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AU2002330887A1 - Micro-electromechanical sensor - Google Patents

Micro-electromechanical sensor

Info

Publication number
AU2002330887A1
AU2002330887A1 AU2002330887A AU2002330887A AU2002330887A1 AU 2002330887 A1 AU2002330887 A1 AU 2002330887A1 AU 2002330887 A AU2002330887 A AU 2002330887A AU 2002330887 A AU2002330887 A AU 2002330887A AU 2002330887 A1 AU2002330887 A1 AU 2002330887A1
Authority
AU
Australia
Prior art keywords
micro
electromechanical sensor
electromechanical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002330887A
Inventor
Sean Cahill
Albert K. Henning
Phil Mauger
Norm Nystrom
Art Zias
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Redwood Microsystems Inc
Original Assignee
Redwood Microsystems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Redwood Microsystems Inc filed Critical Redwood Microsystems Inc
Publication of AU2002330887A1 publication Critical patent/AU2002330887A1/en
Abandoned legal-status Critical Current

Links

AU2002330887A 2001-07-17 2002-07-17 Micro-electromechanical sensor Abandoned AU2002330887A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/306,175 2001-07-17

Publications (1)

Publication Number Publication Date
AU2002330887A1 true AU2002330887A1 (en) 2003-03-03

Family

ID=

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