AU7786700A - Transport device - Google Patents
Transport deviceInfo
- Publication number
- AU7786700A AU7786700A AU77867/00A AU7786700A AU7786700A AU 7786700 A AU7786700 A AU 7786700A AU 77867/00 A AU77867/00 A AU 77867/00A AU 7786700 A AU7786700 A AU 7786700A AU 7786700 A AU7786700 A AU 7786700A
- Authority
- AU
- Australia
- Prior art keywords
- transport device
- transport
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H10P72/3408—
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19951200 | 1999-10-22 | ||
| DE19951200A DE19951200C2 (en) | 1999-10-22 | 1999-10-22 | transport device |
| PCT/EP2000/009911 WO2001031690A1 (en) | 1999-10-22 | 2000-10-10 | Transport device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| AU7786700A true AU7786700A (en) | 2001-05-08 |
Family
ID=7926710
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AU77867/00A Abandoned AU7786700A (en) | 1999-10-22 | 2000-10-10 | Transport device |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP1222682A1 (en) |
| AU (1) | AU7786700A (en) |
| DE (1) | DE19951200C2 (en) |
| WO (1) | WO2001031690A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE10128712C2 (en) * | 2001-06-13 | 2003-06-18 | Erich Thallner | Device with at least two columns, along which a component can be moved vertically |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63242824A (en) * | 1987-03-25 | 1988-10-07 | Tabai Esupetsuku Kk | Article transporting conveyor |
| JPH0555350A (en) * | 1991-08-28 | 1993-03-05 | Murata Mach Ltd | Device for cleanly holding article in overhead article conveyer device |
| JPH05136110A (en) * | 1991-11-08 | 1993-06-01 | Nec Ibaraki Ltd | Sealing structure of liquid tank device with lifting/ lowering functions |
| JPH061564A (en) * | 1992-06-15 | 1994-01-11 | Kokusai Electric Co Ltd | lift device |
| DE19542646C2 (en) * | 1995-03-28 | 2003-04-30 | Brooks Automation Gmbh | Loading and unloading station for semiconductor processing systems |
| US5664925A (en) * | 1995-07-06 | 1997-09-09 | Brooks Automation, Inc. | Batchloader for load lock |
| US5788458A (en) * | 1995-07-10 | 1998-08-04 | Asyst Technologies, Inc. | Method and apparatus for vertical transfer of a semiconductor wafer cassette |
| US6280134B1 (en) * | 1997-06-17 | 2001-08-28 | Applied Materials, Inc. | Apparatus and method for automated cassette handling |
-
1999
- 1999-10-22 DE DE19951200A patent/DE19951200C2/en not_active Expired - Fee Related
-
2000
- 2000-10-10 AU AU77867/00A patent/AU7786700A/en not_active Abandoned
- 2000-10-10 WO PCT/EP2000/009911 patent/WO2001031690A1/en not_active Ceased
- 2000-10-10 EP EP00967848A patent/EP1222682A1/en not_active Withdrawn
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001031690A1 (en) | 2001-05-03 |
| DE19951200A1 (en) | 2001-05-10 |
| DE19951200C2 (en) | 2003-01-30 |
| EP1222682A1 (en) | 2002-07-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |