AU6753998A - Method for producing planar trenches - Google Patents

Method for producing planar trenches

Info

Publication number: AU6753998A
Authority: AU; Australia
Prior art keywords: producing planar; planar trenches; trenches; producing; planar
Prior art date: 1997-03-26
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU67539/98A

Inventor

Ernst Haakan Sjodin

Anders Karl Sivert Soderbarg

Olof Mikael Zackrisson

Nils Ola Ogren

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Telefonaktiebolaget LM Ericsson AB

Original Assignee

Telefonaktiebolaget LM Ericsson AB

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-03-26

Filing date

1998-03-23

Publication date

1998-10-20

1998-03-23 Application filed by Telefonaktiebolaget LM Ericsson AB filed Critical Telefonaktiebolaget LM Ericsson AB

1998-10-20 Publication of AU6753998A publication Critical patent/AU6753998A/en

Status Abandoned legal-status Critical Current

Classifications

- H10W10/012—
- H10W10/00—
- H10W10/01—
- H10W10/041—
- H10W10/13—
- H10W10/40—

AU67539/98A 1997-03-26 1998-03-23 Method for producing planar trenches Abandoned AU6753998A (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
SE9701154		1997-03-26
SE9701154A SE520115C2 (en)	1997-03-26	1997-03-26	The ditch with flat top
PCT/SE1998/000528 WO1998043293A1 (en)	1997-03-26	1998-03-23	Method for producing planar trenches

Publications (1)

Publication Number	Publication Date
AU6753998A true AU6753998A (en)	1998-10-20

Family

ID=20406360

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU67539/98A Abandoned AU6753998A (en)	1997-03-26	1998-03-23	Method for producing planar trenches

Country Status (9)

Country	Link
EP (1)	EP1018156A1 (en)
JP (1)	JP2001519097A (en)
KR (1)	KR100374455B1 (en)
CN (1)	CN1110848C (en)
AU (1)	AU6753998A (en)
CA (1)	CA2285627A1 (en)
SE (1)	SE520115C2 (en)
TW (1)	TW356579B (en)
WO (1)	WO1998043293A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6498383B2 (en) *	2001-05-23	2002-12-24	International Business Machines Corporation	Oxynitride shallow trench isolation and method of formation
US6461936B1 (en) *	2002-01-04	2002-10-08	Infineon Technologies Ag	Double pullback method of filling an isolation trench
JP2008028357A (en)	2006-07-24	2008-02-07	Hynix Semiconductor Inc	Semiconductor device and manufacturing method thereof
JP4717122B2 (en) *	2009-01-13	2011-07-06	三菱電機株式会社	Method for manufacturing thin film solar cell
CN102468176B (en) *	2010-11-19	2013-12-18	上海华虹Nec电子有限公司	Method for making longitudinal region of super junction device
CN103822735A (en) *	2012-11-16	2014-05-28	无锡华润上华半导体有限公司	Wafer structure for pressure sensors and processing method of water structure
CN107507773B (en) *	2016-06-14	2021-09-17	格科微电子（上海）有限公司	Method for optimizing transistor structure of CMOS image sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB2207281B (en) *	1987-07-24	1992-02-05	Plessey Co Plc	A method of providing refilled trenches
US5175122A (en) *	1991-06-28	1992-12-29	Digital Equipment Corporation	Planarization process for trench isolation in integrated circuit manufacture
US5561073A (en) *	1992-03-13	1996-10-01	Jerome; Rick C.	Method of fabricating an isolation trench for analog bipolar devices in harsh environments
US5627092A (en) *	1994-09-26	1997-05-06	Siemens Aktiengesellschaft	Deep trench dram process on SOI for low leakage DRAM cell
US5683945A (en) *	1996-05-16	1997-11-04	Siemens Aktiengesellschaft	Uniform trench fill recess by means of isotropic etching

1997
- 1997-03-26 SE SE9701154A patent/SE520115C2/en not_active IP Right Cessation
- 1997-04-18 TW TW086105057A patent/TW356579B/en active
1998
- 1998-03-23 CA CA002285627A patent/CA2285627A1/en not_active Abandoned
- 1998-03-23 CN CN98805442A patent/CN1110848C/en not_active Expired - Fee Related
- 1998-03-23 KR KR10-1999-7008655A patent/KR100374455B1/en not_active Expired - Fee Related
- 1998-03-23 EP EP98912851A patent/EP1018156A1/en not_active Withdrawn
- 1998-03-23 JP JP54556198A patent/JP2001519097A/en not_active Abandoned
- 1998-03-23 AU AU67539/98A patent/AU6753998A/en not_active Abandoned
- 1998-03-23 WO PCT/SE1998/000528 patent/WO1998043293A1/en not_active Ceased

Also Published As

Publication number	Publication date
SE520115C2 (en)	2003-05-27
CN1257609A (en)	2000-06-21
JP2001519097A (en)	2001-10-16
SE9701154D0 (en)	1997-03-26
CN1110848C (en)	2003-06-04
KR100374455B1 (en)	2003-03-04
TW356579B (en)	1999-04-21
EP1018156A1 (en)	2000-07-12
CA2285627A1 (en)	1998-10-01
KR20010005591A (en)	2001-01-15
WO1998043293A1 (en)	1998-10-01
SE9701154L (en)	1998-09-27

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