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BR8303024A - Sistema de transporte de substrato - Google Patents

Sistema de transporte de substrato

Info

Publication number
BR8303024A
BR8303024A BR8303024A BR8303024A BR8303024A BR 8303024 A BR8303024 A BR 8303024A BR 8303024 A BR8303024 A BR 8303024A BR 8303024 A BR8303024 A BR 8303024A BR 8303024 A BR8303024 A BR 8303024A
Authority
BR
Brazil
Prior art keywords
transportation system
substrate transportation
substrate
transportation
Prior art date
Application number
BR8303024A
Other languages
English (en)
Inventor
Victor Kai-Kuo Wang
Original Assignee
Du Pont
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Du Pont filed Critical Du Pont
Publication of BR8303024A publication Critical patent/BR8303024A/pt

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G03F7/22—Exposing sequentially with the same light pattern different positions of the same surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
BR8303024A 1982-06-11 1983-06-08 Sistema de transporte de substrato BR8303024A (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US38753882A 1982-06-11 1982-06-11

Publications (1)

Publication Number Publication Date
BR8303024A true BR8303024A (pt) 1984-01-31

Family

ID=23530307

Family Applications (1)

Application Number Title Priority Date Filing Date
BR8303024A BR8303024A (pt) 1982-06-11 1983-06-08 Sistema de transporte de substrato

Country Status (5)

Country Link
EP (1) EP0096864A3 (pt)
JP (1) JPS5912442A (pt)
AU (1) AU1569083A (pt)
BR (1) BR8303024A (pt)
CA (1) CA1204793A (pt)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4677303A (en) * 1986-01-31 1987-06-30 Colight, A Division Of Canrad-Hanovia, Inc. Automatic printed circuit board imaging system
US4817199A (en) * 1987-07-17 1989-03-28 Rockwell International Corporation Phase locked loop having reduced response time

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2146630A5 (en) * 1971-07-21 1973-03-02 Grace W R Ltd Photo-hardenable printing plate - prodn without hardening prior to etching
US4281922A (en) * 1978-11-14 1981-08-04 Fuji Photo Film Co., Ltd. Plate feeding apparatus for printing apparatus
US4311381A (en) * 1980-03-24 1982-01-19 Schwaab, Inc. Method and apparatus for producing printing patterns
GB2073151A (en) * 1980-03-28 1981-10-14 Tasope Ltd Printing Plate Processing Machine

Also Published As

Publication number Publication date
CA1204793A (en) 1986-05-20
EP0096864A2 (en) 1983-12-28
AU1569083A (en) 1983-12-15
EP0096864A3 (en) 1986-05-14
JPS5912442A (ja) 1984-01-23

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