AU2605401A - Flexible polishing pad having reduced surface stress - Google Patents

Flexible polishing pad having reduced surface stress

Info

Publication number: AU2605401A
Authority: AU; Australia
Prior art keywords: polishing pad; reduced surface; surface stress; flexible polishing; flexible
Prior art date: 1999-12-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Withdrawn

Application number

AU26054/01A

Inventor

Xuyen Pham

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Lam Research Corp

Original Assignee

Lam Research Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1999-12-30

Filing date

2000-12-28

Publication date

2001-07-16

2000-12-28 Application filed by Lam Research Corp filed Critical Lam Research Corp

2001-07-16 Publication of AU2605401A publication Critical patent/AU2605401A/en

Status Withdrawn legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/11—Lapping tools
- B24B37/20—Lapping pads for working plane surfaces
- B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B21/00—Machines or devices using grinding or polishing belts; Accessories therefor
- B24B21/04—Machines or devices using grinding or polishing belts; Accessories therefor for grinding plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
- B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
- B24D11/02—Backings, e.g. foils, webs, mesh fabrics

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Mechanical Treatment Of Semiconductor (AREA)

AU26054/01A 1999-12-30 2000-12-28 Flexible polishing pad having reduced surface stress Withdrawn AU2605401A (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US09475903		1999-12-30
US09/475,903 US20020077053A1 (en)	1999-12-30	1999-12-30	Flexible polishing pad having reduced surface stress
PCT/US2000/035510 WO2001049449A2 (en)	1999-12-30	2000-12-28	Flexible polishing pad having reduced surface stress

Publications (1)

Publication Number	Publication Date
AU2605401A true AU2605401A (en)	2001-07-16

Family

ID=23889647

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU26054/01A Withdrawn AU2605401A (en)	1999-12-30	2000-12-28	Flexible polishing pad having reduced surface stress

Country Status (3)

Country	Link
US (1)	US20020077053A1 (en)
AU (1)	AU2605401A (en)
WO (1)	WO2001049449A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
EP1594656B1 (en)	2003-02-18	2007-09-12	Parker-Hannifin Corporation	Polishing article for electro-chemical mechanical polishing
TWI238100B (en) *	2003-09-29	2005-08-21	Iv Technologies Co Ltd	Polishing pad and fabricating method thereof
US7349067B2 (en) *	2004-06-21	2008-03-25	Asml Netherlands B.V.	Lithographic apparatus and device manufacturing method
US9180570B2 (en)	2008-03-14	2015-11-10	Nexplanar Corporation	Grooved CMP pad
EP3599050A1 (en) *	2018-07-27	2020-01-29	Steinemann Technology AG	Grinding assembly for a grinding machine

1999
- 1999-12-30 US US09/475,903 patent/US20020077053A1/en not_active Abandoned
2000
- 2000-12-28 AU AU26054/01A patent/AU2605401A/en not_active Withdrawn
- 2000-12-28 WO PCT/US2000/035510 patent/WO2001049449A2/en not_active Ceased

Also Published As

Publication number	Publication date
WO2001049449A2 (en)	2001-07-12
US20020077053A1 (en)	2002-06-20

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Legal Events

Date	Code	Title	Description
2002-02-07	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase