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BR9812465A - Método de fotolitografia inteligente - Google Patents

Método de fotolitografia inteligente

Info

Publication number
BR9812465A
BR9812465A BR9812465-0A BR9812465A BR9812465A BR 9812465 A BR9812465 A BR 9812465A BR 9812465 A BR9812465 A BR 9812465A BR 9812465 A BR9812465 A BR 9812465A
Authority
BR
Brazil
Prior art keywords
film
forming
photolithography method
intelligent
matrix
Prior art date
Application number
BR9812465-0A
Other languages
English (en)
Inventor
Yong Han
Young-Rag Do
Joon-Bae Lee
Original Assignee
Samsung Sdi Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Sdi Co Ltd filed Critical Samsung Sdi Co Ltd
Publication of BR9812465A publication Critical patent/BR9812465A/pt

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/20—Manufacture of screens on or from which an image or pattern is formed, picked up, converted or stored; Applying coatings to the vessel
    • H01J9/22—Applying luminescent coatings
    • H01J9/227—Applying luminescent coatings with luminescent material discontinuously arranged, e.g. in dots or lines
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
    • G03F7/2014—Contact or film exposure of light sensitive plates such as lithographic plates or circuit boards, e.g. in a vacuum frame
    • G03F7/2016—Contact mask being integral part of the photosensitive element and subject to destructive removal during post-exposure processing
    • G03F7/2018—Masking pattern obtained by selective application of an ink or a toner, e.g. ink jet printing
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Materials For Photolithography (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)

Abstract

"MéTODO DE FOTOLITOGRAFIA INTELIGENTE" Método de fotolitografia que inclui as etapas de (a) formação de uma película através do revestimento de uma composição de formação de película apresentando uma resina de aglutinação e um material de formação de película em um substrato e secagem do resultante; (b) revestimento de maneira seletiva de uma composição foto-sensitiva compreendendo um fotosensibilizador em somente uma porção pré-determinada da película, de acordo com uma matriz de película desejada; (c) exposição do resultante obtido na etapa (b); e (d) formação de uma matriz de película desejada através do desenvolvimento do resultante exposto. Portanto, uma matriz de película apresentando excelentes características de película pode ser fácil e eficientemente fabricada. O método de fotolitografia pode ser aplicado a qualquer produto que necessite a formação de uma matriz de película, por exemplo, um VFD, CRT, FED ou PDP.
BR9812465-0A 1997-09-18 1998-05-14 Método de fotolitografia inteligente BR9812465A (pt)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019970047602A KR100467673B1 (ko) 1997-09-18 1997-09-18 스마트 포토리소그래피 방법
PCT/KR1998/000121 WO1999014634A1 (en) 1997-09-18 1998-05-14 Smart photolithography

Publications (1)

Publication Number Publication Date
BR9812465A true BR9812465A (pt) 2000-09-19

Family

ID=19521388

Family Applications (1)

Application Number Title Priority Date Filing Date
BR9812465-0A BR9812465A (pt) 1997-09-18 1998-05-14 Método de fotolitografia inteligente

Country Status (7)

Country Link
US (1) US6447983B1 (pt)
JP (1) JP2001516896A (pt)
KR (1) KR100467673B1 (pt)
CN (1) CN1134705C (pt)
BR (1) BR9812465A (pt)
CA (1) CA2303857A1 (pt)
WO (1) WO1999014634A1 (pt)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030091987A1 (en) * 2001-02-22 2003-05-15 Yamamoto Janet K. Materials and methods for detecting, preventing, and treating retroviral infection
EP1767349B1 (en) * 2005-09-27 2008-07-23 Agfa Graphics N.V. Method for making a lithographic printing plate
CN105073912B (zh) 2013-03-25 2017-09-12 电子部品研究院 光敏涂料组合物、使用光敏涂料组合物的涂料导电膜以及形成涂料导电膜的方法
CN114609816B (zh) * 2022-03-04 2023-07-25 Tcl华星光电技术有限公司 显示面板及其制作方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62187848A (ja) 1986-02-10 1987-08-17 Fuotopori Ouka Kk 感光性樹脂表面の粘着防止方法
ES2148264T3 (es) 1992-10-21 2000-10-16 Schablonentechnik Kufstein Ag Maquina rotativa de exposicion para la fabricacion de una plantilla de serigrafia cilindrica.
JP3560356B2 (ja) * 1994-01-31 2004-09-02 株式会社リコー フォトリソグラフィー方法

Also Published As

Publication number Publication date
JP2001516896A (ja) 2001-10-02
KR100467673B1 (ko) 2005-04-06
CA2303857A1 (en) 1999-03-25
CN1279776A (zh) 2001-01-10
KR19990025818A (ko) 1999-04-06
US6447983B1 (en) 2002-09-10
CN1134705C (zh) 2004-01-14
WO1999014634A1 (en) 1999-03-25

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Legal Events

Date Code Title Description
B08F Application dismissed because of non-payment of annual fees [chapter 8.6 patent gazette]

Free format text: REFERENTE A 5A,6A,7A E 8A ANUIDADES.

B08K Patent lapsed as no evidence of payment of the annual fee has been furnished to inpi [chapter 8.11 patent gazette]

Free format text: REFERENTE AO DESPACHO 8.6 PUBLICADO NA RPI 1860 DE 29/08/2006.