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AUPP156698A0 - New method for hydrogen passivation - Google Patents

New method for hydrogen passivation

Info

Publication number
AUPP156698A0
AUPP156698A0 AUPP1566A AUPP156698A AUPP156698A0 AU PP156698 A0 AUPP156698 A0 AU PP156698A0 AU PP1566 A AUPP1566 A AU PP1566A AU PP156698 A AUPP156698 A AU PP156698A AU PP156698 A0 AUPP156698 A0 AU PP156698A0
Authority
AU
Australia
Prior art keywords
new method
hydrogen passivation
passivation
hydrogen
new
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AUPP1566A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pacific Solar Pty Ltd
Original Assignee
Pacific Solar Pty Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pacific Solar Pty Ltd filed Critical Pacific Solar Pty Ltd
Priority to AUPP1566A priority Critical patent/AUPP156698A0/en
Publication of AUPP156698A0 publication Critical patent/AUPP156698A0/en
Priority to PCT/AU1999/000057 priority patent/WO1999039385A1/en
Priority to AU22594/99A priority patent/AU2259499A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H10P95/94—

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
AUPP1566A 1998-01-30 1998-01-30 New method for hydrogen passivation Abandoned AUPP156698A0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
AUPP1566A AUPP156698A0 (en) 1998-01-30 1998-01-30 New method for hydrogen passivation
PCT/AU1999/000057 WO1999039385A1 (en) 1998-01-30 1999-01-28 Method for hydrogen passivation and multichamber hollow cathode apparatus
AU22594/99A AU2259499A (en) 1998-01-30 1999-01-28 Method for hydrogen passivation and multichamber hollow cathode apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AUPP1566A AUPP156698A0 (en) 1998-01-30 1998-01-30 New method for hydrogen passivation

Publications (1)

Publication Number Publication Date
AUPP156698A0 true AUPP156698A0 (en) 1998-02-19

Family

ID=3805844

Family Applications (1)

Application Number Title Priority Date Filing Date
AUPP1566A Abandoned AUPP156698A0 (en) 1998-01-30 1998-01-30 New method for hydrogen passivation

Country Status (2)

Country Link
AU (1) AUPP156698A0 (en)
WO (1) WO1999039385A1 (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004524678A (en) * 2001-01-16 2004-08-12 フォルシュングツ ウント アプリカツィオーンツラボーア プラスマテヒニック ゲーエムベーハー ドレスデン Plasma excitation processing equipment for planar substrate surface
CA2574122A1 (en) 2004-07-21 2006-02-02 Still River Systems, Inc. A programmable radio frequency waveform generator for a synchrocyclotron
US7179678B1 (en) 2004-08-26 2007-02-20 Hewlett-Packard Development Company, L.P. EBIC response enhancement in type III-VI semiconductor material on silicon
EP2389982A3 (en) 2005-11-18 2012-03-07 Still River Systems, Inc. Charged particle radiation therapy
US8003964B2 (en) 2007-10-11 2011-08-23 Still River Systems Incorporated Applying a particle beam to a patient
US8933650B2 (en) 2007-11-30 2015-01-13 Mevion Medical Systems, Inc. Matching a resonant frequency of a resonant cavity to a frequency of an input voltage
US8581523B2 (en) 2007-11-30 2013-11-12 Mevion Medical Systems, Inc. Interrupted particle source
TW201433331A (en) 2012-09-28 2014-09-01 Mevion Medical Systems Inc Adjusting coil position
CN104813747B (en) 2012-09-28 2018-02-02 梅维昂医疗系统股份有限公司 Use magnetic field flutter focused particle beam
US10254739B2 (en) 2012-09-28 2019-04-09 Mevion Medical Systems, Inc. Coil positioning system
TW201422278A (en) 2012-09-28 2014-06-16 Mevion Medical Systems Inc Control system for a particle accelerator
EP3342462B1 (en) 2012-09-28 2019-05-01 Mevion Medical Systems, Inc. Adjusting energy of a particle beam
TW201424467A (en) 2012-09-28 2014-06-16 Mevion Medical Systems Inc Controlling intensity of a particle beam
CN104813748B (en) 2012-09-28 2019-07-09 梅维昂医疗系统股份有限公司 Focused particle beam
JP6246216B2 (en) 2012-09-28 2017-12-13 メビオン・メディカル・システムズ・インコーポレーテッド Control of particle therapy
CN105103662B (en) 2012-09-28 2018-04-13 梅维昂医疗系统股份有限公司 magnetic field regenerator
US9730308B2 (en) 2013-06-12 2017-08-08 Mevion Medical Systems, Inc. Particle accelerator that produces charged particles having variable energies
CN110237447B (en) 2013-09-27 2021-11-02 梅维昂医疗系统股份有限公司 Particle therapy system
US10675487B2 (en) 2013-12-20 2020-06-09 Mevion Medical Systems, Inc. Energy degrader enabling high-speed energy switching
US9962560B2 (en) 2013-12-20 2018-05-08 Mevion Medical Systems, Inc. Collimator and energy degrader
US9661736B2 (en) 2014-02-20 2017-05-23 Mevion Medical Systems, Inc. Scanning system for a particle therapy system
US9950194B2 (en) 2014-09-09 2018-04-24 Mevion Medical Systems, Inc. Patient positioning system
US10786689B2 (en) 2015-11-10 2020-09-29 Mevion Medical Systems, Inc. Adaptive aperture
CN109803723B (en) 2016-07-08 2021-05-14 迈胜医疗设备有限公司 a particle therapy system
US11103730B2 (en) 2017-02-23 2021-08-31 Mevion Medical Systems, Inc. Automated treatment in particle therapy
EP3645111B1 (en) 2017-06-30 2025-04-23 Mevion Medical Systems, Inc. Configurable collimator controlled using linear motors
JP2022524103A (en) 2019-03-08 2022-04-27 メビオン・メディカル・システムズ・インコーポレーテッド Irradiation by column and generation of treatment plan for it

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4664890A (en) * 1984-06-22 1987-05-12 Kanegafuchi Kagaku Kogyo Kabushiki Kaisha Glow-discharge decomposition apparatus
WO1989003584A1 (en) * 1987-10-14 1989-04-20 Unisearch Limited Multi-electrode vacuum processing chamber
US5490910A (en) * 1992-03-09 1996-02-13 Tulip Memory Systems, Inc. Circularly symmetric sputtering apparatus with hollow-cathode plasma devices
US5711998A (en) * 1996-05-31 1998-01-27 Lam Research Corporation Method of polycrystalline silicon hydrogenation

Also Published As

Publication number Publication date
WO1999039385A1 (en) 1999-08-05

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