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AU5178898A - Processing system and method for processing discrete sheets - Google Patents

Processing system and method for processing discrete sheets

Info

Publication number
AU5178898A
AU5178898A AU51788/98A AU5178898A AU5178898A AU 5178898 A AU5178898 A AU 5178898A AU 51788/98 A AU51788/98 A AU 51788/98A AU 5178898 A AU5178898 A AU 5178898A AU 5178898 A AU5178898 A AU 5178898A
Authority
AU
Australia
Prior art keywords
processing
discrete sheets
processing system
sheets
processing discrete
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU51788/98A
Inventor
Michael J. Cicak
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Solar Cells Inc
Original Assignee
Solar Cells Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Solar Cells Inc filed Critical Solar Cells Inc
Publication of AU5178898A publication Critical patent/AU5178898A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
AU51788/98A 1997-01-17 1997-11-13 Processing system and method for processing discrete sheets Abandoned AU5178898A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US78498397A 1997-01-17 1997-01-17
US08784983 1997-01-17
PCT/US1997/020727 WO1998031848A1 (en) 1997-01-17 1997-11-13 Processing system and method for processing discrete sheets

Publications (1)

Publication Number Publication Date
AU5178898A true AU5178898A (en) 1998-08-07

Family

ID=25134136

Family Applications (1)

Application Number Title Priority Date Filing Date
AU51788/98A Abandoned AU5178898A (en) 1997-01-17 1997-11-13 Processing system and method for processing discrete sheets

Country Status (2)

Country Link
AU (1) AU5178898A (en)
WO (1) WO1998031848A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6719848B2 (en) * 2001-08-16 2004-04-13 First Solar, Llc Chemical vapor deposition system
DE102010010287A1 (en) 2009-03-04 2010-12-02 Von Ardenne Anlagentechnik Gmbh Device for one-sided coating of flat substrate in vacuum coating system, comprises a coating source in a coating chamber of the vacuum coating system, and a frame provided with a smooth lower side, a reception opening and an inner profile

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4812101A (en) * 1987-04-27 1989-03-14 American Telephone And Telegraph Company, At&T Bell Laboratories Method and apparatus for continuous throughput in a vacuum environment
US5382126A (en) * 1992-03-30 1995-01-17 Leybold Ag Multichamber coating apparatus

Also Published As

Publication number Publication date
WO1998031848A1 (en) 1998-07-23

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