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AU3226793A - Method of modifying contact resistance in semiconductor devices and articles produced thereby - Google Patents

Method of modifying contact resistance in semiconductor devices and articles produced thereby

Info

Publication number
AU3226793A
AU3226793A AU32267/93A AU3226793A AU3226793A AU 3226793 A AU3226793 A AU 3226793A AU 32267/93 A AU32267/93 A AU 32267/93A AU 3226793 A AU3226793 A AU 3226793A AU 3226793 A AU3226793 A AU 3226793A
Authority
AU
Australia
Prior art keywords
semiconductor devices
contact resistance
articles produced
modifying contact
modifying
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU32267/93A
Inventor
James C. Blair
Eric C Eichman
Steven D Marcus
J. B Price
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Materials Research Corp
Original Assignee
Materials Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Materials Research Corp filed Critical Materials Research Corp
Publication of AU3226793A publication Critical patent/AU3226793A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H10D64/0111
AU32267/93A 1991-11-26 1992-11-24 Method of modifying contact resistance in semiconductor devices and articles produced thereby Abandoned AU3226793A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US79853891A 1991-11-26 1991-11-26
US798538 1991-11-26

Publications (1)

Publication Number Publication Date
AU3226793A true AU3226793A (en) 1993-06-28

Family

ID=25173659

Family Applications (1)

Application Number Title Priority Date Filing Date
AU32267/93A Abandoned AU3226793A (en) 1991-11-26 1992-11-24 Method of modifying contact resistance in semiconductor devices and articles produced thereby

Country Status (2)

Country Link
AU (1) AU3226793A (en)
WO (1) WO1993011558A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5342652A (en) * 1992-06-15 1994-08-30 Materials Research Corporation Method of nucleating tungsten on titanium nitride by CVD without silane
JPH0730095A (en) * 1993-06-25 1995-01-31 Mitsubishi Electric Corp Semiconductor device and manufacturing method thereof
DE10054936C1 (en) * 2000-11-06 2002-04-25 Infineon Technologies Ag Production of an integrated circuit comprises forming metallizing regions in a substrate, applying an intermediate layer, removing the layer to form an oxide film, and partially converting the oxide film to produce a conducting connection
US6833556B2 (en) 2002-08-12 2004-12-21 Acorn Technologies, Inc. Insulated gate field effect transistor having passivated schottky barriers to the channel
US7084423B2 (en) 2002-08-12 2006-08-01 Acorn Technologies, Inc. Method for depinning the Fermi level of a semiconductor at an electrical junction and devices incorporating such junctions
GB2526951B (en) 2011-11-23 2016-04-20 Acorn Tech Inc Improving metal contacts to group IV semiconductors by inserting interfacial atomic monolayers
US9620611B1 (en) 2016-06-17 2017-04-11 Acorn Technology, Inc. MIS contact structure with metal oxide conductor
US10170627B2 (en) 2016-11-18 2019-01-01 Acorn Technologies, Inc. Nanowire transistor with source and drain induced by electrical contacts with negative schottky barrier height

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3535176A (en) * 1968-12-19 1970-10-20 Mallory & Co Inc P R Surface conditioning of silicon for electroless nickel plating
JP2776826B2 (en) * 1988-04-15 1998-07-16 株式会社日立製作所 Semiconductor device and manufacturing method thereof
US5028565A (en) * 1989-08-25 1991-07-02 Applied Materials, Inc. Process for CVD deposition of tungsten layer on semiconductor wafer

Also Published As

Publication number Publication date
WO1993011558A1 (en) 1993-06-10

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