AU6016498A - Semiconductor processing apparatus having linear conveyor system - Google Patents

Semiconductor processing apparatus having linear conveyor system

Info

Publication number: AU6016498A
Authority: AU; Australia
Prior art keywords: processing apparatus; conveyor system; semiconductor processing; linear conveyor; linear
Prior art date: 1997-09-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU60164/98A

Inventor

Kevin W. Coyle

Mark Dix

Kyle Hanson

Wayne J. Schmidt

Daniel J. Woodruff

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Semitool Inc

Original Assignee

Semitool Inc

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1997-09-30

Filing date

1998-01-06

Publication date

1999-04-23

1997-12-15 Priority claimed from US08/990,107 external-priority patent/US6672820B1/en

1998-01-06 Application filed by Semitool Inc filed Critical Semitool Inc

1999-04-23 Publication of AU6016498A publication Critical patent/AU6016498A/en

Status Abandoned legal-status Critical Current

Classifications

- H10P72/0606—
- H10P72/3302—
- H10P72/3404—
- H10P72/3412—

AU60164/98A 1997-09-30 1998-01-06 Semiconductor processing apparatus having linear conveyor system Abandoned AU6016498A (en)

Applications Claiming Priority (5)

Application Number	Priority Date	Filing Date	Title
US94052497A	1997-09-30	1997-09-30
US08940524		1997-09-30
US08990107		1997-12-15
US08/990,107 US6672820B1 (en)	1996-07-15	1997-12-15	Semiconductor processing apparatus having linear conveyer system
PCT/US1998/000132 WO1999017356A1 (en)	1997-09-30	1998-01-06	Semiconductor processing apparatus having linear conveyor system

Publications (1)

Publication Number	Publication Date
AU6016498A true AU6016498A (en)	1999-04-23

Family

ID=27130139

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU60164/98A Abandoned AU6016498A (en)	1997-09-30	1998-01-06	Semiconductor processing apparatus having linear conveyor system

Country Status (5)

Country	Link
EP (1)	EP1027730A1 (en)
JP (1)	JP2001518710A (en)
CN (1)	CN1129175C (en)
AU (1)	AU6016498A (en)
WO (1)	WO1999017356A1 (en)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6168695B1 (en) *	1999-07-12	2001-01-02	Daniel J. Woodruff	Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same
DE19921246C2 (en) *	1999-05-07	2003-06-12	Infineon Technologies Ag	Plant for the production of semiconductor products
TWI228548B (en)	2000-05-26	2005-03-01	Ebara Corp	Apparatus for processing substrate and apparatus for processing treatment surface of substrate
US7214027B2 (en) *	2003-10-16	2007-05-08	Varian Semiconductor Equipment Associates, Inc.	Wafer handler method and system
JP4462912B2 (en) *	2003-12-10	2010-05-12	大日本スクリーン製造株式会社	Substrate processing apparatus and management method of substrate processing apparatus
JP4471708B2 (en) *	2004-03-31	2010-06-02	キヤノンアネルバ株式会社	Substrate transfer device
CN100435314C (en) *	2005-07-12	2008-11-19	Lkt自动化配备私人有限公司	Adjustable Tool Holder
CN100517566C (en) *	2006-08-02	2009-07-22	台湾积体电路制造股份有限公司	Electronic goods shelf
US7901539B2 (en) *	2006-09-19	2011-03-08	Intevac, Inc.	Apparatus and methods for transporting and processing substrates
SG147353A1 (en)	2007-05-07	2008-11-28	Mfg Integration Technology Ltd	Apparatus for object processing
TWI458612B (en) *	2009-11-10	2014-11-01	因特瓦克公司	Linear vacuum manipulator for Z-axis motion and multi-joint arm
ES2459498T3 (en) *	2011-09-30	2014-05-09	Carefusion Germany 326 Gmbh	Order preparation device for pharmacies with universal supply and control module
JP5885528B2 (en) *	2012-02-14	2016-03-15	株式会社安川電機	Transport device
JP6053528B2 (en) *	2013-01-11	2016-12-27	株式会社荏原製作所	Substrate gripping device
EP2865614B1 (en) *	2013-10-25	2017-06-28	Mettler-Toledo Garvens GmbH	Frame for a conveyor belt assembly
US10236197B2 (en) *	2014-11-06	2019-03-19	Applied Materials, Inc.	Processing system containing an isolation region separating a deposition chamber from a treatment chamber
WO2017026256A1 (en) *	2015-08-07	2017-02-16	日本電産サンキョー株式会社	Industrial robot
CN117116825B (en) *	2023-10-19	2024-02-13	昆山科比精工设备有限公司	Feeding and conveying device of silicon wafer jig

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5172803A (en) *	1989-11-01	1992-12-22	Lewin Heinz Ulrich	Conveyor belt with built-in magnetic-motor linear drive
US5664337A (en) *	1996-03-26	1997-09-09	Semitool, Inc.	Automated semiconductor processing systems
US5544421A (en) *	1994-04-28	1996-08-13	Semitool, Inc.	Semiconductor wafer processing system

1998
- 1998-01-06 WO PCT/US1998/000132 patent/WO1999017356A1/en not_active Ceased
- 1998-01-06 JP JP2000514323A patent/JP2001518710A/en active Pending
- 1998-01-06 CN CN98809734.6A patent/CN1129175C/en not_active Expired - Fee Related
- 1998-01-06 AU AU60164/98A patent/AU6016498A/en not_active Abandoned
- 1998-01-06 EP EP98903371A patent/EP1027730A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
JP2001518710A (en)	2001-10-16
EP1027730A1 (en)	2000-08-16
WO1999017356A1 (en)	1999-04-08
CN1272960A (en)	2000-11-08
CN1129175C (en)	2003-11-26

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Legal Events

Date	Code	Title	Description
2000-06-15	MK1	Application lapsed section 142(2)(a) - no request for examination in relevant period