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BR9103775A - Sensor de pressao - Google Patents

Sensor de pressao

Info

Publication number
BR9103775A
BR9103775A BR919103775A BR9103775A BR9103775A BR 9103775 A BR9103775 A BR 9103775A BR 919103775 A BR919103775 A BR 919103775A BR 9103775 A BR9103775 A BR 9103775A BR 9103775 A BR9103775 A BR 9103775A
Authority
BR
Brazil
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Application number
BR919103775A
Other languages
English (en)
Inventor
Takao Kojima
Kanehisa Kitsukawa
Toshikatsu Yasuda
Katsuyoshi Mizumoto
Original Assignee
Ngk Spark Plug Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=16860403&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=BR9103775(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Ngk Spark Plug Co filed Critical Ngk Spark Plug Co
Publication of BR9103775A publication Critical patent/BR9103775A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/04—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of resistance-strain gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)
BR919103775A 1990-08-28 1991-08-28 Sensor de pressao BR9103775A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2227410A JP2724419B2 (ja) 1990-08-28 1990-08-28 圧力センサ

Publications (1)

Publication Number Publication Date
BR9103775A true BR9103775A (pt) 1992-05-19

Family

ID=16860403

Family Applications (1)

Application Number Title Priority Date Filing Date
BR919103775A BR9103775A (pt) 1990-08-28 1991-08-28 Sensor de pressao

Country Status (6)

Country Link
US (1) US5201228A (pt)
EP (1) EP0473109B1 (pt)
JP (1) JP2724419B2 (pt)
KR (1) KR920004824A (pt)
BR (1) BR9103775A (pt)
DE (1) DE69111337T2 (pt)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2896725B2 (ja) * 1991-12-26 1999-05-31 株式会社山武 静電容量式圧力センサ
KR940012737A (ko) * 1992-11-06 1994-06-24 루셀 이. 바우만 압력 변환 장치 및 그 제조방법
US5296408A (en) * 1992-12-24 1994-03-22 International Business Machines Corporation Fabrication method for vacuum microelectronic devices
US5483834A (en) * 1993-09-20 1996-01-16 Rosemount Inc. Suspended diaphragm pressure sensor
DE69417247T2 (de) * 1993-09-24 1999-07-08 Rosemount Inc., Eden Prairie, Minn. Drucküberträger mit isoliermembran
US5528452A (en) * 1994-11-22 1996-06-18 Case Western Reserve University Capacitive absolute pressure sensor
US6484585B1 (en) 1995-02-28 2002-11-26 Rosemount Inc. Pressure sensor for a pressure transmitter
US5637802A (en) 1995-02-28 1997-06-10 Rosemount Inc. Capacitive pressure sensor for a pressure transmitted where electric field emanates substantially from back sides of plates
US5731522A (en) * 1997-03-14 1998-03-24 Rosemount Inc. Transmitter with isolation assembly for pressure sensor
GB2307744B (en) * 1995-12-01 1999-12-01 Solartron Group Ltd Pressure sensor
GB9524624D0 (en) * 1995-12-01 1996-01-31 Weston Aerospace Ltd Pressure sensor
US5665899A (en) * 1996-02-23 1997-09-09 Rosemount Inc. Pressure sensor diagnostics in a process transmitter
US5917264A (en) * 1996-09-05 1999-06-29 Nagano Keiki Co Ltd Electrostatic capacitance type transducer and method for producing the same
US5880371A (en) * 1997-01-27 1999-03-09 Texas Instruments Incorporated Pressure transducer apparatus and method for making
US6058780A (en) * 1997-03-20 2000-05-09 Alliedsignal Inc. Capacitive pressure sensor housing having a ceramic base
US6324914B1 (en) 1997-03-20 2001-12-04 Alliedsignal, Inc. Pressure sensor support base with cavity
US5808205A (en) * 1997-04-01 1998-09-15 Rosemount Inc. Eccentric capacitive pressure sensor
US5965821A (en) * 1997-07-03 1999-10-12 Mks Instruments, Inc. Pressure sensor
DE19729785C2 (de) * 1997-07-11 1999-08-19 Micronas Semiconductor Holding Kondensatoranordnung und ihr Herstellungsverfahren
US6387318B1 (en) 1997-12-05 2002-05-14 Alliedsignal, Inc. Glass-ceramic pressure sensor support base and its fabrication
US20040099061A1 (en) 1997-12-22 2004-05-27 Mks Instruments Pressure sensor for detecting small pressure differences and low pressures
US6329740B1 (en) * 1998-12-28 2001-12-11 Ngk Insulators, Ltd. Piezoelectric/electrostrictive device and production method thereof
JP4437336B2 (ja) * 1999-05-14 2010-03-24 キヤノンアネルバ株式会社 静電容量型真空センサ
DE60108217T2 (de) 2000-01-06 2005-12-29 Rosemount Inc., Eden Prairie Kornwachstumsverfahren zur herstellung einer elektrischen verbindung für mikroelektromechanische systeme (mems)
US6561038B2 (en) 2000-01-06 2003-05-13 Rosemount Inc. Sensor with fluid isolation barrier
US6508129B1 (en) * 2000-01-06 2003-01-21 Rosemount Inc. Pressure sensor capsule with improved isolation
US6520020B1 (en) * 2000-01-06 2003-02-18 Rosemount Inc. Method and apparatus for a direct bonded isolated pressure sensor
US6505516B1 (en) 2000-01-06 2003-01-14 Rosemount Inc. Capacitive pressure sensing with moving dielectric
JP3850263B2 (ja) * 2001-10-25 2006-11-29 京セラ株式会社 圧力検出装置用パッケージおよび圧力検出装置
JP3545385B2 (ja) * 2002-01-15 2004-07-21 日本テキサス・インスツルメンツ株式会社 圧力センサパッケージ及びその製造方法
US6848316B2 (en) * 2002-05-08 2005-02-01 Rosemount Inc. Pressure sensor assembly
US7100432B2 (en) * 2002-06-06 2006-09-05 Mineral Lassen Llc Capacitive pressure sensor
JP3681721B2 (ja) * 2002-12-04 2005-08-10 株式会社テムテック研究所 静電容量型のダイヤフラム圧力センサの製造方法
US6993973B2 (en) 2003-05-16 2006-02-07 Mks Instruments, Inc. Contaminant deposition control baffle for a capacitive pressure transducer
US7201057B2 (en) 2004-09-30 2007-04-10 Mks Instruments, Inc. High-temperature reduced size manometer
US7141447B2 (en) 2004-10-07 2006-11-28 Mks Instruments, Inc. Method of forming a seal between a housing and a diaphragm of a capacitance sensor
US7137301B2 (en) 2004-10-07 2006-11-21 Mks Instruments, Inc. Method and apparatus for forming a reference pressure within a chamber of a capacitance sensor
US7204150B2 (en) 2005-01-14 2007-04-17 Mks Instruments, Inc. Turbo sump for use with capacitive pressure sensor
EP2018533B1 (en) * 2006-04-25 2018-10-03 Rosemount, Inc. Pressure sensor using near net shape sintered ceramics
US7911315B2 (en) * 2006-07-28 2011-03-22 Honeywell International Inc. Miniature pressure sensor assembly for catheter
JP5305644B2 (ja) * 2006-12-25 2013-10-02 京セラ株式会社 圧力センサ用パッケージおよびその製造方法、ならびに圧力センサ
JP5159685B2 (ja) * 2009-03-30 2013-03-06 アズビル株式会社 静電容量型圧力センサ
US8763479B1 (en) * 2010-06-11 2014-07-01 The United States Of America As Represented By The Secretary Of The Air Force Mold and sensor cells for a nanocomposite material process control system
JP2012047725A (ja) * 2010-07-30 2012-03-08 Canon Anelva Corp 静電容量圧力センサ
JP5365665B2 (ja) * 2011-06-23 2013-12-11 横河電機株式会社 センサユニット
JP5833752B2 (ja) * 2011-06-29 2015-12-16 インベンセンス, インク.Invensense, Inc. 一部が縦型集積電子回路とともに環境に曝露された密閉封止型ｍｅｍｓデバイス
DE102012200983A1 (de) * 2011-12-23 2013-06-27 Continental Automotive Gmbh Sensorelement mit Luftdruckmessung
FI125447B (en) * 2013-06-04 2015-10-15 Murata Manufacturing Co Improved pressure sensor
JP6452140B2 (ja) * 2014-02-19 2019-01-16 本田技研工業株式会社 距離センサ及び計測方法
WO2017072311A1 (de) * 2015-10-30 2017-05-04 Continental Automotive Gmbh Vorrichtung zur abgasnachbehandlung
US11243127B2 (en) 2016-02-03 2022-02-08 Hutchinson Technology Incorporated Miniature pressure/force sensor with integrated leads
US9896327B2 (en) * 2016-05-19 2018-02-20 Invensense, Inc. CMOS-MEMS structures with out-of-plane MEMS sensing gap
US10598559B2 (en) 2017-06-29 2020-03-24 Rosemount Inc. Pressure sensor assembly
US10996120B1 (en) * 2019-11-06 2021-05-04 Vibration Measurement Solutions, Inc. Pressure sensor
KR102290322B1 (ko) * 2019-11-25 2021-08-19 주식회사 아모센스 정전용량형 압력 센서 및 그 제조 방법

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3750476A (en) * 1967-09-25 1973-08-07 Bissett Berman Corp Pressure transducer
US3993939A (en) * 1975-01-07 1976-11-23 The Bendix Corporation Pressure variable capacitor
US4184189A (en) * 1978-08-14 1980-01-15 Motorola, Inc. Capacitive pressure sensor and method of making it
DE3108300C2 (de) * 1980-03-06 1986-05-28 Robert Bosch Gmbh, 7000 Stuttgart Druckmeßdose und Verfahren zu deren Herstellung
JPS63292032A (ja) * 1987-05-26 1988-11-29 Ngk Insulators Ltd 圧力検出器

Also Published As

Publication number Publication date
JP2724419B2 (ja) 1998-03-09
EP0473109A2 (en) 1992-03-04
EP0473109A3 (en) 1993-07-28
JPH04106442A (ja) 1992-04-08
DE69111337D1 (de) 1995-08-24
DE69111337T2 (de) 1996-01-18
EP0473109B1 (en) 1995-07-19
KR920004824A (ko) 1992-03-28
US5201228A (en) 1993-04-13

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Legal Events

Date Code Title Description
FF Decision: intention to grant
KD Notifcation of receipt (letter patent)
FA4 Application deemed withdrawn (art. 21(1))