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BR9004520A - Chapa sensivel a radiacao e processo para a sua producao - Google Patents

Chapa sensivel a radiacao e processo para a sua producao

Info

Publication number
BR9004520A
BR9004520A BR909004520A BR9004520A BR9004520A BR 9004520 A BR9004520 A BR 9004520A BR 909004520 A BR909004520 A BR 909004520A BR 9004520 A BR9004520 A BR 9004520A BR 9004520 A BR9004520 A BR 9004520A
Authority
BR
Brazil
Prior art keywords
radiation
production
sensitive plate
component
silane compound
Prior art date
Application number
BR909004520A
Other languages
English (en)
Inventor
John Robert Wade
Michael John Pratt
Robert Alexander Wal Johnstone
David Ian Smith
Original Assignee
Du Pont Howson Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont Howson Ltd filed Critical Du Pont Howson Ltd
Publication of BR9004520A publication Critical patent/BR9004520A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0755—Non-macromolecular compounds containing Si-O, Si-C or Si-N bonds

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Printing Plates And Materials Therefor (AREA)
  • Developing Agents For Electrophotography (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Laminated Bodies (AREA)
  • Secondary Cells (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Radio Transmission System (AREA)
  • Control Of Charge By Means Of Generators (AREA)
  • Dc Digital Transmission (AREA)
  • Light Receiving Elements (AREA)
  • Photoreceptors In Electrophotography (AREA)
  • Electromagnets (AREA)
  • Silicon Polymers (AREA)
BR909004520A 1989-09-12 1990-09-11 Chapa sensivel a radiacao e processo para a sua producao BR9004520A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB898920622A GB8920622D0 (en) 1989-09-12 1989-09-12 Improvements in or relating to lithographic printing plates

Publications (1)

Publication Number Publication Date
BR9004520A true BR9004520A (pt) 1991-09-10

Family

ID=10662949

Family Applications (1)

Application Number Title Priority Date Filing Date
BR909004520A BR9004520A (pt) 1989-09-12 1990-09-11 Chapa sensivel a radiacao e processo para a sua producao

Country Status (15)

Country Link
US (1) US5550001A (pt)
EP (1) EP0419018B1 (pt)
JP (1) JP3080644B2 (pt)
AT (1) ATE172798T1 (pt)
AU (1) AU6009590A (pt)
BR (1) BR9004520A (pt)
CA (1) CA2022604A1 (pt)
DE (1) DE69032719T2 (pt)
ES (1) ES2125852T3 (pt)
FI (1) FI904337A7 (pt)
GB (1) GB8920622D0 (pt)
IE (1) IE902807A1 (pt)
NO (1) NO903374L (pt)
NZ (1) NZ234729A (pt)
ZA (1) ZA906360B (pt)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999052018A1 (en) * 1998-04-07 1999-10-14 Euv Limited Liability Corporation Thin layer imaging process for microlithography using radiation at strongly attenuated wavelengths
WO2002004552A1 (en) * 2000-07-06 2002-01-17 Commonwealth Scientific And Industrial Research Organisation A process for modifying the surface of a substrate containing a polymeric material by means of vaporising the surface modifying agent
JP2002160141A (ja) * 2000-11-27 2002-06-04 Mori Seiki Co Ltd 工作機械の冷却装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3924520A (en) * 1974-06-27 1975-12-09 Hercules Inc Preparing lithographic plates utilizing vinyl monomers containing hydrolyzable silane groups
US5215867A (en) * 1983-09-16 1993-06-01 At&T Bell Laboratories Method with gas functionalized plasma developed layer
JPS60169852A (ja) * 1984-02-14 1985-09-03 Fuji Photo Film Co Ltd 湿し水不要ネガ型感光性平版印刷版の製版法
US4981909A (en) * 1985-03-19 1991-01-01 International Business Machines Corporation Plasma-resistant polymeric material, preparation thereof, and use thereof
US4613398A (en) * 1985-06-06 1986-09-23 International Business Machines Corporation Formation of etch-resistant resists through preferential permeation
US4931351A (en) * 1987-01-12 1990-06-05 Eastman Kodak Company Bilayer lithographic process
US4808511A (en) * 1987-05-19 1989-02-28 International Business Machines Corporation Vapor phase photoresist silylation process
DE3811242A1 (de) * 1988-04-02 1989-10-19 Hoechst Ag Im waessrigem alkali loesliche, silanylgruppen in der seitenkette enthaltende bindemittel, verfahren zu deren herstellung sowie lichtempfindliches gemisch, enthaltend diese verbindungen
US5108875A (en) * 1988-07-29 1992-04-28 Shipley Company Inc. Photoresist pattern fabrication employing chemically amplified metalized material

Also Published As

Publication number Publication date
ATE172798T1 (de) 1998-11-15
CA2022604A1 (en) 1991-03-13
NZ234729A (en) 1992-10-28
ES2125852T3 (es) 1999-03-16
GB8920622D0 (en) 1989-10-25
DE69032719T2 (de) 1999-04-22
FI904337A0 (fi) 1990-09-03
JP3080644B2 (ja) 2000-08-28
AU6009590A (en) 1991-03-21
FI904337A7 (fi) 1991-03-13
ZA906360B (en) 1991-06-26
EP0419018A2 (en) 1991-03-27
EP0419018A3 (en) 1992-05-06
DE69032719D1 (de) 1998-12-03
NO903374L (no) 1991-03-13
JPH03107159A (ja) 1991-05-07
NO903374D0 (no) 1990-07-31
US5550001A (en) 1996-08-27
IE902807A1 (en) 1991-03-27
EP0419018B1 (en) 1998-10-28

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