AU2003242400A1 - Polisher - Google Patents

Polisher

Info

Publication number: AU2003242400A1
Authority: AU; Australia
Prior art keywords: polisher
Prior art date: 2002-06-17
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Abandoned

Application number

AU2003242400A

Inventor

Kazuhisa Arai

Kazunori Ishikawa

Yoshinori Mitsui

Kazuya Miyazaki

Akio Tsumagari

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Disco Corp

Original Assignee

Disco Corp

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2002-06-17

Filing date

2003-06-13

Publication date

2003-12-31

2003-06-13 Application filed by Disco Corp filed Critical Disco Corp

2003-12-31 Publication of AU2003242400A1 publication Critical patent/AU2003242400A1/en

Status Abandoned legal-status Critical Current

Classifications

- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
- H10P52/402—

Landscapes

Engineering & Computer Science (AREA)
Mechanical Engineering (AREA)
Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Mechanical Treatment Of Semiconductor (AREA)
Grinding-Machine Dressing And Accessory Apparatuses (AREA)

AU2003242400A 2002-06-17 2003-06-13 Polisher Abandoned AU2003242400A1 (en)

Applications Claiming Priority (3)

Application Number	Priority Date	Filing Date	Title
JP2002-175623		2002-06-17
JP2002175623A JP2004022804A (en)	2002-06-17	2002-06-17	Polishing equipment
PCT/JP2003/007555 WO2003107408A1 (en)	2002-06-17	2003-06-13	Polisher

Publications (1)

Publication Number	Publication Date
AU2003242400A1 true AU2003242400A1 (en)	2003-12-31

Family

ID=29728046

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
AU2003242400A Abandoned AU2003242400A1 (en)	2002-06-17	2003-06-13	Polisher

Country Status (3)

Country	Link
JP (1)	JP2004022804A (en)
AU (1)	AU2003242400A1 (en)
WO (1)	WO2003107408A1 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
WO2006098141A1 (en)	2005-03-16	2006-09-21	Asahi Glass Company, Limited	Abrasive for semiconductor integrated circuit device, method for polishing semiconductor integrated circuit device and semiconductor integrated circuit device manufacturing method
KR101146696B1 (en)	2009-12-18	2012-05-22	주식회사 엘지실트론	Apparatus and method for supplying wafer polishing slurry
JP2015062987A (en) *	2013-09-26	2015-04-09	株式会社ディスコ	Method for sticking polishing pad
US10875149B2 (en) *	2017-03-30	2020-12-29	Taiwan Semiconductor Manufacturing Co., Ltd.	Apparatus and method for timed dispensing various slurry components
JP6901905B2 (en) *	2017-05-11	2021-07-14	株式会社ディスコ	Polishing liquid manufacturing method
JP6920141B2 (en)	2017-09-05	2021-08-18	株式会社ディスコ	Polishing equipment
JP7520457B2 (en)	2020-07-30	2024-07-23	株式会社ディスコ	Polishing Fluid
JP2026005659A (en) *	2024-06-27	2026-01-16	株式会社荏原製作所	Polishing liquid supply device, polishing apparatus, and polishing liquid supply method

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPH0864562A (en) *	1994-08-24	1996-03-08	Matsushita Electric Ind Co Ltd	Semiconductor polishing method and device
JP2000237952A (en) *	1999-02-19	2000-09-05	Hitachi Ltd	Polishing apparatus and method of manufacturing semiconductor device
JP2000317826A (en) *	1999-05-07	2000-11-21	Okamoto Machine Tool Works Ltd	Method of detecting polishing end point of substrate and detecting device therefor
JP2001232557A (en) *	2000-02-23	2001-08-28	Toshiba Ceramics Co Ltd	Double-side polishing apparatus and double-side polishing method
JP2002170792A (en) *	2000-11-29	2002-06-14	Mitsubishi Electric Corp	Polishing liquid supply apparatus and polishing liquid supply method, polishing apparatus and polishing method, and method of manufacturing semiconductor device

2002
- 2002-06-17 JP JP2002175623A patent/JP2004022804A/en active Pending
2003
- 2003-06-13 AU AU2003242400A patent/AU2003242400A1/en not_active Abandoned
- 2003-06-13 WO PCT/JP2003/007555 patent/WO2003107408A1/en not_active Ceased

Also Published As

Publication number	Publication date
WO2003107408A1 (en)	2003-12-24
JP2004022804A (en)	2004-01-22

Publication	Publication Date	Title
AU2003215261A1 (en)	2003-09-09	Polishing composition
AU2003225269A1 (en)	2003-12-31	Lint-removing brush
AU2002335152A1 (en)	2003-09-04	Robot-phone
AUPS236102A0 (en)	2002-06-13	Grinder
AU2003242400A1 (en)	2003-12-31	Polisher
AU2002367810A1 (en)	2003-11-10	Bis-transition-metal-chelate-probes
AU2002318053A1 (en)	2004-02-02	Suplier
AU2002368348A1 (en)	2004-06-03	Electrosomatogram
AU2002348964A1 (en)	2004-01-19	Snowbike
AU2002341221A1 (en)	2004-04-19	Honey-brandy
AU2002344387A1 (en)	2003-12-22	Multifunction-pillow
AU2002359072A1 (en)	2004-04-19	Abrasive
AUPS296102A0 (en)	2002-07-04	Grinding aperatas
AU2003222685A1 (en)	2003-12-02	Grinder
AU2002100280A4 (en)	2002-05-09	Proshoe
AU2002100031A4 (en)	2003-01-02	earliPay
AU2002100508A4 (en)	2002-11-14	Photocard
AU2002100510A4 (en)	2002-11-21	Bottlenecker
AU2002100541A4 (en)	2003-07-03	Backmate
AU2002100602A4 (en)	2002-11-28	Bonsystem
AU2002100655A4 (en)	2003-05-22	Armamulch
AU2002100739A4 (en)	2002-12-12	Neuramax
AU2002100747A4 (en)	2003-03-20	Powersell
AU2002100957A4 (en)	2003-06-12	Sluggit
AU2002100026A4 (en)	2002-02-07	Disc400

Legal Events

Date	Code	Title	Description
2005-03-03	MK6	Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase