BE835203A - Fotoresistieve verwijderingssystemen - Google Patents

Fotoresistieve verwijderingssystemen

Info

Publication number: BE835203A
Authority: BE; Belgium
Prior art keywords: removal systems; photo resistive; resistive; photo; removal
Prior art date: 1974-11-04

Application number

BE2054643A

Other languages

English (en)

Inventor

J D Singalewitch

W Reinhardt

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1974-11-04

Filing date

1975-11-04

Publication date

1976-05-04

1975-11-04 Application filed filed Critical

1976-05-04 Publication of BE835203A publication Critical patent/BE835203A/nl

Classifications

- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/261—Alcohols; Phenols
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/50—Solvents
- C11D7/5004—Organic solvents
- C11D7/5018—Halogenated solvents
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23G—CLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
- C23G5/00—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
- C23G5/02—Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/42—Stripping or agents therefor
- G03F7/422—Stripping or agents therefor using liquids only
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/26—Organic compounds containing oxygen
- C11D7/265—Carboxylic acids or salts thereof
- C—CHEMISTRY; METALLURGY
- C11—ANIMAL OR VEGETABLE OILS, FATS, FATTY SUBSTANCES OR WAXES; FATTY ACIDS THEREFROM; DETERGENTS; CANDLES
- C11D—DETERGENT COMPOSITIONS; USE OF SINGLE SUBSTANCES AS DETERGENTS; SOAP OR SOAP-MAKING; RESIN SOAPS; RECOVERY OF GLYCEROL
- C11D7/00—Compositions of detergents based essentially on non-surface-active compounds
- C11D7/22—Organic compounds
- C11D7/28—Organic compounds containing halogen

Landscapes

Chemical & Material Sciences (AREA)
Organic Chemistry (AREA)
Engineering & Computer Science (AREA)
Chemical Kinetics & Catalysis (AREA)
Life Sciences & Earth Sciences (AREA)
Wood Science & Technology (AREA)
Oil, Petroleum & Natural Gas (AREA)
Materials Engineering (AREA)
Emergency Medicine (AREA)
General Chemical & Material Sciences (AREA)
Health & Medical Sciences (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Photosensitive Polymer And Photoresist Processing (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

BE2054643A 1974-11-04 1975-11-04 Fotoresistieve verwijderingssystemen BE835203A (nl)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US52059074A	1974-11-04	1974-11-04

Publications (1)

Publication Number	Publication Date
BE835203A true BE835203A (nl)	1976-05-04

Family

ID=24073269

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
BE2054643A BE835203A (nl)	1974-11-04	1975-11-04	Fotoresistieve verwijderingssystemen

Country Status (3)

Country	Link
US (1)	US4087370A (nl)
BE (1)	BE835203A (nl)
ES (1)	ES442315A1 (nl)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US4187191A (en) *	1978-07-26	1980-02-05	General Motors Corporation	Photoresist stripper with dodecylsulfonic acid and chlorinated solvents
US4246130A (en) *	1979-06-21	1981-01-20	Amchem Products, Inc.	Stripping composition and method for metals
US4267214A (en) *	1979-09-18	1981-05-12	Kelleigh Corporation	Method and apparatus for brominating tacky surfaces of a photopolymer article
US4592816A (en) *	1984-09-26	1986-06-03	Rohm And Haas Company	Electrophoretic deposition process
US4812255A (en) *	1987-03-04	1989-03-14	Gaf Corporation	Paint removing compositions
US5227001A (en) *	1990-10-19	1993-07-13	Integrated Process Equipment Corporation	Integrated dry-wet semiconductor layer removal apparatus and method
US5221362A (en) *	1991-08-23	1993-06-22	E. I. Du Pont De Nemours And Company	Non-halogenated aqueous cleaning systems
JP3390245B2 (ja) *	1993-06-01	2003-03-24	富士通株式会社	洗浄液及び洗浄方法
US5885901A (en) *	1994-08-11	1999-03-23	Texas Instruments Incorporated	Rinsing solution after resist stripping process and method for manufacturing semiconductor device
KR100287173B1 (ko) *	1998-03-13	2001-06-01	윤종용	포토레지스트제거방법및이들을이용한반도체장치의제조방법
US6231678B1 (en) *	1999-12-30	2001-05-15	Alcoa Inc.	Chemical delacquering process
US6419755B1 (en)	1999-12-30	2002-07-16	Alcoa Inc.	Chemical delacquering process
BE1015150A3 (nl) *	2002-10-21	2004-10-05	Sonitron Nv	Verbeterde transducent

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US3988256A (en) *	1974-04-03	1976-10-26	Allied Chemical Corporation	Photoresist stripper rinse

1975
- 1975-11-04 ES ES442315A patent/ES442315A1/es not_active Expired
- 1975-11-04 BE BE2054643A patent/BE835203A/nl unknown
1976
- 1976-04-13 US US05/676,595 patent/US4087370A/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
US4087370A (en)	1978-05-02
ES442315A1 (es)	1977-04-01

Publication	Publication Date	Title
DK671374A (da)	1975-11-10	Serveringssystem
SE7512357L (sv)	1976-05-10	Tvakretsbormssystem
SE7501420L (sv)	1975-08-15	Kopieringsanordning.
AT340757B (de)	1978-01-10	Mehrfachbriefeinheit
NL7507937A (nl)	1976-01-06	Filterinrichting.
SE423697B (sv)	1982-05-24	Dupliceringsapparat
BE835203A (nl)	1976-05-04	Fotoresistieve verwijderingssystemen
DK143925C (da)	1982-04-13	Knapomskifter-byggeelement
SE7510960L (sv)	1976-03-31	Optiskt system
AT336475B (de)	1977-05-10	Drehofenanlage
DK516375A (da)	1976-05-19	Forstovningstorreanleg
NO136445C (no)	1977-09-07	Filteranordning.
SE402395B (sv)	1978-06-26	Fergtelevisionssystem
JPS5131364A (ja)	1976-03-17	Sharyoyojidohensokuki no yuatsuseigyosochi
NL7507453A (nl)	1976-01-06	Kopieer-inrichting.
JPS5129728A (ja)	1976-03-13	Seijonokotonarunenryo no nenshoseigyosochi
NL7501023A (nl)	1975-08-08	Filtreerinrichting.
JPS5134804A (ja)	1976-03-24	Kaitenshikikanetsuro no norojokyosochi
JPS5125880A (ja)	1976-03-03	Aruminiumudenkaisoyokyoku no kenmasochi
JPS5135172A (ja)	1976-03-25	Boorunatsutoshikikajitorihaguruma no kumitsukesochi
JPS5125662A (ja)	1976-03-02	Mudanhensokukitsukisharyo no sukitsudoseigyosochi
JPS5140297A (ja)	1976-04-03	Jidokonhokiniokeruteepuyojuyohiita no nenshokasujokyosochi
SE7409119L (sv)	1976-01-12	Forhalningssystem
NL7410870A (nl)	1976-02-17	Kirlianfotografisch apparaat.
FI55886B (fi)	1979-06-29	System foer sjaelvkompenserad nedsaenkning av flytande konstruktioner