AU5059900A - Device for the non-contact storage of components - Google Patents

Device for the non-contact storage of components

Info

Publication number: AU5059900A
Authority: AU; Australia
Prior art keywords: components; contact storage; storage; contact
Prior art date: 1999-04-14
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU50599/00A

Inventor

Jurgen Hoppner

Josef Zimmermann

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Technische Universitaet Muenchen

Original Assignee

Technische Universitaet Muenchen

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-04-14

Filing date

2000-04-13

Publication date

2000-11-14

2000-04-13 Application filed by Technische Universitaet Muenchen filed Critical Technische Universitaet Muenchen

2000-11-14 Publication of AU5059900A publication Critical patent/AU5059900A/en

Status Abandoned legal-status Critical Current

Classifications

- H10P72/12—
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G54/00—Non-mechanical conveyors not otherwise provided for
- H10P72/17—

AU50599/00A 1999-04-14 2000-04-13 Device for the non-contact storage of components Abandoned AU5059900A (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
DE19916872		1999-04-14
DE19916872A DE19916872C1 (en)	1999-04-14	1999-04-14	Contactless storage device for semiconductor wafers uses levitation sound wafers for supporting wafers in horizontal planes between successive energy nodes
PCT/DE2000/001150 WO2000061467A1 (en)	1999-04-14	2000-04-13	Device for the non-contact storage of components

Publications (1)

Publication Number	Publication Date
AU5059900A true AU5059900A (en)	2000-11-14

Family

ID=7904558

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU50599/00A Abandoned AU5059900A (en)	1999-04-14	2000-04-13	Device for the non-contact storage of components

Country Status (3)

Country	Link
AU (1)	AU5059900A (en)
DE (1)	DE19916872C1 (en)
WO (1)	WO2000061467A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE19916859C1 (en) *	1999-04-14	2001-01-04	Inst Werkzeugmaschinen Und Bet	Device for contactless gripping and positioning of components
DE10039482B4 (en) *	2000-08-08	2016-03-24	Zs-Handling Gmbh	Handler for transporting flat substrates used in the semiconductor industry
DE10260672A1 (en) *	2002-12-23	2004-07-15	Mattson Thermal Products Gmbh	Method and device for the thermal treatment of disk-shaped substrates
DE10352944A1 (en) *	2003-11-11	2005-06-23	Technische Universität München	Device for the contactless transport, handling and storage of components and materials
DE102007016840A1 (en)	2007-04-09	2008-10-16	Zimmermann & Schilp Handhabungstechnik Gmbh	Device for transporting and holding touch-sensitive objects and material
EP4012358A1 (en)	2020-12-10	2022-06-15	Mettler-Toledo Garvens GmbH	Product transport in dynamic inspection systems
WO2024165131A1 (en) *	2023-02-06	2024-08-15	Applied Materials, Inc.	Apparatus and method for storing a plurality of waveguides

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS57189948A (en) *	1981-05-11	1982-11-22	Ibm	Device for floating and holding sheet
JPH08222619A (en) *	1995-02-14	1996-08-30	Toshiba Corp	Semiconductor manufacturing equipment

1999
- 1999-04-14 DE DE19916872A patent/DE19916872C1/en not_active Expired - Lifetime
2000
- 2000-04-13 AU AU50599/00A patent/AU5059900A/en not_active Abandoned
- 2000-04-13 WO PCT/DE2000/001150 patent/WO2000061467A1/en not_active Ceased

Also Published As

Publication number	Publication date
WO2000061467A1 (en)	2000-10-19
DE19916872C1 (en)	2000-04-13

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Legal Events

Date	Code	Title	Description
2002-03-14	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase