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AU2003304270A1 - Transfer device, thin plate-like article transfer method, and thin plate-like article production system - Google Patents

Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Info

Publication number
AU2003304270A1
AU2003304270A1 AU2003304270A AU2003304270A AU2003304270A1 AU 2003304270 A1 AU2003304270 A1 AU 2003304270A1 AU 2003304270 A AU2003304270 A AU 2003304270A AU 2003304270 A AU2003304270 A AU 2003304270A AU 2003304270 A1 AU2003304270 A1 AU 2003304270A1
Authority
AU
Australia
Prior art keywords
thin plate
article
production system
transfer device
transfer method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003304270A
Inventor
Seiichi Fujii
Hidekazu Okutsu
Katsunori Sakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rorze Corp
Original Assignee
Rorze Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rorze Corp filed Critical Rorze Corp
Publication of AU2003304270A1 publication Critical patent/AU2003304270A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H10P72/50—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J18/00—Arms
    • B25J18/002—Arms comprising beam bending compensation means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/023—Cartesian coordinate type
    • B25J9/026—Gantry-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H10P72/3302—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • H10P72/33—

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
AU2003304270A 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system Abandoned AU2003304270A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2003-271050 2003-07-04
JP2003271050 2003-07-04
PCT/JP2003/015411 WO2005002804A1 (en) 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Publications (1)

Publication Number Publication Date
AU2003304270A1 true AU2003304270A1 (en) 2005-01-21

Family

ID=33562640

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003304270A Abandoned AU2003304270A1 (en) 2003-07-04 2003-12-02 Transfer device, thin plate-like article transfer method, and thin plate-like article production system

Country Status (6)

Country Link
JP (1) JP4499038B2 (en)
KR (1) KR101106401B1 (en)
CN (1) CN100407395C (en)
AU (1) AU2003304270A1 (en)
TW (2) TW200502070A (en)
WO (1) WO2005002804A1 (en)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007054939A (en) * 2005-08-26 2007-03-08 Mitsubishi Electric Corp Industrial robot and its transport method
US20080019806A1 (en) * 2006-07-24 2008-01-24 Nyi Oo Myo Small footprint modular processing system
CN101205017B (en) * 2006-12-20 2011-09-28 沈阳新松机器人自动化股份有限公司 Ultrathin glass cleaning carrying robot
CN101646533B (en) * 2007-03-26 2011-06-15 日本电产三协株式会社 Industrial robot and its handling method
US7946800B2 (en) 2007-04-06 2011-05-24 Brooks Automation, Inc. Substrate transport apparatus with multiple independently movable articulated arms
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
JP2009012877A (en) * 2007-06-29 2009-01-22 Ihi Corp Levitation transfer device
JP2010023195A (en) * 2008-07-22 2010-02-04 Nidec Sankyo Corp Industrial robot
DE102008062153A1 (en) * 2008-12-17 2010-12-30 Grenzebach Maschinenbau Gmbh Method and device for rapid transport of glass plates
TWI418810B (en) * 2010-03-26 2013-12-11 Hon Tech Inc Testing machine for multi-layer electronic elements
JP5818345B2 (en) * 2011-04-27 2015-11-18 日本電産サンキョー株式会社 Rotation mechanism, industrial robot, and method of returning origin of rotating body
US10569430B2 (en) 2011-09-16 2020-02-25 Persimmon Technologies Corporation Low variability robot
JP2013074112A (en) * 2011-09-28 2013-04-22 Yaskawa Electric Corp Hand and substrate transfer device
CN102514971A (en) * 2011-12-08 2012-06-27 深圳市鑫联达包装机械有限公司 Transfer system capable of continuously delivering paper and transfer method thereof
JP5614417B2 (en) * 2012-01-05 2014-10-29 株式会社安川電機 Transport system
TWM431163U (en) * 2012-01-31 2012-06-11 Shengjia Prec Co Ltd Glass substrate transportation device
CN102730401B (en) * 2012-06-26 2014-04-02 深圳市华星光电技术有限公司 Substrate transfer device and substrate carrying system
JP5927724B2 (en) * 2012-09-06 2016-06-01 本田技研工業株式会社 Mobile device
CN103663166A (en) * 2013-12-11 2014-03-26 深圳市华星光电技术有限公司 Automatic material carrying system and overhead traveling crane system thereof
WO2015112538A1 (en) 2014-01-21 2015-07-30 Persimmon Technologies, Corp. Substrate transport vacuum platform
CN104440950B (en) * 2014-11-17 2016-03-16 上海华力微电子有限公司 A kind of boiler tube passes protective device and the guard method of sheet manipulator
CN104495357B (en) * 2014-12-12 2017-01-04 南通富士通微电子股份有限公司 A kind of photolithography plate Filtting device
CN104690736B (en) * 2015-02-12 2017-03-08 成都天马微电子有限公司 Mechanical arm and its detecting system and detection method
JP6491515B2 (en) 2015-03-31 2019-03-27 キヤノン株式会社 Automatic assembly apparatus and automatic assembly method
CN104925473B (en) * 2015-05-29 2017-03-01 光驰科技(上海)有限公司 A kind of control method solving substrate conveyance dolly versatility
JP6629012B2 (en) * 2015-08-31 2020-01-15 豊田鉄工株式会社 Work transfer device for heating furnace
CN105417066B (en) * 2015-11-09 2017-12-01 合肥欣奕华智能机器有限公司 Substrate position offset detection and means for correcting and substrate conveying system
CN105583815B (en) * 2016-03-17 2017-12-08 北京新智远恒计量校准技术有限公司 A kind of concrete sample testing inspection robot
US11027949B2 (en) * 2016-05-20 2021-06-08 Murata Machinery, Ltd. Transport vehicle and transport method
CN106216859B (en) * 2016-08-17 2018-02-27 江苏大学 The quick taking device and its method of a kind of flexible loading of laser indirect impact forging
JP6723131B2 (en) * 2016-09-29 2020-07-15 株式会社Ｓｃｒｅｅｎホールディングス Substrate transfer device and substrate transfer method
JP6700149B2 (en) * 2016-09-29 2020-05-27 株式会社Ｓｃｒｅｅｎホールディングス Posture change device
CN106516739B (en) * 2016-10-26 2019-04-16 福耀集团(福建)机械制造有限公司 A kind of glass carrying system based on robot vision
CN106737065B (en) * 2017-01-05 2019-03-15 张家港市铭斯特光电科技有限公司 A kind of glass production line
US10651067B2 (en) * 2017-01-26 2020-05-12 Brooks Automation, Inc. Method and apparatus for substrate transport apparatus position compensation
CN107458108B (en) * 2017-08-25 2023-04-18 浙江正润机械有限公司 Swing rotary mechanism and paperboard transfer deviation-rectifying manipulator
CN111164745B (en) * 2017-10-11 2023-09-12 日商乐华股份有限公司 box opener
CN107934458B (en) * 2017-10-13 2019-09-10 弗埃斯工业技术（苏州）有限公司 Thin plate materials and parts position adjusting mechanism
CN109879052A (en) * 2017-12-06 2019-06-14 沈阳新松机器人自动化股份有限公司 It is a kind of singly to put correction robot and its method for correcting error
JP7181013B2 (en) * 2018-06-20 2022-11-30 Juki株式会社 Electronic component mounting apparatus and electronic component mounting method
CN108818588A (en) * 2018-07-17 2018-11-16 芜湖超源力工业设计有限公司 A kind of bilateral formula clamp device
CN109454640A (en) * 2018-11-14 2019-03-12 惠科股份有限公司 Method for shortening time length of exchange piece
US11767181B2 (en) * 2019-03-14 2023-09-26 Mujin, Inc. Robotic system with handling mechanism and method of operation thereof
JP7299808B2 (en) * 2019-09-19 2023-06-28 川崎重工業株式会社 TILT ADJUSTMENT DEVICE AND ROBOT INCLUDING THE SAME
EP4056330B1 (en) 2019-11-05 2026-01-21 Panasonic Intellectual Property Management Co., Ltd. Robot control method
CN110865620B (en) * 2019-11-27 2022-01-25 郑州旭飞光电科技有限公司 Online sampling inspection system and method for substrate glass and packaging system
CN111660311B (en) * 2020-06-16 2022-05-10 扬州大学 A kind of intelligent egg sorting robot and its operation method
JP7446169B2 (en) * 2020-06-26 2024-03-08 キヤノントッキ株式会社 Substrate transfer device, substrate processing system, substrate transfer method, electronic device manufacturing method, program and storage medium
US11428880B2 (en) * 2020-07-31 2022-08-30 Openlight Photonics, Inc. Optical based placement of an optical compontent using a pick and place machine
CN112171697A (en) * 2020-09-03 2021-01-05 中联重科股份有限公司 Manipulator device and pallet assembly system
CN112660828B (en) * 2020-12-29 2022-03-08 飞马智科信息技术股份有限公司 Liquid crystal panel detection control method replacing Map sensor
WO2022202396A1 (en) * 2021-03-25 2022-09-29 東京エレクトロン株式会社 Substrate transfer device, coating processing device, substrate transfer method, and substrate transfer program
CN114380053A (en) * 2022-03-08 2022-04-22 哈尔滨工业大学 Glass carrying robot
CN118721269A (en) * 2024-07-03 2024-10-01 山东现代庆炀智能装备有限公司 Display panel grabbing robot and display panel production line
CN119795157B (en) * 2024-11-22 2025-12-02 科大讯飞(苏州)科技有限公司 Methods, devices, systems, electronic equipment, and storage media for picking up and putting down components.

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59107882A (en) * 1982-12-09 1984-06-22 三菱電機株式会社 Controller for robot
JPH0517225Y2 (en) * 1986-12-27 1993-05-10
JPH0785819B2 (en) * 1991-09-30 1995-09-20 株式会社栗本鐵工所 Automatic transport device for forging press
JPH09155783A (en) * 1995-12-06 1997-06-17 Shin Meiwa Ind Co Ltd Lifting device and robot equipped with lifting device
JPH11188669A (en) * 1997-12-25 1999-07-13 Mitsubishi Electric Corp Transfer device
JP2000183128A (en) * 1998-12-17 2000-06-30 Komatsu Ltd Control device for work transfer device
TW457173B (en) * 1998-12-10 2001-10-01 Komatsu Mfg Co Ltd Work carrier device and attitude holding method of work carrier device
JP4540201B2 (en) 2000-09-13 2010-09-08 独立行政法人産業技術総合研究所 Method for manufacturing semiconductor device having ZnO-based oxide semiconductor layer
JP2002093882A (en) * 2000-09-20 2002-03-29 Olympus Optical Co Ltd Substrate-transferring device and substrate-inspecting system
KR100577622B1 (en) * 2001-12-04 2006-05-10 로제 가부시키가이샤 Device for temporarily loading, keeping and unloading a container

Also Published As

Publication number Publication date
CN100407395C (en) 2008-07-30
TWI348447B (en) 2011-09-11
JP4499038B2 (en) 2010-07-07
KR101106401B1 (en) 2012-01-17
JPWO2005004230A1 (en) 2006-11-09
WO2005002804A1 (en) 2005-01-13
TW200521056A (en) 2005-07-01
TW200502070A (en) 2005-01-16
KR20060118394A (en) 2006-11-23
CN1816907A (en) 2006-08-09

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase