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BR9101444A - Sistema e metodo para melhorar a profundidade de campo em litografia fotomecanica - Google Patents

Sistema e metodo para melhorar a profundidade de campo em litografia fotomecanica

Info

Publication number
BR9101444A
BR9101444A BR919101444A BR9101444A BR9101444A BR 9101444 A BR9101444 A BR 9101444A BR 919101444 A BR919101444 A BR 919101444A BR 9101444 A BR9101444 A BR 9101444A BR 9101444 A BR9101444 A BR 9101444A
Authority
BR
Brazil
Prior art keywords
litography
photomechanical
depth
improving
field
Prior art date
Application number
BR919101444A
Other languages
English (en)
Inventor
Robert B Watrous
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of BR9101444A publication Critical patent/BR9101444A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70216—Mask projection systems
    • G03F7/703—Non-planar pattern areas or non-planar masks, e.g. curved masks or substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
    • G03F1/70—Adapting basic layout or design of masks to lithographic process requirements, e.g., second iteration correction of mask patterns for imaging

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
BR919101444A 1990-04-18 1991-04-10 Sistema e metodo para melhorar a profundidade de campo em litografia fotomecanica BR9101444A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US51090690A 1990-04-18 1990-04-18

Publications (1)

Publication Number Publication Date
BR9101444A true BR9101444A (pt) 1991-11-26

Family

ID=24032670

Family Applications (1)

Application Number Title Priority Date Filing Date
BR919101444A BR9101444A (pt) 1990-04-18 1991-04-10 Sistema e metodo para melhorar a profundidade de campo em litografia fotomecanica

Country Status (5)

Country Link
EP (1) EP0453753A3 (pt)
JP (1) JPH04226013A (pt)
KR (1) KR910019132A (pt)
BR (1) BR9101444A (pt)
CA (1) CA2037705A1 (pt)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4232844A1 (de) * 1992-09-30 1994-03-31 Siemens Ag Belichtungsverfahren und Maske für die optische Projektionslithographie
KR100263900B1 (ko) * 1993-03-04 2000-09-01 윤종용 마스크 및 그 제조방법
US5438204A (en) * 1993-12-30 1995-08-01 The Board Of Trustees Of The Leland Stanford, Jr. University Twin-mask, and method and system for using same to pattern microelectronic substrates
GB2291216B (en) * 1994-06-30 1998-01-07 Matsushita Electric Works Ltd Method of manufacturing a printed circuit board
KR100290588B1 (ko) * 1998-07-03 2001-06-01 윤종용 반도체장치의 도전막 패턴 형성방법
US7255978B2 (en) 2000-05-09 2007-08-14 Shipley Company, L.L.C. Multi-level optical structure and method of manufacture
US6756185B2 (en) 2000-05-09 2004-06-29 Shipley Company, L.L.C. Method for making integrated optical waveguides and micromachined features
US20030229875A1 (en) 2002-06-07 2003-12-11 Smith Taber H. Use of models in integrated circuit fabrication
US7853904B2 (en) 2002-06-07 2010-12-14 Cadence Design Systems, Inc. Method and system for handling process related variations for integrated circuits based upon reflections
US7774726B2 (en) 2002-06-07 2010-08-10 Cadence Design Systems, Inc. Dummy fill for integrated circuits
US7363099B2 (en) 2002-06-07 2008-04-22 Cadence Design Systems, Inc. Integrated circuit metrology
US7393755B2 (en) 2002-06-07 2008-07-01 Cadence Design Systems, Inc. Dummy fill for integrated circuits
WO2003104921A2 (en) 2002-06-07 2003-12-18 Praesagus, Inc. Characterization adn reduction of variation for integrated circuits
US7712056B2 (en) 2002-06-07 2010-05-04 Cadence Design Systems, Inc. Characterization and verification for integrated circuit designs
US7124386B2 (en) 2002-06-07 2006-10-17 Praesagus, Inc. Dummy fill for integrated circuits
US7152215B2 (en) 2002-06-07 2006-12-19 Praesagus, Inc. Dummy fill for integrated circuits

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5934101B2 (ja) * 1978-12-27 1984-08-20 株式会社クボタ 排ワラ処理装置
JPS5678122A (en) * 1979-11-30 1981-06-26 Fujitsu Ltd Formation of pattern
JPS60223121A (ja) * 1984-04-19 1985-11-07 Matsushita Electric Ind Co Ltd パタ−ン形成方法
JP2644741B2 (ja) * 1987-01-14 1997-08-25 株式会社日立製作所 プロキシミティ露光方法およびその装置

Also Published As

Publication number Publication date
EP0453753A2 (en) 1991-10-30
KR910019132A (ko) 1991-11-30
JPH04226013A (ja) 1992-08-14
CA2037705A1 (en) 1991-10-19
EP0453753A3 (en) 1992-05-20

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Legal Events

Date Code Title Description
KF Request for proof of payment of annual fee
FD5 Application fees: dismissal - article 86 of industrial property law