AU2110299A - Linear developer - Google Patents

Linear developer

Info

Publication number: AU2110299A
Authority: AU; Australia
Prior art keywords: linear developer; developer; linear
Prior art date: 1998-01-09
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU21102/99A

Inventor

Gregory M. Gibson

Carl W. Newquist

Ocie T. Snodgrass

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

FAStar Ltd

Original Assignee

FAStar Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1998-01-09

Filing date

1999-01-08

Publication date

1999-07-26

1999-01-08 Application filed by FAStar Ltd filed Critical FAStar Ltd

1999-07-26 Publication of AU2110299A publication Critical patent/AU2110299A/en

Status Abandoned legal-status Critical Current

Classifications

- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03D—APPARATUS FOR PROCESSING EXPOSED PHOTOGRAPHIC MATERIALS; ACCESSORIES THEREFOR
- G03D5/00—Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected
- G03D5/04—Liquid processing apparatus in which no immersion is effected; Washing apparatus in which no immersion is effected using liquid sprays

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Cleaning Or Drying Semiconductors (AREA)
Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Photosensitive Polymer And Photoresist Processing (AREA)

AU21102/99A 1998-01-09 1999-01-08 Linear developer Abandoned AU2110299A (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
US7097198P	1998-01-09	1998-01-09
US60070971		1998-01-09
PCT/US1999/000494 WO1999035535A1 (en)	1998-01-09	1999-01-08	Linear developer

Publications (1)

Publication Number	Publication Date
AU2110299A true AU2110299A (en)	1999-07-26

Family

ID=22098472

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU21102/99A Abandoned AU2110299A (en)	1998-01-09	1999-01-08	Linear developer

Country Status (4)

Country	Link
JP (1)	JP2002501298A (en)
KR (1)	KR20010034009A (en)
AU (1)	AU2110299A (en)
WO (1)	WO1999035535A1 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP3957983B2 (en) *	2001-03-01	2007-08-15	大日本スクリーン製造株式会社	Substrate developing device
US6645699B2 (en)	2001-06-21	2003-11-11	Agfa-Gevaert	Method of processing a lithographic printing plate precursor
EP1271250A3 (en) *	2001-06-21	2005-02-09	Agfa-Gevaert N.V.	Method of developing a lithographic printing plate precursor
US7018481B2 (en)	2002-01-28	2006-03-28	Kabushiki Kaisha Toshiba	Substrate treating method, substrate-processing apparatus, developing method, method of manufacturing a semiconductor device, and method of cleaning a developing solution nozzle
JP5305330B2 (en) *	2008-06-13	2013-10-02	東京エレクトロン株式会社	Ultrasonic development processing method and ultrasonic development processing apparatus
US20100154826A1 (en) *	2008-12-19	2010-06-24	Tokyo Electron Limited	System and Method For Rinse Optimization

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US5309191A (en) *	1992-03-02	1994-05-03	Eastman Kodak Company	Recirculation, replenishment, refresh, recharge and backflush for a photographic processing apparatus
US5625433A (en) *	1994-09-29	1997-04-29	Tokyo Electron Limited	Apparatus and method for developing resist coated on a substrate
JP3227595B2 (en) *	1996-08-20	2001-11-12	東京エレクトロン株式会社	Development processing method and development processing apparatus

1999
- 1999-01-08 AU AU21102/99A patent/AU2110299A/en not_active Abandoned
- 1999-01-08 KR KR1020007007603A patent/KR20010034009A/en not_active Withdrawn
- 1999-01-08 JP JP2000527860A patent/JP2002501298A/en active Pending
- 1999-01-08 WO PCT/US1999/000494 patent/WO1999035535A1/en not_active Ceased

Also Published As

Publication number	Publication date
JP2002501298A (en)	2002-01-15
KR20010034009A (en)	2001-04-25
WO1999035535A1 (en)	1999-07-15

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Legal Events

Date	Code	Title	Description
2000-09-21	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase