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BRPI0907766A2 - Método e sistema para análise de dados de espectro - Google Patents

Método e sistema para análise de dados de espectro

Info

Publication number
BRPI0907766A2
BRPI0907766A2 BRPI0907766-9A BRPI0907766A BRPI0907766A2 BR PI0907766 A2 BRPI0907766 A2 BR PI0907766A2 BR PI0907766 A BRPI0907766 A BR PI0907766A BR PI0907766 A2 BRPI0907766 A2 BR PI0907766A2
Authority
BR
Brazil
Prior art keywords
data analysis
spectrum data
spectrum
analysis
data
Prior art date
Application number
BRPI0907766-9A
Other languages
English (en)
Inventor
Daniel Roy Corbett
Paul Gottlieb
Michael James Owen
Andrew Harley Menzies
Original Assignee
Fei Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from AU2008900546A external-priority patent/AU2008900546A0/en
Application filed by Fei Co filed Critical Fei Co
Publication of BRPI0907766A2 publication Critical patent/BRPI0907766A2/pt

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G01N23/2076Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions for spectrometry, i.e. using an analysing crystal, e.g. for measuring X-ray fluorescence spectrum of a sample with wavelength-dispersion, i.e. WDXFS
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • G01N23/2251Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion using incident electron beams, e.g. scanning electron microscopy [SEM]
    • G01N23/2252Measuring emitted X-rays, e.g. electron probe microanalysis [EPMA]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Immunology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
BRPI0907766-9A 2008-02-06 2009-02-06 Método e sistema para análise de dados de espectro BRPI0907766A2 (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AU2008900546A AU2008900546A0 (en) 2008-02-06 A method and system for spectrum data analysis
PCT/US2009/033493 WO2009100404A2 (en) 2008-02-06 2009-02-06 A method and system for spectrum data analysis

Publications (1)

Publication Number Publication Date
BRPI0907766A2 true BRPI0907766A2 (pt) 2015-07-14

Family

ID=40952728

Family Applications (1)

Application Number Title Priority Date Filing Date
BRPI0907766-9A BRPI0907766A2 (pt) 2008-02-06 2009-02-06 Método e sistema para análise de dados de espectro

Country Status (9)

Country Link
US (1) US8880356B2 (pt)
EP (2) EP2538185A3 (pt)
CN (2) CN103776855B (pt)
AU (1) AU2009212187B2 (pt)
BR (1) BRPI0907766A2 (pt)
CA (1) CA2713984C (pt)
RU (1) RU2518230C2 (pt)
WO (1) WO2009100404A2 (pt)
ZA (1) ZA201005582B (pt)

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Also Published As

Publication number Publication date
WO2009100404A3 (en) 2009-10-15
WO2009100404A9 (en) 2009-12-03
CN102084229A (zh) 2011-06-01
US20110144922A1 (en) 2011-06-16
EP2250474A2 (en) 2010-11-17
RU2518230C2 (ru) 2014-06-10
CA2713984C (en) 2016-06-07
CA2713984A1 (en) 2009-08-13
AU2009212187A1 (en) 2009-08-13
EP2538185A2 (en) 2012-12-26
ZA201005582B (en) 2012-01-25
WO2009100404A2 (en) 2009-08-13
EP2538185A3 (en) 2013-10-30
EP2250474A4 (en) 2011-11-02
RU2010135871A (ru) 2012-03-20
CN103776855A (zh) 2014-05-07
AU2009212187B2 (en) 2014-05-01
CN102084229B (zh) 2014-10-15
CN103776855B (zh) 2017-05-31
US8880356B2 (en) 2014-11-04

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Legal Events

Date Code Title Description
B07A Application suspended after technical examination (opinion) [chapter 7.1 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]
B09B Patent application refused [chapter 9.2 patent gazette]

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