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BR8902002A - Sensor eletromecanico,processo para fabricacao de sensor de semicondutor e processo para producao de sensor eletromecanico - Google Patents

Sensor eletromecanico,processo para fabricacao de sensor de semicondutor e processo para producao de sensor eletromecanico

Info

Publication number
BR8902002A
BR8902002A BR8902002A BR8902002A BR8902002A BR 8902002 A BR8902002 A BR 8902002A BR 8902002 A BR8902002 A BR 8902002A BR 8902002 A BR8902002 A BR 8902002A BR 8902002 A BR8902002 A BR 8902002A
Authority
BR
Brazil
Prior art keywords
sensor
electromechanical
manufacture
production
electromechanical sensor
Prior art date
Application number
BR8902002A
Other languages
English (en)
Inventor
Kurt E Petersen
Phillip W Barth
Joseph R Mallon Jr
Janusz Bryzek
Original Assignee
Schlumberger Ind Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schlumberger Ind Inc filed Critical Schlumberger Ind Inc
Publication of BR8902002A publication Critical patent/BR8902002A/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0618—Overload protection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0073—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a semiconductive diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Pressure Sensors (AREA)
BR8902002A 1988-04-29 1989-04-28 Sensor eletromecanico,processo para fabricacao de sensor de semicondutor e processo para producao de sensor eletromecanico BR8902002A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US18773988A 1988-04-29 1988-04-29

Publications (1)

Publication Number Publication Date
BR8902002A true BR8902002A (pt) 1989-12-05

Family

ID=22690261

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8902002A BR8902002A (pt) 1988-04-29 1989-04-28 Sensor eletromecanico,processo para fabricacao de sensor de semicondutor e processo para producao de sensor eletromecanico

Country Status (3)

Country Link
EP (1) EP0339981A3 (pt)
JP (1) JPH02203233A (pt)
BR (1) BR8902002A (pt)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE59006845D1 (de) * 1990-05-02 1994-09-22 Siemens Ag Kapazitiver Sensor.
DE4028402A1 (de) * 1990-09-07 1992-03-12 Bosch Gmbh Robert Drucksensor
US5189777A (en) * 1990-12-07 1993-03-02 Wisconsin Alumni Research Foundation Method of producing micromachined differential pressure transducers
US5295395A (en) * 1991-02-07 1994-03-22 Hocker G Benjamin Diaphragm-based-sensors
EP0502306A3 (en) * 1991-03-04 1993-01-13 Motorola, Inc. Wafer-bonded semiconductor sensor
US5220838A (en) * 1991-03-28 1993-06-22 The Foxboro Company Overpressure-protected, differential pressure sensor and method of making the same
US5323656A (en) * 1992-05-12 1994-06-28 The Foxboro Company Overpressure-protected, polysilicon, capacitive differential pressure sensor and method of making the same
US5333504A (en) * 1992-09-01 1994-08-02 Rosemount Inc. High overpressure low range pressure sensor
EP0681691B1 (de) * 1993-01-19 1996-07-31 Fraunhofer-Gesellschaft Zur Förderung Der Angewandten Forschung E.V. Drucksensor
FI93059C (fi) * 1993-07-07 1995-02-10 Vaisala Oy Kapasitiivinen paineanturirakenne ja menetelmä sen valmistamiseksi
CN1138136C (zh) * 1998-03-12 2004-02-11 株式会社山武 传感器及其制造方法
JP3588286B2 (ja) * 1999-10-06 2004-11-10 株式会社山武 容量式圧力センサ
DE10031129A1 (de) * 2000-06-30 2002-01-17 Grieshaber Vega Kg Überlastfester Drucksensor
US8511171B2 (en) * 2011-05-23 2013-08-20 General Electric Company Device for measuring environmental forces and method of fabricating the same
FR2982023B1 (fr) * 2011-10-26 2015-03-06 Auxitrol Sa Structure micromecanique a membrane deformable et a protection contre de fortes deformations
JP6034819B2 (ja) * 2014-03-31 2016-11-30 アズビル株式会社 圧力センサチップ
DE102015120074A1 (de) * 2015-11-19 2017-05-24 Endress+Hauser Gmbh+Co. Kg Kapazitiver Differenzdrucksensor und Verfahren zu dessen Herstellung

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4023562A (en) * 1975-09-02 1977-05-17 Case Western Reserve University Miniature pressure transducer for medical use and assembly method
DE2617731C3 (de) * 1976-04-23 1979-06-07 Siemens Ag, 1000 Berlin Und 8000 Muenchen Miniaturdruckmeßwandler
US4065970A (en) * 1976-05-17 1978-01-03 Becton, Dickinson Electronics Company Diffused semiconductor pressure gauge
JPS5780532A (en) * 1980-11-07 1982-05-20 Hitachi Ltd Semiconductor load converter
JPS59125032A (ja) * 1982-12-29 1984-07-19 Fuji Electric Co Ltd 差圧測定装置
US4680606A (en) * 1984-06-04 1987-07-14 Tactile Perceptions, Inc. Semiconductor transducer

Also Published As

Publication number Publication date
EP0339981A2 (en) 1989-11-02
JPH02203233A (ja) 1990-08-13
EP0339981A3 (en) 1991-10-09

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