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AU3770093A - Pressure sensor and method - Google Patents

Pressure sensor and method

Info

Publication number
AU3770093A
AU3770093A AU37700/93A AU3770093A AU3770093A AU 3770093 A AU3770093 A AU 3770093A AU 37700/93 A AU37700/93 A AU 37700/93A AU 3770093 A AU3770093 A AU 3770093A AU 3770093 A AU3770093 A AU 3770093A
Authority
AU
Australia
Prior art keywords
pressure sensor
sensor
pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU37700/93A
Inventor
Michael Kenneth Andrews
Ian Murray Harris
Paul David Harris
Murray Bruce Moore
Gary Chandler Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Callaghan Innovation Research Ltd
Original Assignee
IND RES Ltd
Industrial Research Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by IND RES Ltd, Industrial Research Ltd filed Critical IND RES Ltd
Publication of AU3770093A publication Critical patent/AU3770093A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N11/00—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties
    • G01N11/02—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material
    • G01N11/04—Investigating flow properties of materials, e.g. viscosity, plasticity; Analysing materials by determining flow properties by measuring flow of the material through a restricted passage, e.g. tube, aperture

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Fluid Pressure (AREA)
AU37700/93A 1992-03-12 1993-03-12 Pressure sensor and method Abandoned AU3770093A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
NZ24075192 1992-03-12
NZ240751 1992-03-12
NZ242475 1992-04-23
NZ24247592 1992-04-23
PCT/NZ1993/000016 WO1993018381A1 (en) 1992-03-12 1993-03-12 Pressure sensor and method

Publications (1)

Publication Number Publication Date
AU3770093A true AU3770093A (en) 1993-10-05

Family

ID=26651029

Family Applications (1)

Application Number Title Priority Date Filing Date
AU37700/93A Abandoned AU3770093A (en) 1992-03-12 1993-03-12 Pressure sensor and method

Country Status (3)

Country Link
JP (1) JPH07504980A (en)
AU (1) AU3770093A (en)
WO (1) WO1993018381A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7287415B2 (en) * 2004-09-30 2007-10-30 Teledyne Licensing, Llc Microelectromechanical system (MEMS) viscosity sensor for fluid health monitoring
JP5118785B2 (en) * 2011-04-12 2013-01-16 パナソニック株式会社 MEMS pressure sensor
JP2014115209A (en) * 2012-12-11 2014-06-26 Seiko Epson Corp Mems element, electronic device, altimeter, electronic apparatus and moving body
US9778238B2 (en) * 2014-09-09 2017-10-03 Ams International Ag Resonant CO2 sensing with mitigation of cross-sensitivities
EP3211393A1 (en) * 2016-02-29 2017-08-30 ETH Zürich Mems device using a released device layer as membrane

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3808480A (en) * 1973-04-16 1974-04-30 Bunker Ramo Capacitive pressure transducer
CH639762A5 (en) * 1980-11-12 1983-11-30 Centre Electron Horloger PRESSURE TRANSDUCER WITH VIBRATING ELEMENT.
US4479070A (en) * 1983-06-10 1984-10-23 Sperry Corporation Vibrating quartz diaphragm pressure sensor
US4523474A (en) * 1983-08-12 1985-06-18 Borg-Warner Corporation Capacitive pressure sensor

Also Published As

Publication number Publication date
JPH07504980A (en) 1995-06-01
WO1993018381A1 (en) 1993-09-16

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