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AU578174B2 - Chemical vapor deposition method - Google Patents

Chemical vapor deposition method

Info

Publication number
AU578174B2
AU578174B2 AU67063/86A AU6706386A AU578174B2 AU 578174 B2 AU578174 B2 AU 578174B2 AU 67063/86 A AU67063/86 A AU 67063/86A AU 6706386 A AU6706386 A AU 6706386A AU 578174 B2 AU578174 B2 AU 578174B2
Authority
AU
Australia
Prior art keywords
vapor deposition
chemical vapor
deposition method
chemical
vapor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU67063/86A
Other versions
AU6706386A (en
Inventor
Junichi Hanna
Hirokazu Ohtoshi
Isamu Shimizu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of AU6706386A publication Critical patent/AU6706386A/en
Application granted granted Critical
Publication of AU578174B2 publication Critical patent/AU578174B2/en
Anticipated expiration legal-status Critical
Expired legal-status Critical Current

Links

AU67063/86A 1985-12-28 1986-12-30 Chemical vapor deposition method Expired AU578174B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP60-298044 1985-12-28
JP29804485 1985-12-28

Publications (2)

Publication Number Publication Date
AU6706386A AU6706386A (en) 1987-07-02
AU578174B2 true AU578174B2 (en) 1988-10-13

Family

ID=33430386

Family Applications (1)

Application Number Title Priority Date Filing Date
AU67063/86A Expired AU578174B2 (en) 1985-12-28 1986-12-30 Chemical vapor deposition method

Country Status (1)

Country Link
AU (1) AU578174B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6632186A (en) * 1985-12-11 1987-06-18 Canon Kabushiki Kaisha Process for the preparation of image-reading photosensor
AU6706186A (en) * 1985-12-28 1987-07-02 Canon Kabushiki Kaisha Multilayer films by optical cvd
AU6691886A (en) * 1985-12-26 1987-07-02 Canon Kabushiki Kaisha Thin-film transistor

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU6632186A (en) * 1985-12-11 1987-06-18 Canon Kabushiki Kaisha Process for the preparation of image-reading photosensor
AU6691886A (en) * 1985-12-26 1987-07-02 Canon Kabushiki Kaisha Thin-film transistor
AU6706186A (en) * 1985-12-28 1987-07-02 Canon Kabushiki Kaisha Multilayer films by optical cvd

Also Published As

Publication number Publication date
AU6706386A (en) 1987-07-02

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