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AU3298189A - Membrane structure and method for the manufacture thereof - Google Patents

Membrane structure and method for the manufacture thereof

Info

Publication number
AU3298189A
AU3298189A AU32981/89A AU3298189A AU3298189A AU 3298189 A AU3298189 A AU 3298189A AU 32981/89 A AU32981/89 A AU 32981/89A AU 3298189 A AU3298189 A AU 3298189A AU 3298189 A AU3298189 A AU 3298189A
Authority
AU
Australia
Prior art keywords
manufacture
membrane structure
membrane
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU32981/89A
Inventor
Nils Goran Stemme
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU3298189A publication Critical patent/AU3298189A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0053—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/006—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods
    • B01D67/0062—Inorganic membrane manufacture by inducing porosity into non porous precursor membranes by elimination of segments of the precursor, e.g. nucleation-track membranes, lithography or laser methods by micromachining techniques, e.g. using masking and etching steps, photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D69/00—Semi-permeable membranes for separation processes or apparatus characterised by their form, structure or properties; Manufacturing processes specially adapted therefor
    • B01D69/12—Composite membranes; Ultra-thin membranes
    • B01D69/1216—Three or more layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/0213—Silicon
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/20—Masks or mask blanks for imaging by charged particle beam [CPB] radiation, e.g. by electron beam; Preparation thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
AU32981/89A 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof Abandoned AU3298189A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
SE8800869 1988-03-11
SE8800869A SE463654B (en) 1988-03-11 1988-03-11 MEMBRANE STRUCTURE AS WELL AS MANUFACTURING THEM

Publications (1)

Publication Number Publication Date
AU3298189A true AU3298189A (en) 1989-10-05

Family

ID=20371649

Family Applications (1)

Application Number Title Priority Date Filing Date
AU32981/89A Abandoned AU3298189A (en) 1988-03-11 1989-03-13 Membrane structure and method for the manufacture thereof

Country Status (3)

Country Link
AU (1) AU3298189A (en)
SE (1) SE463654B (en)
WO (1) WO1989008489A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4140922C1 (en) * 1991-12-12 1993-07-29 Danfoss A/S, Nordborg, Dk
US5770076A (en) * 1994-03-07 1998-06-23 The Regents Of The University Of California Micromachined capsules having porous membranes and bulk supports
US5651900A (en) * 1994-03-07 1997-07-29 The Regents Of The University Of California Microfabricated particle filter
US5798042A (en) * 1994-03-07 1998-08-25 Regents Of The University Of California Microfabricated filter with specially constructed channel walls, and containment well and capsule constructed with such filters
DE19521275A1 (en) 1995-06-10 1996-12-12 Leybold Ag Gas passage with a selectively acting passage area and method for producing the passage area
US5938923A (en) * 1997-04-15 1999-08-17 The Regents Of The University Of California Microfabricated filter and capsule using a substrate sandwich
FR2845513B1 (en) * 2002-10-03 2006-08-11 Commissariat Energie Atomique DATA RECORDING DEVICE HAVING MEMBRANE MEMORY MEMORY MEDIUM
FR2868411B1 (en) 2004-04-01 2006-06-16 Commissariat Energie Atomique FLEXIBLE MEMBRANE COMPRISING DETAILS

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB840615A (en) * 1957-10-18 1960-07-06 Multi Metal Wire Cloth Company Filtering septum and method of making it
US3900629A (en) * 1973-09-14 1975-08-19 Bendix Corp Porous laminate and method of manufacture
US4510436A (en) * 1982-07-15 1985-04-09 Southwest Medical Products, Incorporated Dielectric measuring systems

Also Published As

Publication number Publication date
SE8800869D0 (en) 1988-03-11
WO1989008489A1 (en) 1989-09-21
SE8800869L (en) 1989-09-12
SE463654B (en) 1991-01-07

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