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AU2002329753A1 - Apparatus and method for plasma processing - Google Patents

Apparatus and method for plasma processing

Info

Publication number
AU2002329753A1
AU2002329753A1 AU2002329753A AU2002329753A AU2002329753A1 AU 2002329753 A1 AU2002329753 A1 AU 2002329753A1 AU 2002329753 A AU2002329753 A AU 2002329753A AU 2002329753 A AU2002329753 A AU 2002329753A AU 2002329753 A1 AU2002329753 A1 AU 2002329753A1
Authority
AU
Australia
Prior art keywords
plasma processing
plasma
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002329753A
Inventor
Eric J. Strang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Publication of AU2002329753A1 publication Critical patent/AU2002329753A1/en
Abandoned legal-status Critical Current

Links

AU2002329753A 2001-08-29 2002-08-29 Apparatus and method for plasma processing Abandoned AU2002329753A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US60/315,369 2001-08-29

Publications (1)

Publication Number Publication Date
AU2002329753A1 true AU2002329753A1 (en) 2003-03-18

Family

ID=

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