA)
  • Plasma Technology (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
BRPI1007908A 2009-02-05 2010-01-15 instalação de revestimento por plasma e método para revestir ou tratar a superfície de um substrato BRPI1007908A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP09152189 2009-02-05
PCT/EP2010/050459 WO2010089175A1 (de) 2009-02-05 2010-01-15 Plasmabeschichtungsanlage und verfahren zum beschichten oder behandeln der oberfläche eines substrats

Publications (1)

Publication Number Publication Date
BRPI1007908A2 true BRPI1007908A2 (pt) 2016-02-16

Family

ID=40791345

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI1007908A BRPI1007908A2 (pt) 2009-02-05 2010-01-15 instalação de revestimento por plasma e método para revestir ou tratar a superfície de um substrato

Country Status (9)

Country Link
US (1) US20120100300A1 (pt)
EP (1) EP2394497B1 (pt)
JP (1) JP5654491B2 (pt)
KR (1) KR101750841B1 (pt)
CN (1) CN102388680B (pt)
BR (1) BRPI1007908A2 (pt)
CA (1) CA2750789C (pt)
RU (1) RU2536818C2 (pt)
WO (1) WO2010089175A1 (pt)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2658210A1 (en) * 2008-04-04 2009-10-04 Sulzer Metco Ag Method and apparatus for the coating and for the surface treatment of substrates by means of a plasma beam
DE102012107282A1 (de) 2012-01-17 2013-07-18 Reinhausen Plasma Gmbh Vorrichtung und verfahren zur plasmabehandlung von oberflächen
US9034199B2 (en) 2012-02-21 2015-05-19 Applied Materials, Inc. Ceramic article with reduced surface defect density and process for producing a ceramic article
US9212099B2 (en) 2012-02-22 2015-12-15 Applied Materials, Inc. Heat treated ceramic substrate having ceramic coating and heat treatment for coated ceramics
US9343289B2 (en) 2012-07-27 2016-05-17 Applied Materials, Inc. Chemistry compatible coating material for advanced device on-wafer particle performance
US9865434B2 (en) 2013-06-05 2018-01-09 Applied Materials, Inc. Rare-earth oxide based erosion resistant coatings for semiconductor application
US9850568B2 (en) 2013-06-20 2017-12-26 Applied Materials, Inc. Plasma erosion resistant rare-earth oxide based thin film coatings
KR20180004471A (ko) * 2016-07-04 2018-01-12 세메스 주식회사 표면 처리 방법
RU182054U1 (ru) * 2017-12-28 2018-08-01 федеральное государственное автономное образовательное учреждение высшего образования "Самарский национальный исследовательский университет имени академика С.П. Королева" Устройство для нанесения двухслойного покрытия
US11047035B2 (en) 2018-02-23 2021-06-29 Applied Materials, Inc. Protective yttria coating for semiconductor equipment parts
KR20210068922A (ko) 2019-12-02 2021-06-10 (주)폴리바이오텍 보철물 접합 촉진을 위한 저온 대기압 플라즈마 발생장치
EP4316213B1 (en) * 2021-04-01 2025-05-14 Universiteit Gent A device and method for generating a plasma jet

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US5104634A (en) * 1989-04-20 1992-04-14 Hercules Incorporated Process for forming diamond coating using a silent discharge plasma jet process
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Also Published As

Publication number Publication date
CA2750789A1 (en) 2010-08-12
US20120100300A1 (en) 2012-04-26
RU2011136702A (ru) 2013-03-10
CN102388680A (zh) 2012-03-21
CA2750789C (en) 2018-12-04
KR101750841B1 (ko) 2017-06-26
JP2012516945A (ja) 2012-07-26
WO2010089175A1 (de) 2010-08-12
CN102388680B (zh) 2015-07-08
EP2394497B1 (de) 2017-03-22
EP2394497A1 (de) 2011-12-14
KR20110123750A (ko) 2011-11-15
RU2536818C2 (ru) 2014-12-27
JP5654491B2 (ja) 2015-01-14

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Legal Events

Date Code Title Description
B06F Objections, documents and/or translations needed after an examination request according [chapter 6.6 patent gazette]
B06T Formal requirements before examination [chapter 6.20 patent gazette]
B11E Dismissal acc. art. 34 of ipl - requirements for examination incomplete
B11T Dismissal of application maintained [chapter 11.20 patent gazette]